Wafer wa Sapphire wa mainchesi 12 C-Plane SSP/DSP
Chithunzi Chatsatanetsatane
Chiyambi cha Sapphire
Wafer wa safiro ndi chinthu chopangidwa ndi kristalo imodzi chopangidwa ndi aluminiyamu yopangidwa ndi oxide (Al₂O₃) yoyera kwambiri. Makristalo akuluakulu a safiro amalimidwa pogwiritsa ntchito njira zapamwamba monga Kyropoulos (KY) kapena Heat Exchange Method (HEM), kenako amakonzedwa kudzera mu kudula, kuyang'ana, kupukuta, ndi kupukuta molondola. Chifukwa cha mawonekedwe ake apadera, kuwala, komanso mankhwala, wafer wa safiro umagwira ntchito yofunika kwambiri m'magawo a semiconductors, optoelectronics, ndi zamagetsi apamwamba kwambiri.
Njira Zopangira Sapphire
| Njira | Mfundo yaikulu | Ubwino | Mapulogalamu Aakulu |
|---|---|---|---|
| Njira ya Verneuil(Kusakanikirana kwa Moto) | Ufa wa Al₂O₃ woyera kwambiri umasungunuka mu moto wa okosijeni, madontho amauma pang'onopang'ono pa mbewu. | Mtengo wotsika, magwiridwe antchito apamwamba, njira yosavuta | Ma safiro abwino kwambiri, zipangizo zoyambirira zowunikira |
| Njira ya Czochralski (CZ) | Al₂O₃ imasungunuka mu chophikira, ndipo kristalo wa mbewu amakokedwa pang'onopang'ono mmwamba kuti akule kristaloyo | Amapanga makhiristo akuluakulu ndi umphumphu wabwino | Makristalo a laser, mawindo owonera |
| Njira ya Kyropoulos (KY) | Kuzizira pang'onopang'ono komwe kumalamulidwa kumalola kristalo kukula pang'onopang'ono mkati mwa mbiya | Amatha kumera makhiristo akuluakulu, osapanikizika kwambiri (makumi a makilogalamu kapena kuposerapo) | Ma LED substrates, zowonetsera mafoni, ndi zida zowunikira |
| Njira ya HEM(Kusinthana kwa Kutentha) | Kuzizira kumayamba kuchokera pamwamba pa mbiya, makhiristo amakula pansi kuchokera ku mbewu | Amapanga makhiristo akuluakulu kwambiri (mpaka mazana a makilogalamu) okhala ndi khalidwe lofanana | Mawindo akuluakulu owoneka bwino, ndege, kuwala kwa asilikali |
Kuyang'ana kwa Makristalo
| Kuyang'ana / Ndege | Mndandanda wa Miller | Makhalidwe | Mapulogalamu Aakulu |
|---|---|---|---|
| C-ndege | (0001) | Yolunjika ku c-axis, pamwamba pa polar, maatomu okonzedwa mofanana | Ma LED, ma laser diode, ma GaN epitaxial substrates (ogwiritsidwa ntchito kwambiri) |
| Ndege | (11-20) | Pofanana ndi c-axis, pamwamba posakhala polar, imapewa zotsatira za polarization | Zipangizo za GaN epitaxy zomwe sizili polar, optoelectronic |
| Ndege ya M | (10-10) | Kufanana ndi c-axis, non-polar, high symmetry | Zipangizo za GaN epitaxy zogwira ntchito bwino, optoelectronic |
| Ndege ya R | (1-102) | Yokhala ndi mawonekedwe abwino kwambiri, ogwirizana ndi c-axis | Mawindo owoneka bwino, zowunikira za infrared, zida za laser |
Sapphire Wafer Specification (Makonda)
| Chinthu | Ma Wafer a Sapphire a mainchesi 1 (0001) 430μm | |
| Zipangizo Zakristalo | 99,999%, Kuyera Kwambiri, Monocrystalline Al2O3 | |
| Giredi | Prime, Epi-Ready | |
| Kuyang'ana Pamwamba | C-ndege (0001) | |
| C-ndege yopita ku M-axis 0.2 +/- 0.1° | ||
| M'mimba mwake | 25.4 mm +/- 0.1 mm | |
| Kukhuthala | 430 μm +/- 25 μm | |
| Mbali Yopukutidwa Yokha | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (SSP) | Kumbuyo | Nthaka yabwino, Ra = 0.8 μm mpaka 1.2 μm |
| Mbali ziwiri zopukutidwa | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (DSP) | Kumbuyo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| TTV | < 5 μm | |
| UTA | < 5 μm | |
| WARP | < 5 μm | |
| Kuyeretsa / Kulongedza | Kalasi 100 yoyeretsa zipinda zoyera ndi zopaka vacuum, | |
| Zidutswa 25 mu phukusi limodzi la kaseti kapena phukusi limodzi. | ||
| Chinthu | Ma Wafer a Sapphire a mainchesi awiri (0001) 430μm | |
| Zipangizo Zakristalo | 99,999%, Kuyera Kwambiri, Monocrystalline Al2O3 | |
| Giredi | Prime, Epi-Ready | |
| Kuyang'ana Pamwamba | C-ndege (0001) | |
| C-ndege yopita ku M-axis 0.2 +/- 0.1° | ||
| M'mimba mwake | 50.8 mm +/- 0.1 mm | |
| Kukhuthala | 430 μm +/- 25 μm | |
| Kuyang'ana Kwambiri Pang'onopang'ono | Ndege ya A (11-20) +/- 0.2° | |
| Utali Woyamba Wathyathyathya | 16.0 mm +/- 1.0 mm | |
| Mbali Yopukutidwa Yokha | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (SSP) | Kumbuyo | Nthaka yabwino, Ra = 0.8 μm mpaka 1.2 μm |
| Mbali ziwiri zopukutidwa | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (DSP) | Kumbuyo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| TTV | < 10 μm | |
| UTA | < 10 μm | |
| WARP | < 10 μm | |
| Kuyeretsa / Kulongedza | Kalasi 100 yoyeretsa zipinda zoyera ndi zopaka vacuum, | |
| Zidutswa 25 mu phukusi limodzi la kaseti kapena phukusi limodzi. | ||
| Chinthu | Ma Wafer a Sapphire a mainchesi atatu (0001) 500μm | |
| Zipangizo Zakristalo | 99,999%, Kuyera Kwambiri, Monocrystalline Al2O3 | |
| Giredi | Prime, Epi-Ready | |
| Kuyang'ana Pamwamba | C-ndege (0001) | |
| C-ndege yopita ku M-axis 0.2 +/- 0.1° | ||
| M'mimba mwake | 76.2 mm +/- 0.1 mm | |
| Kukhuthala | 500 μm +/- 25 μm | |
| Kuyang'ana Kwambiri Pang'onopang'ono | Ndege ya A (11-20) +/- 0.2° | |
| Utali Woyamba Wathyathyathya | 22.0 mm +/- 1.0 mm | |
| Mbali Yopukutidwa Yokha | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (SSP) | Kumbuyo | Nthaka yabwino, Ra = 0.8 μm mpaka 1.2 μm |
| Mbali ziwiri zopukutidwa | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (DSP) | Kumbuyo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| TTV | < 15 μm | |
| UTA | < 15 μm | |
| WARP | < 15 μm | |
| Kuyeretsa / Kulongedza | Kalasi 100 yoyeretsa zipinda zoyera ndi zopaka vacuum, | |
| Zidutswa 25 mu phukusi limodzi la kaseti kapena phukusi limodzi. | ||
| Chinthu | Ma Wafer a Sapphire a mainchesi 4 (0001) 650μm | |
| Zipangizo Zakristalo | 99,999%, Kuyera Kwambiri, Monocrystalline Al2O3 | |
| Giredi | Prime, Epi-Ready | |
| Kuyang'ana Pamwamba | C-ndege (0001) | |
| C-ndege yopita ku M-axis 0.2 +/- 0.1° | ||
| M'mimba mwake | 100.0 mm +/- 0.1 mm | |
| Kukhuthala | 650 μm +/- 25 μm | |
| Kuyang'ana Kwambiri Pang'onopang'ono | Ndege ya A (11-20) +/- 0.2° | |
| Utali Woyamba Wathyathyathya | 30.0 mm +/- 1.0 mm | |
| Mbali Yopukutidwa Yokha | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (SSP) | Kumbuyo | Nthaka yabwino, Ra = 0.8 μm mpaka 1.2 μm |
| Mbali ziwiri zopukutidwa | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (DSP) | Kumbuyo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| TTV | < 20 μm | |
| UTA | < 20 μm | |
| WARP | < 20 μm | |
| Kuyeretsa / Kulongedza | Kalasi 100 yoyeretsa zipinda zoyera ndi zopaka vacuum, | |
| Zidutswa 25 mu phukusi limodzi la kaseti kapena phukusi limodzi. | ||
| Chinthu | Ma Wafer a Sapphire a mainchesi 6 (0001) 1300μm | |
| Zipangizo Zakristalo | 99,999%, Kuyera Kwambiri, Monocrystalline Al2O3 | |
| Giredi | Prime, Epi-Ready | |
| Kuyang'ana Pamwamba | C-ndege (0001) | |
| C-ndege yopita ku M-axis 0.2 +/- 0.1° | ||
| M'mimba mwake | 150.0 mm +/- 0.2 mm | |
| Kukhuthala | 1300 μm +/- 25 μm | |
| Kuyang'ana Kwambiri Pang'onopang'ono | Ndege ya A (11-20) +/- 0.2° | |
| Utali Woyamba Wathyathyathya | 47.0 mm +/- 1.0 mm | |
| Mbali Yopukutidwa Yokha | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (SSP) | Kumbuyo | Nthaka yabwino, Ra = 0.8 μm mpaka 1.2 μm |
| Mbali ziwiri zopukutidwa | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (DSP) | Kumbuyo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| TTV | < 25 μm | |
| UTA | < 25 μm | |
| WARP | < 25 μm | |
| Kuyeretsa / Kulongedza | Kalasi 100 yoyeretsa zipinda zoyera ndi zopaka vacuum, | |
| Zidutswa 25 mu phukusi limodzi la kaseti kapena phukusi limodzi. | ||
| Chinthu | Ma Wafer a Sapphire a mainchesi 8 (0001) 1300μm | |
| Zipangizo Zakristalo | 99,999%, Kuyera Kwambiri, Monocrystalline Al2O3 | |
| Giredi | Prime, Epi-Ready | |
| Kuyang'ana Pamwamba | C-ndege (0001) | |
| C-ndege yopita ku M-axis 0.2 +/- 0.1° | ||
| M'mimba mwake | 200.0 mm +/- 0.2 mm | |
| Kukhuthala | 1300 μm +/- 25 μm | |
| Mbali Yopukutidwa Yokha | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (SSP) | Kumbuyo | Nthaka yabwino, Ra = 0.8 μm mpaka 1.2 μm |
| Mbali ziwiri zopukutidwa | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (DSP) | Kumbuyo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| TTV | < 30 μm | |
| UTA | < 30 μm | |
| WARP | < 30 μm | |
| Kuyeretsa / Kulongedza | Kalasi 100 yoyeretsa zipinda zoyera ndi zopaka vacuum, | |
| Phukusi la chidutswa chimodzi. | ||
| Chinthu | Ma Wafer a Sapphire a mainchesi 12 (0001) 1300μm | |
| Zipangizo Zakristalo | 99,999%, Kuyera Kwambiri, Monocrystalline Al2O3 | |
| Giredi | Prime, Epi-Ready | |
| Kuyang'ana Pamwamba | C-ndege (0001) | |
| C-ndege yopita ku M-axis 0.2 +/- 0.1° | ||
| M'mimba mwake | 300.0 mm +/- 0.2 mm | |
| Kukhuthala | 3000 μm +/- 25 μm | |
| Mbali Yopukutidwa Yokha | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (SSP) | Kumbuyo | Nthaka yabwino, Ra = 0.8 μm mpaka 1.2 μm |
| Mbali ziwiri zopukutidwa | Kutsogolo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| (DSP) | Kumbuyo | Yopukutidwa ndi Epi, Ra < 0.2 nm (ndi AFM) |
| TTV | < 30 μm | |
| UTA | < 30 μm | |
| WARP | < 30 μm | |
Njira Yopangira Wafer ya Sapphire
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Kukula kwa Makristalo
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Pangani maboules a safiro (100–400 kg) pogwiritsa ntchito njira ya Kyropoulos (KY) m'zitofu zapadera zokuliramo makristalo.
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Kubowola ndi Kupanga Ingot
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Gwiritsani ntchito mbiya yobowolera kuti mupange boule kukhala ma ingot ozungulira okhala ndi mainchesi 2-6 ndi kutalika kwa 50-200 mm.
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Kuyamba Kudzaza
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Yang'anani ma ingot kuti muwone ngati ali ndi zolakwika ndipo chitani annealing yoyamba yotentha kwambiri kuti muchepetse kupsinjika kwamkati.
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Kuyang'ana kwa Makristalo
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Dziwani momwe ingot ya safiro imayendera (monga C-plane, A-plane, R-plane) imayendera pogwiritsa ntchito zida zoyendetsera.
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Kudula Mawaya Ambiri
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Dulani ingot m'ma wafers opyapyala malinga ndi makulidwe ofunikira pogwiritsa ntchito zida zodulira za waya zambiri.
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Kuyang'anira Koyamba & Kuyikanso Kachiwiri
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Yang'anani ma wafer odulidwa (kukhuthala, kusalala, ndi zolakwika pamwamba).
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Chitani kupopera kachiwiri ngati pakufunika kuti muwongolere bwino makristalo.
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Kupukuta, Kupera & Kupukuta kwa CMP
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Chitani chamfering, kugaya pamwamba, ndi kupukuta kwa makina (CMP) pogwiritsa ntchito zida zapadera kuti mupeze malo owoneka ngati galasi.
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Kuyeretsa
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Tsukani bwino ma wafer pogwiritsa ntchito madzi oyera kwambiri komanso mankhwala m'chipinda choyera kuti muchotse tinthu tating'onoting'ono ndi zinthu zina zodetsa.
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Kuyang'anira Maso ndi Kuthupi
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Chitani kuzindikira ma transmittance ndikulemba deta ya optical.
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Yesani magawo a wafer kuphatikiza TTV (Total Thickness Variation), Bow, Warp, kulondola kwa malo, ndi kukhwima kwa pamwamba.
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Kuphimba (Mwasankha)
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Ikani zophimba (monga zophimba za AR, zigawo zoteteza) malinga ndi zomwe kasitomala akufuna.
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Kuyendera Komaliza & Kulongedza
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Chitani kafukufuku wa 100% mu chipinda choyera.
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Ikani ma wafer m'mabokosi a makaseti okhala ndi zinthu zoyera za Class-100 ndipo muwatseke musanatumize.
Kugwiritsa Ntchito Ma Wafers a Sapphire
Ma wafer a safiro, omwe ali ndi kuuma kwawo kwapadera, kutumizirana kwa kuwala kwabwino kwambiri, kutentha kwabwino kwambiri, komanso kutchinjiriza magetsi, amagwiritsidwa ntchito kwambiri m'mafakitale osiyanasiyana. Ntchito zawo sizimangokhudza mafakitale achikhalidwe a LED ndi optoelectronic komanso zikukula m'mafakitale a semiconductors, consumer electronics, komanso malo apamwamba oyendetsera ndege ndi chitetezo.
1. Ma semiconductor ndi Optoelectronics
Magawo a LED
Ma wafer a safiro ndi omwe amagwiritsidwa ntchito kwambiri pakukula kwa gallium nitride (GaN) epitaxial, omwe amagwiritsidwa ntchito kwambiri mu ma LED abuluu, ma LED oyera, ndi ukadaulo wa Mini/Micro LED.
Ma Diode a Laser (LDs)
Monga zinthu zogwiritsira ntchito ma diode a laser ochokera ku GaN, ma wafer a safiro amathandizira kupanga zipangizo za laser zamphamvu kwambiri komanso zokhalitsa.
Zojambulajambula
Mu zowunikira za ultraviolet ndi infrared, ma wafer a safiro nthawi zambiri amagwiritsidwa ntchito ngati mawindo owonekera komanso zotetezera kutentha.
2. Zipangizo Zopangira Ma Semiconductor
Ma RFIC (Ma Radio Frequency Integrated Circuits)
Chifukwa cha kutchinjiriza kwawo kwamagetsi kwabwino kwambiri, ma wafer a safiro ndi abwino kwambiri pazida zama microwave zomwe zimagwiritsa ntchito ma frequency ambiri komanso mphamvu zambiri.
Ukadaulo wa Silicon-on-Sapphire (SoS)
Pogwiritsa ntchito ukadaulo wa SoS, mphamvu ya parasitic imatha kuchepetsedwa kwambiri, zomwe zimapangitsa kuti magwiridwe antchito a circuit agwire bwino ntchito. Izi zimagwiritsidwa ntchito kwambiri mu kulumikizana kwa RF ndi zamagetsi amlengalenga.
3. Mapulogalamu Owoneka
Mawindo Owala a Infrared
Ndi mphamvu yotumizira mauthenga ambiri mu utali wa mafunde a 200 nm–5000 nm, safiro imagwiritsidwa ntchito kwambiri mu zida zowunikira ma infrared ndi machitidwe owongolera ma infrared.
Mawindo a Laser Amphamvu Kwambiri
Kuuma ndi kukana kutentha kwa safiro kumapangitsa kuti ikhale chinthu chabwino kwambiri chotetezera mawindo ndi magalasi m'makina amphamvu a laser.
4. Zamagetsi Zamagetsi Zamagetsi Zamagetsi
Zophimba za Lenzi ya Kamera
Kulimba kwambiri kwa safiro kumatsimikizira kukana kukanda kwa mafoni a m'manja ndi makamera.
Zosewerera zala
Ma wafer a safiro amatha kukhala ngati zophimba zolimba komanso zowonekera bwino zomwe zimapangitsa kuti zikhale zolondola komanso zodalirika pakuzindikira zala.
Ma Smartwatch ndi Ma Displays Apamwamba
Zophimba za safiro zimaphatikizapo kukana kukanda ndi kuwala kowala kwambiri, zomwe zimapangitsa kuti zikhale zodziwika bwino m'zinthu zamagetsi zapamwamba.
5. Ndege ndi Chitetezo
Ma Dome a Infrared a Missile
Mawindo a safiro amakhalabe owonekera bwino komanso okhazikika ngakhale kutentha kwambiri komanso kuthamanga kwambiri.
Machitidwe Owonera Amlengalenga
Amagwiritsidwa ntchito m'mawindo amphamvu kwambiri komanso zida zowonera zomwe zimapangidwira malo ovuta kwambiri.
Zinthu Zina Zodziwika Bwino za Sapphire
Zogulitsa Zowala
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Mawindo Owoneka a Sapphire
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Amagwiritsidwa ntchito mu ma laser, ma spectrometer, makina ojambula zithunzi za infrared, ndi mawindo a masensa.
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Mtundu wa ma transmission:UV 150 nm mpaka mid-IR 5.5 μm.
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Magalasi a Sapphire
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Imagwiritsidwa ntchito mu makina amphamvu kwambiri a laser komanso mu aerospace optics.
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Zitha kupangidwa ngati magalasi ozungulira, ozungulira, kapena ozungulira.
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Ma Prismu a Sapphire
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Amagwiritsidwa ntchito mu zida zoyezera kuwala ndi machitidwe owonetsera molondola.
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Kupaka Zinthu
About XINKEHUI
Shanghai Xinkehui New Material Co., Ltd. ndi imodzi mwa makampani akuluakulu ogulitsa zinthu padziko lonse lapansi.wogulitsa wamkulu kwambiri wa optical & semiconductor ku China, yomwe idakhazikitsidwa mu 2002. XKH idapangidwa kuti ipereke ofufuza amaphunziro ma wafer ndi zida zina zasayansi zokhudzana ndi semiconductor ndi ntchito zina. Zipangizo za semiconductor ndiye bizinesi yathu yayikulu, gulu lathu limadalira ukadaulo, kuyambira pomwe idakhazikitsidwa, XKH imachita nawo kafukufuku ndi chitukuko cha zipangizo zamagetsi zapamwamba, makamaka pankhani ya ma wafer / substrate osiyanasiyana.
Ogwirizana nawo
Ndi ukadaulo wake wabwino kwambiri wa zinthu za semiconductor, Shanghai Zhimingxin yakhala bwenzi lodalirika la makampani apamwamba padziko lonse lapansi komanso mabungwe odziwika bwino a maphunziro. Chifukwa cha kupitilira kwake pakupanga zinthu zatsopano komanso kuchita bwino, Zhimingxin yakhazikitsa ubale wolimba ndi atsogoleri amakampani monga Schott Glass, Corning, ndi Seoul Semiconductor. Mgwirizanowu sunangowonjezera luso la zinthu zathu, komanso walimbikitsa chitukuko chaukadaulo m'magawo a zamagetsi zamagetsi, zida zamagetsi zamagetsi, ndi zida za semiconductor.
Kuwonjezera pa mgwirizano ndi makampani odziwika bwino, Zhimingxin yakhazikitsanso ubale wogwirizana kwa nthawi yayitali ndi mayunivesite apamwamba padziko lonse lapansi monga Harvard University, University College London (UCL), ndi University of Houston. Kudzera m'mgwirizanowu, Zhimingxin sikuti imangopereka chithandizo chaukadaulo pamapulojekiti ofufuza zasayansi m'masukulu, komanso imatenga nawo mbali pakupanga zipangizo zatsopano ndi zatsopano zaukadaulo, kuonetsetsa kuti nthawi zonse timakhala patsogolo pamakampani opanga ma semiconductor.
Mwa mgwirizano wapafupi ndi makampani odziwika padziko lonse lapansi ndi mabungwe a maphunziro, Shanghai Zhimingxin ikupitiliza kulimbikitsa luso lamakono ndi chitukuko, kupereka zinthu zapamwamba komanso mayankho kuti akwaniritse zosowa zomwe zikukulirakulira pamsika wapadziko lonse lapansi.




