Chitofu chokulirapo cha SiC kristalo SiC Ingot growing 4inch 6inch 8inch PTV Lely TSSG LPE growth method

Kufotokozera Kwachidule:

Kukula kwa makristalo a Silicon carbide (SiC) ndi gawo lofunika kwambiri pakukonzekera zipangizo za semiconductor zogwira ntchito kwambiri. Chifukwa cha kutentha kwambiri kwa SiC (pafupifupi 2700°C) ndi kapangidwe ka polytypic kovuta (monga 4H-SiC, 6H-SiC), ukadaulo wa kukula kwa makristalo uli ndi vuto lalikulu. Pakadali pano, njira zazikulu zokulira zikuphatikizapo njira yotumizira nthunzi ya thupi (PTV), njira ya Lely, njira yokulira ya yankho la mbewu yapamwamba (TSSG) ndi njira ya epitaxy ya gawo lamadzimadzi (LPE). Njira iliyonse ili ndi ubwino ndi kuipa kwake ndipo ndi yoyenera kugwiritsa ntchito zosiyanasiyana.

Tumizani imelo kwa ife

Mawonekedwe

Njira zazikulu zokulira makristalo ndi makhalidwe awo

(1) Njira Yosamutsira Nthunzi Yathupi (PTV)
Mfundo: Pa kutentha kwambiri, zinthu zopangira SiC zimasanduka mpweya, womwe pambuyo pake umapangidwanso pa kristalo wa mbewu.
Zinthu zazikulu:
Kutentha kwakukulu kwa kukula (2000-2500°C).
Makristalo a 4H-SiC ndi 6H-SiC abwino kwambiri, akuluakulu amatha kulimidwa.
Kukula kwake kumakhala pang'onopang'ono, koma khalidwe la kristalo ndi lalikulu.
Kugwiritsa Ntchito: Amagwiritsidwa ntchito makamaka mu semiconductor yamagetsi, zida za RF ndi minda ina yapamwamba.

(2) Njira ya Lely
Mfundo: Makristalo amakula mwa kuyikanso ufa wa SiC mu dothi losakhazikika komanso kubwezeretsanso ufa wa SiC pa kutentha kwambiri.
Zinthu zazikulu:
Kukula sikufuna mbewu, ndipo kukula kwa kristalo ndi kochepa.
Ubwino wa kristalo ndi wapamwamba, koma mphamvu yokulira ndi yochepa.
Yoyenera kafukufuku wa labotale komanso kupanga zinthu zazing'ono.
Kugwiritsa Ntchito: Amagwiritsidwa ntchito makamaka mu kafukufuku wa sayansi ndi kukonzekera makhiristo ang'onoang'ono a SiC.

(3) Njira Yokulira Madzi Ochokera ku Mbeu Yapamwamba (TSSG)
Mfundo: Mu yankho lotentha kwambiri, zinthu zopangira za SiC zimasungunuka ndikukhala crystal pa mbewu ya kristalo.
Zinthu zazikulu:
Kutentha kwa kukula kwake ndi kochepa (1500-1800°C).
Makristalo a SiC abwino kwambiri komanso opanda chilema amatha kulimidwa.
Kukula kwake kumakhala pang'onopang'ono, koma kufanana kwa kristalo ndi kwabwino.
Kugwiritsa Ntchito: Koyenera kukonzekera makhiristo apamwamba a SiC, monga zida zamagetsi.

(4) Liquid Phase epitaxy (LPE)
Mfundo: Mu yankho la chitsulo chamadzimadzi, kukula kwa zinthu zopangira SiC epitaxial pa substrate.
Zinthu zazikulu:
Kutentha kwa kukula kwake ndi kochepa (1000-1500°C).
Kukula mwachangu, koyenera kukula kwa filimu.
Ubwino wa kristalo ndi wapamwamba, koma makulidwe ake ndi ochepa.
Kugwiritsa Ntchito: Amagwiritsidwa ntchito makamaka pakukula kwa mafilimu a SiC, monga masensa ndi zida zamagetsi.

Njira zazikulu zogwiritsira ntchito ng'anjo ya kristalo ya silikoni carbide

Chitofu cha kristalo cha SiC ndiye chida chachikulu chopangira makristasi a sic, ndipo njira zake zazikulu zogwiritsira ntchito ndi izi:
Kupanga zida zamagetsi zamagetsi: Amagwiritsidwa ntchito kukulitsa makhiristo apamwamba a 4H-SiC ndi 6H-SiC ngati zinthu zoyambira zamagetsi zamagetsi (monga ma MOSFET, ma diode).
Kugwiritsa ntchito: magalimoto amagetsi, ma inverter a photovoltaic, magetsi a mafakitale, ndi zina zotero.

Kupanga zipangizo za Rf: Kumagwiritsidwa ntchito kukulitsa makhiristo a SiC omwe ali ndi vuto lochepa ngati zinthu zogwiritsira ntchito zipangizo za RF kuti zikwaniritse zosowa zapamwamba za mauthenga a 5G, radar ndi satellite.

Kupanga zipangizo zamagetsi: Kumathandiza kukulitsa makhiristo apamwamba a SiC ngati zinthu zopangira ma LED, ma ultraviolet detectors ndi ma lasers.

Kafukufuku wa sayansi ndi kupanga magulu ang'onoang'ono: kafukufuku wa labotale ndi chitukuko cha zinthu zatsopano kuti zithandizire kupanga zinthu zatsopano komanso kukonza bwino ukadaulo wakukula kwa makristalo a SiC.

Kupanga zipangizo zotentha kwambiri: Zimagwiritsidwa ntchito kukulitsa makhiristo a SiC osatentha kwambiri ngati maziko a zoyezera zakuthambo ndi kutentha kwambiri.

Zipangizo za SiC ng'anjo ndi ntchito zomwe kampaniyo imapereka

XKH imayang'ana kwambiri pakupanga ndi kupanga zida za SIC crystal furnace, popereka ntchito zotsatirazi:

Zipangizo Zopangidwira Makonda: XKH imapereka uvuni wokulirapo wopangidwa mwamakonda ndi njira zosiyanasiyana zokulirapo monga PTV ndi TSSG malinga ndi zosowa za makasitomala.

Thandizo laukadaulo: XKH imapatsa makasitomala chithandizo chaukadaulo pa ntchito yonse kuyambira kukonza njira yopangira makristalo mpaka kukonza zida.

Ntchito Zophunzitsira: XKH imapereka maphunziro ogwirira ntchito ndi malangizo aukadaulo kwa makasitomala kuti atsimikizire kuti zipangizo zikugwira ntchito bwino.

Utumiki wogulitsira zinthu pambuyo pogulitsa: XKH imapereka chithandizo chofulumira pambuyo pogulitsa zinthu komanso kukonza zida kuti makasitomala apitirize kupanga zinthu.

Ukadaulo wokulitsa makristalo a silicon carbide (monga PTV, Lely, TSSG, LPE) uli ndi ntchito zofunika kwambiri pa zamagetsi zamagetsi, zida za RF ndi ma optoelectronics. XKH imapereka zida zapamwamba za SiC furnace ndi mautumiki osiyanasiyana othandizira makasitomala popanga makristalo apamwamba a SiC komanso kuthandiza chitukuko cha makampani opanga ma semiconductor.