Chophimba cha Sapphire Chopangidwa ndi Ma Patterned PSS 2inch 4inch 6inch ICP dry etching chingagwiritsidwe ntchito pa ma LED chips
Khalidwe lapakati
1. Makhalidwe a zinthu: Chipangizo cha pansi pake ndi safiro imodzi ya kristalo (Al₂O₃), yokhala ndi kuuma kwakukulu, kukana kutentha kwambiri komanso kukhazikika kwa mankhwala.
2. Kapangidwe ka pamwamba: Pamwamba pake pamapangidwa ndi photolithography ndikujambula m'mapangidwe ang'onoang'ono a nano, monga ma cone, ma piramidi kapena ma hexagonal arrays.
3. Kugwira ntchito kwa kuwala: Kudzera mu kapangidwe ka mapangidwe a pamwamba, kuwala konse komwe kumawunikira kumachepa, ndipo mphamvu yotulutsa kuwala imawonjezeka.
4. Kugwira ntchito kwa kutentha: Chophimba cha safiro chili ndi kutentha kwabwino kwambiri, choyenera kugwiritsidwa ntchito ndi LED yamphamvu kwambiri.
5. Mafotokozedwe a kukula: Kukula kofanana ndi mainchesi awiri (50.8mm), mainchesi anayi (100mm) ndi mainchesi 6 (150mm).
Madera akuluakulu ogwiritsira ntchito
1. Kupanga kwa LED:
Kuwongolera bwino kwa kutulutsa kuwala: PSS imachepetsa kutayika kwa kuwala kudzera mu kapangidwe ka mapangidwe, ndikuwonjezera kwambiri kuwala kwa LED ndi magwiridwe antchito owunikira.
Kukula kwa epitaxial kowonjezereka: Kapangidwe kameneka kamapereka maziko abwino okulira a zigawo za epitaxial za GaN ndipo kumawongolera magwiridwe antchito a LED.
2. Laser Diode (LD):
Ma laser amphamvu kwambiri: Kuthamanga kwa kutentha kwambiri komanso kukhazikika kwa PSS ndizoyenera ma diode amphamvu kwambiri a laser, zomwe zimapangitsa kuti kutentha kusamayende bwino komanso kudalirika.
Mphamvu yamagetsi yotsika: Konzani kukula kwa epitaxial, chepetsani mphamvu yamagetsi ya laser diode, ndikuwonjezera magwiridwe antchito.
3. Chowunikira zithunzi:
Kuzindikira Kwambiri: Kutumiza kuwala kwambiri komanso kuchuluka kochepa kwa PSS kumapangitsa kuti chipangizo chowunikira zithunzi chizimva bwino komanso kuti chizimva bwino.
Yankho la wide spectral: loyenera kuzindikira kuwala kwa dzuwa mu ultraviolet mpaka kuwonekera.
4. Zamagetsi zamagetsi:
Kukana kwa magetsi amphamvu: Kuteteza kutentha kwambiri kwa Sapphire komanso kukhazikika kwa kutentha ndizoyenera zida zamagetsi amphamvu amphamvu kwambiri.
Kutaya kutentha bwino: Kutentha kwambiri kumathandiza kuti zipangizo zamagetsi zizitaya kutentha bwino komanso zimawonjezera nthawi yogwira ntchito.
5. Zipangizo za Rf:
Kuchita bwino kwa ma frequency: Kutayika kochepa kwa dielectric ndi kukhazikika kwakukulu kwa kutentha kwa PSS ndizoyenera zida za RF zama frequency ambiri.
Phokoso lochepa: Kusalala kwambiri komanso kufooka kochepa kumachepetsa phokoso la chipangizocho ndikuwonjezera ubwino wa chizindikiro.
6. Zosensa za Biosensor:
Kuzindikira kukhudzidwa kwakukulu: Kutumiza kuwala kwakukulu komanso kukhazikika kwa mankhwala a PSS ndizoyenera ma biosensors okhala ndi kukhudzidwa kwakukulu.
Kugwirizana kwa zinthu zachilengedwe: Kugwirizana kwa safiro kumapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito kuchipatala komanso pofufuza zinthu zachilengedwe.
Chopangidwa ndi miyala ya safiro (PSS) yokhala ndi zinthu za GaN epitaxial:
Chitsulo cha safiro chokhala ndi mapatani (PSS) ndi chinthu chabwino kwambiri pakukula kwa epitaxial ya GaN (gallium nitride). Chitsulo cha safiro chili pafupi ndi GaN, chomwe chingachepetse kusalingana kwa lattice ndi zolakwika pakukula kwa epitaxial. Kapangidwe ka micro-nano ka pamwamba pa PSS sikuti kamangowonjezera mphamvu yotulutsa kuwala, komanso kumawonjezera khalidwe la kristalo la GaN epitaxial layer, motero kumawonjezera magwiridwe antchito ndi kudalirika kwa LED.
Magawo aukadaulo
| Chinthu | Choyikapo cha Sapphire Chopangidwa ndi Mapatani (2 ~ 6inch) | ||
| M'mimba mwake | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| Kukhuthala | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Kuyang'ana Pamwamba | C-plane (0001) yopingasa kulowera ku M-axis (10-10) 0.2 ± 0.1° | ||
| C-plane (0001) yopingasa mbali yolunjika ku A-axis (11-20) 0 ± 0.1° | |||
| Kuyang'ana Kwambiri Pang'onopang'ono | Ndege ya A (11-20) ± 1.0° | ||
| Utali Woyamba Wathyathyathya | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| R-Ndege | 9 koloko | ||
| Kumaliza Kutsogolo | Yopangidwa ndi Mapatani | ||
| Kumaliza Kumbuyo | SSP: Yosalala bwino, Ra=0.8-1.2um; DSP: Yopukutidwa ndi Epi, Ra<0.3nm | ||
| Chizindikiro cha Laser | Mbali yakumbuyo | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| UTA | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Kupatula Mphepete | ≤2 mm | ||
| Mafotokozedwe a Kapangidwe | Kapangidwe ka Mawonekedwe | Dome, Koni, Piramidi | |
| Kutalika kwa Chitsanzo | 1.6 ~ 1.8μm | ||
| Chidutswa cha Chitsanzo | 2.75~2.85μm | ||
| Malo Opangira Mapatani | 0.1 ~ 0.3μm | ||
XKH imagwira ntchito yopereka zinthu zapamwamba za safiro (PSS) zokhala ndi mapangidwe apamwamba komanso chithandizo chaukadaulo komanso ntchito yogulitsa pambuyo pogulitsa kuti ithandize makasitomala kupeza luso lochita bwino pantchito ya LED, chiwonetsero ndi zamagetsi.
1. PSS yapamwamba kwambiri: Ma substrates a safiro okhala ndi mapangidwe osiyanasiyana a kukula (2 ", 4", 6 ") kuti akwaniritse zosowa za LED, zida zowonetsera ndi zamagetsi.
2. Kapangidwe Koyenera: Sinthani kapangidwe ka pamwamba ka micro-nano (monga cone, piramidi kapena hexagonal array) malinga ndi zosowa za makasitomala kuti muwongolere bwino ntchito yotulutsa kuwala.
3. Thandizo laukadaulo: Perekani kapangidwe ka mapulogalamu a PSS, kukonza njira ndi upangiri waukadaulo kuti muthandize makasitomala kukonza magwiridwe antchito azinthu.
4. Thandizo la kukula kwa Epitaxial: PSS yogwirizana ndi zinthu za GaN epitaxial zimaperekedwa kuti zitsimikizire kukula kwa epitaxial layer yapamwamba kwambiri.
5. Kuyesa ndi kutsimikizira: Perekani lipoti lowunikira khalidwe la PSS kuti muwonetsetse kuti zinthuzo zikugwirizana ndi miyezo yamakampani.
Chithunzi Chatsatanetsatane
