p-type 4H/6H-P 3C-N TYPE SIC substrate 4inch 〈111〉± 0.5°Zero MPD
4H/6H-P Mtundu wa SiC Composite Substrates Tebulo la magawo ofanana
4 Silikoni m'mimba mwake wa inchiGawo la Carbide (SiC) Kufotokozera
| Giredi | Kupanga kwa MPD Kopanda Giredi (Z) Giredi) | Kupanga Kokhazikika Giredi (P) Giredi) | Giredi Yopanda Chilungamo (D Giredi) | ||
| M'mimba mwake | 99.5 mm ~ 100.0 mm | ||||
| Kukhuthala | 350 μm ± 25 μm | ||||
| Kuwongolera kwa Wafer | Off axis: 2.0°-4.0° kulowera [11]20] ± 0.5° pa 4H/6H-P, On axis:〈111〉± 0.5° ya 3C-N | ||||
| Kuchuluka kwa mapaipi ang'onoang'ono | 0 cm-2 | ||||
| Kusakhazikika | mtundu wa p 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| n-mtundu 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| Kuyang'ana Kwambiri Pang'onopang'ono | 4H/6H-P | - {1010} ± 5.0° | |||
| 3C-N | - {110} ± 5.0° | ||||
| Utali Woyamba Wathyathyathya | 32.5 mm ± 2.0 mm | ||||
| Utali Wachiwiri Wathyathyathya | 18.0 mm ± 2.0 mm | ||||
| Kuyang'ana Kwachiwiri Kwapafupi | Silikoni yoyang'ana mmwamba: 90° CW. kuchokera ku Prime flat±5.0° | ||||
| Kupatula Mphepete | 3 mm | 6 mm | |||
| LTV/TTV/Uta/Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
| Kuuma | Chipolishi Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Ming'alu ya Mphepete Yopangidwa ndi Kuwala Kwakukulu Kwambiri | Palibe | Kutalika kokwanira ≤ 10 mm, kutalika kamodzi ≤2 mm | |||
| Mbale za Hex Ndi Kuwala Kwakukulu Kwambiri | Malo osonkhanitsidwa ≤0.05% | Malo osonkhanitsidwa ≤0.1% | |||
| Malo Opangidwa ndi Polytype Ndi Kuwala Kwambiri | Palibe | Malo osonkhanitsidwa ≤3% | |||
| Kuphatikizidwa kwa Kaboni Yowoneka | Malo osonkhanitsidwa ≤0.05% | Malo osonkhanitsidwa ≤3% | |||
| Kukanda kwa Silicon Pamwamba Ndi Kuwala Kwambiri | Palibe | Kutalika kokwanira ≤1 × m'mimba mwake wa wafer | |||
| Ma Chips a M'mphepete Okhala ndi Mphamvu Yaikulu | Palibe chololedwa m'lifupi ndi kuya kwa ≥0.2mm | 5 zololedwa, ≤1 mm iliyonse | |||
| Kuipitsidwa kwa Silicon pamwamba ndi Mphamvu Yaikulu | Palibe | ||||
| Kulongedza | Kaseti ya ma wafer ambiri kapena chidebe chimodzi cha ma wafer | ||||
Zolemba:
※Miyezo ya zolakwika imagwiritsidwa ntchito pamwamba pa wafer yonse kupatulapo malo olekanitsa m'mphepete. # Mikwingwirima iyenera kuwonedwa pa nkhope ya Si yokha.
Chipangizo cha P-type 4H/6H-P 3C-N cha mainchesi 4 cha SiC chokhala ndi mawonekedwe a 〈111〉± 0.5° ndi grade ya Zero MPD chimagwiritsidwa ntchito kwambiri pakugwiritsa ntchito zamagetsi zamagetsi. Kuyendetsa bwino kutentha kwake komanso magetsi owonongeka kwambiri zimapangitsa kuti chikhale choyenera kugwiritsa ntchito zamagetsi zamagetsi, monga ma switch amphamvu, ma inverter, ndi ma power converters, omwe amagwira ntchito m'malo ovuta kwambiri. Kuphatikiza apo, kukana kwa chipangizocho ku kutentha kwakukulu ndi dzimbiri kumatsimikizira kuti chimagwira ntchito bwino m'malo ovuta. Kuwongolera kolondola kwa 〈111〉± 0.5° kumawonjezera kulondola kwa kupanga, ndikupangitsa kuti chikhale choyenera kugwiritsa ntchito zida za RF ndi mapulogalamu apamwamba, monga machitidwe a radar ndi zida zolumikizirana opanda zingwe.
Ubwino wa substrates za N-type SiC composite ndi monga:
1. Kutentha Kwambiri: Kutaya kutentha bwino, zomwe zimapangitsa kuti ikhale yoyenera malo otentha kwambiri komanso kugwiritsa ntchito mphamvu zambiri.
2. Volti Yowonongeka Kwambiri: Imatsimikizira kuti imagwira ntchito bwino kwambiri pakugwiritsa ntchito mphamvu zambiri monga ma converter amphamvu ndi ma inverter.
3. Zero MPD (Micro Pipe Defect) Giredi: Imatsimikizira zolakwika zochepa, imapereka kukhazikika komanso kudalirika kwambiri pazida zamagetsi zofunika kwambiri.
4. Kukana Kudzimbidwa: Kulimba m'malo ovuta, kuonetsetsa kuti ikugwira ntchito kwa nthawi yayitali m'malo ovuta.
5. Kulunjika Kolondola 〈111〉± 0.5°: Kumalola kulinganiza bwino panthawi yopanga, kukonza magwiridwe antchito a chipangizocho mu mapulogalamu apamwamba komanso a RF.
Ponseponse, substrate ya P-type 4H/6H-P 3C-N ya mainchesi 4 SiC yokhala ndi mawonekedwe a 〈111〉± 0.5° ndi mtundu wa Zero MPD ndi chinthu chogwira ntchito bwino kwambiri chomwe chimagwiritsidwa ntchito pamagetsi apamwamba. Kutenthetsa kwake bwino kwambiri komanso magetsi owonongeka kwambiri zimapangitsa kuti ikhale yoyenera kugwiritsa ntchito zamagetsi zamagetsi monga ma switch amphamvu, ma inverter, ndi ma converter. Giredi ya Zero MPD imatsimikizira zolakwika zochepa, zomwe zimapangitsa kuti zikhale zodalirika komanso zokhazikika pazida zofunika kwambiri. Kuphatikiza apo, kukana kwa substrate ku dzimbiri komanso kutentha kwambiri kumatsimikizira kulimba m'malo ovuta. Kulunjika kolondola kwa 〈111〉± 0.5° kumalola kulinganiza kolondola panthawi yopanga, zomwe zimapangitsa kuti ikhale yoyenera kwambiri pazida za RF ndi mapulogalamu apamwamba.
Chithunzi Chatsatanetsatane
