SiC ceramic tray mbale graphite yokhala ndi zokutira za CVD SiC pazida

Silicon carbide ceramics samangogwiritsidwa ntchito mu siteji yowonda kwambiri ya filimu, monga epitaxy kapena MOCVD, kapena muzitsulo zophwanyika, pamtima pomwe ma trays onyamulira a MOCVD amayamba kugonjetsedwa ndi malo osungiramo zinthu, choncho amagonjetsedwa kwambiri ndi kutentha ndi corrosion.

Zonyamulira Zoyera za Chemical Vapor Silicon Carbide (CVD SiC) zonyamula kutentha kwambiri kwa Metal Organic Chemical Vapor Deposition (MOCVD).

Koyera CVD SiC zonyamulira zopyapyala ndi apamwamba kwambiri kuposa zonyamulira ochiritsira yopyapyala ntchito ndondomeko imeneyi, amene ndi graphite ndi TACHIMATA ndi wosanjikiza CVD SiC. zonyamulira zokhala ndi graphite zokhala ndi graphite sizingathe kupirira kutentha kwambiri (madigiri 1100 mpaka 1200 Celsius) ofunikira kuti GaN ikhazikike kwa kuwala kwamasiku ano kowoneka bwino kwabuluu ndi koyera. Kutentha kwapamwamba kumapangitsa kuti zokutirazo zikhale ndi timabowo tating'onoting'ono momwe mankhwala amawonongera graphite pansi. Tinthu tating'ono ta graphite timachoka ndikuyipitsa GaN, zomwe zimapangitsa kuti chonyamulira chophimbidwacho chisinthidwe.

CVD SiC ili ndi chiyero cha 99.999% kapena kuposerapo ndipo imakhala ndi matenthedwe apamwamba komanso kukana kwamphamvu kwamafuta. Chifukwa chake, imatha kupirira kutentha kwambiri komanso malo ovuta akupanga kowala kwambiri kwa LED. Ndizinthu zolimba za monolithic zomwe zimafikira kachulukidwe kazinthu, zimapanga tinthu tating'onoting'ono, ndipo zimawonetsa kutukuka kwakukulu komanso kukana kukokoloka. Zinthuzo zimatha kusintha mawonekedwe ndi madutsidwe popanda kuyambitsa zonyansa zachitsulo. Zonyamula zopyapyala zimakhala ndi mainchesi 17 m'mimba mwake ndipo zimatha kunyamula mpaka 40 2-4 inchi zowotcha.