Mtundu wa Sapphire Substrate PSS 2inch 4inch 6inch ICP dry etching angagwiritsidwe ntchito tchipisi ta LED
Khalidwe lalikulu
1. Makhalidwe a zinthu: Gawo laling'ono ndi safiro imodzi ya crystal (Al₂O₃), yokhala ndi kuuma kwakukulu, kukana kutentha kwakukulu ndi kukhazikika kwa mankhwala.
2. Mapangidwe apamwamba: Pamwamba pake amapangidwa ndi photolithography ndikuyika muzinthu zazing'ono zazing'ono, monga cones, piramidi kapena hexagonal arrays.
3. Mawonekedwe a kuwala: Kupyolera mu kapangidwe kake kapamwamba, kuwonetsetsa kwathunthu kwa kuwala pamawonekedwe kumachepetsedwa, ndipo kuwala kotulutsa kuwala kumakhala bwino.
4. Kutentha kwamafuta: Gawo la safiro lili ndi matenthedwe abwino kwambiri, oyenera kugwiritsa ntchito magetsi a LED.
5. Kukula kwake: Miyeso yodziwika bwino ndi mainchesi awiri (50.8mm), mainchesi 4 (100mm) ndi mainchesi 6 (150mm).
Magawo ofunsira kwambiri
1. Kupanga kwa LED:
Kuwongolera bwino pakuchotsa kuwala: PSS imachepetsa kutayika kwa kuwala kudzera mu kapangidwe kake, kuwongolera kwambiri kuwala kwa LED komanso kuwala kowala.
Kupititsa patsogolo khalidwe la kukula kwa epitaxial: Mapangidwe apangidwe amapereka maziko abwino a kukula kwa zigawo za epitaxial za GaN ndikuwongolera magwiridwe antchito a LED.
2. Laser Diode (LD) :
Ma lasers amphamvu kwambiri: Kutentha kwapamwamba komanso kukhazikika kwa PSS ndi koyenera ma diode amphamvu a laser, kuwongolera magwiridwe antchito komanso kudalirika.
Kutsika kwapano: Konzani kukula kwa epitaxial, chepetsa malire a laser diode, ndikuwongolera magwiridwe antchito.
3. Photodetector:
Kumverera kwakukulu: Kutulutsa kwapamwamba kwambiri komanso kuchepa kwapang'onopang'ono kwa PSS kumakulitsa chidwi komanso liwiro la kuyankha kwa photodetector.
Kuyankha kowoneka bwino: koyenera kuzindikirika ndi ma photoelectric mu ultraviolet kuti muwoneke.
4. Zamagetsi zamagetsi:
Kukana kwamagetsi apamwamba: Kutentha kwambiri kwa safiro komanso kukhazikika kwamafuta ndikoyenera pazida zamagetsi zamagetsi.
Kutentha koyenera: Kutentha kwapamwamba kumapangitsa kuti zipangizo zamagetsi ziwonongeke komanso zimatalikitsa moyo wautumiki.
5. Zipangizo za Rf:
Kuchita pafupipafupi: Kutayika kwa dielectric kochepa komanso kukhazikika kwamafuta ambiri a PSS ndikoyenera pazida zapamwamba za RF.
Phokoso lotsika: Kutsika kwambiri komanso kusasunthika kocheperako kumachepetsa phokoso la chipangizocho ndikuwongolera mawonekedwe azizindikiro.
6. Ma biosensor:
Kuzindikira kwamphamvu kwambiri: Kutulutsa kwapamwamba kwambiri komanso kukhazikika kwamankhwala kwa PSS ndizoyenera ma biosensors apamwamba kwambiri.
Biocompatibility: The biocompatibility ya safiro imapangitsa kuti ikhale yoyenera kugwiritsa ntchito zamankhwala ndi biodetection.
Mtundu wa safiro (PSS) wokhala ndi zida za GaN epitaxial:
Pattered safire substrate (PSS) ndi gawo labwino kwambiri la GaN (gallium nitride) epitaxial kukula. Lattice yokhazikika ya safiro ili pafupi ndi GaN, yomwe imatha kuchepetsa kusagwirizana kwa latisi ndi kuwonongeka kwa kukula kwa epitaxial. Mawonekedwe a micro-nano a PSS pamwamba amangowonjezera kuwala kwa kuwala, komanso kumapangitsanso khalidwe la kristalo la GaN epitaxial layer, potero kumapangitsa kuti LED ikhale yodalirika komanso yodalirika.
Zosintha zaukadaulo
| Kanthu | Gawo Lapansi la safiro (2~6inch) | ||
| Diameter | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| Makulidwe | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Kuzungulira Pamwamba | C-ndege (0001) kumbali yolowera ku M-axis (10-10) 0.2 ± 0.1° | ||
| C-ndege (0001) kumbali yolowera ku A-axis (11-20) 0 ± 0.1° | |||
| Chiyambi cha Flat Orientation | A-Ndege (11-20) ± 1.0 ° | ||
| Utali Woyambira Wathyathyathya | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| R-Ndege | 9-o'clock | ||
| Front Surface Finish | Zopangidwa | ||
| Back Surface Finish | SSP: Malo abwino, Ra = 0.8-1.2um; DSP: Epi-opukutidwa, Ra<0.3nm | ||
| Laser Mark | Mbali yakumbuyo | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| BOW | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Kupatula M'mphepete | ≤2 mm | ||
| Mafotokozedwe a Chitsanzo | Kapangidwe ka Maonekedwe | Dome, Cone, Piramidi | |
| Kutalika kwa Chitsanzo | 1.6-1.8μm | ||
| Chitsanzo Diameter | 2.75 ~ 2.85μm | ||
| Chitsanzo Space | 0.1 ~ 0.3μm | ||
XKH imagwira ntchito popereka magawo apamwamba kwambiri a safiro (PSS) omwe ali ndi chithandizo chaukadaulo komanso ntchito yogulitsa pambuyo pogulitsa kuti athandize makasitomala kupeza luso laukadaulo pagawo la LED, mawonedwe ndi ma optoelectronics.
1. Kupereka kwapamwamba kwa PSS: Magawo a safiro opangidwa ndi mawonekedwe osiyanasiyana (2 ", 4 ", 6 ") kuti akwaniritse zosowa za LED, zowonetsera ndi optoelectronic zipangizo.
2. Mapangidwe opangidwa mwamakonda: Sinthani mawonekedwe amtundu wa micro-nano (monga cone, piramidi kapena hexagonal array) malinga ndi zosowa za kasitomala kuti muwonjezere kuwala kwa m'zigawo.
3. Thandizo laukadaulo: Perekani mapangidwe a mapulogalamu a PSS, kukhathamiritsa kwa ndondomeko ndi kukambirana ndi luso kuti athandize makasitomala kupititsa patsogolo ntchito ya malonda.
4. Thandizo la kukula kwa Epitaxial: PSS yofanana ndi zinthu za GaN epitaxial zimaperekedwa kuti zitsimikizire kukula kwapamwamba kwa epitaxial layer.
5. Kuyesa ndi certification: Perekani lipoti loyang'anira khalidwe la PSS kuti muwonetsetse kuti malonda akukwaniritsa miyezo yamakampani.
Chithunzi chatsatanetsatane
