SiC ceramic end effector yopereka mkono wonyamula mkate

SiC ceramic end effector yopereka mkono wa wafer wonyamula Chithunzi Chowonetsedwa

Kufotokozera Kwachidule:

LiNbO₃ Wafers amayimira mulingo wa golide muzojambula zophatikizika ndi ma acoustics olondola, opereka magwiridwe antchito osayerekezeka pamakina amakono a optoelectronic. Monga opanga otsogola, takwaniritsa luso lopanga magawo opangidwa ndi makinawa kudzera munjira zotsogola zoyendetsera nthunzi, ndikukwaniritsa ungwiro wotsogola wa kristalo wokhala ndi vuto lochepera 50/cm².

Kuthekera kopanga kwa XKH kumatalika kuyambira 75mm mpaka 150mm, ndikuwongolera kolondola (X/Y/Z-cut ± 0.3°) ndi njira zapadera za doping kuphatikiza zinthu zapadziko lapansi zomwe sizipezeka. Kuphatikizika kwapadera kwa katundu mu LiNbO₃ Wafers - kuphatikiza r₃₃ coefficient (32±2 pm/V) komanso kuwonekera kwakukulu kuchokera pafupi ndi UV mpaka pakati pa IR - zimawapangitsa kukhala ofunikira kwambiri pamawonekedwe am'badwo wotsatira ndi zida zomvekera kwambiri.

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SiC ceramic end effector Abstract

SiC (Silicon Carbide) ceramic end-effector ndi gawo lofunikira kwambiri pamakina opangira mawafa olondola kwambiri omwe amagwiritsidwa ntchito popanga semiconductor komanso malo apamwamba opangira ma microfabrication. Wopangidwa kuti akwaniritse zofunikira zamalo oyera kwambiri, otentha kwambiri, komanso okhazikika, chomaliza chapaderachi chimatsimikizira kusuntha kodalirika komanso kopanda kuipitsidwa kwa mawafa pamiyeso yayikulu yopanga monga lithography, etching, ndi deposition.

Kugwiritsa ntchito zinthu zapamwamba za silicon carbide-monga kutenthetsa kwambiri, kuuma kwambiri, kusakhazikika kwamphamvu kwamankhwala, komanso kukulitsa pang'ono kwamafuta - SiC ceramic end-effector imapereka kuuma kwamakina kosayerekezeka komanso kukhazikika kwapang'onopang'ono ngakhale pakuyenda mwachangu kapena m'zipinda zowononga. Kapangidwe kake kakang'ono ka tinthu tating'ono komanso kukana kwa plasma kumapangitsa kuti ikhale yoyenera kwambiri pakuyeretsa zipinda zoyeretsera ndi vacuum, pomwe kusunga umphumphu wa pamwamba ndikuchepetsa kuipitsidwa kwa tinthu ndikofunikira kwambiri.

SiC ceramic end effector Application

1. Semiconductor Wafer Kusamalira

SiC ceramic end effectors imagwiritsidwa ntchito kwambiri mumakampani a semiconductor pogwira zowotcha za silicon panthawi yopanga makina. Zothandizira zomalizazi nthawi zambiri zimayikidwa pamakina a robotic kapena makina osamutsira vacuum ndipo amapangidwa kuti azitha kukhala ndi mawafa osiyanasiyana monga 200mm ndi 300mm. Ndiwofunikira munjira kuphatikiza Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), etching, ndi diffusion - komwe kutentha kwambiri, vacuum, ndi mpweya wowononga ndizofala. Kusasunthika kwapadera kwa SiC ndi kukhazikika kwamankhwala kumapangitsa kuti ikhale chinthu choyenera kupirira malo ovuta otere popanda kuwonongeka.

2. Chipinda Choyeretsa ndi Kugwirizana kwa Vacuum

M'zipinda zoyeretsa ndi zotsekera, pomwe kuipitsidwa kwa tinthu kuyenera kuchepetsedwa, zoumba za SiC zimapereka zabwino zambiri. Zowundana komanso zosalala za zinthuzo zimakana kupanga tinthu ting'onoting'ono, zomwe zimathandiza kusunga umphumphu wa ng'ombe panthawi yoyendetsa. Izi zimapangitsa kuti omaliza a SiC akhale oyenerera kwambiri pamachitidwe ovuta monga Extreme Ultraviolet Lithography (EUV) ndi Atomic Layer Deposition (ALD), pomwe ukhondo ndi wofunikira. Kuphatikiza apo, kutsika pang'ono kwa SiC komanso kukana kwambiri kwa plasma kumatsimikizira kugwira ntchito modalirika m'zipinda zotsekera, kukulitsa moyo wa zida ndikuchepetsa pafupipafupi kukonza.

3. High-Precision Positioning Systems

Kulondola komanso kukhazikika ndikofunikira pamakina apamwamba kwambiri opangira mawafa, makamaka muzochita zama metrology, kuyang'anira, ndi zida zoyendera. Makamera a SiC ali ndi gawo lotsika kwambiri la kukula kwamafuta komanso kuuma kwakukulu, zomwe zimalola kuti chomalizacho chizisunga zolondola pamapangidwe ake ngakhale pansi pa njinga yamoto kapena katundu wamakina. Izi zimawonetsetsa kuti ma wafers amakhalabe ogwirizana bwino panthawi yoyendetsa, kuchepetsa chiopsezo cha ma micro-scratches, kusalinganika molakwika, kapena zolakwika zoyezera - zinthu zomwe zikuchulukirachulukira pa sub-5nm process node.

SiC ceramic end effector Properties

1. Mphamvu Yapamwamba Yamakina ndi Kuuma

Makatani a SiC ali ndi mphamvu zamakina zapadera, zokhala ndi mphamvu zosunthika nthawi zambiri zopitilira 400 MPa ndi Vickers kuuma kopitilira 2000 HV. Izi zimawapangitsa kukhala osagwirizana kwambiri ndi kupsinjika kwamakina, kukhudzidwa, komanso kuvala, ngakhale atagwiritsa ntchito nthawi yayitali. Kukhazikika kwakukulu kwa SiC kumachepetsanso kupatuka pakasamutsidwa kothamanga kwambiri, kuwonetsetsa kukhazikika kolondola komanso kobwerezabwereza.

2. Kukhazikika Kwabwino Kwambiri kwa Thermal

Chimodzi mwazinthu zamtengo wapatali kwambiri za ceramics za SiC ndikutha kupirira kutentha kwambiri - nthawi zambiri mpaka 1600 ° C m'malo opanda mpweya - osataya umphumphu wamakina. Kutsika kwawo kocheperako pakukulitsa kwamafuta (~4.0 x 10⁻⁶ /K) kumatsimikizira kukhazikika kwapang'onopang'ono panjinga yotentha, kuwapangitsa kukhala abwino kwa mapulogalamu monga CVD, PVD, ndi kutentha kwambiri.

SiC ceramic end effector Q&A

Q: Ndi zinthu ziti zomwe zimagwiritsidwa ntchito mu wafer end effector?

A:Wafer end effectors nthawi zambiri amapangidwa kuchokera kuzinthu zomwe zimapereka mphamvu zambiri, kukhazikika kwamafuta, komanso kupanga tinthu tating'ono. Mwa izi, Silicon Carbide (SiC) ceramic ndi imodzi mwazinthu zapamwamba kwambiri komanso zokondedwa. Zoumba za SiC ndizolimba kwambiri, zokhazikika pakutentha, zoziziritsa kukhosi, komanso zosamva kuvala, zomwe zimawapangitsa kukhala abwino kunyamula zowotcha za silicon m'zipinda zoyera komanso zotsekera. Poyerekeza ndi zitsulo za quartz kapena zokutira, SiC imapereka kukhazikika kwapamwamba kwambiri pansi pa kutentha kwakukulu ndipo sikukhetsa tinthu tating'ono, zomwe zimathandiza kupewa kuipitsidwa.