Kodi palinso kusiyana pakugwiritsa ntchito ma wafer a safiro okhala ndi mawonekedwe osiyanasiyana a kristalo?

Safira ndi galasi limodzi la alumina, ndi la dongosolo la kristalo la tripartite, kapangidwe ka hexagonal, kapangidwe kake ka kristalo kamapangidwa ndi maatomu atatu a okosijeni ndi maatomu awiri a aluminiyamu mumtundu wa covalent bond, okonzedwa bwino kwambiri, ndi unyolo wamphamvu womangirira ndi mphamvu ya lattice, pomwe mkati mwake mwa kristalo mulibe zonyansa kapena zolakwika, kotero ili ndi kutchinjiriza kwabwino kwamagetsi, kuwonekera bwino, kutentha bwino komanso mawonekedwe olimba kwambiri. Imagwiritsidwa ntchito kwambiri ngati zenera la kuwala ndi zida zapamwamba kwambiri. Komabe, kapangidwe ka maselo a safiro ndi kovuta ndipo pali anisotropy, ndipo momwe zimakhudzira katundu wofanana ndi thupi ndizosiyana kwambiri pakukonza ndi kugwiritsa ntchito malangizo osiyanasiyana a kristalo, kotero kugwiritsa ntchito nakonso ndikosiyana. Kawirikawiri, magawo a safiro amapezeka mu malangizo a C, R, A ndi M.

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Kugwiritsa ntchitoC-plane safiro wafer

Gallium nitride (GaN) monga semiconductor ya m'badwo wachitatu ya bandgap, ili ndi mpata waukulu wa band band, mgwirizano wamphamvu wa atomiki, kutentha kwakukulu, kukhazikika kwa mankhwala (pafupifupi osawonongeka ndi asidi) komanso mphamvu yamphamvu yolimbana ndi kuwala, ndipo ili ndi mwayi waukulu wogwiritsa ntchito ma optoelectronics, zida zotentha kwambiri komanso zamagetsi komanso zida zama microwave zomwe zimasungunuka pafupipafupi. Komabe, chifukwa cha malo osungunuka kwambiri a GaN, zimakhala zovuta kupeza zinthu zazikulu za kristalo imodzi, kotero njira yodziwika bwino ndiyo kuchita kukula kwa heteroepitaxy pazinthu zina, zomwe zimakhala ndi zofunikira kwambiri pazinthu za substrate.

Poyerekeza ndigawo la safiroNdi nkhope zina za kristalo, kuchuluka kwa kusalingana kwa lattice pakati pa C-plane (<0001> orientation) safiro wafer ndi mafilimu omwe amaikidwa m'magulu Ⅲ-Ⅴ ndi Ⅱ-Ⅵ (monga GaN) ndi kochepa, ndipo kuchuluka kwa kusalingana kwa lattice pakati pa awiriwa ndiMafilimu a AlNChomwe chingagwiritsidwe ntchito ngati gawo la buffer ndi chaching'ono kwambiri, ndipo chimakwaniritsa zofunikira za kukana kutentha kwambiri mu njira ya GaN crystallization. Chifukwa chake, ndi chinthu chofala kwambiri chomwe chimagwiritsidwa ntchito popanga ma LED oyera/abuluu/obiriwira, ma laser diode, zowunikira za infrared ndi zina zotero.

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Ndikoyenera kunena kuti filimu ya GaN yomwe imamera pa C-plane safiro imakula motsatira polar axis yake, kutanthauza kuti, mbali ya C-axis, yomwe si njira yokhwima yokha komanso njira ya epitaxy, mtengo wotsika, mphamvu zokhazikika zakuthupi ndi zamankhwala, komanso magwiridwe antchito abwino. Maatomu a wafer ya safiro yolunjika pa C amalumikizidwa mu dongosolo la O-al-al-o-al-O, pomwe makristalo a safiro olunjika pa M ndi A amalumikizidwa mu al-O-al-O. Chifukwa Al-Al ili ndi mphamvu yocheperako yolumikizira komanso yofooka kuposa Al-O, poyerekeza ndi makristalo a safiro olunjika pa M ndi A, kukonza kwa C-sapphire makamaka ndikutsegula kiyi ya Al-Al, yomwe ndi yosavuta kuikonza, ndipo imatha kupeza mawonekedwe apamwamba, kenako kupeza gallium nitride epitaxial yabwino kwambiri, yomwe ingathandize kukonza bwino LED yoyera/yabuluu yowala kwambiri. Kumbali inayi, mafilimu omwe amakula m'mbali mwa C-axis amakhala ndi zotsatira za polarization ya piezoelectric, zomwe zimapangitsa kuti magetsi azikhala amphamvu mkati mwa mafilimu (active layer quantum Wells), zomwe zimachepetsa kwambiri kuwala kwa mafilimu a GaN.

Wafa wa safiro wa A-planentchito

Chifukwa cha magwiridwe ake abwino kwambiri, makamaka kutumizirana bwino kwambiri, kristalo imodzi ya safiro imatha kukulitsa mphamvu yolowera mu infrared, ndikukhala chinthu chabwino kwambiri cha mawindo apakati pa infrared, chomwe chagwiritsidwa ntchito kwambiri mu zida zamagetsi zankhondo. Kumene safiro ndi ndege ya polar (ndege ya C) yomwe ili mbali ya nkhope, ndi malo osakhala polar. Kawirikawiri, khalidwe la kristalo ya safiro yolunjika ku A ndi labwino kuposa la kristalo yolunjika ku C, yokhala ndi kusuntha kochepa, kapangidwe ka Mosaic kochepa komanso kapangidwe ka kristalo kokwanira, kotero imakhala ndi magwiridwe antchito abwino otumizira kuwala. Nthawi yomweyo, chifukwa cha Al-O-Al-O atomic bonding mode pa ndege a, kuuma ndi kukana kwa kuvulala kwa safiro yolunjika ku A ndi kwakukulu kwambiri kuposa kwa safiro yolunjika ku C. Chifukwa chake, ma chips a A-directional amagwiritsidwa ntchito kwambiri ngati zipangizo za zenera; Kuphatikiza apo, A safiro ilinso ndi mphamvu yofanana ya dielectric komanso kutenthetsa kwambiri, kotero ingagwiritsidwe ntchito paukadaulo wa hybrid microelectronics, komanso pakukula kwa ma conductors abwino kwambiri, monga kugwiritsa ntchito TlBaCaCuO (TbBaCaCuO), Tl-2212, kukula kwa mafilimu osiyanasiyana a epitaxial superconducting pa cerium oxide (CeO2) safiro composite substrate. Komabe, chifukwa cha mphamvu yayikulu ya Al-O2, zimakhala zovuta kwambiri kuikonza.

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Kugwiritsa ntchitoR/M plane safiro wafer

Ndege ya R ndi malo osakhala a polar a safiro, kotero kusintha kwa malo a ndege ya R mu chipangizo cha safiro kumachipatsa mawonekedwe osiyanasiyana a makina, kutentha, magetsi, ndi kuwala. Kawirikawiri, substrate ya safiro ya R-surface imakondedwa poika silicon mu heteroepitaxial, makamaka pa ntchito za semiconductor, microwave ndi microelectronics, popanga lead, zigawo zina za superconducting, resistor yolimba kwambiri, gallium arsenide ingagwiritsidwenso ntchito pakukula kwa substrate ya mtundu wa R. Pakadali pano, chifukwa cha kutchuka kwa mafoni anzeru ndi makompyuta apiritsi, substrate ya safiro ya R-face yalowa m'malo mwa zida za SAW zomwe zimagwiritsidwa ntchito pa mafoni anzeru ndi makompyuta apiritsi, zomwe zimapangitsa kuti zipangizo zigwire bwino ntchito.

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Nthawi yotumizira: Julayi-16-2024