Zipangizo Zokweza Ma Laser za Semiconductor Zimasintha Kuchepa kwa Ingot

Zipangizo Zokweza Laser Zopangira Semiconductor Zimasintha Kuchepetsa kwa Ingot Chithunzi Chowonetsedwa

Kufotokozera Kwachidule:

Chida Chokweza Ma Laser cha Semiconductor ndi njira yapadera kwambiri yopangira zinthu zochepetsera ma ingot a semiconductor pogwiritsa ntchito njira zokwezera ma ingot pogwiritsa ntchito laser. Dongosolo lapamwambali limagwira ntchito yofunika kwambiri pakupanga ma wafers a semiconductor amakono, makamaka popanga ma wafers owonda kwambiri amagetsi amphamvu, ma LED, ndi zida za RF. Mwa kuthandizira kulekanitsa zigawo zoonda kuchokera ku ma ingot ambiri kapena zinthu zina zoperekera, Semiconductor Laser Lift-Off Equipment imasinthira kuchepetsera ma ingot mwa kuchotsa njira zocheka, kugaya, ndi mankhwala.

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Chithunzi Chatsatanetsatane

Chiyambi cha Zamalonda cha Semiconductor Laser Lift-Off Equipment

Kuchepetsa zinthu za semiconductor ingots zachikhalidwe, monga gallium nitride (GaN), silicon carbide (SiC), ndi safiro, nthawi zambiri kumafuna ntchito yambiri, kuwononga ndalama, komanso kumakhala ndi ming'alu yaying'ono kapena kuwonongeka kwa pamwamba. Mosiyana ndi zimenezi, Semiconductor Laser Lift-Off Equipment imapereka njira ina yosawononga komanso yolondola yomwe imachepetsa kutayika kwa zinthu ndi kupsinjika kwa pamwamba pamene ikuwonjezera zokolola. Imathandizira mitundu yosiyanasiyana ya zinthu zopangidwa ndi kristalo ndi compound ndipo imatha kuphatikizidwa mosavuta mu mizere yopanga ma semiconductor a front-end kapena midstream.

Ndi ma wavelength a laser osinthika, makina owunikira osinthika, ndi ma wafer chucks ogwirizana ndi vacuum, chipangizochi ndi choyenera kwambiri kudula ingot, kupanga lamella, komanso kuchotsedwa kwa filimu yopyapyala kwambiri pazida zoyimirira kapena kusamutsa zigawo za heteroepitaxial.

Chigawo cha Zida Zokweza Laser za Semiconductor

Kutalika kwa mafunde	IR/SHG/THG/FHG
Kukula kwa Kugunda	Nanosecond, Picosecond, Femtosecond
Dongosolo Lowala	Dongosolo lokhazikika la kuwala kapena dongosolo la Galvano-optical
Gawo la XY	500 mm × 500 mm
Kukonza Mitundu	160 mm
Liwiro la Kuyenda	Mphamvu yoposa 1,000 mm/sekondi
Kubwerezabwereza	± 1 μm kapena kuchepera
Kulondola Kwathunthu kwa Malo:	± 5 μm kapena kuchepera
Kukula kwa Wafer	2–6 mainchesi kapena makonda
Kulamulira	Mawindo 10, 11 ndi PLC
Mphamvu Yopereka Mphamvu	AC 200 V ±20 V, Gawo limodzi, 50/60 kHz
Miyeso Yakunja	2400 mm (W) × 1700 mm (D) × 2000 mm (H)
Kulemera	makilogalamu 1,000

Mfundo Yogwirira Ntchito ya Zida Zokweza Laser za Semiconductor

Njira yaikulu ya Semiconductor Laser Lift-Off Equipment imadalira kugawanika kwa photothermal kapena ablation pamalo olumikizirana pakati pa ingot ya donor ndi epitaxial kapena target layer. Laser ya UV yamphamvu kwambiri (nthawi zambiri KrF pa 248 nm kapena solid-state UV lasers pafupifupi 355 nm) imayang'aniridwa kudzera mu zinthu zowunikira kapena zowunikira pang'ono, komwe mphamvuyo imayamwa mosankha pa kuya kokhazikika.

Kuyamwa kwa mphamvu kumeneku kumapangitsa kuti mpweya ukhale ndi mphamvu zambiri kapena kutentha kwambiri pamalo olumikizirana, zomwe zimayambitsa kuyeretsa kwa wafer wapamwamba kapena chipangizo kuchokera pansi pa ingot. Njirayi imakonzedwa bwino posintha magawo monga pulse width, laser fluence, scanning speed, ndi z-axis focal depth. Zotsatira zake zimakhala chidutswa choonda kwambiri—nthawi zambiri chomwe chili pamtunda wa 10 mpaka 50 µm—cholekanitsidwa bwino ndi ingot yoyambirira popanda kukwapula kwamakina.

Njira imeneyi yochotsera zinthu pogwiritsa ntchito laser pochepetsa kukhuthala kwa ingot imapewa kutayika kwa kerf ndi kuwonongeka kwa pamwamba komwe kumachitika chifukwa cha kudula waya wa diamondi kapena kuluka kwa makina. Imasunganso umphumphu wa kristalo ndipo imachepetsa kupukuta komwe kumafunika, zomwe zimapangitsa kuti Semiconductor Laser Lift-Off Equipment ikhale chida chosinthiratu kupanga ma wafer a m'badwo wotsatira.

Zipangizo Zokweza Laser za Semiconductor Zimasintha Kuchepetsa kwa Ingot 2

Kugwiritsa Ntchito Zida Zokweza Laser za Semiconductor

Zipangizo Zolimbitsira Ma Laser za Semiconductor zimagwiritsidwa ntchito kwambiri pochepetsa ma ingot pazinthu zosiyanasiyana zapamwamba komanso mitundu ya zida, kuphatikizapo:

Kuchepetsa kwa GaN ndi GaAs Ingot kwa Zipangizo Zamagetsi
Zimathandiza kupanga ma wafer owonda kuti ma transistors amphamvu ndi ma diode azigwira ntchito bwino komanso osalimba.

Kukonzanso kwa SiC Substrate ndi Kupatukana kwa Lamella
Imalola kukweza kwa wafer-scale kuchokera ku ma substrates a SiC ambiri kuti pakhale zida zoyimirira komanso kuti wafer igwiritsidwenso ntchito.

Kudula kwa Wafer kwa LED
Zimathandiza kukweza zigawo za GaN kuchokera ku ma ingot okhuthala a safiro kuti apange ma LED opyapyala kwambiri.

Kupanga Chipangizo cha RF ndi Microwave
Imathandizira mapangidwe a transistor yoyenda bwino kwambiri (HEMT) yomwe imafunika mu 5G ndi machitidwe a radar.

Kusamutsa kwa Epitaxial Layer
Amachotsa bwino zigawo za epitaxial kuchokera ku ma ingot a crystalline kuti agwiritsidwenso ntchito kapena kuphatikizidwa mu heterostructures.

Maselo a Dzuwa Ochepa ndi Ma Photovoltaics
Amagwiritsidwa ntchito kulekanitsa zigawo zopyapyala zoyamwitsa kuti maselo a dzuwa osinthasintha kapena ogwira ntchito bwino kwambiri azitha kusinthasintha.

Mu gawo lililonse mwa magawo awa, Semiconductor Laser Lift-Off Equipment imapereka ulamuliro wosayerekezeka pa kufanana kwa makulidwe, mtundu wa pamwamba, ndi umphumphu wa zigawo.

Ubwino wa Kuchepetsa Ingot Yochokera ku Laser

Kutayika kwa Zinthu Zosafunika
Poyerekeza ndi njira zachikhalidwe zodulira wafer, njira ya laser imapangitsa kuti zinthu zigwiritsidwe ntchito pafupifupi 100%.

Kupsinjika Kochepa ndi Kupotoka
Kuchotsa kukhudza sikukhudza kumathetsa kugwedezeka kwa makina, kuchepetsa kupangika kwa wafer bow ndi microcrack.

Kusunga Ubwino Wapamwamba
Nthawi zambiri sipamafunika kupukuta kapena kupukuta pambuyo pochepetsa kukhuthala, chifukwa kukweza kwa laser kumasunga umphumphu pamwamba.

Kuthamanga Kwambiri ndi Kukonzeka Kokha
Imatha kukonza zinthu zambirimbiri pa nthawi iliyonse pogwiritsa ntchito makina olowetsa/kutsitsa zinthu okha.

Yosinthika ku Zida Zambiri
Imagwirizana ndi GaN, SiC, safiro, GaAs, ndi zinthu zatsopano za III-V.

Kuteteza chilengedwe
Amachepetsa kugwiritsa ntchito mankhwala oletsa kutupa ndi mankhwala amphamvu omwe amapezeka nthawi zambiri pochepetsa kutupa pogwiritsa ntchito matope.

Kugwiritsanso Ntchito Pansi pa Substrate
Ma ingot operekedwa ndi opereka amatha kubwezeretsedwanso nthawi zambiri, zomwe zimachepetsa kwambiri mtengo wa zinthu.

Mafunso Ofunsidwa Kawirikawiri (FAQ) a Zida Zolimbitsira Laser za Semiconductor

Q1: Kodi Semiconductor Laser Lift-Off Equipment ingafikire makulidwe otani pa zidutswa za wafer?
A1:Kukhuthala kwa chidutswa cha chidutswa nthawi zambiri kumakhala pakati pa 10 µm mpaka 100 µm kutengera ndi zinthu ndi kapangidwe kake.

Q2: Kodi chipangizochi chingagwiritsidwe ntchito kupukuta ma ingot opangidwa ndi zinthu zosawoneka bwino monga SiC?
A2:Inde. Mwa kusintha kutalika kwa mafunde a laser ndi kukonza mainjiniya olumikizirana (monga, ma interlayers osasangalatsa), ngakhale zinthu zosawoneka bwino pang'ono zimatha kukonzedwa.

Q3: Kodi gawo loperekera limayikidwa bwanji musanachotsedwe ndi laser?
A3:Dongosololi limagwiritsa ntchito ma module a sub-micron vision-based alignment omwe ali ndi mayankho ochokera ku fiducial marks ndi surface reflectivity scans.

Q4: Kodi nthawi yozungulira yomwe ikuyembekezeka kugwira ntchito imodzi yokweza laser ndi yotani?
A4:Kutengera kukula ndi makulidwe a wafer, nthawi zambiri zimakhala kuyambira mphindi ziwiri mpaka khumi.

Q5: Kodi njirayi imafuna malo oyeretsera?
A5:Ngakhale sikofunikira, kuphatikiza zipinda zoyera kumalimbikitsidwa kuti kukhalebe koyera pansi pa nthaka komanso kuti zipangizo zizigwira ntchito bwino kwambiri.

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.