Ma Wafers a Silicon Carbide SiC a mainchesi 6 a 150mm okhala ndi mtundu wa 4H-N wa MOS kapena SBD Production Research ndi Dummy grade
Minda Yofunsira
Chophimba cha silicon carbide cha mainchesi 6 chimagwira ntchito yofunika kwambiri m'mafakitale osiyanasiyana. Choyamba, chimagwiritsidwa ntchito kwambiri mumakampani opanga ma semiconductor popanga zida zamagetsi zamagetsi zamphamvu kwambiri monga ma transistors amphamvu, ma circuits ophatikizidwa, ndi ma module amphamvu. Kutulutsa kwake kutentha kwambiri komanso kukana kutentha kwambiri kumapangitsa kuti kutentha kusamayende bwino, zomwe zimapangitsa kuti zinthu zizigwira bwino ntchito komanso kudalirika. Kachiwiri, ma wafer a silicon carbide ndi ofunikira kwambiri m'magawo ofufuza popanga zipangizo ndi zida zatsopano. Kuphatikiza apo, wafer wa silicon carbide imagwiritsa ntchito kwambiri m'magawo a optoelectronics, kuphatikizapo kupanga ma LED ndi ma laser diode.
Zofotokozera Zamalonda
Chotsukira cha silicon carbide cha mainchesi 6 chokhala ndi kristalo imodzi chili ndi mainchesi 6 m'mimba mwake (pafupifupi 152.4 mm). Kuuma kwa pamwamba ndi Ra < 0.5 nm, ndipo makulidwe ake ndi 600 ± 25 μm. Chotsukiracho chikhoza kusinthidwa kukhala chowongolera cha mtundu wa N kapena P, kutengera zomwe makasitomala akufuna. Kuphatikiza apo, chimakhala ndi kukhazikika kwapadera kwa makina, chokhoza kupirira kupsinjika ndi kugwedezeka.
| M'mimba mwake | 150±2.0mm(6inchi) | ||||
| Kukhuthala | 350 μm±25μm | ||||
| Kuyang'ana | Pa axis: <0001>±0.5° | Off axis:4.0° kulowera ku 1120±0.5° | |||
| Mtundu wa Polytype | 4H | ||||
| Kukana (Ω·cm) | 4H-N | 0.015~0.028 Ω·cm/0.015~0.025ohm ·cm | |||
| 4/6H-SI | >1E5 | ||||
| Koyambira kolunjika bwino | {10-10}±5.0° | ||||
| Kutalika koyambirira kosalala (mm) | 47.5 mm±2.5 mm | ||||
| Mphepete | Chamfer | ||||
| TTV/Uta/Warp (um) | ≤15 /≤40 /≤60 | ||||
| AFM Front (Si-face) | Chipolishi Ra≤1 nm | ||||
| CMP Ra≤0.5 nm | |||||
| LTV | ≤3μm (10mm * 10mm) | ≤5μm (10mm * 10mm) | ≤10μm (10mm * 10mm) | ||
| TTV | ≤5μm | ≤10μm | ≤15μm | ||
| Mapeyala a lalanje/mabowo/ming'alu/kuipitsidwa/madontho/kusweka | Palibe | Palibe | Palibe | ||
| zolembera | Palibe | Palibe | Palibe | ||
Chophimba cha silicon carbide cha mainchesi 6 ndi chinthu chogwira ntchito bwino chomwe chimagwiritsidwa ntchito kwambiri m'mafakitale a semiconductor, research, andoptoelectronics. Chimapereka kutentha kwabwino kwambiri, kukhazikika kwa makina, komanso kukana kutentha kwambiri, zomwe zimapangitsa kuti chikhale choyenera kupanga zida zamagetsi zamagetsi zamphamvu kwambiri komanso kafukufuku watsopano. Timapereka njira zosiyanasiyana zosinthira kuti tikwaniritse zosowa zosiyanasiyana za makasitomala.Lumikizanani nafe kuti mudziwe zambiri zokhudza ma wafer a silicon carbide!
Chithunzi Chatsatanetsatane






