SiC ceramic tray plate graphite yokhala ndi CVD SiC covering ya zida

Zida za silicon carbide sizigwiritsidwa ntchito pokhapokha pa gawo lochepa loyika filimu, monga epitaxy kapena MOCVD, kapena pokonza wafer, pomwe ma tray onyamula wafer a MOCVD amayamba kuyikidwa pamalo oyikamo, motero amalimbana kwambiri ndi kutentha ndi dzimbiri. Zonyamula zophimbidwa ndi SiC zimakhalanso ndi kutentha kwambiri komanso zimakhala ndi mphamvu yabwino kwambiri yogawa kutentha.

Zonyamulira za Pure Chemical Vapor Deposition Silicon Carbide (CVD SiC) zotengera zotenthetsera za Metal Organic Chemical Vapor Deposition (MOCVD) zomwe zimagwiritsidwa ntchito kutentha kwambiri.

Zonyamulira za CVD SiC zoyera bwino ndi zapamwamba kwambiri kuposa zonyamulira za wafer zomwe zimagwiritsidwa ntchito pa njirayi, zomwe ndi graphite ndipo zimakutidwa ndi wosanjikiza wa CVD SiC. Zonyamulira za graphite zophimbidwazi sizingathe kupirira kutentha kwakukulu (1100 mpaka 1200 madigiri Celsius) komwe kumafunika kuti GaN ipereke kuwala kwa buluu ndi koyera kwa led masiku ano. Kutentha kwakukulu kumapangitsa kuti chophimbacho chikhale ndi mabowo ang'onoang'ono omwe mankhwala amawononga graphite pansi pake. Tinthu ta graphite timatuluka ndikuipitsa GaN, zomwe zimapangitsa kuti chonyamulira cha wafer chophimbidwacho chilowe m'malo.

CVD SiC ili ndi chiyero cha 99.999% kapena kuposerapo ndipo imakhala ndi mphamvu yoyendetsera kutentha kwambiri komanso mphamvu yolimbana ndi kutentha kwambiri. Chifukwa chake, imatha kupirira kutentha kwambiri komanso malo ovuta kwambiri opangira ma LED owala kwambiri. Ndi chinthu cholimba cha monolithic chomwe chimafika pamlingo wozama, chimapanga tinthu tating'onoting'ono, komanso chimawonetsa kukana dzimbiri komanso kukokoloka kwa nthaka kwambiri. Chidacho chimatha kusintha mawonekedwe ndi mphamvu yoyendetsera popanda kuyika zinyalala zachitsulo. Zonyamulira ma wafer nthawi zambiri zimakhala mainchesi 17 m'mimba mwake ndipo zimatha kusunga ma wafers okwana mainchesi 2-4.