100mm 4inch GaN pa Sapphire Epi-wosanjikiza mkate Gallium nitride epitaxial wafer
Kukula kwa GaN blue LED quantum well structure.Tsatanetsatane wa ndondomekoyi ndi motere
(1) Kuwotcha kwapamwamba kwambiri, gawo lapansi la safiro limayamba kutenthedwa mpaka 1050 ℃ mumlengalenga wa haidrojeni, cholinga chake ndikuyeretsa gawo lapansi;
(2) Pamene kutentha kwa gawo lapansi kumatsikira ku 510 ℃, gawo laling'ono la GaN/AlN lokhala ndi makulidwe a 30nm limayikidwa pamwamba pa gawo lapansi la safiro;
(3) Kutentha kukwera kwa 10 ℃, zimene gasi ammonia, trimethylgallium ndi silane ndi jekeseni, motero kulamulira lolingana otaya mlingo, ndi pakachitsulo-doped N-mtundu GaN wa 4um makulidwe wakula;
(4) The anachita mpweya wa trimethyl zotayidwa ndi trimethyl gallium ntchito kukonzekera pakachitsulo-doped N-mtundu A-makontinenti ndi makulidwe a 0.15um;
(5) 50nm Zn-doped InGaN inakonzedwa ndi jekeseni trimethylgallium, trimethylindium, diethylzinc ndi ammonia pa kutentha kwa 8O0 ℃ ndi kulamulira maulendo osiyanasiyana otaya motsatira;
(6) Kutentha kunawonjezeka kufika ku 1020 ℃, trimethylaluminium, trimethylgallium ndi bis (cyclopentadienyl) magnesium anabayidwa kuti akonzekere 0.15um Mg doped P-mtundu wa AlGaN ndi 0.5um Mg doped P-mtundu wa G shuga wa magazi;
(7) Kanema wapamwamba kwambiri wa P-mtundu wa GaN Sibuyan adapezedwa mwa kulowetsedwa mumlengalenga wa nitrogen pa 700 ℃;
(8) Etching pa P-mtundu G stasis pamwamba kuwulula N-mtundu G stasis pamwamba;
(9) Mpweya wa mbale zolumikizana za Ni/A pa p-GaNI, kutuluka kwa △/Al mbale zolumikizana pa ll-GaN pamwamba kupanga maelekitirodi.
Zofotokozera
Kanthu | GaN-TCU-C100 | GaN-TCN-C100 |
Makulidwe | ndi 100 mm ± 0.1 mm | |
Makulidwe | 4.5 ± 0.5 um Ikhoza makonda | |
Kuwongolera | C-ndege(0001) ± 0.5° | |
Mtundu Woyendetsa | N-mtundu (Wosasinthidwa) | N-mtundu (Si-doped) |
Kukana (300K) | <0.5 Q・cm | <0.05 Q・cm |
Carrier Concentration | <5x1017cm-3 | > 1x1018cm-3 |
Kuyenda | ~ 300 cm2/Vs | ~ 200cm2/Vs |
Dislocation Density | Pafupi ndi 5x108cm-2(owerengedwa ndi FWHMs of XRD) | |
Mapangidwe a gawo lapansi | GaN pa Sapphire(Mulingo: Njira ya SSP: DSP) | |
Malo Ogwiritsidwa Ntchito Pamwamba | 90% | |
Phukusi | Zoyikidwa m'chipinda choyera cha kalasi 100, m'makaseti a 25pcs kapena mbiya imodzi yopyapyala, pansi pa mpweya wa nayitrogeni. |