Wafer Orientation System ya Crystal Orientation Measurement

Kufotokozera Kwachidule:

Chida choyang'ana chophatikizira ndi chipangizo cholondola kwambiri chomwe chimagwiritsa ntchito mfundo zosinthira ma X-ray kuti akwaniritse kupanga ma semiconductor ndi njira zasayansi yazinthu pozindikira mawonekedwe a crystallographic. Zigawo zake zazikulu zimaphatikizapo gwero la X-ray (mwachitsanzo, Cu-Kα, 0.154 nm wavelength), goniometer yolondola (angular resolution ≤0.001 °), ndi zowunikira (CCD kapena scintillation counters). Potembenuza zitsanzo ndi kusanthula ma diffraction, imawerengera ma crystallographic indices (mwachitsanzo, 100, 111) ndi malo otsetsereka ndi ± 30 arcsecond molondola. Dongosololi limathandizira magwiridwe antchito, kukonza vacuum, ndi kuzungulira kwa ma axis angapo, kumagwirizana ndi ma 2-8-inch wafers kuti muyeze mwachangu m'mphepete mwake, ndege zolozera, ndi kulumikizana kwa epitaxial. Ntchito zazikuluzikulu zimaphatikizapo kudulidwa kwa silicon carbide, zowotcha za safiro, ndi turbine blade yotsimikizira kutentha kwambiri, kupititsa patsogolo mphamvu zamagetsi zamagetsi ndi zokolola.

Titumizireni imelo

Mawonekedwe

Equipment Introduction

Zida zoyang'anira wafer ndi zida zolondola zomwe zimatengera mfundo za X-ray diffraction (XRD), zomwe zimagwiritsidwa ntchito makamaka popanga semiconductor, zida zowoneka bwino, zoumba, ndi mafakitale ena a crystalline.

Zida izi zimatsimikizira mawonekedwe a crystal lattice ndikuwongolera njira zodulira kapena kupukuta. Zinthu zazikuluzikulu zikuphatikiza:

Miyezo yolondola kwambiri:Wokhoza kuthetsa ndege za crystallographic zokhala ndi ma angular mpaka 0.001 ° .
Zitsanzo zazikulu zogwirizana:Imathandizira zowotcha mpaka 450 mm m'mimba mwake ndi zolemera za 30 kg, zoyenera zida ngati silicon carbide (SiC), safiro, ndi silicon (Si).
Modular Design:Zochita zokulirapo zikuphatikiza kusanthula kwa ma curve curve, mapu a zolakwika za 3D, ndi zida zosungiramo zitsanzo zingapo.

Key Technical Parameters

Gulu la Parameter	Makhalidwe abwino/Masinthidwe
Chithunzi cha X-ray	Cu-Kα (0.4 × 1 mm malo olunjika), 30 kV accelerating voltage, 0–5 mA chubu chosinthika chapano
Angular Range	θ: -10 ° mpaka +50 °; 2θ: -10° mpaka +100°
Kulondola	Kupendekeka kwa ngodya: 0.001 °, kuzindikira cholakwika chapamtunda: ± 30 arcseconds (kugwedezeka kopindika)
Kuthamanga kwa Scan	Omega scan imamaliza kuyang'ana kwathunthu kwa lattice mumasekondi 5; Kujambula kwa Theta kumatenga ~ mphindi imodzi
Chitsanzo cha Stage	V-groove, kuyamwa pneumatic, kuzungulira kozungulira, kumagwirizana ndi zowotcha za 2-8-inch
Ntchito Zowonjezera	Kusanthula kwa ma curve curve, mapu a 3D, chida chodulira, kuzindikira cholakwika cha kuwala (zokanda, ma GB)

Ntchito Mfundo

1. X-ray Diffraction Foundation

Ma X-ray amalumikizana ndi nyukiliya ya atomiki ndi ma elekitironi mu kristalo wa kristalo, kutulutsa mawonekedwe osinthika. Chilamulo cha Bragg (nλ = 2d sinθ) chimayang'anira ubale wapakati pa ngodya zosiyanitsira (θ) ndi malo otsetsereka (d).
Ma detectors amajambula machitidwewa, omwe amawunikidwa kuti amangenso mawonekedwe a crystallographic.

2. Omega Scanning Technology

Krustalo imazungulira mosalekeza mozungulira mozungulira pomwe ma X-ray amawunikira.
Zowunikira zimasonkhanitsa ma siginecha osokoneza ndege zingapo zamakristalo, zomwe zimapangitsa kutsimikiza kwathunthu kwa lattice mumasekondi 5.

3. Rocking Curve Analysis

Makona a kristalo osasunthika okhala ndi ma X-ray osiyanasiyana kuti athe kuyeza m'lifupi mwake (FWHM), kuwunika zolakwika za lattice ndi kupsinjika.

4. Automated Control

PLC ndi mawonekedwe a touchscreen amathandizira ma angle odulira, mayankho anthawi yeniyeni, ndikuphatikizana ndi makina odulira kuti azitha kuwongolera.

Ubwino ndi Mbali

1. Kulondola ndi Mwachangu

Kulondola kwapang'onopang'ono ± 0.001 °, kusamvana kwachilema <30 arcseconds.
Kuthamanga kwa scan ya Omega ndi 200 × mwachangu kuposa masikelo achikhalidwe a Theta.

2. Modularity ndi Scalability

Zowonjezereka kuti zigwiritsidwe ntchito mwapadera (mwachitsanzo, zowotcha za SiC, masamba a turbine).
Imaphatikizana ndi machitidwe a MES pakuwunikira nthawi yeniyeni yopanga.

3. Kugwirizana ndi Kukhazikika

Imakhala ndi zitsanzo zosaoneka bwino (monga ma ingots osweka a safiro).
Mapangidwe oziziritsa mpweya amachepetsa zosowa zosamalira.

4. Ntchito Yanzeru

Kudina kumodzi ndikukonza zochita zambiri.
Kuwongolera mokhazikika ndi makhiristo olozera kuti muchepetse zolakwika zamunthu.

Mapulogalamu

1. Kupanga kwa Semiconductor

Mawonekedwe a Wafer dicing: Imatsimikizira Si, SiC, GaN wafer orientation kuti muzitha kudula bwino.
Kujambula kwa zolakwika: Kumazindikiritsa zong'ambika pamwamba kapena zosunthika kuti ziwonjezeke zokolola.

2. Zida Zowonera

Makhiristo opanda mzere (mwachitsanzo, LBO, BBO) pazida za laser.
Chizindikiro cha safiro cha safiro cha magawo a LED.

3. Ceramics ndi Composites

Imawunika momwe mbewu zimayendera mu Si3N4 ndi ZrO2 pazogwiritsa ntchito kutentha kwambiri.

4. Research and Quality Control

Mayunivesite / ma lab opangira zinthu zatsopano (mwachitsanzo, ma aloyi apamwamba kwambiri).
Industrial QC kuti iwonetsetse kusasinthika kwa batch.

Ntchito za XKH

XKH imapereka chithandizo chokwanira chaukadaulo pazida zowongoka, kuphatikiza kuyika, kukhathamiritsa kwa magawo, kusanthula kwama curve, ndi mapu a zolakwika za 3D. Mayankho ogwirizana (mwachitsanzo, ukadaulo wa ingot stacking) amaperekedwa kuti apititse patsogolo luso la semiconductor ndi optical material kupanga ndi kupitirira 30%. Gulu lodzipatulira limachita maphunziro apamalo, pomwe thandizo lakutali la 24/7 ndikusintha mwachangu mbali zina zimatsimikizira kudalirika kwa zida.

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