8inch LNOI (LiNbO3 pa Insulator) Wafer for Optical Modulators Waveguides Integrated Circuits
Chithunzi chatsatanetsatane
Mawu Oyamba
Zowotcha za Lithium Niobate pa Insulator (LNOI) ndi zida zotsogola zomwe zimagwiritsidwa ntchito pazinthu zosiyanasiyana zapamwamba zaukadaulo ndi zamagetsi. Zopyapyalazi zimapangidwa posamutsa wosanjikiza wopyapyala wa lithiamu niobate (LiNbO₃) pagawo lotchingira, nthawi zambiri silicon kapena zinthu zina zoyenera, pogwiritsa ntchito njira zaukadaulo monga kuyika ma ion ndi kulumikiza kophatikizika. Ukadaulo wa LNOI umagawana zambiri zofananira ndiukadaulo wa Silicon pa Insulator (SOI) koma zimatengera mwayi wapadera wa lithiamu niobate, zinthu zomwe zimadziwika ndi mawonekedwe ake a piezoelectric, pyroelectric, ndi nonlinear optical.
Ma wafer a LNOI apeza chidwi kwambiri m'magawo monga ma optics ophatikizika, ma telecommunication, ndi quantum computing chifukwa chakuchita bwino kwambiri pamapulogalamu apamwamba komanso othamanga kwambiri. Zophika zimapangidwa pogwiritsa ntchito njira ya "Smart-cut", yomwe imathandizira kuwongolera ndendende makulidwe a filimu yopyapyala ya lifiyamu niobate, kuonetsetsa kuti zophatikizika zimakwaniritsa zofunikira pazogwiritsa ntchito zosiyanasiyana.
Mfundo yofunika
Njira yopangira zophika za LNOI zimayamba ndi kristalo wochuluka wa lithiamu niobate. Ma kristalo amapangidwa ndi ion implantation, pomwe ma ion amphamvu kwambiri a helium amalowetsedwa pamwamba pa lithiamu niobate crystal. Ma ion awa amalowa mu kristalo mpaka kukuya kwake ndikusokoneza mawonekedwe a kristalo, ndikupanga ndege yosalimba yomwe pambuyo pake ingagwiritsidwe ntchito kulekanitsa kristalo kukhala zigawo zoonda. Mphamvu yeniyeni ya ma ion a helium imayendetsa kuya kwa kuyika, komwe kumakhudza mwachindunji makulidwe a gawo lomaliza la lithiamu niobate.
Pambuyo pa kuikidwa kwa ion, kristalo ya lithiamu niobate imamangiriridwa ku gawo lapansi pogwiritsa ntchito njira yotchedwa wafer bonding. Njira yolumikizirana nthawi zambiri imagwiritsa ntchito njira yolumikizira mwachindunji, pomwe malo awiri (ion-implanted lithium niobate crystal ndi gawo lapansi) amapanikizidwa palimodzi pansi pa kutentha kwakukulu ndi kukakamizidwa kuti apange mgwirizano wamphamvu. Nthawi zina, zomatira monga benzocyclobutene (BCB) zitha kugwiritsidwa ntchito powonjezera chithandizo.
Kutsatira kugwirizana, chophatikiziracho chimakhala ndi njira yochepetsera kukonzanso kuwonongeka kulikonse komwe kumabwera chifukwa cha kuyika kwa ion ndikuwonjezera mgwirizano pakati pa zigawozo. Njira yopangira annealing imathandizanso wosanjikiza woonda wa lithiamu niobate kuchoka ku kristalo woyambirira, ndikusiya wosanjikiza woonda, wapamwamba kwambiri wa lithiamu niobate womwe ungagwiritsidwe ntchito kupanga zida.
Zofotokozera
Zophika za LNOI zimadziwika ndi zofunikira zingapo zomwe zimatsimikizira kukwanira kwawo pamapulogalamu apamwamba kwambiri. Izi zikuphatikizapo:
Zofunika Zakuthupipa
| paZofunikapa | paSpecificationspa |
| Zakuthupi | Homogeneous: LiNbO3 |
| Ubwino Wazinthu | Mibulu kapena inclusions <100μm |
| Kuwongolera | Y-kudula ±0.2° |
| Kuchulukana | 4.65g/cm³ |
| Curie Kutentha | 1142 ±1°C |
| Kuwonekera | > 95% mu 450-700 nm osiyanasiyana (10 mm makulidwe) |
Zolemba Zopangapa
| paParameterpa | paSpecificationpa |
| Diameter | 150 mm ± 0.2 mm |
| Makulidwe | 350 μm ± 10 μm |
| Kusalala | <1.3 μm |
| Total Makulidwe Kusiyana (TTV) | Warp <70 μm @ 150 mm wafer |
| Kusintha kwa Makulidwe Kwapafupi (LTV) | <70 μm @ 150 mm wafer |
| Ukali | Rq ≤0.5 nm (mtengo wa AFM RMS) |
| Ubwino Wapamwamba | 40-20 |
| Tinthu (zosachotsedwa) | 100-200 μm ≤3 particles |
| Chips | <300 μm (wafer wathunthu, palibe zone yopatula) |
| Ming'alu | Palibe ming'alu (wophika wathunthu) |
| Kuipitsidwa | Palibe madontho osachotsedwa (wophika wathunthu) |
| Kufanana | <30 arcseconds |
| Oriental Reference Plane (X-axis) | 47 ± 2 mm |
Mapulogalamu
Zophika za LNOI zimagwiritsidwa ntchito mosiyanasiyana chifukwa cha mawonekedwe ake apadera, makamaka pankhani zazithunzi, matelefoni, ndi matekinoloje a quantum. Zina mwazofunikira kwambiri ndizo:
Integrated Optics:Zophika za LNOI zimagwiritsidwa ntchito kwambiri m'mabwalo ophatikizika ophatikizika, komwe amathandizira zida zazithunzi zapamwamba kwambiri monga ma modulators, ma waveguide, ndi ma resonators. Mawonekedwe apamwamba a lithiamu niobate amapangitsa kuti ikhale chisankho chabwino kwambiri pamapulogalamu omwe amafunikira kuwongolera bwino kwa kuwala.
Matelefoni:Zophika za LNOI zimagwiritsidwa ntchito mu optical modulators, zomwe ndizofunikira pamakina olumikizirana othamanga kwambiri, kuphatikiza ma fiber optic network. Kuthekera kosinthira kuwala pama frequency apamwamba kumapangitsa zowotcha za LNOI kukhala zabwino pamakina amakono olumikizirana matelefoni.
Quantum Computing:Mu matekinoloje a quantum, zowotcha za LNOI zimagwiritsidwa ntchito kupanga zida zamakompyuta a quantum ndi makina olumikizirana a quantum. Mawonekedwe osagwirizana ndi mawonekedwe a LNOI amathandizidwa kuti apange ma photon awiriawiri, omwe ndi ofunikira pakugawa makiyi a quantum ndi quantum cryptography.
Zomverera:Zowotcha za LNOI zimagwiritsidwa ntchito pazomvera zosiyanasiyana, kuphatikiza zowonera ndi zomvera. Kukhoza kwawo kuyanjana ndi kuwala ndi phokoso kumawapangitsa kukhala osinthasintha pamitundu yosiyanasiyana ya matekinoloje omvera.
FAQ
Q:Kodi ukadaulo wa LNOI ndi chiyani?
A: Ukadaulo wa LNOI umakhudza kusamutsa filimu yopyapyala ya lifiyamu niobate pagawo lotsekereza, makamaka silicon. Tekinolojeyi imagwiritsa ntchito mawonekedwe apadera a lithiamu niobate, monga mawonekedwe ake apamwamba osagwirizana ndi mawonekedwe, piezoelectricity, ndi pyroelectricity, ndikupangitsa kuti ikhale yabwino kwa optics ophatikizika ndi matelefoni.
Q:Kodi pali kusiyana kotani pakati pa LNOI ndi SOI wafers?
A: Zowotcha zonse za LNOI ndi SOI ndizofanana chifukwa zimakhala ndi zinthu zopyapyala zomangika ku gawo lapansi. Komabe, zowotcha za LNOI zimagwiritsa ntchito lithiamu niobate ngati filimu yopyapyala, pomwe zowotcha za SOI zimagwiritsa ntchito silicon. Kusiyana kwakukulu kwagona mu mawonekedwe a filimu yopyapyala, yokhala ndi LNOI yopereka mawonekedwe apamwamba kwambiri ndi piezoelectric.
Q:Ubwino wogwiritsa ntchito zowotcha za LNOI ndi ziti?
A: Ubwino waukulu wa zowotcha za LNOI ndi monga mawonekedwe awo abwino kwambiri a kuwala, monga ma coefficients apamwamba a nonlinear optical, ndi mphamvu zawo zamakina. Makhalidwewa amapangitsa kuti zowotcha za LNOI zikhale zabwino kuti zigwiritsidwe ntchito pa liwiro lalitali, ma frequency apamwamba, komanso ma quantum.
Q:Kodi zowotcha za LNOI zitha kugwiritsidwa ntchito pazambiri?
A: Inde, zowotcha za LNOI zimagwiritsidwa ntchito kwambiri muukadaulo wa quantum chifukwa cha kuthekera kwawo kupanga ma photon awiriawiri omangika komanso kugwirizanitsa kwawo ndi ma photonic ophatikizika. Izi ndizofunikira pakugwiritsa ntchito quantum computing, kulumikizana, ndi cryptography.
Q:Kodi makulidwe amtundu wanji wamakanema a LNOI?
A: Makanema a LNOI nthawi zambiri amachokera ku nanometer mazana angapo mpaka ma micrometer angapo mu makulidwe, kutengera ntchito yake. Kuchuluka kwake kumayendetsedwa panthawi ya ion implantation.
