SiC gawo lapansi P-mtundu 4H/6H-P 3C-N 4inch makulidwe a 350um Kupanga kalasi Dummy kalasi
4inch SiC gawo lapansi P-mtundu 4H/6H-P 3C-N chizindikiro tebulo
4 silicon m'mimba mwakeCarbide (SiC) gawo lapansi Kufotokozera
Gulu | Zero MPD Production Gawo (Z Gulu) | Standard Production Gawo (P Gulu) | Dummy Grade (D Gulu) | ||
Diameter | 99.5 mm ~ 100.0 mm | ||||
Makulidwe | 350 μm ± 25 μm | ||||
Wafer Orientation | Kuchokera kumbali: 2.0 ° -4.0 ° kulowera [1120] ± 0.5° kwa 4H/6H-P, On olamulira:〈111〉± 0.5° kwa 3C-N | ||||
Kuchulukana kwa Micropipe | 0cm-2 | ||||
Kukaniza | p-mtundu 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
n-mtundu 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
Chiyambi cha Flat Orientation | 4H/6H-P | - {1010} ± 5.0° | |||
3C-N | - {110} ± 5.0° | ||||
Utali Woyambira Wathyathyathya | 32.5 mm ± 2.0 mm | ||||
Kutalika kwa Sekondale | 18.0 mm ± 2.0 mm | ||||
Sekondale Flat Orientation | Silicon nkhope m'mwamba: 90 ° CW. kuchokera ku Prime flat±5.0 ° | ||||
Kupatula M'mphepete | 3 mm | 6 mm | |||
LTV/TTV/Bow/Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
Ukali | Chipolishi Ra≤1 nm | ||||
CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
Mphepete Mng'alu Mwa Kuwala Kwakukulu Kwambiri | Palibe | Utali wophatikiza ≤ 10 mm, utali umodzi≤2 mm | |||
Hex Plates Mwa Kuwala Kwakukulu Kwambiri | Malo owonjezera ≤0.05% | Malo owonjezera ≤0.1% | |||
Madera a Polytype Mwa Kuwala Kwakukulu Kwambiri | Palibe | Malo owonjezera≤3% | |||
Mawonekedwe a Carbon Inclusions | Malo owonjezera ≤0.05% | Malo owonjezera ≤3% | |||
Silicon Surface Scratches Ndi Kuwala Kwakukulu Kwambiri | Palibe | Kutalikirana ≤1 × awiri wafer | |||
Mphepete Chips Mmwamba Mwamphamvu Kuwala | Palibe chololedwa ≥0.2mm m'lifupi ndi kuya | 5 zololedwa, ≤1 mm iliyonse | |||
Silicon Surface Kuipitsidwa Ndi Kuchuluka Kwambiri | Palibe | ||||
Kupaka | Makaseti amitundu yopyapyala kapena Chidebe Chowotcha Chimodzi |
Ndemanga:
※ Malire a zolakwika amagwira ntchito pamtunda wonse kupatulapo m'mphepete mwake. # Zikandazi ziyenera kuyang'aniridwa pa Si nkhope yokha.
Gawo la P-mtundu wa 4H/6H-P 3C-N 4-inch SiC lokhala ndi makulidwe a 350 μm limagwiritsidwa ntchito kwambiri popanga zida zapamwamba zamagetsi ndi zamagetsi. Ndi matenthedwe abwino kwambiri amafuta, ma voltages osweka kwambiri, komanso kukana kwamphamvu kumadera owopsa, gawo lapansili ndilabwino kwambiri pamagetsi amagetsi ochita bwino kwambiri monga ma switch othamanga kwambiri, ma inverter, ndi zida za RF. Magawo opangira zinthu amagwiritsidwa ntchito popanga zazikulu, kuwonetsetsa kuti zida zodalirika, zolondola kwambiri, zomwe ndizofunikira kwambiri pamagetsi amagetsi komanso kugwiritsa ntchito pafupipafupi. Magawo a Dummy-grade, kumbali ina, amagwiritsidwa ntchito makamaka pakuwongolera, kuyesa zida, ndi chitukuko cha ma prototype, kuthandiza kuwongolera bwino komanso kusasinthika kwadongosolo pakupanga semiconductor.
Kufotokozera Ubwino wa magawo a N-mtundu wa SiC umaphatikizapo
- High Thermal Conductivity: Kutentha kwachangu kumapangitsa gawo lapansi kukhala labwino kwambiri pakutentha kwambiri komanso kugwiritsa ntchito mphamvu zambiri.
- High Breakdown Voltage: Imathandizira kugwira ntchito kwamagetsi apamwamba, kuonetsetsa kudalirika kwamagetsi amagetsi ndi zida za RF.
- Kukaniza Malo Ovuta: Kukhalitsa mumikhalidwe yoopsa monga kutentha kwakukulu ndi malo owononga, kuonetsetsa kuti ntchitoyo ikugwira ntchito kwa nthawi yaitali.
- Production-Grade Precision: Imawonetsetsa kuti magwiridwe antchito apamwamba komanso odalirika pakupanga kwakukulu, oyenera mphamvu zapamwamba komanso kugwiritsa ntchito RF.
- Dummy-Grade Yoyezetsa: Imathandiza kuwongolera molondola, kuyesa zida, ndi ma prototyping popanda kusokoneza zowotcha zamagulu opanga.
Ponseponse, gawo la P-mtundu wa 4H/6H-P 3C-N 4-inch SiC lokhala ndi makulidwe a 350 μm limapereka zabwino zambiri pazogwiritsa ntchito kwambiri zamagetsi. Kutentha kwake kwapamwamba kwambiri komanso kuphulika kwamagetsi kumapangitsa kuti ikhale yabwino kwa malo okhala ndi mphamvu komanso kutentha kwambiri, pamene kukana kwake ku zovuta kumatsimikizira kulimba ndi kudalirika. Gawo laling'ono lopanga zinthu limawonetsetsa kuti magwiridwe antchito amatsimikizika komanso osasinthika pakupanga kwakukulu kwamagetsi amagetsi ndi zida za RF. Pakadali pano, gawo laling'ono la dummy ndilofunikira pakuwongolera, kuyesa zida, ndi ma prototyping, kuthandizira kuwongolera kwamtundu komanso kusasinthika pakupanga semiconductor. Izi zimapangitsa magawo a SiC kukhala osinthika kwambiri pamapulogalamu apamwamba.