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Chithunzi Chojambulidwa cha Silicon Carbide Cantilever Paddle (SiC Cantilever Paddle)

Kufotokozera Kwachidule:

Tumizani imelo kwa ife

Mawonekedwe

Chithunzi Chatsatanetsatane

Chidule cha Zamalonda

Chophimba cha silicon carbide cantilever, chopangidwa kuchokera ku silicon carbide yolumikizidwa ndi reaction-bonded high-performance (RBSiC), ndi chinthu chofunikira kwambiri chomwe chimagwiritsidwa ntchito mu makina odzaza ndi ogwiritsira ntchito ma wafer pazinthu zopangira ma semiconductor ndi photovoltaic.
Poyerekeza ndi ma paddle achikhalidwe a quartz kapena graphite, ma paddle a SiC cantilever amapereka mphamvu yapamwamba kwambiri yamakina, kuuma kwambiri, kutentha kochepa, komanso kukana dzimbiri. Amasunga kukhazikika kwa kapangidwe kake bwino kwambiri kutentha kwambiri, kukwaniritsa zofunikira zolimba za ma wafer akuluakulu, nthawi yayitali yogwira ntchito, komanso kuipitsidwa kochepa kwambiri.

Ndi chitukuko chopitilira cha njira za semiconductor kupita ku ma wafer diameter akuluakulu, mphamvu yochulukirapo, komanso malo oyeretsera, ma paddle a SiC cantilever pang'onopang'ono asintha zinthu zachikhalidwe, kukhala chisankho chokondedwa cha uvuni wofalikira, LPCVD, ndi zida zina zokhudzana ndi kutentha kwambiri.

Zinthu Zamalonda

Kukhazikika Kwambiri pa Kutentha Kwambiri
- Imagwira ntchito bwino pa kutentha kwa 1000–1300℃ popanda kusintha.
- Kutentha kwakukulu kwa ntchito mpaka 1380℃.
Kutha Kunyamula Katundu Wambiri
- Mphamvu yopindika mpaka 250–280 MPa, yokwera kwambiri kuposa ma paddle a quartz.
- Wokhoza kugwira ma wafer akuluakulu (300 mm ndi kupitirira apo).
Moyo Wogwira Ntchito Wotalikirapo & Kusamalira Kochepa
- Kuchuluka kwa kutentha kochepa (4.5 × 10⁻⁶ K⁻¹), kogwirizana bwino ndi zinthu zokutira za LPCVD.
- Amachepetsa ming'alu ndi kutsekeka komwe kumabwera chifukwa cha kupsinjika maganizo, zomwe zimapangitsa kuti ntchito yoyeretsa ndi kukonza zinthu ipitirire.
Kukana Kudzimbiri ndi Kuyera
- Kukana bwino kwambiri ma acid ndi alkali.
- Kapangidwe kakang'ono kwambiri kamene kali ndi ma porosity otseguka <0.1%, zomwe zimachepetsa kupanga tinthu tating'onoting'ono ndi kutulutsa zinyalala.
Kapangidwe Kogwirizana ndi Makina Odzichitira
- Ma geometry okhazikika okhala ndi mawonekedwe olondola kwambiri.
- Imalumikizana bwino ndi makina olowetsa ndi kutsitsa zinthu a robotic wafer, zomwe zimathandiza kupanga zinthu zokha.

Katundu Wathupi ndi Mankhwala

Chinthu	Chigawo	Deta
Kutentha Kwambiri kwa Utumiki	℃	1380
Kuchulukana	g/cm³	3.04 – 3.08
Tsegulani Porosity	%	< 0.1
Mphamvu Yopindika	MPa	250 (20℃), 280 (1200℃)
Modulus ya Elasticity	GPa	330 (20℃), 300 (1200℃)
Kutentha kwa Matenthedwe	W/m·K	45 (1200℃)
Kuchuluka kwa Kutentha	K⁻¹×10⁻⁶	4.5
Kuuma kwa Vickers	HV2	≥ 2100
Kukana kwa Asidi/Alkaline	-	Zabwino kwambiri

Kutalika kwanthawi zonse:2378 mm, 2550 mm, 2660 mm
Miyeso yapadera imapezeka mukapempha

Mapulogalamu

Makampani Opanga Makontrakitala
- LPCVD (Kutaya Nthunzi Yochepa ya Mankhwala Opanikizika)
- Njira zofalitsira (phosphorous, boron, ndi zina zotero)
- Kutentha kwa kutentha
Makampani a Photovoltaic
- Kufalikira ndi kuphimba kwa polysilicon ndi monocrystalline wafer
- Kutentha kwambiri komanso kusinthasintha kwa kutentha
Minda Ina
- Malo otentha kwambiri omwe amawononga zinthu
- Machitidwe ogwiritsira ntchito wafer moyenera omwe amafunika nthawi yayitali komanso kuipitsidwa kochepa

Ubwino wa Makasitomala

Ndalama Zotsika Zogwirira Ntchito- Moyo wautali poyerekeza ndi ma paddle a quartz, kuchepetsa nthawi yogwira ntchito komanso kuchuluka kwa nthawi yosinthira.
Zokolola Zambiri- Kuipitsidwa kochepa kwambiri kumatsimikizira kuyera kwa pamwamba pa wafer ndikuchepetsa kuchuluka kwa zolakwika.
Umboni Wamtsogolo- Imagwirizana ndi ma wafer akuluakulu komanso njira zatsopano zogwiritsira ntchito semiconductor.
Kupititsa patsogolo Kukolola- Yogwirizana kwathunthu ndi machitidwe oyendetsera ma robotic, othandizira kupanga zinthu zambiri.

Mafunso Ofunsidwa Kawirikawiri - Silicon Carbide Cantilever Paddle

Q1: Kodi chophikira cha silicon carbide cantilever ndi chiyani?
A: Ndi gawo lothandizira ndi logwirira ntchito la wafer lopangidwa ndi reaction-bonded silicon carbide (RBSiC). Limagwiritsidwa ntchito kwambiri mu uvuni wofalitsa, LPCVD, ndi njira zina zotenthetsera kwambiri za semiconductor ndi photovoltaic.

Q2: N’chifukwa chiyani mungasankhe SiC m’malo mwa quartz paddles?
A: Poyerekeza ndi ma paddle a quartz, ma paddle a SiC amapereka:

Mphamvu yapamwamba yamakina komanso mphamvu zonyamula katundu
Kukhazikika bwino kwa kutentha pa kutentha mpaka 1380℃
Moyo wautali kwambiri wautumiki komanso nthawi yochepetsera yokonza
Kuchepetsa kupanga tinthu tating'onoting'ono ndi chiopsezo cha kuipitsidwa
Kugwirizana ndi kukula kwakukulu kwa wafer (300 mm ndi kupitirira apo)

Q3: Kodi chogwirira cha SiC cantilever chingathandize kukula kotani kwa wafer?
A: Ma paddles okhazikika amapezeka pa makina a uvuni a 2378 mm, 2550 mm, ndi 2660 mm. Miyeso yosinthidwa imapezeka kuti igwirizane ndi ma wafers okwana 300 mm ndi kupitirira apo.

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.