Dongosolo Lowongolera Ma Wafer la Kuyeza Ma Crystal Orientation

Dongosolo Lowongolera Ma Wafer la Muyeso wa Ma Crystal Orientation Chithunzi Chodziwika

Kufotokozera Kwachidule:

Chida chowongolera ma wafer ndi chipangizo cholondola kwambiri chomwe chimagwiritsa ntchito mfundo za X-ray diffraction kuti chiwongolere kupanga ma semiconductor ndi njira zasayansi yazinthu pozindikira momwe ma crystallographic akuyendera. Zigawo zake zazikulu zimaphatikizapo gwero la X-ray (monga Cu-Kα, 0.154 nm wavelength), goniometer yolondola (angle resolution ≤0.001°), ndi zowunikira (CCD kapena scintillation counters). Mwa kuzungulira zitsanzo ndikuwunika momwe ma diffraction amagwirira ntchito, imawerengera ma crystallographic indices (monga 100, 111) ndi malo olumikizirana ndi ±30 arcsecond accuracy. Dongosololi limathandizira magwiridwe antchito odziyimira pawokha, kukhazikika kwa vacuum, ndi kuzungulira kwa multi-axis, komwe kumagwirizana ndi ma wafer a mainchesi 2-8 kuti muyeze mwachangu m'mphepete mwa ma wafer, ma reference planes, ndi epitaxial layer alignment. Ntchito zazikulu zimaphatikizapo cutting-oriented silicon carbide, ma wafer a safiro, ndi turbine blade high-temperature performance validation, zomwe zimawonjezera mwachindunji mphamvu zamagetsi a chip ndi yield.

Tumizani imelo kwa ife

Mawonekedwe

Chiyambi cha Zida

Zipangizo zowongolera ma wafer ndi zipangizo zolondola zomwe zimagwiritsa ntchito mfundo za X-ray diffraction (XRD), zomwe zimagwiritsidwa ntchito makamaka popanga zinthu za semiconductor, zipangizo zowala, zoumba, ndi mafakitale ena a crystalline.

Zipangizozi zimathandizira kuti kristalo iyang'ane bwino ndipo zimatsogolera njira zodulira kapena kupukuta bwino. Zinthu zazikulu ndi izi:

Miyeso yolondola kwambiri:Wokhoza kuthetsa ma crystallographic planes okhala ndi ma resolution a angular mpaka 0.001°.
Kugwirizana kwakukulu kwa zitsanzo:Imathandizira ma wafers mpaka 450 mm mulifupi mwake ndi kulemera kwa 30 kg, yoyenera zipangizo monga silicon carbide (SiC), safiro, ndi silicon (Si).
Kapangidwe ka modular:Ntchito zokulirapo zimaphatikizapo kusanthula kwa rocking curve, mapu a zolakwika za pamwamba pa 3D, ndi zida zosungira zinthu kuti zigwiritsidwe ntchito m'njira zosiyanasiyana.

Ma Parameter Ofunika Kwambiri

Gulu la Ma Parameter	Makhalidwe/Makonzedwe Achizolowezi
Chitsime cha X-ray	Cu-Kα (malo olunjika a 0.4×1 mm), 30 kV yowonjezera mphamvu yamagetsi, 0–5 mA yosinthika ya chubu
Mzere wa Angular	θ: -10° mpaka +50°; 2θ: -10° mpaka +100°
Kulondola	Kutha kwa ngodya yopendekeka: 0.001°, kuzindikira chilema cha pamwamba: ± 30 arcseconds (kugwedezeka kwa curve)
Liwiro la Kusanthula	Kujambula kwa Omega kumamaliza kuyang'ana bwino kwa lattice mumasekondi 5; Kujambula kwa Theta kumatenga mphindi 1.
Gawo la Chitsanzo	Chopondera cha V, chokokera mpweya, chozungulira mbali zambiri, chimagwirizana ndi ma wafer a mainchesi 2–8
Ntchito Zowonjezera	Kusanthula kwa ma rocking curve, mapu a 3D, chipangizo chosungira zinthu, kuzindikira zolakwika za kuwala (kukanda, GBs)

Mfundo Yogwirira Ntchito

1. Maziko a X-ray Diffraction

Ma X-ray amalumikizana ndi ma atomu a nyukiliya ndi ma elekitironi mu kristalo, zomwe zimapangitsa kuti pakhale ma diffraction patterns. Lamulo la Bragg (nλ = 2d sinθ) limalamulira ubale pakati pa ma diffraction angles (θ) ndi lattice spacing (d).
Zipangizo zofufuzira zimagwira ntchito izi, zomwe zimasanthulidwa kuti zikonzenso kapangidwe ka kristalo.

2. Ukadaulo wa Omega Scanning

Khiristo imazungulira mozungulira mzere wokhazikika pomwe ma X-ray amawunikira.
Zipangizo zowunikira zimasonkhanitsa zizindikiro zosinthira kuwala m'magawo angapo a kristalographic, zomwe zimathandiza kudziwa bwino mawonekedwe a lattice mumasekondi 5.

3. Kusanthula kwa Rocking Curve

Kona yokhazikika ya kristalo yokhala ndi ma angles osiyanasiyana a X-ray kuti muyese m'lifupi mwake (FWHM), kuwunika zolakwika za lattice ndi kupsinjika.

4. Kulamulira Kokha

Ma interface a PLC ndi touchscreen amalola ma angles odulira omwe akonzedweratu, mayankho a nthawi yeniyeni, komanso kuphatikiza ndi makina odulira kuti azilamulira mozungulira.

Ubwino ndi Makhalidwe

1. Kulondola ndi Kuchita Bwino

Kulondola kwa angular ± 0.001°, kutsimikiza kwa kuzindikira zolakwika <30 arcseconds.
Liwiro la Omega scan ndi lachangu kwambiri kuposa Theta scan yachikhalidwe.

2. Kusinthasintha ndi Kusasinthika

Imatha kukulitsidwa kuti igwiritsidwe ntchito mwapadera (monga ma wafer a SiC, masamba a turbine).
Imagwirizana ndi machitidwe a MES kuti aziwunika momwe zinthu zilili nthawi yeniyeni.

3. Kugwirizana ndi Kukhazikika

Amalola zitsanzo zosaoneka bwino (monga miyala ya safiro yosweka).
Kapangidwe koziziritsidwa ndi mpweya kamachepetsa zosowa zosamalira.

4. Ntchito Yanzeru

Kuwerengera kamodzi kokha ndi kukonza ntchito zambiri.
Kukonza zokha pogwiritsa ntchito makhiristo ofotokozera kuti muchepetse zolakwika za anthu.

Mapulogalamu

1. Kupanga Ma Semiconductor

Kuyang'ana kwa Wafer dicing: Kumazindikira momwe Si, SiC, ndi GaN wafer imagwirira ntchito bwino.
Kujambula zolakwika: Kuzindikira mikwingwirima kapena kusokonekera kwa pamwamba kuti kuwonjezere kukolola kwa tchipisi.

2. Zida Zowala

Makristalo osakhala a mzere (monga LBO, BBO) a zipangizo za laser.
Chizindikiro cha pamwamba cha wafer wa safiro cha zinthu za LED.

3. Zida zadothi ndi zosakaniza

Imasanthula momwe tirigu amayendera mu Si3N4 ndi ZrO2 kuti agwiritse ntchito kutentha kwambiri.

4. Kafukufuku ndi Kulamulira Ubwino

Mayunivesite/ma labu ophunzirira zinthu zatsopano (monga ma alloys okhala ndi entropy yambiri).
Industrial QC kuti zitsimikizire kuti gulu lonse likugwirizana.

Ntchito za XKH

XKH imapereka chithandizo chaukadaulo chokwanira cha zida zowongolera ma wafer, kuphatikiza kukhazikitsa, kukonza magwiridwe antchito, kusanthula kwa ma rocking curve, ndi mapu a zolakwika za 3D pamwamba. Mayankho opangidwa mwaluso (monga ukadaulo wa ingot stacking) amaperekedwa kuti apititse patsogolo kupanga bwino kwa semiconductor ndi zinthu zowunikira ndi kupitirira 30%. Gulu lodzipereka limachita maphunziro pamalopo, pomwe chithandizo chakutali cha maola 24 pa sabata komanso kusintha zida mwachangu kumatsimikizira kudalirika kwa zida.

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