Chitoliro cha Silicon Carbide (SiC) Chopingasa cha Ng'anjo

Chitoliro cha Silicon Carbide (SiC) Chopingasa Choyatsira Ng'anjo Chithunzi Chodziwika

Kufotokozera Kwachidule:

Chitoliro cha Silicon Carbide (SiC) Horizontal Furnace chimagwira ntchito ngati chipinda chachikulu chogwirira ntchito komanso malire a kupanikizika kwa kutentha kwambiri kwa mpweya komanso mankhwala otenthetsera omwe amagwiritsidwa ntchito popanga ma semiconductor, kupanga ma photovoltaic, komanso kukonza zinthu zapamwamba.

Tumizani imelo kwa ife

Mawonekedwe

Chithunzi Chatsatanetsatane

Kuyika Zinthu Pamalo ndi Kupereka Mtengo

Chubu ichi, chopangidwa ndi kapangidwe ka SiC kamodzi kokha, kophatikizidwa ndi gawo lolimba la chitetezo cha CVD-SiC, chimapereka mphamvu yabwino kwambiri yoyendetsera kutentha, kuipitsidwa kochepa, umphumphu wamphamvu wa makina, komanso kukana mankhwala.
Kapangidwe kake kamatsimikizira kuti kutentha kwake kuli kofanana kwambiri, nthawi yayitali yogwirira ntchito, komanso kugwira ntchito bwino kwa nthawi yayitali.

Ubwino Waukulu

Zimathandizira kutentha kwa makina, ukhondo, komanso kugwira ntchito bwino kwa zida zonse (OEE).
Kumachepetsa nthawi yogwira ntchito yoyeretsa ndikuwonjezera nthawi yosinthira, kuchepetsa mtengo wonse wa umwini (TCO).
Chimapereka chipinda chokhala ndi moyo wautali chomwe chingathe kugwira ntchito ndi mankhwala otentha kwambiri a okosijeni komanso okhala ndi chlorine wambiri popanda chiopsezo chachikulu.

Malo Oyenera ndi Zenera la Machitidwe

Mpweya wochitapo kanthu: mpweya (O₂) ndi zosakaniza zina zosakaniza okosijeni
Mpweya wonyamula/woteteza: nayitrogeni (N₂) ndi mpweya wopanda mpweya wabwino kwambiri
Mitundu yogwirizana: mpweya wochepa wokhala ndi chlorine (njira yochepetsera kuchuluka kwa mpweya ndi nthawi yokhazikika imayendetsedwa)

Njira Zachizolowezi: kusungunuka kwa mpweya wouma/wonyowa, kupondereza, kufalikira, kuyika kwa LPCVD/CVD, kuyambitsa pamwamba, kusuntha kwa kuwala kwa dzuwa, kukula kwa filimu yopyapyala, kuyika kwa mpweya m'mlengalenga, nitridation, ndi zina zambiri.

Mikhalidwe Yogwirira Ntchito

Kutentha: kutentha kwa chipinda mpaka 1250 °C (kulola chitetezo cha 10–15% kutengera kapangidwe ka chotenthetsera ndi ΔT)
Kupanikizika: kuyambira pamlingo wotsika wa vacuum/LPCVD mpaka kupsinjika kwapafupi ndi mlengalenga (zofunikira zonse pa oda yogulira)

Zipangizo & Malingaliro Achilengedwe

Thupi la Monolithic SiC (Lowonjezeredwa)

SiC yokhala ndi kuchuluka kwakukulu kapena SiC yokhala ndi magawo ambiri, yomangidwa ngati gawo limodzi—yopanda zolumikizira kapena mipata yolimba yomwe ingatulutse kapena kupanga malo opsinjika.
Kutentha kwakukulu kumathandiza kuti kutentha kuchitike mwachangu komanso kuti kutentha kwa axial/radial kufanane bwino.
Kuchuluka kwa kutentha kotsika komanso kokhazikika (CTE) kumatsimikizira kukhazikika kwa magawo ndi zisindikizo zodalirika pa kutentha kwakukulu.

Chophimba Chogwira Ntchito cha CVD SiC

Malo obisika, oyera kwambiri (zonyansa za pamwamba/zokutira <5 ppm) kuti achepetse kupanga tinthu tating'onoting'ono ndi kutulutsidwa kwa ayoni achitsulo.
Kusagwira bwino ntchito kwa mankhwala motsutsana ndi mpweya wotulutsa okosijeni ndi chlorine, zomwe zimaletsa kuukira kapena kubwezeretsanso makoma.
Zosankha zokhuthala zomwe zimagwirizana ndi dera lililonse kuti zigwirizane ndi kukana dzimbiri komanso kuyankha kutentha.

Phindu Lophatikizana: thupi lolimba la SiC limapereka mphamvu yomanga ndi kutentha, pomwe gawo la CVD limatsimikizira ukhondo ndi kukana dzimbiri kuti likhale lodalirika komanso logwira ntchito bwino.

Zolinga Zofunikira pa Kugwira Ntchito

Kutentha kogwiritsa ntchito mosalekeza:≤ 1250 °C
Zonyansa za substrate zambiri:< 300 ppm
Zonyansa za pamwamba pa CVD-SiC:< 5 ppm
Kulekerera kwa miyeso: OD ± 0.3–0.5 mm; coaxiality ≤ 0.3 mm/m (yolimba ikupezeka)
Kukhwima kwa khoma lamkati: Ra ≤ 0.8–1.6 µm (ngati mukufuna kumaliza kopukutidwa kapena kofanana ndi galasi)
Kuchuluka kwa kutayikira kwa helium: ≤ 1 × 10⁻⁹ Pa·m³/s
Kupirira kutentha ndi kugwedezeka: kumapulumuka kutentha/kuzizira mobwerezabwereza popanda kusweka kapena kuphulika
Kukonza chipinda chotsukira: ISO Class 5–6 yokhala ndi milingo yotsimikizika ya tinthu/chitsulo-ion residue

Makonzedwe ndi Zosankha

Jiyomethri: OD 50–400 mm (yokulirapo poyerekeza ndi kuwunika) yokhala ndi kapangidwe kakatali ka chidutswa chimodzi; makulidwe a khoma okonzedwa kuti agwirizane ndi mphamvu ya makina, kulemera, ndi kutentha.
Mapangidwe omaliza: ma flange, bell-mouth, bayonet, malo opezera mphete, ma O-ring grooves, ndi ma custom pump-out kapena ma pressure ports.
Madoko ogwira ntchito: malo olumikizirana ndi thermocouple, mipando yooneka ngati magalasi, malo olowera mpweya wodutsa—zonsezi zimapangidwa kuti zigwire ntchito kutentha kwambiri komanso mosalola kutuluka kwa madzi.
Ndondomeko zophikira: khoma lamkati (lokhazikika), khoma lakunja, kapena chophimba chonse; chitetezo cholunjika kapena makulidwe ofunikira m'malo omwe ali ndi vuto lalikulu.
Kusamalira ndi kuyeretsa pamwamba: mitundu yosiyanasiyana ya roughness, kuyeretsa kwa ultrasound/DI, ndi njira zophikira/zowuma zomwe zakonzedwa.
Zowonjezera: graphite/ceramic/chitsulo, zomatira, malo osungiramo zinthu, manja ogwirira ntchito, ndi makanda osungiramo zinthu.

Kuyerekeza kwa Magwiridwe Antchito

Chiyerekezo	Chitoliro cha SiC	Chubu cha Quartz	Chubu cha Aluminiyamu	Graphite chubu
Kutentha kwa matenthedwe	Wamtali, yunifolomu	Zochepa	Zochepa	Pamwamba
Mphamvu/kukwera kwa kutentha kwambiri	Zabwino kwambiri	Zabwino	Zabwino	Zabwino (zimakhudzidwa ndi okosijeni)
Kutentha kwa thupi	Zabwino kwambiri	Wofooka	Wocheperako	Zabwino kwambiri
Ukhondo / ma ayoni achitsulo	Zabwino kwambiri (zochepa)	Wocheperako	Wocheperako	Wosauka
Kutulutsa okosijeni ndi Cl-chemistry	Zabwino kwambiri	Zabwino	Zabwino	Zosauka (zimapangitsa kuti thupi likhale lopanda okosijeni)
Mtengo poyerekeza ndi nthawi yautumiki	Moyo wapakati / wautali	Wochepa / waufupi	Wapakati / wapakati	Zochepa zapakati / zachilengedwe

Mafunso Ofunsidwa Kawirikawiri (Mafunso Ofunsidwa Kawirikawiri)

Q1. N’chifukwa chiyani mungasankhe thupi la SiC losindikizidwa ndi 3D?
A. Imachotsa mipata ndi ma braze omwe amatha kutulutsa kapena kulimbitsa mphamvu, ndipo imathandizira ma geometri ovuta ndi kulondola kofanana kwa miyeso.

Q2. Kodi SiC imagonjetsedwa ndi mpweya wokhala ndi chlorine?
A. Inde. CVD-SiC ndi yopanda mphamvu kwambiri mkati mwa malire ofunikira a kutentha ndi kuthamanga. Pa madera omwe amakhudzidwa kwambiri, zokutira zokhuthala zapafupi ndi makina olimba otsukira/otulutsa utsi zimalimbikitsidwa.

Q3. Kodi imapambana bwanji machubu a quartz?
A. SiC imapereka nthawi yayitali yogwira ntchito, kutentha kofanana bwino, kuipitsidwa pang'ono kwa tinthu/chitsulo-ion, komanso TCO yabwino—makamaka kupitirira ~900 °C kapena mumlengalenga wothira okosijeni/chlorine.

Q4. Kodi chubuchi chingathe kuthana ndi kutentha kwachangu?
A. Inde, malinga ngati malangizo apamwamba kwambiri a ΔT ndi ramp-rate atsatiridwa. Kuphatikiza thupi la high-κ SiC ndi wosanjikiza woonda wa CVD kumathandizira kusintha kwa kutentha mwachangu.

Q5. Kodi kusintha kumafunika liti?
A. Bwezerani chubucho ngati muwona ming'alu ya flange kapena m'mphepete, maenje okutira kapena kufalikira kwa madzi, kuchuluka kwa kutayikira kwa madzi, kusuntha kwa kutentha kwambiri, kapena kupanga tinthu tating'onoting'ono kosazolowereka.

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.