LNOI Wafer (Lithium Niobate pa Insulator) Telecommunications Sensing High Electro-Optic
Chithunzi Chatsatanetsatane
Chidule
Mkati mwa bokosi la wafer muli mipata yofanana, yomwe miyeso yake ndi yofanana kuti ithandizire mbali ziwiri za wafer. Bokosi la kristalo nthawi zambiri limapangidwa ndi pulasitiki yowala ya PP yomwe imalimbana ndi kutentha, kutopa ndi magetsi osasinthasintha. Mitundu yosiyanasiyana ya zowonjezera imagwiritsidwa ntchito kusiyanitsa magawo achitsulo popanga semiconductor. Chifukwa cha kukula kochepa kwa ma semiconductor, mapangidwe okhuthala, komanso zofunikira kwambiri pakukula kwa tinthu tomwe timapanga, bokosi la wafer liyenera kutsimikiziridwa kuti lili ndi malo oyera kuti lilumikizane ndi bokosi lochitapo kanthu la microenvironment box reaction cavity la makina osiyanasiyana opanga.
Njira Yopangira
Kupanga ma wafer a LNOI kumakhala ndi njira zingapo zolondola:
Gawo 1: Kuyika Helium IonMa ion a helium amalowetsedwa mu kristalo wa LN wambiri pogwiritsa ntchito choyika ma ion. Ma ion amenewa amakhala pansi pa kuya kwina, ndikupanga malo ofooka omwe pamapeto pake angathandize kugawanika kwa filimu.
Gawo 2: Kupanga Pansi PansiChophimba china cha silicon kapena LN chimaphikidwa ndi SiO2 pogwiritsa ntchito PECVD kapena kutentha kwa mpweya. Pamwamba pake pamakonzedwa kuti pakhale mgwirizano wabwino kwambiri.
Gawo 3: Kulumikizana kwa LN ndi SubstrateKhiristo ya LN yolowetsedwa mu ayoni imapindidwa ndikulumikizidwa ku wafer yoyambira pogwiritsa ntchito wafer yolumikizana mwachindunji. Mu kafukufuku, benzocyclobutene (BCB) ingagwiritsidwe ntchito ngati guluu kuti ikhale yosavuta kulumikiza pansi pa zovuta zochepa.
Gawo 4: Kuchiza Kutentha ndi Kulekanitsa MafilimuKuphimba kumayatsa mapangidwe a thovu pa kuya komwe kwaikidwa, zomwe zimathandiza kuti filimu yopyapyala (gawo lapamwamba la LN) ikulekanitsidwe ndi thovu lalikulu. Mphamvu ya makina imagwiritsidwa ntchito kumaliza kuchotsa thovu.
Gawo 5: Kupukuta PamwambaKupukuta kwa Makina Opangira Mankhwala (CMP) kumayikidwa kuti kusalala pamwamba pa LN, zomwe zimapangitsa kuti kuwala kukhale bwino komanso kuti chipangizocho chizigwira ntchito bwino.
Magawo aukadaulo
| Zinthu Zofunika | Kuwala Giredi LiNbO3 mawafesi (Oyera or Chakuda) | |
| Curie Kutentha | 1142±0.7℃ | |
| Kudula Ngodya | X/Y/Z ndi zina zotero | |
| M'mimba mwake/kukula | 2”/3”/4” ±0.03mm | |
| Tol(±) | <0.20 mm ±0.005mm | |
| Kukhuthala | 0.18 ～0.5mm kapena kuposerapo | |
| Choyamba Lathyathyathya | 16mm/22mm/32mm | |
| TTV | <3μm | |
| Uta | -30 | |
| Kupindika | <40μm | |
| Kuyang'ana Lathyathyathya | Zonse zilipo | |
| Pamwamba Mtundu | Mbali Imodzi Yopukutidwa (SSP)/Mbali Ziwiri Zopukutidwa (DSP) | |
| Yopukutidwa mbali Ra | <0.5nm | |
| S/D | 20/10 | |
| Mphepete Zofunikira | R=0.2mm Mtundu wa C or Mphuno ya ng'ombe | |
| Ubwino | Zaulere of ming'alu (matumphu ndi kuphatikizapo) | |
| Kuwala wothira mankhwala | Mg/Fe/Zn/MgO ndi zina zotero chifukwa cha kuwala giredi LN ma wafer pa anapempha | |
| Wafer Pamwamba Zofunikira | Chizindikiro cha refractive | Ayi=2.2878/Ne=2.2033 @632nm njira yolumikizira ma wavelength/prism. |
| Kuipitsidwa, | Palibe | |
| Tinthu tating'onoting'ono c>0.3μ m | <=30 | |
| Kukanda, Kudula | Palibe | |
| Chilema | Palibe ming'alu ya m'mphepete, mikwingwirima, mabala odulidwa, kapena madontho | |
| Kulongedza | Kuchuluka/Bokosi la Wafer | 25pcs pa bokosi lililonse |
Makesi Ogwiritsira Ntchito
Chifukwa cha kusinthasintha kwake komanso magwiridwe antchito ake, LNOI imagwiritsidwa ntchito m'mafakitale osiyanasiyana:
Zojambulajambula:Ma modulators ang'onoang'ono, ma multiplexers, ndi ma photonic circuits.
RF/Acoustics:Ma modulators a acousto-optic, zosefera za RF.
Kuwerengera kwa Quantum:Zosakaniza ma frequency osalunjika ndi ma jenereta a photon-pair.
Chitetezo ndi Ndege:Zipangizo zoyendera magetsi zotsika mtengo, zosinthira pafupipafupi.
Zipangizo Zachipatala:Ma biosensor optical ndi ma probe a chizindikiro chapamwamba.
FAQ
Q: Nchifukwa chiyani LNOI imakondedwa kuposa SOI mu makina owonera?
A:LNOI ili ndi ma coefficient apamwamba kwambiri a electro-optic komanso mawonekedwe ambiri, zomwe zimathandiza kuti magwiridwe antchito apamwamba m'mabwalo a photonic.
Q: Kodi CMP ndi yovomerezeka pambuyo pogawanitsa?
A:Inde. Malo owonekera a LN ndi okhwima akadulidwa ndi ayoni ndipo ayenera kupukutidwa kuti akwaniritse zofunikira za kuwala.
Q: Kodi kukula kwakukulu kwa wafer komwe kulipo ndi kotani?
A:Ma wafer a LNOI amalonda makamaka amakhala a mainchesi 3 ndi 4, ngakhale kuti ogulitsa ena akupanga mitundu ya mainchesi 6.
Q: Kodi gawo la LN lingagwiritsidwenso ntchito pambuyo pogawa?
A:Krustalo woyambira akhoza kupukutidwanso ndikugwiritsidwanso ntchito kangapo, ngakhale kuti khalidwe lake lingachepe pambuyo pa maulendo angapo.
Q: Kodi ma wafer a LNOI amagwirizana ndi kukonza kwa CMOS?
A:Inde, apangidwa kuti agwirizane ndi njira zachikhalidwe zopangira ma semiconductor, makamaka pamene ma substrates a silicon akugwiritsidwa ntchito.
