Gawo Lokhala ndi Mpweya la SiC Lolondola Kwambiri

Chithunzi Chowonetsedwa cha Ultra-Precision SiC Air-Bearing Stage

Kufotokozera Kwachidule:

Chifukwa cha kusintha kosalekeza kwa makampani opanga ma semiconductor, zida zopangira ndi kuwunika zimafuna magwiridwe antchito apamwamba kwambiri. Pogwiritsa ntchito ukadaulo wokulirapo pakuwongolera mayendedwe ndi malo oimika nanometer, tapanga gawo lopangidwa ndi H-type dual-axis ultra-precision air-bearing steji.

Tumizani imelo kwa ife

Mawonekedwe

Chithunzi Chatsatanetsatane

Chidule

Popangidwa ndi kapangidwe ka ceramic ka silicon carbide (SiC) kopangidwa ndi finite-element-optimized element komanso ukadaulo wonyamula mpweya, sitejiyi imapereka kulondola kwakukulu, kulimba, komanso kuyankha kwamphamvu. Ndi yoyenera kwambiri pa:

Kukonza ndi kuyang'anira ma semiconductor
Kupanga ndi kuyerekeza kwa micro/nano
Kudula ndi kupukuta ntchentche pogwiritsa ntchito nanometer
Kusanthula kolondola kwambiri mwachangu

Zinthu Zofunika Kwambiri

Njira yoyendetsera SiC yokhala ndi mpweyachifukwa cha kuuma kwambiri komanso kulondola kwambiri
Mphamvu zazikulu: liwiro mpaka 1 m/s, kuthamanga mpaka 4 g, kukhazikika mwachangu
Gantry yoyendetsa kawiri ya Y-axiskumatsimikizira kuti katundu ali ndi mphamvu zambiri komanso kukhazikika
Zosankha za encoder: grating ya kuwala kapena laser interferometer
Kulondola kwa malo: ± 0.15 μm;kubwerezabwereza: ± 75 nm
Kuyendetsa bwino chingwekuti pakhale kapangidwe koyera komanso kodalirika kwa nthawi yayitali
Makonzedwe osinthikapa zosowa za ntchito yeniyeni

Kapangidwe Kolondola Kwambiri & Kapangidwe Koyendetsa Molunjika, Kosakhudzana ndi Kulumikizana

Chimango cha Ceramic cha SiC: ~5 × kuuma kwa aluminiyamu ndi ~5 × kutentha kotsika, kuonetsetsa kuti kutentha kumakhala kolimba komanso kolimba.
Mpweya Woperekedwa ndi Ndalama: Kapangidwe ka mwiniwake kamawonjezera kuuma, mphamvu yonyamula katundu, komanso kukhazikika kwa kuyenda.
Magwiridwe Abwino: Imathandizira liwiro la 1 m/s ndi kuthamanga kwa 4 g, yoyenera kwambiri pa ntchito zothamanga kwambiri.
Kuphatikiza Kopanda Msoko: Imagwirizana ndi machitidwe odzipatula a kugwedezeka, magawo ozungulira, ma module opendekera, ndi nsanja zogwirira ntchito za wafer.
Kuyang'anira Zingwe: Ma radius opindika olamulidwa amachepetsa kupsinjika kwa nthawi yayitali ya ntchito.

Coreless Linear Motor: Kuyenda kosalala popanda mphamvu yogwira.
Kuyendetsa Magalimoto Ambiri: Kuyika kwa injini ya load-plane kumathandizira kuti ikhale yowongoka, yosalala, komanso yolondola kwambiri.
Kudzipatula kwa Kutentha: Ma mota amachotsedwa ku kapangidwe ka siteji; kuziziritsa mpweya kapena madzi kosankha kuti azitha kugwira ntchito molimbika.

Mafotokozedwe

Chitsanzo	400-400	500-500	600-600
Nkhwangwa	X (skani) / Y (sitepe)	X (skani) / Y (sitepe)	X (skani) / Y (sitepe)
Ulendo (mm)	400/400	500/500	600/600
Kulondola (μm)	± 0.15	± 0.2	± 0.2
Kubwerezabwereza (nm)	± 75	±100	±100
Chisankho (nm)	0.3	0.3	0.3
Liwiro Lalikulu (m/s)	1	1	1
Kuthamanga (g)	4	4	4
Kuwongoka (μm)	± 0.2	± 0.3	± 0.4
Kukhazikika (nm)	±5	±5	±5
Katundu Waukulu (kg)	20	20	20
Pitch/Roll/Yaw (arc-sec)	± 1	± 1	± 1

Mikhalidwe Yoyesera:

Mpweya wokwanira: woyera, wouma; mame ≤ 0°F; kusefa tinthu ≤ 0.25 μm; kapena 99.99% nayitrogeni.
Kulondola kunayesedwa 25 mm pamwamba pa siteji pakati pa 20±1 °C, 40–60% RH.

Mapulogalamu

Kujambula, kuyang'anira, ndi kusamalira ma wafer a semiconductor
Kupanga kwa micro/nano ndi kuwerengera molondola
Kupanga ma optics apamwamba kwambiri ndi interferometry
Kafukufuku wa sayansi ya zakuthambo ndi zapamwamba

Mafunso Ofunsidwa Kawirikawiri - Gawo Lokhala ndi Mpweya la Silicon Carbide

1. Kodi gawo lokhala ndi mpweya ndi chiyani?

Gawo lokhala ndi mpweya limagwiritsa ntchito mpweya wochepa wopanikizika pakati pa siteji ndi njira yotsogolera kuti liperekeyosasunthika, yosawonongeka, komanso yoyenda bwino kwambiriMosiyana ndi mabearing achikhalidwe a makina, imachotsa kutsetsereka kwa ndodo, imapereka kulondola kwa nanometer, komanso imathandizira kudalirika kwa nthawi yayitali.

2. N’chifukwa chiyani muyenera kugwiritsa ntchito silicon carbide (SiC) pa kapangidwe ka siteji?

Kuuma kwakukulu: ~5× ya aluminiyamu, kuchepetsa kusintha kwa zinthu panthawi yoyenda mosinthasintha.
Kuwonjezeka kwa kutentha kochepa: ~5× yotsika kuposa aluminiyamu, kusunga kulondola pansi pa kusintha kwa kutentha.
Wopepuka: Kuchuluka kochepa poyerekeza ndi chitsulo, zomwe zimathandiza kuti ntchito iziyenda mwachangu komanso mwachangu.
Kukhazikika kwabwino kwambiri: Kuchepetsa kutentha komanso kulimba kwapamwamba kwambiri kuti malo azikhala olondola kwambiri.

3. Kodi sitejiyo imafuna mafuta kapena kukonza?

Palibe mafuta odzola achikhalidwe omwe amafunikira chifukwa palipalibe kukhudzana ndi makinaKukonza komwe kumalimbikitsidwa kumaphatikizapo:

Kuperekampweya woyera, wouma wopanikizika kapena nayitrogeni
Kuyang'ana nthawi ndi nthawi ma filters ndi ma dryer
Kuyang'anira zingwe ndi makina ozizira

4. Kodi zofunikira pakupereka mpweya ndi ziti?

Malo a mame: ≤ 0 °F (≈ –18 °C)
Kusefa kwa tinthu: ≤ 0.25 μm
Mpweya woyera, wouma kapena 99.99% nayitrogeni yeniyeni
Kupanikizika kokhazikika ndi kusinthasintha kochepa

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.