Ma Substrates a Semiconductor a M'badwo Wotsatira: Sapphire, Silicon, ndi Silicon Carbide

Mu makampani opanga ma semiconductor, ma substrate ndi maziko omwe magwiridwe antchito a chipangizocho amadalira. Kapangidwe kake ka thupi, kutentha, ndi magetsi kumakhudza mwachindunji magwiridwe antchito, kudalirika, ndi kuchuluka kwa ntchito. Pakati pa zosankha zonse, safiro (Al₂O₃), silicon (Si), ndi silicon carbide (SiC) akhala ma substrate omwe amagwiritsidwa ntchito kwambiri, iliyonse imachita bwino kwambiri m'magawo osiyanasiyana aukadaulo. Nkhaniyi ikufotokoza za mawonekedwe awo azinthu, malo ogwiritsira ntchito, ndi zomwe zikuchitika mtsogolo.

Safira: Kavalo Wogwira Ntchito Wowoneka

Sapphire ndi mtundu umodzi wa aluminiyamu oxide wokhala ndi galasi limodzi wokhala ndi lattice ya hexagonal. Makhalidwe ake ofunikira ndi monga kuuma kwapadera (kuuma kwa Mohs 9), kuwonekera bwino kwa kuwala kuchokera ku ultraviolet kupita ku infrared, komanso kukana kwamphamvu kwa mankhwala, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsa ntchito zida zamagetsi komanso malo ovuta. Njira zamakono zokulira monga Heat Exchange Method ndi Kyropoulos method, kuphatikiza ndi chemical-mechanical polishing (CMP), zimapanga ma wafers okhala ndi sub-nanometer surface roughness.

Ma substrate a safiro amagwiritsidwa ntchito kwambiri mu ma LED ndi ma Micro-LED monga zigawo za GaN epitaxial, pomwe zigawo za safiro zokhala ndi mapatani (PSS) zimathandizira kuti kuwala kugwire bwino ntchito. Amagwiritsidwanso ntchito mu zipangizo za RF zama frequency chifukwa cha mphamvu zawo zamagetsi, komanso muzinthu zamagetsi ndi zogwiritsa ntchito mumlengalenga monga mawindo oteteza ndi zophimba masensa. Zoletsa zimaphatikizapo kutentha kochepa (35–42 W/m·K) ndi kusagwirizana kwa lattice ndi GaN, zomwe zimafuna zigawo za buffer kuti zichepetse zolakwika.

Silicon: Maziko a Microelectronics

Silicon ikadali maziko a zamagetsi achikhalidwe chifukwa cha chilengedwe chake chokhwima cha mafakitale, mphamvu zamagetsi zosinthika kudzera mu doping, komanso mphamvu zotenthetsera zocheperako (mphamvu zamagetsi ~150 W/m·K, malo osungunuka 1410°C). Ma circuits opitilira 90%, kuphatikiza ma CPU, zida zokumbukira, ndi logic, amapangidwa pa ma wafers a silicon. Silicon imagwiranso ntchito kwambiri m'ma cell a photovoltaic ndipo imagwiritsidwa ntchito kwambiri m'zida zamagetsi zochepa mpaka zapakati monga ma IGBT ndi ma MOSFET.

Komabe, silicon ikukumana ndi mavuto pakugwiritsa ntchito magetsi amphamvu komanso pafupipafupi chifukwa cha bandgap yake yopapatiza (1.12 eV) komanso bandgap yosalunjika, yomwe imachepetsa mphamvu yotulutsa kuwala.

Silicon Carbide: Wopanga Zinthu Zamphamvu Kwambiri

SiC ndi chipangizo cha semiconductor cha m'badwo wachitatu chomwe chili ndi bandgap yayikulu (3.2 eV), voltage yotsika kwambiri (3 MV/cm), kutentha kwambiri (~490 W/m·K), komanso liwiro la kufalikira kwa ma elekitironi mwachangu (~2×10⁷ cm/s). Makhalidwe amenewa amachipangitsa kukhala choyenera kugwiritsa ntchito zipangizo zamagetsi amphamvu kwambiri, mphamvu zambiri, komanso ma frequency apamwamba. Ma substrates a SiC nthawi zambiri amakula kudzera mu physical vapor transport (PVT) pa kutentha kopitilira 2000°C, ndi zofunikira zovuta komanso zolondola pakukonza.

Mapulogalamuwa akuphatikizapo magalimoto amagetsi, komwe ma SiC MOSFET amathandizira kuti inverter igwire bwino ntchito ndi 5–10%, makina olumikizirana a 5G omwe amagwiritsa ntchito semi-insulating SiC pazida za GaN RF, ndi ma smart grid okhala ndi high-voltage direct current (HVDC) transmission omwe amachepetsa kutayika kwa mphamvu ndi 30%. Zoletsa zake ndi mtengo wokwera (ma wafer a mainchesi 6 ndi okwera mtengo nthawi 20–30 kuposa silicon) komanso zovuta zokonza chifukwa cha kuuma kwambiri.

Maudindo Owonjezera ndi Chiyembekezo Chamtsogolo

Safira, silicon, ndi SiC amapanga zinthu zogwirizana mumakampani opanga ma semiconductor. Safira imalamulira ma optoelectronics, silicon imathandizira ma microelectronics akale komanso zida zamagetsi zochepa mpaka zapakati, ndipo SiC imayang'anira zamagetsi zamagetsi amphamvu kwambiri, ma frequency apamwamba, komanso ogwira ntchito bwino kwambiri.

Zomwe zikuchitika mtsogolomu zikuphatikizapo kukulitsa kugwiritsa ntchito kwa safiro mu ma LED a UV ndi ma micro-LED, zomwe zimathandiza kuti Si-based GaN heteroepitaxy ipititse patsogolo magwiridwe antchito apamwamba, ndikukulitsa kupanga kwa SiC wafer kufika mainchesi 8 ndikuwongolera bwino phindu komanso kugwiritsa ntchito bwino ndalama. Pamodzi, zipangizozi zikuyendetsa zatsopano mu 5G, AI, ndi magetsi, zomwe zikupanga mbadwo wotsatira wa ukadaulo wa semiconductor.