LNOI Wafer (Lithium Niobate pa Insulator) Telecommunications Sensing High Electro-Optic
Chithunzi chatsatanetsatane
Mwachidule
Mkati mwa bokosi la wafer muli ma grooves ofananira, miyeso yake yomwe imakhala yofanana kwambiri kuti ithandizire mbali ziwiri za chophatikiziracho. Bokosi la crystal nthawi zambiri limapangidwa ndi zinthu zapulasitiki za PP zomwe zimagonjetsedwa ndi kutentha, kuvala komanso magetsi osasunthika. Mitundu yosiyanasiyana ya zowonjezera imagwiritsidwa ntchito kusiyanitsa magawo azitsulo pakupanga semiconductor. Chifukwa cha kakulidwe kakang'ono ka ma semiconductors, mapatani wandiweyani, komanso zofunikira pakukula kwa tinthu tating'ono pakupanga, bokosi lawafa liyenera kutsimikiziridwa kuti ndi loyera kuti lilumikizidwe ndi bokosi la microenvironment reaction cavity la makina osiyanasiyana opanga.
Njira Yopangira
Kupanga zowotcha za LNOI kumakhala ndi njira zingapo zolondola:
Khwerero 1: Kuyika kwa Helium IonMa ion a Helium amalowetsedwa mu kristalo wochuluka wa LN pogwiritsa ntchito ion implanter. Ma ions awa amakhala mozama kwambiri, kupanga ndege yofooka yomwe pamapeto pake imathandizira kuthamangitsidwa kwa filimu.
Gawo 2: Mapangidwe a Base SubstrateSilicon yosiyana kapena yowotcha ya LN imakutidwa ndi okosijeni kapena yokutidwa ndi SiO2 pogwiritsa ntchito PECVD kapena matenthedwe oxidation. Pamwamba pake amapangidwa kuti agwirizane bwino.
Khwerero 3: Kulumikiza kwa LN ku gawo lapansiLN crystal yoyikidwa ndi ion imapindidwa ndikumangidwira ku chowotcha choyambira pogwiritsa ntchito cholumikizira chachindunji. Pakafukufuku, benzocyclobutene (BCB) itha kugwiritsidwa ntchito ngati zomatira kuti zikhale zosavuta kulumikizana pansi pazovuta kwambiri.
Khwerero 4: Chithandizo cha Matenthedwe ndi Kusiyanitsa MafilimuAnnealing imayambitsa kupangika kwa thovu pakuya kwake, zomwe zimapangitsa kuti filimu yopyapyala isiyanitsidwe (pamwamba pa LN wosanjikiza) kuchokera pazambiri. Mphamvu yamakina imagwiritsidwa ntchito kumaliza kutulutsa.
Gawo 5: Kupukuta pamwambaChemical Mechanical Polishing (CMP) imagwiritsidwa ntchito kusalaza pamwamba pa LN, kukonza mawonekedwe a kuwala ndi zokolola za chipangizo.
Magawo aukadaulo
| Zakuthupi | Kuwala Gulu LiNbO3 masamba (White or Wakuda) | |
| Curie Temp | 1142±0.7℃ | |
| Kudula ngodya | X/Y/Z ndi zina | |
| Diameter / kukula | 2"/3"/4" ± 0.03mm | |
| Tol(±) | <0.20 mm ± 0.005mm | |
| Makulidwe | 0.18 ~ 0.5mm kapena kuposa | |
| Pulayimale Lathyathyathya | 16mm/22mm/32mm | |
| TTV | <3 mu | |
| Kugwada | -30 | |
| Warp | <40μm | |
| Kuwongolera Lathyathyathya | Zonse zilipo | |
| Pamwamba Mtundu | Mbali Imodzi Yopukutidwa(SSP)/Mambali Awiri Opukutidwa(DSP) | |
| Wopukutidwa mbali Ra | <0.5nm | |
| S/D | 20/10 | |
| M'mphepete Zofunikira | R=0.2mm C-mtundu or Bullnose | |
| Ubwino | Kwaulere of crack (mabubu ndi kuphatikiza) | |
| Kuwala dope | Mg/Fe/Zn/MgO ndi zina za kuwala kalasi LN zopyapyala pa anapempha | |
| Wafer Pamwamba Zofunikira | Refractive index | No=2.2878/Ne=2.2033 @632nm wavelength/prism coupler njira. |
| Kuipitsidwa, | Palibe | |
| Tinthu ting'onoting'ono c>0.3μ m | <=30 | |
| Scratch, Chipping | Palibe | |
| Chilema | Palibe ming'alu m'mphepete, zokopa, zowona, madontho | |
| Kupaka | Bokosi la Qty / Wafer | 25pcs pa bokosi |
Gwiritsani Ntchito Milandu
Chifukwa cha kusinthasintha kwake komanso magwiridwe antchito, LNOI imagwiritsidwa ntchito m'mafakitale ambiri:
Zithunzi:Compact modulators, multiplexers, ndi ma circular photonic.
RF/Acoustics:Acousto-optic modulators, zosefera za RF.
Quantum Computing:Zosakaniza zopanda mzere ndi majenereta a photon-pair.
Chitetezo & Zamlengalenga:Ma gyros otaya otsika otsika, zida zosinthira pafupipafupi.
Zida Zachipatala:Ma biosensors a Optical ndi ma probe a siginecha apamwamba kwambiri.
FAQ
Q: Chifukwa chiyani LNOI imakondedwa kuposa SOI mumakina owoneka bwino?
A:LNOI imakhala ndi ma electro-optic coefficients apamwamba komanso mawonekedwe owoneka bwino, zomwe zimapangitsa kuti pakhale magwiridwe antchito apamwamba pamawonekedwe azithunzi.
Q: Kodi CMP ndi yovomerezeka pambuyo pogawanika?
A:Inde. Malo owonekera a LN amakhala ovuta pambuyo podulidwa ayoni ndipo amayenera kupukutidwa kuti akwaniritse zofunikira za giredi ya kuwala.
Q: Kodi kukula kwake kowongoka komwe kulipo ndi kotani?
A:Zophika zamalonda za LNOI zimakhala 3 "ndi 4", ngakhale ogulitsa ena akupanga mitundu 6".
Q: Kodi gawo la LN lingagwiritsidwenso ntchito pogawanika?
A:Makristalo oyambira amatha kusinthidwanso ndikugwiritsiridwa ntchito kangapo, ngakhale kuti khalidweli likhoza kuwonongeka pambuyo pa maulendo angapo.
Q: Kodi zowotcha za LNOI zimagwirizana ndi kukonza kwa CMOS?
A:Inde, amapangidwa kuti agwirizane ndi njira zopangira semiconductor wamba, makamaka akamagwiritsidwa ntchito ndi silicon.
