N-Type SiC Composite Substrates Dia6inch Monocrystaline wapamwamba kwambiri komanso gawo lapansi labwino kwambiri
N-Type SiC Composite Substrates Common parameter tebulo
项目Zinthu | 指标Kufotokozera | 项目Zinthu | 指标Kufotokozera |
直径Diameter | 150 ± 0.2mm | 正 面 ( 硅 面 ) 粗 糙 度 Pamaso (Si-nkhope) roughness | Ra≤0.2nm (5μm*5μm) |
晶型Polytype | 4H | Edge Chip, Scratch, Crack (kuyang'ana kowoneka) | Palibe |
电阻率Kukaniza | 0.015-0.025ohm ·cm | 总厚度变化TTV | ≤3μm |
Choka wosanjikiza Makulidwe | ≥0.4μm | 翘曲度Warp | ≤35μm |
空洞Zopanda kanthu | ≤5ea/wafer (2mm>D>0.5mm) | 总厚度Makulidwe | 350±25μm |
Dzina la "N-mtundu" limatanthawuza mtundu wa doping womwe umagwiritsidwa ntchito muzinthu za SiC. Mu semiconductor physics, doping imaphatikizapo kuyambitsa mwadala zonyansa mu semiconductor kuti asinthe mphamvu zake zamagetsi. Doping yamtundu wa N imayambitsa zinthu zomwe zimapereka ma elekitironi aulere ochulukirapo, zomwe zimapangitsa kuti zinthuzo zikhale zovuta kunyamula.
Ubwino wa magawo amtundu wa N-SiC ndi awa:
1. Kutentha kwapamwamba: SiC imakhala ndi kutentha kwapamwamba kwambiri ndipo imatha kugwira ntchito pa kutentha kwakukulu, ndikupangitsa kuti ikhale yoyenera kugwiritsira ntchito magetsi amphamvu kwambiri komanso othamanga kwambiri.
2. Mpweya wothamanga kwambiri: Zida za SiC zimakhala ndi mphamvu zowonongeka kwambiri, zomwe zimawathandiza kuti azitha kupirira madera akuluakulu a magetsi popanda kuwonongeka kwa magetsi.
3. Kukana kwa Chemical ndi chilengedwe: SiC ndi yolimbana ndi mankhwala ndipo imatha kupirira zovuta zachilengedwe, ndikupangitsa kuti ikhale yoyenera kugwiritsidwa ntchito pazovuta.
4. Kuchepetsa mphamvu yamagetsi: Poyerekeza ndi zida zachikhalidwe za silicon, magawo a SiC amathandizira kutembenuka kwamphamvu kwamphamvu ndikuchepetsa kutayika kwa mphamvu pazida zamagetsi.
5. Wide bandgap: SiC ili ndi bandgap yotakata, yomwe imalola kuti pakhale zipangizo zamagetsi zomwe zimatha kugwira ntchito pa kutentha kwakukulu komanso mphamvu zambiri.
Ponseponse, magawo ophatikizika a N-mtundu wa SiC amapereka zabwino zambiri pakupanga zida zamagetsi zogwira ntchito kwambiri, makamaka m'mapulogalamu omwe ntchito yotentha kwambiri, kuchuluka kwamphamvu kwamagetsi, komanso kutembenuka kwamphamvu kwamagetsi ndikofunikira.