SiC Ceramic Fork Arm / End Effector - Kusamalira Mwanzeru Kwambiri kwa Kupanga Semiconductor

SiC Ceramic Fork Arm / End Effector - Kusamalira Mwanzeru Kwambiri kwa Kupanga Ma Semiconductor Chithunzi Chowonetsedwa

Kufotokozera Kwachidule:

SiC Ceramic Fork Arm, yomwe nthawi zambiri imatchedwa Ceramic End Effector, ndi gawo logwira ntchito bwino kwambiri lomwe limapangidwa makamaka kuti lizinyamula, kulumikiza, ndi kuyika zinthu m'mafakitale apamwamba kwambiri, makamaka mkati mwa semiconductor ndi photovoltaic. Chopangidwa pogwiritsa ntchito silicon carbide ceramics yoyera kwambiri, gawoli limaphatikiza mphamvu yapadera yamakina, kukulitsa kutentha kochepa kwambiri, komanso kukana kwambiri kutentha ndi dzimbiri.

Tumizani imelo kwa ife

Mawonekedwe

Chithunzi Chatsatanetsatane

Chidule cha Zamalonda

Mosiyana ndi zida zamakono zopangira zinthu zopangidwa ndi aluminiyamu, chitsulo chosapanga dzimbiri, kapena ngakhale quartz, zida zopangira zinthu zopangidwa ndi ceramic za SiC zimapereka magwiridwe antchito osayerekezeka m'zipinda zotsukira, zipinda zoyera, komanso malo ovuta opangira zinthu, zomwe zimapangitsa kuti zikhale gawo lofunika kwambiri la maloboti ogwiritsira ntchito ma wafer a m'badwo wotsatira. Chifukwa cha kufunikira kwakukulu kwa kupanga zinthu zopanda kuipitsidwa komanso kulekerera kwakukulu popanga ma chip, kugwiritsa ntchito zida zopangira zinthu zopangidwa ndi ceramic kukukhala muyezo wamakampani mwachangu.

Mfundo Yopangira Zinthu

Kupanga kwaZothandizira Mapeto a SiC CeramicImakhala ndi njira zingapo zolondola kwambiri komanso zoyera kwambiri zomwe zimatsimikizira kuti imagwira ntchito bwino komanso kuti izikhala yolimba. Njira ziwiri zazikulu zimagwiritsidwa ntchito nthawi zambiri:

Silicon Carbide Yogwirizana ndi Reaction-Bonded (RB-SiC)

Mu njira iyi, preform yopangidwa kuchokera ku ufa wa silicon carbide ndi binder imalowetsedwa ndi silicon yosungunuka pa kutentha kwakukulu (~1500°C), yomwe imagwirizana ndi kaboni wotsalira kuti ipange SiC-Si composite yolimba komanso yolimba. Njirayi imapereka ulamuliro wabwino kwambiri ndipo ndi yotsika mtengo popanga zinthu zazikulu.

Silikoni Carbide Yopanda Kupanikizika (SSiC)

SSiC imapangidwa pochotsa ufa wa SiC wosalala kwambiri komanso woyera kwambiri pa kutentha kwambiri (>2000°C) popanda kugwiritsa ntchito zowonjezera kapena gawo lomangirira. Izi zimapangitsa kuti ikhale ndi mphamvu pafupifupi 100% komanso mphamvu zapamwamba kwambiri zamagetsi ndi kutentha zomwe zimapezeka pakati pa zipangizo za SiC. Ndi yabwino kwambiri pogwiritsira ntchito ma wafer ofunikira kwambiri.

Kukonza Pambuyo

Kukonza Machining Molondola kwa CNC: Amakwaniritsa kusalala kwambiri komanso kufanana.
Kumaliza Pamwamba: Kupukuta kwa diamondi kumachepetsa kuuma kwa pamwamba kufika pa <0.02 µm.
Kuyendera: Kuyesa kwa Optical interferometry, CMM, ndi mayeso osawononga amagwiritsidwa ntchito kuti atsimikizire chidutswa chilichonse.

Njira izi zikutsimikizira kutiChotsatira cha SiCimapereka kulondola kokhazikika kwa malo osungiramo ma wafer, kulinganika bwino kwambiri, komanso kupanga tinthu tating'onoting'ono kochepa.

Zinthu Zofunika ndi Mapindu

Mbali	Kufotokozera
Kulimba Kwambiri	Kulimba kwa Vickers > 2500 HV, komwe kumaletsa kuwonongeka ndi kusweka.
Kuwonjezeka kwa Kutentha Kochepa	CTE ~4.5×10⁻⁶/K, zomwe zimathandiza kuti kutentha kukhale kokhazikika.
Kusagwira Ntchito kwa Mankhwala	Yolimba ku HF, HCl, mpweya wa plasma, ndi zinthu zina zowononga.
Kukana Kwambiri Kutenthedwa ndi Kutentha	Yoyenera kutentha/kuzizira mwachangu mu makina otayira mpweya ndi uvuni.
Kulimba Kwambiri ndi Mphamvu	Imathandizira manja aatali okhala ndi chidendene popanda kupotoka.
Kutaya mpweya pang'ono	Yabwino kwambiri pa malo okhala ndi vacuum yambiri (UHV).
Chipinda Chotsukira cha ISO Class 1 Chokonzeka	Kugwira ntchito popanda tinthu tating'onoting'ono kumatsimikizira kuti wafer ndi yolimba.

Mapulogalamu

SiC Ceramic Fork Arm / End Effector imagwiritsidwa ntchito kwambiri m'mafakitale omwe amafunikira kulondola kwambiri, ukhondo, komanso kukana mankhwala. Zochitika zazikulu zomwe zimagwiritsidwa ntchito ndi izi:

Kupanga Ma Semiconductor

Kuyika/kutsitsa ma wafer mu malo osungira (CVD, PVD), kupukuta (RIE, DRIE), ndi makina oyeretsera.
Kutumiza kwa robotic wafer pakati pa ma FOUP, makaseti, ndi zida zogwirira ntchito.
Kusamalira kutentha kwambiri panthawi yokonza kapena kuyika kutentha.

Kupanga Maselo a Photovoltaic

Kunyamula kosavuta kwa ma wafers osalimba a silicon kapena ma solar substrates m'mizere yodziyimira yokha.

Makampani Owonetsera Magulu A Flat Panel (FPD)

Kusuntha magalasi akuluakulu kapena zinthu zina m'malo opangira OLED/LCD.

Semiconductor Yophatikizana / MEMS

Amagwiritsidwa ntchito mu mizere yopangira ya GaN, SiC, ndi MEMS komwe kuwongolera kuipitsidwa ndi kulondola kwa malo ndikofunikira.

Udindo wake wothandiza kwambiri ndi wofunikira kwambiri pakuonetsetsa kuti palibe chilema komanso kukhazikika pakugwira ntchito molimbika.

Maluso Osinthira Zinthu Mwamakonda

Timapereka kusintha kwakukulu kuti tikwaniritse zofunikira zosiyanasiyana za zida ndi njira:

Kapangidwe ka Foloko: Mawonekedwe a mano awiri, zala zambiri, kapena magawo ogawanika.
Kukula kwa Wafer Kugwirizana: Ma wafer a 2” mpaka 12”.
Ma interfaces Oyika: Imagwirizana ndi manja a robotic a OEM.
Kukhuthala & Kulekerera Pamwamba: Kusalala kwa micron komanso kuzungulira m'mphepete kulipo.
Zinthu Zoletsa Kutsetsereka: Mawonekedwe kapena zokutira zomwe mungasankhe kuti mugwire bwino wafer.

Chilichonsechothandizira kumapeto kwa ceramicYapangidwa pamodzi ndi makasitomala kuti iwonetsetse kuti ikugwirizana bwino ndi kusintha kochepa kwa zida.

Mafunso Ofunsidwa Kawirikawiri (Mafunso Ofunsidwa Kawirikawiri)

Q1: Kodi SiC ndi yabwino bwanji kuposa quartz pakugwiritsa ntchito mphamvu yomaliza?
A1:Ngakhale kuti quartz imagwiritsidwa ntchito kwambiri chifukwa cha kuyera kwake, ilibe mphamvu yamakina ndipo imatha kusweka mosavuta ikagwedezeka ndi katundu kapena kutentha. SiC imapereka mphamvu yapamwamba, kukana kuwonongeka, komanso kukhazikika kwa kutentha, zomwe zimachepetsa kwambiri chiopsezo cha nthawi yogwira ntchito komanso kuwonongeka kwa wafer.

Q2: Kodi mkono wa ceramic foloko uwu umagwirizana ndi zida zonse zogwirira ma wafer za robotic?
A2:Inde, ma end effector athu a ceramic amagwirizana ndi machitidwe ambiri akuluakulu ogwiritsira ntchito ma wafer ndipo amatha kusinthidwa kuti agwirizane ndi ma robot anu enieni okhala ndi zojambula zolondola zaukadaulo.

Q3: Kodi imatha kugwira ma wafer a 300 mm popanda kupindika?
A3:Inde. Kulimba kwambiri kwa SiC kumalola manja a foloko ngakhale opyapyala komanso ataliatali kuti agwire bwino ma wafer a 300 mm popanda kugwedezeka kapena kupotoka panthawi yoyenda.

Q4: Kodi moyo wanthawi zonse wa SiC ceramic end effector ndi wotani?
A4:Pogwiritsa ntchito bwino, chogwirira ntchito cha SiC chimatha kukhala nthawi yayitali nthawi 5 mpaka 10 kuposa mitundu yachikhalidwe ya quartz kapena aluminiyamu, chifukwa cha kukana kwake kutentha ndi kupsinjika kwa makina.

Q5: Kodi mumapereka ntchito zosinthira kapena zoyeserera mwachangu?
A5:Inde, timathandizira kupanga zitsanzo mwachangu ndipo timapereka ntchito zosinthira kutengera zojambula za CAD kapena zida zosinthidwa kuchokera ku zida zomwe zilipo.

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.