6inch 150mm Silicon Carbide SiC Wafers 4H-N mtundu wa MOS kapena SBD Production Research ndi Dummy kalasi
Minda Yofunsira
6-inch silicon carbide single crystal substrate imagwira ntchito yofunika kwambiri m'mafakitale angapo. Choyamba, amagwiritsidwa ntchito kwambiri m'makampani opanga ma semiconductor popanga zida zamagetsi zamagetsi zamphamvu kwambiri monga ma transistors amagetsi, ma frequency ophatikizika, ndi ma module amagetsi. Kutentha kwake kwapamwamba komanso kutentha kwapamwamba kumapangitsa kuti kutentha kwabwino kuwonongeke, zomwe zimapangitsa kuti zikhale bwino komanso zodalirika. Kachiwiri, zowotcha za silicon carbide ndizofunikira m'magawo ofufuzira pakupanga zida zatsopano ndi zida. Kuphatikiza apo, silicon carbide wafer imapeza ntchito zambiri pantchito ya optoelectronics, kuphatikiza kupanga ma LED ndi ma laser diode.
Zofotokozera Zamalonda
Gawo la 6-inch silicon carbide single crystal substrate lili ndi mainchesi 6 (pafupifupi 152.4 mm). Ukali pamwamba ndi Ra <0.5 nm, ndi makulidwe ndi 600 ± 25 μm. Gawoli likhoza kusinthidwa ndi mtundu wa N kapena P-mtundu wa conductivity, kutengera zofuna za makasitomala. Kuphatikiza apo, imawonetsa kukhazikika kwamakina, komwe kumatha kupirira kupsinjika ndi kugwedezeka.
Diameter | 150 ± 2.0mm (6inch) | ||||
Makulidwe | 350μm±25μm | ||||
Kuwongolera | Pa axis: <0001> ± 0.5 ° | Kuchokera pa olamulira: 4.0 ° ku 1120± 0.5 ° | |||
Polytype | 4H | ||||
Kukaniza (Ω·cm) | 4H-N | 0.015~0.028 Ω·cm/0.015~0.025ohm ·cm | |||
4/6H-SI | >1E5 | ||||
Primary flat orientation | {10-10}±5.0° | ||||
Kutalika koyambira kwaphwando (mm) | 47.5 mm ± 2.5 mm | ||||
M'mphepete | Chamfer | ||||
TTV / Bow / Warp (um) | ≤15/≤40/≤60 | ||||
AFM Front (Si-face) | Chipolishi Ra≤1 nm | ||||
CMP Ra≤0.5 nm | |||||
LTV | ≤3μm(10mm*10mm) | ≤5μm(10mm*10mm) | ≤10μm(10mm*10mm) | ||
TTV | ≤5μm | ≤10μm | ≤15μm | ||
Peel/maenje/ming'alu/kuipitsidwa/madontho/madontho | Palibe | Palibe | Palibe | ||
indents | Palibe | Palibe | Palibe |
Gawo la 6-inch silicon carbide single crystal substrate ndi chinthu chogwira ntchito kwambiri chomwe chimagwiritsidwa ntchito kwambiri m'mafakitale a semiconductor, kafukufuku, andoptoelectronics. Amapereka matenthedwe abwino kwambiri amafuta, kukhazikika kwamakina, komanso kukana kutentha kwambiri, zomwe zimapangitsa kuti zikhale zoyenera kupanga zida zamagetsi zamagetsi zamphamvu kwambiri komanso kafukufuku wazinthu zatsopano. Timapereka mafotokozedwe osiyanasiyana komanso zosankha makonda kuti tikwaniritse zofuna za makasitomala osiyanasiyana.Lumikizanani nafe kuti mumve zambiri za silicon carbide wafers!