Ma Substrates a N-Type SiC Composite Dia6inch Monocrystaline wapamwamba kwambiri komanso substrate yotsika mtengo
Ma Substrates a N-Type SiC Composite Tebulo la Common parameter
| 项目Zinthu | 指标Kufotokozera | 项目Zinthu | 指标Kufotokozera |
| 直径M'mimba mwake | 150±0.2mm | 正 面 ( 硅 面 ) 粗 糙 度 Kukhwima kwa nkhope (kutsogolo) | Ra≤0.2nm (5μm*5μm) |
| 晶型Mtundu wa Polytype | 4H | Chip ya Edge, Scratch, Crack (kuyang'ana kowoneka) | Palibe |
| 电阻率Kusakhazikika | 0.015-0.025ohm ·cm | 总厚度变化TTV | ≤3μm |
| Kusamutsa wosanjikiza makulidwe | ≥0.4μm | 翘曲度Kupindika | ≤35μm |
| 空洞Chopanda kanthu | ≤5ea/wafer (2mm>D>0.5mm) | 总厚度Kukhuthala | 350±25μm |
Dzina la "mtundu wa N" limatanthauza mtundu wa doping womwe umagwiritsidwa ntchito mu zinthu za SiC. Mu fiziki ya semiconductor, doping imaphatikizapo kulowetsa mwadala zinthu zodetsedwa mu semiconductor kuti isinthe mphamvu zake zamagetsi. Doping ya mtundu wa N imayambitsa zinthu zomwe zimapereka ma elekitironi ochulukirapo, zomwe zimapangitsa kuti zinthuzo zikhale ndi kuchuluka kwa chonyamulira cha negative.
Ubwino wa substrates za N-type SiC composite ndi monga:
1. Kugwira ntchito kwa kutentha kwambiri: SiC ili ndi kutentha kwambiri ndipo imatha kugwira ntchito kutentha kwambiri, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsa ntchito zamagetsi zamagetsi zamphamvu kwambiri komanso zamafupipafupi.
2. Voliyumu yochuluka yophwanyika: Zipangizo za SiC zimakhala ndi voliyumu yochuluka yophwanyika, zomwe zimawathandiza kupirira magetsi ambiri popanda kuwonongeka kwa magetsi.
3. Kukana mankhwala ndi chilengedwe: SiC ndi yolimba ndi mankhwala ndipo imatha kupirira nyengo zovuta zachilengedwe, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito pazovuta.
4. Kuchepa kwa mphamvu: Poyerekeza ndi zipangizo zachikhalidwe zopangidwa ndi silicon, ma substrates a SiC amathandiza kusintha mphamvu bwino komanso kuchepetsa kutayika kwa mphamvu mu zipangizo zamagetsi.
5. Chigawo chachikulu cha bandgap: SiC ili ndi chigawo chachikulu cha bandgap, zomwe zimathandiza kupanga zipangizo zamagetsi zomwe zingagwire ntchito kutentha kwambiri komanso mphamvu zambiri.
Ponseponse, ma substrates a N-type SiC composite amapereka ubwino waukulu pakupanga zipangizo zamagetsi zogwira ntchito kwambiri, makamaka m'magwiritsidwe ntchito komwe kutentha kwambiri, kuchuluka kwa mphamvu, komanso kusintha mphamvu moyenera ndikofunikira kwambiri.