Silicon Dioxide wafer SiO2 wafer wandiweyani Wopukutidwa, Prime Ndi Mayeso Giredi
Kuwonetsa bokosi la wafer
| Chogulitsa | Ma wafer a Thermal Oxide (Si+SiO2) |
| Njira Yopangira | LPCVD |
| Kupukuta Pamwamba | SSP/DSP |
| M'mimba mwake | 2 inchi / 3 inchi / 4 inchi / 5 inchi / 6 inchi |
| Mtundu | Mtundu wa P / Mtundu wa N |
| Oxidation Layer makulidwe | 100nm ~ 1000nm |
| Kuyang'ana | <100> <111> |
| Kukana kwa magetsi | 0.001-25000(Ω•cm) |
| Kugwiritsa ntchito | Yogwiritsidwa ntchito ponyamula zitsanzo za synchrotron radiation, PVD/CVD covering ngati substrate, magnetron sputtering growth sample, XRD, SEM,Mphamvu ya atomiki, infrared spectroscopy, fluorescence spectroscopy ndi ma substrates ena oyesera kusanthula, ma molecular beam epitaxial growth substrates, X-ray kusanthula kwa ma crystalline semiconductors |
Ma wafer a silicon oxide ndi mafilimu a silicon dioxide omwe amamera pamwamba pa ma wafer a silicon pogwiritsa ntchito mpweya kapena nthunzi yamadzi pa kutentha kwakukulu (800°C ~ 1150°C) pogwiritsa ntchito njira yotenthetsera kutentha pogwiritsa ntchito zida za chubu cha ng'anjo yotenthetsera mpweya. Kukhuthala kwa njirayi kumayambira pa nanometers 50 mpaka ma microns awiri, kutentha kwa njirayo kumafika madigiri Celsius 1100, njira yokulira imagawidwa m'mitundu iwiri ya "oxygen yonyowa" ndi "oxygen youma". Thermal Oxide ndi "kukula" kwa oxide, komwe kuli kofanana kwambiri, kukhuthala bwino komanso mphamvu ya dielectric kuposa zigawo za CVD zomwe zimayikidwa mu oxide, zomwe zimapangitsa kuti pakhale mtundu wapamwamba.
Kutulutsa Mpweya Wouma
Silikoni imakumana ndi mpweya ndipo gawo la okosijeni limayenda nthawi zonse kupita ku gawo la substrate. Kusungunuka kouma kuyenera kuchitika kutentha kuyambira 850 mpaka 1200°C, ndi kukula kochepa, ndipo kungagwiritsidwe ntchito pakukula kwa chipata chotetezedwa ndi MOS. Kusungunuka kouma kumakondedwa kuposa kusungunuka konyowa pamene gawo la silicon oxide labwino kwambiri, lopyapyala kwambiri likufunika. Mphamvu ya okosijeni youma: 15nm ~ 300nm.
2. Kusungunuka kwa Oxidation Yonyowa
Njirayi imagwiritsa ntchito nthunzi ya madzi kupanga oxide wosanjikiza polowa mu chubu cha uvuni pansi pa kutentha kwambiri. Kuchulukana kwa okosijeni wonyowa kumakhala koipa pang'ono kuposa okosijeni wouma, koma poyerekeza ndi okosijeni wouma ubwino wake ndi wakuti ili ndi chiwongola dzanja chachikulu chokulirapo, choyenera kukula kwa filimu yoposa 500nm. Mphamvu ya okosijeni wonyowa: 500nm ~ 2µm.
Chubu cha ng'anjo ya AEMD choyezera kuthamanga kwa mpweya ndi chubu cha ng'anjo chopingasa cha ku Czech, chomwe chimadziwika ndi kukhazikika kwa njira, kufanana bwino kwa filimu komanso kuwongolera bwino tinthu tating'onoting'ono. Chubu cha ng'anjo ya silicon oxide chimatha kukonza ma wafers 50 pa chubu chilichonse, chokhala ndi kufanana kwabwino kwambiri mkati ndi pakati pa ma wafers.
Chithunzi Chatsatanetsatane
