Ma Wafers a Silicon Carbide SiC a mainchesi 6 a 150mm okhala ndi mtundu wa 4H-N wa MOS kapena SBD Production Research ndi Dummy grade

Kufotokozera Kwachidule:

Chopangidwa ndi silicon carbide single crystal substrate ya mainchesi 6 ndi chinthu chogwira ntchito bwino kwambiri chomwe chili ndi mphamvu zabwino kwambiri zakuthupi ndi zamakemikolo. Chopangidwa kuchokera ku silicon carbide single crystal material yoyera kwambiri, chimasonyeza kutentha kwapamwamba, kukhazikika kwa makina, komanso kukana kutentha kwambiri. Chopangidwa ndi njira zopangidwira bwino komanso zipangizo zapamwamba, chakhala chinthu chomwe chimakonda kwambiri popanga zipangizo zamagetsi zogwira ntchito bwino m'magawo osiyanasiyana.


Mawonekedwe

Minda Yofunsira

Chophimba cha silicon carbide cha mainchesi 6 chimagwira ntchito yofunika kwambiri m'mafakitale osiyanasiyana. Choyamba, chimagwiritsidwa ntchito kwambiri mumakampani opanga ma semiconductor popanga zida zamagetsi zamagetsi zamphamvu kwambiri monga ma transistors amphamvu, ma circuits ophatikizidwa, ndi ma module amphamvu. Kutulutsa kwake kutentha kwambiri komanso kukana kutentha kwambiri kumapangitsa kuti kutentha kusamayende bwino, zomwe zimapangitsa kuti zinthu zizigwira bwino ntchito komanso kudalirika. Kachiwiri, ma wafer a silicon carbide ndi ofunikira kwambiri m'magawo ofufuza popanga zipangizo ndi zida zatsopano. Kuphatikiza apo, wafer wa silicon carbide imagwiritsa ntchito kwambiri m'magawo a optoelectronics, kuphatikizapo kupanga ma LED ndi ma laser diode.

Zofotokozera Zamalonda

Chotsukira cha silicon carbide cha mainchesi 6 chokhala ndi kristalo imodzi chili ndi mainchesi 6 m'mimba mwake (pafupifupi 152.4 mm). Kuuma kwa pamwamba ndi Ra < 0.5 nm, ndipo makulidwe ake ndi 600 ± 25 μm. Chotsukiracho chikhoza kusinthidwa kukhala chowongolera cha mtundu wa N kapena P, kutengera zomwe makasitomala akufuna. Kuphatikiza apo, chimakhala ndi kukhazikika kwapadera kwa makina, chokhoza kupirira kupsinjika ndi kugwedezeka.

M'mimba mwake 150±2.0mm(6inchi)

Kukhuthala

350 μm±25μm

Kuyang'ana

Pa axis: <0001>±0.5°

Off axis:4.0° kulowera ku 1120±0.5°

Mtundu wa Polytype 4H

Kukana (Ω·cm)

4H-N

0.015~0.028 Ω·cm/0.015~0.025ohm ·cm

4/6H-SI

>1E5

Koyambira kolunjika bwino

{10-10}±5.0°

Kutalika koyambirira kosalala (mm)

47.5 mm±2.5 mm

Mphepete

Chamfer

TTV/Uta/Warp (um)

≤15 /≤40 /≤60

AFM Front (Si-face)

Chipolishi Ra≤1 nm

CMP Ra≤0.5 nm

LTV

≤3μm (10mm * 10mm)

≤5μm (10mm * 10mm)

≤10μm (10mm * 10mm)

TTV

≤5μm

≤10μm

≤15μm

Mapeyala a lalanje/mabowo/ming'alu/kuipitsidwa/madontho/kusweka

Palibe Palibe Palibe

zolembera

Palibe Palibe Palibe

Chophimba cha silicon carbide cha mainchesi 6 ndi chinthu chogwira ntchito bwino chomwe chimagwiritsidwa ntchito kwambiri m'mafakitale a semiconductor, research, andoptoelectronics. Chimapereka kutentha kwabwino kwambiri, kukhazikika kwa makina, komanso kukana kutentha kwambiri, zomwe zimapangitsa kuti chikhale choyenera kupanga zida zamagetsi zamagetsi zamphamvu kwambiri komanso kafukufuku watsopano. Timapereka njira zosiyanasiyana zosinthira kuti tikwaniritse zosowa zosiyanasiyana za makasitomala.Lumikizanani nafe kuti mudziwe zambiri zokhudza ma wafer a silicon carbide!

Chithunzi Chatsatanetsatane

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