SiC ceramic tray mbale graphite yokhala ndi zokutira za CVD SiC pazida

SiC ceramic tray plate graphite yokhala ndi CVD SiC yokutira pazida Zowonetsedwa

Kufotokozera Kwachidule:

Shanghai Xinkehui New Materials Co., Ltd. imapanga Φ380mm-Φ600mm semiconductor etching disk, wafer bearing disk, tray ya silicon carbide, tray ya SIC, tray ya silicon carbide, tray etching ya ICP, etching tray, silicon carbide purity> 99.9% moyo wautumiki, SIC tray moyo ndi kuwirikiza kanayi thireyi graphite zochokera CVD, ntchito yaitali popanda mapindikidwe, Kugonjetsedwa ndi FH asidi, anaikira H2So4 dzimbiri.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Silicon carbide ceramics samangogwiritsidwa ntchito popanga filimu yopyapyala, monga epitaxy kapena MOCVD, kapena pokonza zophatikizika, pamtima pomwe ma tray onyamulira a MOCVD amayamba kugonjetsedwa ndi malo oyikapo, motero amalimbana kwambiri. kutentha ndi corrosion.SiC- TACHIMATA zonyamulira amakhalanso ndi mkulu matenthedwe madutsidwe ndi makhalidwe abwino matenthedwe kugawa.

Zonyamulira Zoyera za Chemical Vapor Silicon Carbide (CVD SiC) zonyamula kutentha kwambiri kwa Metal Organic Chemical Vapor Deposition (MOCVD).

Koyera CVD SiC zonyamulira zopyapyala ndi apamwamba kwambiri kuposa zonyamulira ochiritsira yopyapyala ntchito ndondomeko imeneyi, amene ndi graphite ndi TACHIMATA ndi wosanjikiza CVD SiC.zonyamulira zokhala ndi graphite zokhala ndi graphite sizingathe kupirira kutentha kwambiri (madigiri 1100 mpaka 1200 Celsius) ofunikira kuti GaN ikhazikike kwa kuwala kwamasiku ano kowoneka bwino kwabuluu ndi koyera.Kutentha kwapamwamba kumapangitsa kuti zokutirazo zikhale ndi timabowo tating'onoting'ono momwe mankhwala amawonongera graphite pansi.Tinthu tating'onoting'ono ta graphite timachoka ndikuipitsa GaN, zomwe zimapangitsa kuti chonyamulira chophimbidwacho chisinthidwe.

CVD SiC ili ndi chiyero cha 99.999% kapena kuposerapo ndipo imakhala ndi matenthedwe apamwamba komanso kukana kwamphamvu kwamafuta.Chifukwa chake, imatha kupirira kutentha kwambiri komanso malo ovuta akupanga kowala kwambiri kwa LED.Ndizinthu zolimba za monolithic zomwe zimafikira kachulukidwe kazinthu, zimatulutsa tinthu tating'onoting'ono, ndipo zimawonetsa dzimbiri komanso kukana kukokoloka.Zinthuzo zimatha kusintha mawonekedwe ndi madutsidwe popanda kuyambitsa zonyansa zachitsulo.Zonyamula zopyapyala zimakhala ndi mainchesi 17 m'mimba mwake ndipo zimatha kunyamula mpaka 40 2-4 inchi zowotcha.