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SiC Epitaxial Wafer ya Zipangizo Zamagetsi – 4H-SiC, N-mtundu, Low Defect Density

SiC Epitaxial Wafer ya Zipangizo Zamagetsi – 4H-SiC, mtundu wa N, Kuchuluka Kochepa kwa Chilema Chithunzi Chowonetsedwa
  • SiC Epitaxial Wafer ya Zipangizo Zamagetsi – 4H-SiC, N-mtundu, Low Defect Density
  • SiC Epitaxial Wafer ya Zipangizo Zamagetsi – 4H-SiC, N-mtundu, Low Defect Density
  • SiC Epitaxial Wafer ya Zipangizo Zamagetsi – 4H-SiC, N-mtundu, Low Defect Density

Kufotokozera Kwachidule:

SiC Epitaxial Wafer ndi chida chachikulu cha zida zamakono zoyezera mphamvu, makamaka zomwe zimapangidwira ntchito zamphamvu kwambiri, zamafupipafupi, komanso kutentha kwambiri. Mwachidule cha Silicon Carbide Epitaxial Wafer, SiC Epitaxial Wafer imakhala ndi gawo labwino kwambiri, lopyapyala la SiC epitaxial lomwe limakula pamwamba pa gawo lalikulu la SiC. Kugwiritsa ntchito ukadaulo wa SiC Epitaxial Wafer kukukulirakulira mwachangu m'magalimoto amagetsi, ma gridi anzeru, machitidwe amagetsi obwezerezedwanso, komanso ndege chifukwa cha mphamvu zake zapamwamba komanso zamagetsi poyerekeza ndi ma wafers achikhalidwe okhala ndi silicon.


Mawonekedwe

Chithunzi Chatsatanetsatane

SiC Epitaxial Wafer-4
SiC Epitaxial Wafer-6 - 副本

Chiyambi

SiC Epitaxial Wafer ndi chida chachikulu cha zida zamakono zoyezera mphamvu, makamaka zomwe zimapangidwira ntchito zamphamvu kwambiri, zamafupipafupi, komanso kutentha kwambiri. Mwachidule cha Silicon Carbide Epitaxial Wafer, SiC Epitaxial Wafer imakhala ndi gawo labwino kwambiri, lopyapyala la SiC epitaxial lomwe limakula pamwamba pa gawo lalikulu la SiC. Kugwiritsa ntchito ukadaulo wa SiC Epitaxial Wafer kukukulirakulira mwachangu m'magalimoto amagetsi, ma gridi anzeru, machitidwe amagetsi obwezerezedwanso, komanso ndege chifukwa cha mphamvu zake zapamwamba komanso zamagetsi poyerekeza ndi ma wafers achikhalidwe okhala ndi silicon.

Mfundo Zopangira SiC Epitaxial Wafer

Kupanga SiC Epitaxial Wafer kumafuna njira yowongolera kwambiri ya chemical vapor deposition (CVD). Epitaxial layer nthawi zambiri imakulitsidwa pa monocrystalline SiC substrate pogwiritsa ntchito mpweya monga silane (SiH₄), propane (C₃H₈), ndi hydrogen (H₂) kutentha kopitilira 1500°C. Kukula kwa epitaxial kotentha kwambiri kumeneku kumatsimikizira kulumikizana bwino kwa makristalo ndi zolakwika zochepa pakati pa epitaxial layer ndi substrate.

Njirayi ikuphatikizapo magawo angapo ofunikira:

  1. Kukonzekera kwa Substrate: Chikwama cha SiC choyambira chimatsukidwa ndikupukutidwa kuti chikhale chosalala bwino.

  2. Kukula kwa CVD: Mu reaktarakitala yoyera kwambiri, mpweya umachitapo kanthu kuti uike gawo la SiC la kristalo imodzi pa substrate.

  3. Kulamulira Kugwiritsa Ntchito Mankhwala Osokoneza Bongo: Kupopera mankhwala kwa mtundu wa N kapena P kumayambitsidwa panthawi ya epitaxy kuti akwaniritse mphamvu zamagetsi zomwe zimafunidwa.

  4. Kuyang'anira ndi Metrology: Kuyeza kwa maikulosikopu ya kuwala, AFM, ndi X-ray diffraction zimagwiritsidwa ntchito kutsimikizira makulidwe a layer, kuchuluka kwa doping, ndi kuchuluka kwa defect.

SiC Epitaxial Wafer iliyonse imayang'aniridwa mosamala kuti isunge kulekerera kolimba pakufanana kwa makulidwe, kusalala pamwamba, komanso kukana. Kutha kusintha magawo awa ndikofunikira pa ma MOSFET amphamvu kwambiri, ma Schottky diode, ndi zida zina zamagetsi.

Kufotokozera

Chizindikiro Kufotokozera
Magulu Sayansi ya Zipangizo, Ma Crystal Substrates Amodzi
Mtundu wa Polytype 4H
Kugwiritsa ntchito mankhwala osokoneza bongo Mtundu wa N
M'mimba mwake 101 mm
Kulekerera kwa m'mimba mwake ± 5%
Kukhuthala 0.35 mm
Kulekerera Kunenepa ± 5%
Utali Woyamba Wathyathyathya 22 mm (± 10%)
TTV (Kusiyana kwa Kukhuthala Konse) ≤10 µm
Kupindika ≤25 µm
FWHM ≤30 Arc-sekondi
Kumaliza Pamwamba Rq ≤0.35 nm

Kugwiritsa ntchito SiC Epitaxial Wafer

Zogulitsa za SiC Epitaxial Wafer ndizofunikira kwambiri m'magawo angapo:

  • Magalimoto Amagetsi (ma EV)Zipangizo zopangidwa ndi SiC Epitaxial Wafer zimawonjezera mphamvu ya powertrain ndikuchepetsa kulemera.

  • Mphamvu Zongowonjezedwanso: Amagwiritsidwa ntchito mu ma inverter amagetsi a dzuwa ndi mphepo.

  • Mphamvu Zamakampani: Yambitsani kusintha kwa kutentha kwambiri komanso pafupipafupi komanso kutayika kochepa.

  • Ndege ndi Chitetezo: Yabwino kwambiri m'malo ovuta omwe amafuna ma semiconductor amphamvu.

  • Malo Oyambira a 5G: Zigawo za SiC Epitaxial Wafer zimathandiza mphamvu zambiri pa ntchito za RF.

SiC Epitaxial Wafer imalola mapangidwe ang'onoang'ono, kusintha mwachangu, komanso kusintha mphamvu kwambiri poyerekeza ndi ma wafer a silicon.

Ubwino wa SiC Epitaxial Wafer

Ukadaulo wa SiC Epitaxial Wafer umapereka ubwino waukulu:

  1. Kuwonongeka Kwambiri kwa Voliyumu: Imapirira ma voltages mpaka nthawi 10 kuposa ma wafers a Si.

  2. Kutentha kwa Matenthedwe: SiC Epitaxial Wafer imachotsa kutentha mwachangu, zomwe zimathandiza kuti zipangizo ziziyenda bwino komanso modalirika.

  3. Kuthamanga Kwambiri kwa Kusintha: Kutayika kochepa kwa kusinthana kumathandiza kuti ntchito ikhale yogwira mtima kwambiri komanso kuti ikhale yochepa.

  4. Chingwe Chokulirapo: Zimathandiza kuti magetsi azikhala olimba pa kutentha ndi ma voltage okwera.

  5. Kulimba kwa Zinthu Zakuthupi: SiC ndi yopanda mankhwala komanso yamphamvu pamakina, yabwino kwambiri yogwiritsidwa ntchito molimbika.

Ubwino uwu umapangitsa SiC Epitaxial Wafer kukhala chinthu chosankhidwa kwambiri kwa mibadwo yotsatira ya ma semiconductors.

Mafunso Ofunsidwa Kawirikawiri: SiC Epitaxial Wafer

Q1: Kodi pali kusiyana kotani pakati pa SiC wafer ndi SiC Epitaxial Wafer?
Wafer wa SiC umatanthauza gawo lofunika kwambiri, pomwe Wafer wa SiC Epitaxial umaphatikizapo gawo lopangidwa mwapadera lomwe limagwiritsidwa ntchito popanga zipangizo.

Q2: Ndi makulidwe otani omwe alipo pa zigawo za SiC Epitaxial Wafer?
Ma layers a Epitaxial nthawi zambiri amakhala kuyambira ma micrometer ochepa mpaka kupitirira 100 μm, kutengera zomwe zimagwiritsidwa ntchito.

Q3: Kodi SiC Epitaxial Wafer ndi yoyenera malo otentha kwambiri?
Inde, SiC Epitaxial Wafer imatha kugwira ntchito pamalo otentha kuposa 600°C, zomwe zimapangitsa kuti silicon ikhale yabwino kwambiri.

Q4: Nchifukwa chiyani kuchuluka kwa zolakwika ndikofunikira mu SiC Epitaxial Wafer?
Kuchuluka kwa chilema chochepa kumathandizira kuti chipangizocho chigwire ntchito bwino komanso chizigwira bwino ntchito, makamaka pakugwiritsa ntchito magetsi amphamvu.

Q5: Kodi ma Wafer a mtundu wa N ndi P-type SiC Epitaxial akupezeka?
Inde, mitundu yonse iwiri imapangidwa pogwiritsa ntchito njira yolondola yowongolera mpweya wa dopant panthawi ya epitaxial.

Q6: Ndi kukula kotani kwa wafer komwe kuli koyenera kwa SiC Epitaxial Wafer?
Ma diameter wamba amaphatikizapo mainchesi awiri, mainchesi anayi, mainchesi asanu ndi limodzi, ndi mainchesi asanu ndi limodzi (8) kuti apange zinthu zambiri.

Q7: Kodi SiC Epitaxial Wafer imakhudza bwanji mtengo ndi magwiridwe antchito?
Ngakhale poyamba zimakhala zodula kuposa silicon, SiC Epitaxial Wafer imachepetsa kukula kwa makina ndi kutayika kwa mphamvu, zomwe zimapangitsa kuti ndalama zonse zigwiritsidwe ntchito bwino pakapita nthawi.

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