SiC ceramic plate/thireyi ya chogwirira cha wafer cha mainchesi 4 cha mainchesi 6 cha ICP

Kufotokozera Kwachidule:

Mbale ya SiC ceramic ndi gawo logwira ntchito bwino kwambiri lopangidwa kuchokera ku Silicon Carbide yoyera kwambiri, yopangidwira kugwiritsidwa ntchito m'malo otentha kwambiri, mankhwala, ndi makina. Yodziwika bwino chifukwa cha kuuma kwake kwapadera, kuyendetsa bwino kutentha, komanso kukana dzimbiri, mbale ya SiC imagwiritsidwa ntchito kwambiri ngati chonyamulira, chosungira, kapena gawo lomangira m'mafakitale a semiconductor, LED, photovoltaic, ndi aerospace.

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Mawonekedwe

SiC ceramic plate Chidule

Ndi kutentha kolimba kwambiri mpaka 1600°C komanso kukana bwino mpweya woipa komanso malo ozungulira plasma, mbale ya SiC imatsimikizira kuti imagwira ntchito bwino nthawi zonse poika, kuyika, ndi kufalitsa kutentha kwambiri. Kapangidwe kake kakang'ono, kopanda mabowo kamachepetsa kupanga tinthu tating'onoting'ono, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito moyera kwambiri m'malo osungira vacuum kapena m'chipinda chotsukira.

Kugwiritsa ntchito mbale ya SiC ceramic

1. Kupanga Ma Semiconductor

Ma plate a SiC ceramic amagwiritsidwa ntchito kwambiri ngati zonyamulira ma wafer, ma susceptor, ndi ma pedestal plates mu zida zopangira ma semiconductor monga CVD (Chemical Vapor Deposition), PVD (Physical Vapor Deposition), ndi makina odulira. Kutulutsa kwawo kutentha kwabwino komanso kukulitsa kutentha kochepa kumawathandiza kuti azisunga kutentha kofanana, komwe ndikofunikira kwambiri pakupanga ma wafer molondola kwambiri. Kukana kwa SiC ku mpweya wowononga ndi ma plasma kumatsimikizira kulimba m'malo ovuta, kuthandiza kuchepetsa kuipitsidwa kwa tinthu tating'onoting'ono komanso kukonza zida.

2. Makampani a LED - Kujambula kwa ICP

Mu gawo lopanga ma LED, ma SiC plates ndi zinthu zofunika kwambiri mu makina odulira a ICP (Inductively Coupled Plasma). Amagwira ntchito ngati zogwirira ma wafer, amapereka nsanja yokhazikika komanso yolimba yothandizira ma wafer a safiro kapena GaN panthawi yokonza ma plasma. Kukana kwawo kwabwino kwambiri kwa plasma, kusalala pamwamba, komanso kukhazikika kwa mawonekedwe kumathandiza kuwonetsetsa kuti ma etching ndi ofanana, zomwe zimapangitsa kuti pakhale kukolola kwakukulu komanso magwiridwe antchito a chipangizocho mu ma chips a LED.

3. Mphamvu ya dzuwa (Photovoltaics) ndi mphamvu ya dzuwa

Ma plate a SiC ceramic amagwiritsidwanso ntchito popanga ma cell a dzuwa, makamaka panthawi yotenthetsera kwambiri komanso yonyowa. Kusakhazikika kwawo kutentha kwambiri komanso kuthekera kolimba kuti asagwedezeke kumapangitsa kuti ma wafer a silicon agwiritsidwe ntchito nthawi zonse. Kuphatikiza apo, chiopsezo chawo chochepa cha kuipitsidwa ndikofunikira kuti ma cell a photovoltaic agwire ntchito bwino.

Katundu wa mbale ya SiC ceramic

1. Mphamvu Yapadera ya Makina ndi Kuuma

Ma plate a SiC ceramic ali ndi mphamvu zambiri zamakaniko, ndipo mphamvu yachibadwa yopindika imapitirira 400 MPa ndipo kuuma kwa Vickers kumafika >2000 HV. Izi zimapangitsa kuti azipirira kuwonongeka kwa makina, kusweka, ndi kusinthika, zomwe zimapangitsa kuti ntchito yawo ikhale yayitali ngakhale atakhala ndi katundu wambiri kapena kutentha mobwerezabwereza.

2. Kutentha Kwambiri

SiC ili ndi kutentha kwabwino kwambiri (nthawi zambiri 120–200 W/m·K), zomwe zimapangitsa kuti ifalitse kutentha mofanana pamwamba pake. Kapangidwe kake ndi kofunikira kwambiri pazochitika monga kupukuta, kuyika, kapena kupukuta, komwe kufanana kwa kutentha kumakhudza mwachindunji kuchuluka kwa zinthu ndi ubwino wake.

3. Kukhazikika Kwambiri kwa Kutentha

Ndi malo osungunuka kwambiri (2700°C) komanso kutentha kochepa (4.0 × 10⁻⁶/K), mbale za SiC ceramic zimasunga kulondola kwa mawonekedwe ndi kapangidwe kake pansi pa kutentha ndi kuzizira mwachangu. Izi zimapangitsa kuti zikhale zoyenera kugwiritsidwa ntchito m'zitofu zotentha kwambiri, zipinda zotsukiramo mpweya, ndi malo okhala ndi plasma.

Katundu Waukadaulo
Mndandanda	Chigawo	Mtengo
Dzina la Zinthu		Chisoni Sintered Silicon Carbide	Sintered Silicon Carbide Yopanda Kupanikizika	Kapangidwe ka silicon carbide
Kapangidwe kake		RBSiC	SSiC	R-SiC
Kuchuluka Kwambiri	g/cm3	3	3.15 ± 0.03	2.60-2.70
Mphamvu Yosinthasintha	MPa (kpsi)	338(49)	380(55)	80-90 (20°C) 90-100 (1400°C)
Mphamvu Yokakamiza	MPa (kpsi)	1120(158)	3970(560)	> 600
Kuuma	Knoop	2700	2800	/
Kuswa Kulimba Mtima	MPa m1/2	4.5	4	/
Kutentha kwa Matenthedwe	W/mk	95	120	23
Kuchuluka kwa Kutentha kwa Kutentha	10^-6.1/°C	5	4	4.7
Kutentha Kwapadera	Joule/g 0k	0.8	0.67	/
Kutentha kwakukulu mumlengalenga	℃	1200	1500	1600
Modulus Yotanuka	Gpa	360	410	240

Mafunso ndi Mayankho a SiC ceramic plate

Q: Kodi mbale ya silicon carbide ndi yotani?

A: Ma plate a silicon carbide (SiC) amadziwika ndi mphamvu zawo zapamwamba, kuuma kwawo, komanso kukhazikika kwawo pa kutentha. Amapereka mphamvu yabwino kwambiri yoyendetsera kutentha komanso kukulitsa kutentha pang'ono, zomwe zimapangitsa kuti ntchito ikhale yodalirika pa kutentha kwambiri. SiC ilinso yopanda mankhwala, yolimbana ndi ma acid, alkalis, ndi plasma, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito ndi semiconductor ndi LED. Malo ake okhuthala komanso osalala amachepetsa kupanga tinthu tating'onoting'ono, ndikusunga kuyanjana kwa chipinda choyera. Ma plate a SiC amagwiritsidwa ntchito kwambiri ngati zonyamulira ma wafer, susceptors, ndi zigawo zothandizira m'malo otentha kwambiri komanso owononga m'mafakitale a semiconductor, photovoltaic, ndi aerospace.