SiC Ceramic Fork Arm / End Effector - Advanced Precision Handling for Semiconductor Manufacturing

Kufotokozera Kwachidule:

SiC Ceramic Fork Arm, yomwe nthawi zambiri imatchedwa Ceramic End Effector, ndi gawo lapamwamba logwira ntchito bwino lomwe limapangidwa kuti liziyendera, kuyanjanitsa, ndikuyika m'mafakitale apamwamba kwambiri, makamaka mkati mwa semiconductor ndi kupanga photovoltaic. Chopangidwa pogwiritsa ntchito zoumba zoyera kwambiri za silicon carbide ceramics, chigawochi chimaphatikiza mphamvu zamakina, kukulitsa kwamafuta otsika kwambiri, komanso kukana kwambiri kugwedezeka kwamafuta ndi dzimbiri.

Titumizireni imelo

Mawonekedwe

Chithunzi chatsatanetsatane

Zowonetsa Zamalonda

Mosiyana ndi zomangira zachikhalidwe zopangidwa kuchokera ku aluminiyamu, chitsulo chosapanga dzimbiri, kapena quartz, SiC ceramic end effectors imapereka magwiridwe antchito osayerekezeka m'zipinda zotsekera, zipinda zoyeretsera, komanso malo opangira zinthu zovuta, zomwe zimawapangitsa kukhala gawo lofunikira kwambiri lamaloboti am'badwo wotsatira. Pakuchulukirachulukira kwazinthu zopanga zopanda kuipitsidwa komanso kulolerana kokulirapo pakupanga chip, kugwiritsa ntchito zida za ceramic kumapeto kwakhala mulingo wamakampani.

Mfundo Yopanga Zinthu

Kupanga kwaSiC Ceramic End Effectsimaphatikizapo ndondomeko zolondola kwambiri, zoyera kwambiri zomwe zimatsimikizira kuti zonse zimagwira ntchito komanso zimakhala zolimba. Njira ziwiri zazikuluzikulu zimagwiritsidwa ntchito:

Rection-Bonded Silicon Carbide (RB-SiC)

Pochita izi, preform yopangidwa kuchokera ku silicon carbide powder ndi binder imalowetsedwa ndi silicon yosungunuka pa kutentha kwakukulu (~ 1500 ° C), yomwe imagwira ndi carbon yotsalira kuti ipange wandiweyani, wosasunthika wa SiC-Si. Njirayi imapereka kuwongolera kwabwino kwambiri ndipo ndiyotsika mtengo pakupanga kwakukulu.

Pressureless Sintered Silicon Carbide (SSiC)

SSiC imapangidwa ndi sintering ultra-fine, high-purity SiC powder pa kutentha kwambiri (> 2000 ° C) popanda kugwiritsa ntchito zowonjezera kapena gawo lomanga. Izi zimapangitsa kuti pakhale chinthu chokhala ndi kachulukidwe pafupifupi 100% komanso makina apamwamba kwambiri komanso matenthedwe omwe amapezeka pakati pa zida za SiC. Ndi yabwino kwa ultra-critical wafer handling applications.

Pambuyo pokonza

Precision CNC Machining: Amakwaniritsa kutsetsereka kwakukulu komanso kufanana.
Kumaliza Pamwamba: Kupukuta kwa diamondi kumachepetsa roughness pamwamba pa <0.02 µm.
Kuyendera: Optical interferometry, CMM, ndi kuyesa kosawononga kumagwiritsidwa ntchito kutsimikizira chidutswa chilichonse.

Njira izi zimatsimikizira kutiSiC mapeto effectorimapereka kuyika kokhazikika kosasinthika, kulinganiza bwino kwambiri, komanso kupanga tinthu tating'ono.

Zofunika Kwambiri ndi Ubwino

Mbali	Kufotokozera
Kuuma Kwambiri Kwambiri	Kuuma kwa Vickers> 2500 HV, kukana kuvala ndi kupukuta.
Kukula Kwamafuta Otsika	CTE ~4.5×10⁻⁶/K, kupangitsa kukhazikika kwapang'onopang'ono pakutentha.
Chemical Inertness	Kugonjetsedwa ndi HF, HCl, mpweya wa plasma, ndi zina zowononga.
Kukaniza Kwabwino Kwambiri kwa Thermal Shock	Yoyenera kutentha / kuziziritsa mwachangu mu vacuum ndi ng'anjo yamoto.
Kukhazikika Kwambiri ndi Mphamvu	Imathandizira mikono yayitali ya cantilevered foloko popanda kupotoza.
Kuthamangitsidwa Kwambiri	Ndi abwino kwa madera a Ultra-high vacuum (UHV).
ISO Class 1 Malo Oyeretsa Okonzeka	Kuchita popanda tinthu kumatsimikizira kukhulupirika kwa wafer.

Mapulogalamu

SiC Ceramic Fork Arm / End Effector imagwiritsidwa ntchito kwambiri m'mafakitale omwe amafunikira kulondola kwambiri, ukhondo, komanso kukana mankhwala. Zochitika zazikulu zogwiritsira ntchito ndizo:

Kupanga Semiconductor

Kutsitsa / kutsitsa kwa Wafer poyika (CVD, PVD), etching (RIE, DRIE), ndi makina oyeretsera.
Mayendedwe a robotic wafer pakati pa FOUPs, makaseti, ndi zida zopangira.
Kusamalira kutentha kwambiri panthawi yotentha kapena kutenthetsa.

Kupanga Ma cell a Photovoltaic

Kuyenda kosasunthika kwa zowotcha za silicon zosalimba kapena magawo adzuwa m'mizere yodzichitira.

Flat Panel Display (FPD) Viwanda

Kusuntha magalasi akulu akulu kapena magawo m'malo opanga OLED / LCD.

Compound Semiconductor / MEMS

Amagwiritsidwa ntchito mumizere yopangira GaN, SiC, ndi MEMS pomwe kuwongolera kuipitsidwa ndi kulondola kwa malo ndikofunikira.

Ntchito yake yomaliza ndiyofunikira kwambiri pakuwonetsetsa kuti kasamalidwe kopanda chilema, kokhazikika pakachitika zovuta.

Makonda Makonda

Timapereka makonda ambiri kuti tikwaniritse zida zosiyanasiyana komanso zofunikira pakukonza:

Fork Design: Masanjidwe a ma prong awiri, a zala zambiri, kapena agawidwe.
Wafer Size Kugwirizana: Kuchokera 2 "mpaka 12" zophika.
Mounting Interfaces: N'zogwirizana ndi OEM robotic mikono.
Makulidwe & Pamwamba Kulekerera: Kutsika kwapang'onopang'ono kwa Micron ndi kuzungulira m'mphepete kulipo.
Zotsutsana ndi Slip: Mapangidwe apamwamba kapena zokutira kuti mugwire motetezeka.

Aliyenseceramic end effectoramapangidwa mogwirizana ndi makasitomala kuti awonetsetse kuti ali oyenera komanso kusintha kochepa kwa zida.

Mafunso Ofunsidwa Kawirikawiri (FAQ)

Q1: Kodi SiC ili bwino bwanji kuposa quartz pakugwiritsa ntchito komaliza?
A1:Ngakhale kuti quartz imagwiritsidwa ntchito kwambiri kuti ikhale yoyera, ilibe mphamvu zamakina ndipo imakonda kusweka chifukwa cha katundu kapena kutentha. SiC imapereka mphamvu zapamwamba, kukana kuvala, komanso kukhazikika kwamafuta, kuchepetsa kwambiri chiwopsezo cha nthawi yopumira komanso kuwonongeka kwa mawafa.

Q2: Kodi mkono wa foloko wa ceramic uwu umagwirizana ndi ma robotic wafer wafer?
A2:Inde, zida zathu zomaliza za ceramic zimagwirizana ndi makina ambiri opangira mawafa ndipo amatha kusinthidwa kuti agwirizane ndi mitundu yanu ya robotic yokhala ndi zojambula zolondola zaukadaulo.

Q3: Kodi imatha kunyamula zopyapyala za 300 mm popanda kupindika?
A3:Mwamtheradi. Kukhazikika kwakukulu kwa SiC kumalola ngakhale mikono yopyapyala, yayitali ya foloko kuti igwire 300 mm wafer mosatekeseka kapena kupatuka panthawi yoyenda.

Q4: Kodi moyo wantchito wa SiC ceramic end effector ndi wotani?
A4:Pogwiritsa ntchito moyenera, chomaliza cha SiC chimatha kukhala nthawi yayitali 5 mpaka 10 kuposa mitundu yachikhalidwe ya quartz kapena aluminiyamu, chifukwa chokana kwambiri kupsinjika kwamafuta ndi makina.

Q5: Kodi mumapereka zosintha kapena ntchito zowonera mwachangu?
A5:Inde, timathandizira kupanga zitsanzo mwachangu ndikupereka ntchito zosinthira kutengera zojambula za CAD kapena magawo osinthika kuchokera ku zida zomwe zilipo kale.

Zambiri zaife

XKH imagwira ntchito mwaukadaulo wapamwamba kwambiri, kupanga, ndi kugulitsa magalasi apadera owoneka bwino ndi zida zatsopano za kristalo. Zogulitsa zathu zimagwiritsa ntchito zamagetsi zamagetsi, zamagetsi zamagetsi, komanso zankhondo. Timapereka zida zowoneka bwino za Sapphire, zovundikira ma lens amafoni, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi zowotcha za semiconductor crystal. Ndi ukadaulo waluso komanso zida zotsogola, timachita bwino kwambiri pakukonza zinthu zomwe sizili muyeso, tikufuna kukhala bizinesi yotsogola yaukadaulo wa optoelectronic.