Boti la Silicon Carbide (SiC) Wafer

Kufotokozera Kwachidule:

Boti la Silicon Carbide (SiC) wafer ndi chonyamulira cha semiconductor chopangidwa ndi zinthu za SiC zoyera kwambiri, zopangidwa kuti zigwire ndikunyamula ma wafer panthawi ya kutentha kwambiri monga epitaxy, oxidation, diffusion, ndi annealing.

Tumizani imelo kwa ife

Mawonekedwe

Chithunzi Chatsatanetsatane

Chidule cha Galasi la Quartz

Chifukwa cha kupangidwa mwachangu kwa ma semiconductor amphamvu ndi zida zopingasa, maboti achikhalidwe a quartz amakumana ndi zopinga monga kusintha kwa kutentha kwambiri, kuipitsidwa kwambiri kwa tinthu tating'onoting'ono, komanso moyo waufupi wautumiki. Maboti a SiC wafer, okhala ndi kukhazikika kwa kutentha kwambiri, kuipitsidwa kochepa, komanso moyo wautali, akulowa m'malo mwa maboti a quartz ndipo akukhala chisankho chomwe chimakondedwa kwambiri popanga zida za SiC.

Zinthu Zofunika Kwambiri

1. Ubwino wa Zinthu Zofunika

Yopangidwa kuchokera ku SiC yoyera kwambiri yokhala ndikuuma kwakukulu ndi mphamvu.
Malo osungunuka pamwamba pa 2700°C, okwera kwambiri kuposa quartz, zomwe zimapangitsa kuti pakhale bata kwa nthawi yayitali m'malo ovuta kwambiri.

2. Katundu wa Kutentha

Kutentha kwambiri komwe kumathandizira kusamutsa kutentha mwachangu komanso mofanana, kuchepetsa kupsinjika kwa wafer.
Coefficient of thermal expansion (CTE) imagwirizana kwambiri ndi ma substrates a SiC, zomwe zimachepetsa kupindika ndi kusweka kwa wafer.

3. Kukhazikika kwa Mankhwala

Yokhazikika pansi pa kutentha kwakukulu ndi mlengalenga wosiyanasiyana (H₂, N₂, Ar, NH₃, ndi zina zotero).
Kukana bwino kwambiri okosijeni, kuteteza kuwonongeka ndi kupanga tinthu.

4. Kugwira Ntchito kwa Njira

Malo osalala komanso okhuthala amachepetsa kutayika kwa tinthu tating'onoting'ono ndi kuipitsidwa.
Imasunga kukhazikika kwa miyeso ndi mphamvu yonyamula katundu ikagwiritsidwa ntchito kwa nthawi yayitali.

5. Kugwiritsa Ntchito Ndalama Moyenera

Nthawi yogwira ntchito ndi yayitali nthawi 3-5 kuposa maboti a quartz.
Kuchepetsa nthawi yokonza, kuchepetsa nthawi yopuma komanso ndalama zosinthira.

Mapulogalamu

SiC Epitaxy: Kuthandizira ma substrates a SiC a mainchesi 4, mainchesi 6, ndi mainchesi 8 panthawi ya kukula kwa epitaxial kutentha kwambiri.
Kupanga Chipangizo Chamagetsi: Yabwino kwambiri pa ma SiC MOSFET, Schottky Barrier Diodes (SBDs), ma IGBT, ndi zipangizo zina.
Chithandizo cha Kutentha: Kuyika, kugawa ndi kuyika mpweya m'nthaka, ndi njira zopangira mpweya kukhala carbonization.
Kusungunuka ndi Kufalikira: Nsanja yothandizira ya wafer yokhazikika yothira ndi kufalitsa kutentha kwambiri.

Mafotokozedwe Aukadaulo

Chinthu	Kufotokozera
Zinthu Zofunika	Silicon Carbide yoyera kwambiri (SiC)
Kukula kwa Wafer	4-inchi / 6-inchi / 8-inchi (yosinthika)
Kutentha Kwambiri kwa Ntchito.	≤ 1800°C
CTE Yokulitsa Kutentha	4.2 × 10⁻⁶ /K (pafupi ndi SiC substrate)
Kutentha kwa Matenthedwe	120–200 W/m·K
Kuuma kwa pamwamba	Ra < 0.2 μm
Kufanana	± 0.1 mm
Moyo wa Utumiki	≥ 3 × yaitali kuposa maboti a quartz

Kuyerekeza: Boti la Quartz vs. Boti la SiC

Kukula	Bwato la Quartz	SiC Boat
Kukana Kutentha	≤ 1200°C, kusintha kwa kutentha kwambiri.	≤ 1800°C, kutentha kumakhala kokhazikika
Masewero a CTE ndi SiC	Kusagwirizana kwakukulu, chiopsezo cha kupsinjika kwa wafer	Kugwirizana kofanana, kumachepetsa kusweka kwa wafer
Kuipitsidwa kwa Tinthu	Zapamwamba, zimapanga zonyansa	Malo otsika, osalala komanso okhuthala
Moyo wa Utumiki	Kusintha kwakanthawi kochepa, kawirikawiri	Kutalika, nthawi ya moyo wautali ndi 3–5 ×
Njira Yoyenera	Si epitaxy yachikhalidwe	Yokonzedwa bwino kuti igwiritsidwe ntchito pa SiC epitaxy ndi zida zamagetsi

Mafunso Ofunsidwa Kawirikawiri - Maboti a Silicon Carbide (SiC) Wafer

1. Kodi bwato la SiC wafer ndi chiyani?

Boti la SiC wafer ndi chonyamulira cha semiconductor chopangidwa ndi silicon carbide yoyera kwambiri. Chimagwiritsidwa ntchito kunyamula ndi kunyamula ma wafer panthawi ya kutentha kwambiri monga epitaxy, oxidation, diffusion, ndi annealing. Poyerekeza ndi maboti achikhalidwe a quartz, maboti a SiC wafer amapereka kutentha kwabwino, kuipitsidwa pang'ono, komanso moyo wautali wa ntchito.

2. N’chifukwa chiyani mungasankhe maboti a SiC wafer m’malo mwa maboti a quartz?

Kukana kutentha kwambiri: Yokhazikika mpaka 1800°C poyerekeza ndi quartz (≤1200°C).
Kugwirizana bwino kwa CTE: Pafupi ndi ma substrates a SiC, kuchepetsa kupsinjika kwa wafer ndi ming'alu.
Kupanga tinthu tating'onoting'ono totsika: Malo osalala komanso okhuthala amachepetsa kuipitsidwa.
Moyo wautali: nthawi 3–5 kuposa maboti a quartz, zomwe zimachepetsa mtengo wa umwini.

3. Kodi maboti a SiC wafer boti amatha kunyamula kukula kotani kwa wafer?

Timapereka mapangidwe okhazikika aMainchesi 4, mainchesi 6, ndi mainchesi 8ma wafer, okhala ndi zosintha zonse zomwe zilipo kuti zikwaniritse zosowa za makasitomala.

4. Kodi maboti a SiC wafer amagwiritsidwa ntchito nthawi zambiri m'njira ziti?

Kukula kwa SiC epitaxial
Kupanga zida zamagetsi zamagetsi (SiC MOSFETs, SBDs, IGBTs)
Kutentha kwambiri, kupatsa mphamvu, ndi kuyika mpweya m'nthaka
Njira zotulutsira okosijeni ndi kufalikira

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.