12 inchi SIC gawo lapansi silikoni carbide wamkulu kalasi awiri 300mm lalikulu kukula 4H-N Oyenera mkulu mphamvu chipangizo kutentha dissipation

Kufotokozera Kwachidule:

Gawo la 12-inch silicon carbide substrate (SiC substrate) ndi gawo lalikulu, logwira ntchito kwambiri la semiconductor lopangidwa kuchokera ku crystal imodzi ya silicon carbide. Silicon carbide (SiC) ndi wide band gap semiconductor material yokhala ndi magetsi, matenthedwe komanso makina amakina, omwe amagwiritsidwa ntchito kwambiri popanga zida zamagetsi zamphamvu kwambiri, ma frequency apamwamba komanso kutentha kwambiri. Gawo la 12-inch (300mm) ndizomwe zidatsogola zaukadaulo wa silicon carbide, zomwe zitha kupititsa patsogolo kupanga bwino ndikuchepetsa mtengo.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Makhalidwe a mankhwala

1. High matenthedwe madutsidwe: matenthedwe madutsidwe silicon carbide ndi kuposa 3 pa silicon, amene ali oyenera mkulu mphamvu chipangizo kutentha dissipation.

2. Mphamvu yamunda yosweka kwambiri: Mphamvu yamunda wosweka ndi nthawi 10 kuposa ya silicon, yoyenera kugwiritsa ntchito zopanikizika kwambiri.

3.Wide bandgap: The bandgap ndi 3.26eV (4H-SiC), yoyenera kutentha kwambiri komanso ntchito zambiri.

4. Kuuma kwakukulu: Kuuma kwa Mohs ndi 9.2, kachiwiri kwa diamondi, kukana kwambiri kuvala ndi mphamvu zamakina.

5. Kukhazikika kwa Chemical: kukana kwamphamvu kwa dzimbiri, kugwira ntchito mokhazikika pakutentha kwambiri komanso malo ovuta.

6. Kukula kwakukulu: 12 inchi (300mm) gawo lapansi, kukonza bwino kupanga, kuchepetsa mtengo wagawo.

7.Low defect density: high quality single crystal kukula luso kuonetsetsa otsika chilema ndi kusasinthasintha mkulu.

Malangizo ogwiritsira ntchito kwambiri

1. Zamagetsi zamagetsi:

Mosfets: Amagwiritsidwa ntchito pamagalimoto amagetsi, ma drive motor motor ndi ma converter amagetsi.

Ma diode: monga ma Schottky diode (SBD), omwe amagwiritsidwa ntchito pokonzanso bwino ndikusintha magetsi.

2. Zipangizo za Rf:

Rf magetsi amplifier: amagwiritsidwa ntchito m'malo olumikizirana a 5G ndi ma satellite.

Zipangizo za Microwave: Zoyenera kugwiritsa ntchito radar ndi makina olumikizirana opanda zingwe.

3. Magalimoto amagetsi atsopano:

Makina oyendetsa magetsi: owongolera ma motor ndi ma inverters pamagalimoto amagetsi.

Mulu wolipiritsa: Mphamvu yamagetsi pazida zothamangitsa mwachangu.

4. Ntchito zama mafakitale:

High voltage inverter: yowongolera magalimoto amakampani ndi kasamalidwe ka mphamvu.

Gululi wanzeru: Pakutumiza kwa HVDC ndi zosinthira zamagetsi zamagetsi.

5. Zamlengalenga:

Zipangizo zamagetsi zotentha kwambiri: zoyenera kutentha kwambiri kwa zida zamlengalenga.

6. Malo ofufuzira:

Kafukufuku wa Wide bandgap semiconductor: popanga zida zatsopano za semiconductor ndi zida.

Gawo la 12-inch silicon carbide substrate ndi mtundu wa gawo laling'ono la semiconductor lapamwamba kwambiri lomwe lili ndi zinthu zabwino kwambiri monga kukhathamiritsa kwamafuta ambiri, kulimba kwamunda wosweka komanso kusiyana kwamagulu ambiri. Amagwiritsidwa ntchito kwambiri pamagetsi amagetsi, zida zamagetsi zamagetsi, magalimoto amagetsi atsopano, kayendetsedwe ka mafakitale ndi ndege, ndipo ndizofunikira kwambiri polimbikitsa chitukuko cha m'badwo wotsatira wa zipangizo zamagetsi zamagetsi.

Ngakhale magawo a silicon carbide pakadali pano ali ndi ntchito zochepa zachindunji pazamagetsi ogula monga magalasi a AR, kuthekera kwawo pakuwongolera mphamvu moyenera ndi zamagetsi zazing'ono zitha kuthandizira njira zopepuka, zogwira ntchito kwambiri pazida zamtsogolo za AR/VR. Pakali pano, chitukuko chachikulu cha silicon carbide gawo lapansi chimakhazikika m'mafakitale monga magalimoto atsopano amphamvu, zipangizo zoyankhulirana ndi mafakitale, ndipo zimalimbikitsa makampani opanga ma semiconductor kuti akhale ndi njira yabwino komanso yodalirika.

XKH yadzipereka kuti ipereke magawo 12 apamwamba kwambiri a SIC okhala ndi chithandizo chokwanira chaukadaulo ndi ntchito, kuphatikiza:

1. Kupanga mwamakonda: Malinga ndi makasitomala akufunika kupereka resistivity zosiyana, kristalo orientation ndi pamwamba mankhwala gawo lapansi.

2. Kukhathamiritsa kwa ndondomeko: Perekani makasitomala chithandizo chaumisiri cha kukula kwa epitaxial, kupanga zipangizo ndi njira zina kuti ziwongolere ntchito.

3. Kuyesa ndi certification: Perekani chidziwitso chokhwima ndi chitsimikiziro cha khalidwe kuti muwonetsetse kuti gawo lapansi likukwaniritsa miyezo yamakampani.

4.R&d mgwirizano: Pamodzi kupanga zida zatsopano za silicon carbide ndi makasitomala kuti mulimbikitse luso laukadaulo.

Tchati cha data

1 2 inch Silicon Carbide (SiC) Matchulidwe a gawo lapansi
Gulu		ZeroMPD Production Giredi (Z Giredi)	Standard Production Giredi (P)		Dummy Grade (D kalasi)
Diameter		3 00mm ~ 305mm
Makulidwe	4H-N	750μm ± 15 μm	750μm±25μm
	4H-SI	750μm ± 15 μm	750μm±25μm
Wafer Orientation		Kutalikirana: 4.0 ° kulowera <1120 > ± 0.5 ° kwa 4H-N, Pa axis: <0001> ± 0.5 ° kwa 4H-SI
Kuchuluka kwa Micropipe	4H-N	≤0.4cm-2	≤4cm-2		≤25cm-2
	4H-SI	≤5cm-2	≤10cm-2		≤25cm-2
Kukaniza	4H-N	0.015 ~ 0.024 Ω·cm			0.015 ~ 0.028 Ω·cm
	4H-SI	≥1E10 Ω·cm			≥1E5 Ω·cm
Chiyambi cha Flat Orientation		{10-10} ±5.0°
Utali Woyambira Wathyathyathya	4H-N	N / A
	4H-SI	Notch
Kupatula M'mphepete		3 mm
LTV/TTV/Bow/Warp		≤5μm/≤15μm/≤35 μm/≤55 μm			≤5μm/≤15μm/≤35 □ μm/≤55 □ μm
Ukali		Chipolishi Ra≤1 nm
		CMP Ra≤0.2 nm			Ra≤0.5 nm
Mphepete Mng'alu Mwa Kuwala Kwakukulu Kwambiri Hex Plates Mwa Kuwala Kwakukulu Kwambiri Madera a Polytype Mwa Kuwala Kwakukulu Kwambiri Mawonekedwe a Carbon Inclusions Silicon Surface Scratches Ndi Kuwala Kwakukulu Kwambiri		Palibe Malo owonjezera ≤0.05% Palibe Malo owonjezera ≤0.05% Palibe			Utali wokwanira ≤ 20 mm, utali umodzi≤2 mm Malo owonjezera ≤0.1% Malo owonjezera≤3% Malo owonjezera ≤3% Kutalikirana ≤1 × awiri wafer
Mphepete Chips Mwa High Intensity Kuwala		Palibe chololedwa ≥0.2mm m'lifupi ndi kuya			7 zololedwa, ≤1 mm iliyonse
(TSD) Kusokoneza screw screw		≤500 cm-2		N / A
(BPD) Kusuntha kwapansi kwa ndege		≤1000 cm-2		N / A
Silicon Surface Kuipitsidwa Ndi Kuwala Kwakukulu Kwambiri		Palibe
Kupaka		Makaseti amitundu yopyapyala Kapena Chidebe Chowotcha Chimodzi
Ndemanga:
1 Malire opunduka amagwira ntchito pamtunda wonse wophatikizika kupatula m'mphepete mwake. 2Zikandazi ziyenera kuyang'aniridwa pa Si nkhope yokha. 3 Zomwe zasunthidwa zimangochokera ku KOH etched wafers.

XKH idzapitirizabe kugulitsa kafukufuku ndi chitukuko kuti ipititse patsogolo kupititsa patsogolo kwa 12-inch silicon carbide substrates mu kukula kwakukulu, zolakwika zochepa komanso kusasinthasintha kwakukulu, pamene XKH ikuyang'ana ntchito zake m'madera omwe akubwera monga magetsi ogula (monga ma modules amphamvu a zipangizo za AR / VR) ndi quantum computing. Mwa kuchepetsa ndalama ndi kuonjezera mphamvu, XKH idzabweretsa chitukuko ku makampani a semiconductor.