Silicon Carbide (SiC) Single-Crystal Substrate – 10×10mm Wafer

Kufotokozera Kwachidule:

Chipinda cha 10×10mm Silicon Carbide (SiC) cha 10×10mm chopangidwa ndi kristalo imodzi ndi chinthu cha semiconductor chogwira ntchito bwino chomwe chimapangidwira zamagetsi zamagetsi ndi ma optoelectronics a m'badwo wotsatira. Chipinda cha SiC chokhala ndi kutentha kwapadera, bandgap yayikulu, komanso kukhazikika kwabwino kwa mankhwala, chimapereka maziko a zida zomwe zimagwira ntchito bwino pansi pa kutentha kwambiri, ma frequency ambiri, komanso ma voltage okwera. Ma substrates awa amadulidwa molondola m'ma 10×10mm sikweya tchipisi, abwino kwambiri pakufufuza, kupanga ma prototyping, ndi kupanga zida.

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Chithunzi Chatsatanetsatane cha Silicon Carbide (SiC) substrate wafer

Chidule cha Silicon Carbide (SiC) substrate wafer

The10 × 10mm Silicon Carbide (SiC) single-crystal substrate waferNdi chipangizo cha semiconductor chogwira ntchito bwino chomwe chapangidwira zida zamagetsi zamagetsi ndi ma optoelectronics a m'badwo wotsatira. Chokhala ndi kutentha kwapadera, bandgap yayikulu, komanso kukhazikika kwabwino kwa mankhwala, Silicon Carbide (SiC) substrate wafer imapereka maziko a zida zomwe zimagwira ntchito bwino pansi pa kutentha kwambiri, ma frequency ambiri, komanso ma voltage ambiri. Ma substrates awa amadulidwa molondola kwambiri.Zidutswa za sikweya 10 × 10mm, yabwino kwambiri pofufuza, kupanga zitsanzo, komanso kupanga zipangizo.

Mfundo Yopangira ya Silicon Carbide (SiC) substrate wafer

Kapu ya Silicon Carbide (SiC) imapangidwa pogwiritsa ntchito njira zoyendetsera nthunzi (PVT) kapena njira zokulira za sublimation. Njirayi imayamba ndi ufa wa SiC woyeretsedwa kwambiri womwe umayikidwa mu graphite crucible. Pa kutentha kwambiri kopitilira 2,000°C komanso malo olamulidwa, ufawo umalowa mu nthunzi ndikuyikanso pa kristalo ya mbewu yoyang'aniridwa mosamala, ndikupanga ingot yayikulu, yochepetsedwa chilema chimodzi cha kristalo.

SiC boule ikakula, imadutsa mu:

Kuduladula kwa Ingot: Macheka a waya a diamondi olondola amadula SiC ingot kukhala ma wafer kapena ma chips.

Kupala ndi kupukuta: Malo amapachikidwa kuti achotse zizindikiro za macheka ndikukhala ndi makulidwe ofanana.

Kupukuta kwa Makina Opangira Mankhwala (CMP): Kumapeto kwa galasi lokonzeka bwino lomwe lili ndi kuuma pang'ono kwambiri pamwamba.

Kusankha kugwiritsa ntchito mankhwala osokoneza bongo: Kugwiritsa ntchito mankhwala osokoneza bongo a nayitrogeni, aluminiyamu, kapena boron kungayambitsidwe kuti kugwirizane ndi mphamvu zamagetsi (mtundu wa n kapena mtundu wa p).

Kuyang'anira Ubwino: Kuyeza kwapamwamba kumatsimikizira kuti wafer ndi yosalala, makulidwe ofanana, komanso kuchulukana kwa chilema kumakwaniritsa zofunikira zolimba za semiconductor grade.

Njira yopangira zinthu zambiriyi imapangitsa kuti pakhale ma chips olimba a 10×10mm Silicon Carbide (SiC) substrate wafer omwe ali okonzeka kukula mu epitaxial kapena kupanga chipangizo mwachindunji.

Makhalidwe a Zinthu za Silicon Carbide (SiC) substrate wafer

Chophimba cha Silicon Carbide (SiC) chopangidwa ndi zinthu zopangidwa ndi4H-SiC or 6H-SiCmitundu yambiri:

4H-SiC:Ili ndi kuyenda kwa ma elekitironi ambiri, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsa ntchito zida zamagetsi monga MOSFET ndi Schottky diodes.
6H-SiC:Imapereka zinthu zapadera za RF ndi zida za optoelectronic.

Zinthu zofunika kwambiri za Silicon Carbide (SiC) substrate wafer:

Chingwe chachikulu:~3.26 eV (4H-SiC) - imalola magetsi owonongeka kwambiri komanso kutayika kochepa kwa switch.
Kutentha kwa ma conductivity:3–4.9 W/cm·K – imachotsa kutentha bwino, kuonetsetsa kuti makina amphamvu kwambiri ndi olimba.
Kuuma:~9.2 pa sikelo ya Mohs - imatsimikizira kulimba kwa makina panthawi yokonza ndi kugwiritsa ntchito chipangizocho.

Kugwiritsa ntchito Silicon Carbide (SiC) substrate wafer

Kusinthasintha kwa Silicon Carbide (SiC) substrate wafer kumawapatsa phindu m'mafakitale osiyanasiyana:

Zamagetsi Zamagetsi: Maziko a ma MOSFET, ma IGBT, ndi ma Schottky diode omwe amagwiritsidwa ntchito m'magalimoto amagetsi (EV), magetsi a mafakitale, ndi ma inverters amagetsi obwezerezedwanso.

Zipangizo za RF & Microwave: Zimathandizira ma transistors, ma amplifiers, ndi zigawo za radar za 5G, satellite, ndi ntchito zodzitetezera.

Zipangizo zamagetsi: Zimagwiritsidwa ntchito mu ma LED a UV, ma photodetector, ndi ma laser diode komwe kuwala kwa UV ndi kukhazikika kwake ndikofunikira kwambiri.

Ndege ndi Chitetezo: Cholimba chodalirika cha zamagetsi zotentha kwambiri komanso zolimba chifukwa cha kuwala kwa dzuwa.

Mabungwe Ofufuza ndi Mayunivesite: Abwino kwambiri pa maphunziro a sayansi ya zinthu, kupanga zida zoyesera, komanso kuyesa njira zatsopano za epitaxial.

Mafotokozedwe a Silicon Carbide (SiC) substrate wafer Chips

Katundu	Mtengo
Kukula	10mm × 10mm sikweya
Kukhuthala	330–500 μm (yosinthika)
Mtundu wa Polytype	4H-SiC kapena 6H-SiC
Kuyang'ana	C-ndege, yopanda mzere (0°/4°)
Kumaliza Pamwamba	Yopukutidwa mbali imodzi kapena mbali ziwiri; yokonzeka kugwiritsidwa ntchito
Zosankha Zogwiritsa Ntchito Doping	Mtundu wa N kapena mtundu wa P
Giredi	Gulu lofufuzira kapena gulu la chipangizo

Mafunso Ofunsidwa Kawirikawiri pa Silicon Carbide (SiC) substrate wafer

Q1: N’chiyani chimapangitsa kuti Silicon Carbide (SiC) substrate wafer ikhale yabwino kuposa ma silicon wafers achikhalidwe?
SiC imapereka mphamvu yowononga mphamvu ya 10 ×, kukana kutentha kwambiri, komanso kutayika kochepa kwa switch, zomwe zimapangitsa kuti ikhale yoyenera kwambiri pazida zamagetsi zomwe silicon singazigwiritse ntchito.

Q2: Kodi wafer wa substrate wa 10×10mm Silicon Carbide (SiC) ungaperekedwe ndi zigawo za epitaxial?
Inde. Timapereka zinthu zokonzeka kugwiritsidwa ntchito ndi epi ndipo timapereka ma wafer okhala ndi zigawo zapadera za epitaxial kuti tikwaniritse zosowa za chipangizo chamagetsi kapena LED.

Q3: Kodi kukula koyenera ndi milingo ya doping ikupezeka?
Inde. Ngakhale kuti ma chips a 10×10mm ndi ofunikira pa kafukufuku ndi kusandutsa zida, miyeso, makulidwe, ndi ma profiles a doping amapezeka mukawapempha.

Q4: Kodi ma wafer awa ndi olimba bwanji m'malo ovuta kwambiri?
SiC imasunga umphumphu wa kapangidwe kake ndi magwiridwe antchito amagetsi opitilira 600°C komanso pansi pa mphamvu yamagetsi yamphamvu, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito pazinthu zamagetsi zamagetsi zapamlengalenga komanso zankhondo.

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.