4H-N/6H-N SiC Wafer Reasearch kupanga Dummy grade Dia150mm Silicon carbide gawo lapansi

Kufotokozera Kwachidule:

Titha kupereka mkulu kutentha superconducting woonda filimu gawo lapansi, maginito woonda mafilimu ndi ferroelectric woonda filimu gawo lapansi, semiconductor galasi, galasi kuwala, zipangizo laser galasi, pa nthawi yomweyo kupereka lathu, galasi kudula, akupera, kupukuta ndi ntchito zina processing.Magawo athu a SiC amachokera ku Tankeblue Factory ku China.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

6 inchi m'mimba mwake silicon carbide (SiC) gawo lapansi

Gulu	Zero MPD	Kupanga	Gulu la Kafukufuku	Dummy Grade
Diameter	150.0mm±0.25mm
Makulidwe	4H-N	350um ± 25um
	4H-SI	500um±25um
Wafer Orientation	Pa axis :<0001>±0.5°kwa 4H-SI Kutalikirana: 4.0 ° kulowera <1120> ± 0.5 ° kwa 4H-N
Nyumba Yoyambira	{10-10}±5.0°
Utali Woyambira Wathyathyathya	47.5mm ± 2.5mm
Kupatula m'mphepete	3 mm
TTV / Bow / Warp	≤15um/≤40um/≤60um
Kuchuluka kwa Micropipe	≤1cm-2	≤5cm-2	≤15cm-2	≤50cm-2
Kukaniza 4H-N 4H-SI	0.015 ~ 0.028Ω!cm
	≥1E5Ω!cm
Ukali	Polish Ra ≤1nm CMP Ra≤0.5nm
# Zowonongeka ndi kuwala kwamphamvu kwambiri	Palibe		1 yololedwa, ≤2mm	Kutalika kokwanira ≤10mm, utali umodzi≤2mm
* Ma mbale a Hex ndi kuwala kwakukulu	Malo owonjezera ≤1%		Malo owonjezera ≤ 2%	Malo owonjezera ≤ 5%
*Magawo a polytype ndi kuwala kwakukulu	Palibe		Malo owonjezera ≤ 2%	Malo owonjezera ≤ 5%
*&Kukanda ndi kuwala kwamphamvu kwambiri	Zikwapu 3 mpaka 1 x wafer awiri kutalika kwake		Zikwapu 5 mpaka 1 x wafer awiri kutalika kwake	5 kukwapula mpaka 1 x wafer m'mimba mwake mowonjezera kutalika kwake
Chip m'mphepete	Palibe		3 amaloledwa, ≤0.5mm iliyonse	5 zololedwa, ≤1mm iliyonse
Kuyipitsidwa ndi kuwala kwamphamvu kwambiri	Palibe

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