Makina Opukutira a Ion Beam a safiro SiC Si

Kufotokozera Kwachidule:

Makina Owerengera ndi Kupukuta a Ion Beam amachokera pa mfundo ya kuphulika kwa ayoni. Mkati mwa chipinda chokhala ndi vacuum yambiri, gwero la ayoni limapanga plasma, yomwe imafulumizitsidwa kukhala ion beam yamphamvu kwambiri. Mtambo uwu umaphulika pamwamba pa gawo la kuwala, ndikuchotsa zinthu pa atomiki kuti zikwaniritse kukonza bwino kwambiri pamwamba ndi kumaliza.

Tumizani imelo kwa ife

Mawonekedwe

Chithunzi Chatsatanetsatane

Chidule cha Zamalonda za Makina Opukutira a Ion Beam

Monga njira yosakhudzana ndi zinthu, kupukuta kwa ion beam kumachotsa kupsinjika kwa makina ndikupewa kuwonongeka kwa pansi pa nthaka, zomwe zimapangitsa kuti ikhale yoyenera kupanga ma optics olondola kwambiri omwe amagwiritsidwa ntchito mu zakuthambo, ndege, ma semiconductors, ndi ntchito zofufuzira zapamwamba.

Mfundo Yogwira Ntchito ya Makina Opukutira a Ion Beam

Kupanga kwa Ion
Mpweya wopanda mphamvu (monga argon) umalowetsedwa mu chipinda chotsukira mpweya ndipo umayikidwa mu ion kudzera mu chotulutsa chamagetsi kuti upange plasma.

Kufulumizitsa & Kupanga kwa Beam
Ma ayoni amafulumizitsidwa kufika pa ma electron volts mazana angapo kapena zikwi (eV) ndipo amapangidwa kukhala malo okhazikika komanso olunjika.

Kuchotsa Zinthu
Kuwala kwa ayoni kumatulutsa maatomu kuchokera pamwamba popanda kuyambitsa zochita za mankhwala.

Kuzindikira Zolakwika & Kukonzekera Njira
Kupatuka kwa mawonekedwe a pamwamba kumayesedwa ndi interferometry. Ntchito zochotsera zimagwiritsidwa ntchito kuti zidziwike nthawi yokhazikika ndikupanga njira zabwino kwambiri zogwiritsira ntchito.

Kukonza Kotsekedwa kwa Loop
Kubwerezabwereza kwa njira zoyezera ndi kukonza zinthu kumapitirira mpaka zolinga zolondola za RMS/PV zitakwaniritsidwa.

Zinthu Zofunika Kwambiri pa Makina Opukutira a Ion Beam

Kugwirizana kwa Padziko Lonse- Imagwira ntchito pamalo athyathyathya, ozungulira, ozungulira, komanso osasunthika

Chiwongola dzanja chochotsa chokhazikika kwambiri- Imathandizira kukonza chithunzi cha sub-nanometer

Kukonza Kopanda Kuwonongeka- Palibe zolakwika za pansi pa nthaka kapena kusintha kwa kapangidwe kake

Kuchita Mogwirizana- Imagwira ntchito bwino pa zinthu zolimba zosiyanasiyana

Kukonza Mafupipafupi Otsika/Apakati- Imachotsa zolakwika popanda kupanga zinthu zakale zapakati/zapamwamba

Zofunikira Zosamalira Zochepa- Kugwira ntchito nthawi yayitali mosalekeza komanso nthawi yochepa yopuma

Mafotokozedwe Aukadaulo Aakulu a Makina Opukutira a Ion Beam

Chinthu	Kufotokozera
Njira Yogwiritsira Ntchito	Ion ikutuluka m'malo opanda mpweya wambiri
Mtundu Wopangira	Kupukuta ndi kupukuta malo osakhudzana ndi kukhudza
Kukula kwa Ntchito Yogwira Ntchito Kwambiri	Φ4000 mm
Nkhwangwa Zoyenda	3-axis / 5-axis
Kukhazikika kwa Kuchotsa	≥95%
Kulondola Kwapamwamba	PV < 10 nm; RMS ≤ 0.5 nm (RMS wamba < 1 nm; PV < 15 nm)
Kutha Kukonza Mafupipafupi	Imachotsa zolakwika za ma frequency otsika-apakatikati popanda kuyambitsa zolakwika za ma frequency apakati/apamwamba
Kugwira Ntchito Kosalekeza	Masabata 3-5 popanda kukonza vacuum
Ndalama Zokonzera	Zochepa

Kukonza Mphamvu za Makina Opukutira a Ion Beam

Mitundu Yothandizidwa Pamwamba

Zosavuta: Zathyathyathya, zozungulira, prism

Zovuta: Asphere yofanana/yosafanana, Asphere yosagwirizana, yozungulira

Zapadera: Ma optics owonda kwambiri, ma optics a slat, ma optics a hemispherical, ma optics a conformal, ma phase plates, malo omasuka

Zipangizo Zothandizidwa

Galasi lowala: Quartz, microcrystalline, K9, ndi zina zotero.

Zipangizo za infrared: Silicon, germanium, ndi zina zotero.

Zitsulo: Aluminiyamu, chitsulo chosapanga dzimbiri, titaniyamu alloy, ndi zina zotero.

Makristalo: YAG, silicon carbide ya kristalo imodzi, ndi zina zotero.

Zipangizo zolimba/zosalimba: Silicon carbide, ndi zina zotero.

Ubwino Wapamwamba / Kulondola Kwambiri

PV < 10 nm

RMS ≤ 0.5 nm

Kukonza Maphunziro a Makina Oyeretsera a Ion Beam

Mlandu 1 - Galasi Lokhazikika

Chogwirira ntchito: D630 mm quartz lathyathyathya

Zotsatira: PV 46.4 nm; RMS 4.63 nm

Mlandu Wachiwiri - Galasi Lowunikira la X-ray

Chogwirira ntchito: 150 × 30 mm silikoni lathyathyathya

Zotsatira: PV 8.3 nm; RMS 0.379 nm; Kutsetsereka 0.13 µrad

Mlandu 3 - Galasi Losayang'ana Mbali

Chogwirira ntchito: Galasi la D326 mm lopanda axis

Zotsatira: PV 35.9 nm; RMS 3.9 nm

Mafunso Ofunsidwa Kawirikawiri Pa Magalasi a Quartz

Mafunso Ofunsidwa Kawirikawiri - Makina Opukutira a Ion Beam

Q1: Kodi kupukuta kwa ion beam ndi chiyani?
A1:Kupukuta kwa ion beam ndi njira yosakhudzana ndi zinthu zomwe zimagwiritsa ntchito ion beam yolunjika (monga ma argon ions) kuchotsa zinthu kuchokera pamwamba pa workpiece. Ma ion amafulumizitsidwa ndikulunjika pamwamba, zomwe zimapangitsa kuti zinthu zichotsedwe pa atomu, zomwe zimapangitsa kuti zikhale zosalala kwambiri. Njirayi imachotsa kupsinjika kwa makina ndi kuwonongeka kwa pansi pa nthaka, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsa ntchito zinthu zowunikira molondola.

Q2: Ndi mitundu yanji ya malo omwe Ion Beam Polishing Machine ingasamalire?
A2:TheMakina Opukutira a Ion Beamimatha kukonza malo osiyanasiyana, kuphatikizapo zinthu zosavuta mongama flat, ma sphere, ndi ma prismkomanso ma geometri ovuta mongama aspheres, ma aspheres osagwirizanandimalo opanda mawonekedweImagwira ntchito bwino kwambiri pazinthu monga magalasi owonera, ma infrared optics, zitsulo, ndi zinthu zolimba/zosalimba.

Q3: Ndi zipangizo ziti zomwe Ion Beam Polishing Machine ingagwire ntchito?
A3:TheMakina Opukutira a Ion Beamimatha kupukuta zinthu zosiyanasiyana, kuphatikizapo:

Galasi lowala: Quartz, microcrystalline, K9, ndi zina zotero.
Zipangizo za infrared: Silikoni, germanium, ndi zina zotero.
Zitsulo: Aluminiyamu, chitsulo chosapanga dzimbiri, titaniyamu alloy, ndi zina zotero.
Zipangizo zamakristalo: YAG, silicon carbide ya kristalo imodzi, ndi zina zotero.
Zipangizo zina zolimba/zosalimba: Silikoni carbide, ndi zina zotero.

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.