Ma Wafers a Quartz Opukutidwa ndi Chitsulo Chapamwamba a Semiconductor, Mapulogalamu a Photonics Optical 2″4″6″8″12″

Kufotokozera Kwachidule:

Quartz Yosakanizidwa—yomwe imadziwikanso kutiSilika Yosakanizidwa—ndi mtundu wosawoneka bwino wa silicon dioxide (SiO₂). Mosiyana ndi magalasi a borosilicate kapena magalasi ena a mafakitale, quartz yosakanikirana ilibe zinthu zina zowonjezera kapena zowonjezera, zomwe zimapangitsa kuti SiO₂ ikhale yopangidwa mwapadera ndi mankhwala. Imadziwika kuti imafalikira bwino kwambiri kudzera mu ultraviolet (UV) ndi infrared (IR), kuposa magalasi achikhalidwe.

Tumizani imelo kwa ife

Mawonekedwe

Chithunzi Chatsatanetsatane

Ma Wafers a Galasi Opangidwa ndi Silika ndi Quartz Optical-2

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Chidule cha Galasi la Quartz

Ma wafer a quartz ndi maziko a zida zamakono zambiri zomwe zimayendetsa dziko lamakono la digito. Kuyambira pakuyenda mu foni yanu yam'manja mpaka maziko a malo oyambira a 5G, quartz imapereka bata, chiyero, komanso kulondola kofunikira pamagetsi apamwamba komanso ma photonics. Kaya kuthandizira ma circuitry osinthasintha, kulola masensa a MEMS, kapena kupanga maziko a quantum computing, mawonekedwe apadera a quartz amawapangitsa kukhala ofunikira kwambiri m'mafakitale osiyanasiyana.

"Fused Silica" kapena "Fused Quartz" yomwe ndi gawo lopanda mawonekedwe la quartz (SiO2). Poyerekeza ndi galasi la borosilicate, silica yosakanikirana ilibe zowonjezera; motero imakhalapo mu mawonekedwe ake oyera, SiO2. Silica yosakanikirana ili ndi mphamvu yotumizira kwambiri mu infrared ndi ultraviolet spectrum poyerekeza ndi galasi wamba. Silica yosakanikirana imapangidwa posungunuka ndikulimbitsanso SiO2 yoyera kwambiri. Silica yosakanikirana yopangidwa ndi silicon imapangidwa kuchokera ku zinthu zoyambira za silicon monga SiCl4 zomwe zimasinthidwa ndi mpweya kenako zimasungunuka mumlengalenga wa H2 + O2. Fumbi la SiO2 lomwe limapangidwa pankhaniyi limaphatikizidwa ndi silica pa substrate. Ma block a silica osakanikirana amadulidwa kukhala ma wafers kenako ma wafers amapukutidwa.

Ma Wafers a Galasi Opangidwa ndi Silika ndi Quartz Optical

Zinthu Zofunika Kwambiri ndi Ubwino wa Quartz Glass Wafer

Kuyera Kwambiri (≥99.99% SiO2)
Zabwino kwambiri pa ntchito za semiconductor ndi photonics zoyera kwambiri komwe kuipitsidwa kwa zinthu kuyenera kuchepetsedwa.
Matenthedwe Osiyanasiyana Ogwira Ntchito
Imasunga kapangidwe kake kuyambira kutentha kwa cryogenic mpaka kupitirira 1100°C popanda kupindika kapena kuwonongeka.
Kutumiza kwabwino kwambiri kwa UV ndi IR
Imapereka kuwala kwabwino kwambiri kwa kuwala kuchokera ku ultraviolet yakuya (DUV) kudzera mu near-infrared (NIR), kuthandizira kugwiritsa ntchito bwino kuwala.
Kuchuluka kwa Kutentha Kotsika
Zimathandizira kukhazikika kwa miyeso pamene kutentha kusinthasintha, kuchepetsa kupsinjika ndikuwongolera kudalirika kwa njira.
Kukana Kwambiri kwa Mankhwala
Sili ndi ma acid ambiri, alkali, ndi zosungunulira—zomwe zimapangitsa kuti likhale loyenera kwambiri m'malo omwe ali ndi mankhwala amphamvu.
Kusinthasintha kwa Mapeto a Pamwamba
Imapezeka ndi zomaliza zosalala kwambiri, zopukutidwa mbali imodzi kapena ziwiri, zogwirizana ndi photonics ndi zofunikira za MEMS.

Njira Yopangira Quartz Glass Wafer

Ma wafer a quartz ophatikizidwa amapangidwa kudzera mu njira zingapo zolamulidwa komanso zolondola:

Kusankha Zinthu Zopangira
Kusankha magwero a quartz achilengedwe oyera kwambiri kapena magwero a SiO₂ opangidwa.
Kusungunuka ndi Kusakanikirana
Quartz imasungunuka pa ~2000°C mu uvuni wamagetsi pansi pa mlengalenga wolamulidwa kuti ichotse zinthu zomwe zimalowa ndi thovu.
Kupanga Block
Silika yosungunuka imaziziritsidwa kukhala mabuloko olimba kapena ma ingot.
Kudula kwa Wafer
Macheka a diamondi kapena waya amagwiritsidwa ntchito kudula ma ingot kukhala ma wafer blanks.
Kupalasa ndi Kupukuta
Malo onse awiriwa ndi osalala komanso opukutidwa kuti akwaniritse mawonekedwe enieni, makulidwe, komanso kukhwima.
Kuyeretsa ndi Kuyang'anira
Ma wafer amatsukidwa m'zipinda zoyera za ISO Class 100/1000 ndipo amawunikidwa mosamala kuti awone ngati ali ndi zolakwika komanso ngati ali ndi mawonekedwe ofanana.

Katundu wa Quartz Glass wafer

spec	gawo	4"	6"	8"	10"	12"
M'mimba mwake / kukula (kapena sikweya)	mm	100	150	200	250	300
Kulekerera (±)	mm	0.2	0.2	0.2	0.2	0.2
Kukhuthala	mm	0.10 kapena kuposerapo	0.30 kapena kuposerapo	0.40 kapena kuposerapo	0.50 kapena kuposerapo	0.50 kapena kuposerapo
Nyumba yodziwika bwino yoyamba	mm	32.5	57.5	Semi-notch	Semi-notch	Semi-notch
LTV (5mm×5mm)	μm	< 0.5	< 0.5	< 0.5	< 0.5	< 0.5
TTV	μm	< 2	< 3	< 3	< 5	< 5
Uta	μm	±20	±30	±40	±40	±40
Kupindika	μm	≤ 30	≤ 40	≤ 50	≤ 50	≤ 50
PLTV (5mm×5mm) < 0.4μm	%	≥95%	≥95%	≥95%	≥95%	≥95%
Kuzungulira Mphepete	mm	Kutsatira miyezo ya SEMI M1.2 / onani IEC62276
Mtundu wa pamwamba		Mbali Imodzi Yopukutidwa / Mbali Ziwiri Zopukutidwa
Mbali yopukutidwa Ra	nm	≤1	≤1	≤1	≤1	≤1
Zofunikira Zakumbuyo	μm	wamba 0.2-0.7 kapena wosinthidwa

Quartz vs. Zida Zina Zowonekera

Katundu	Galasi la Quartz	Galasi la Borosilicate	Safira	Galasi Yokhazikika
Kutentha Kwambiri Kogwira Ntchito	~1100°C	~500°C	~2000°C	~200°C
Kutumiza kwa UV	Zabwino Kwambiri (JGS1)	Wosauka	Zabwino	Wosauka kwambiri
Kukana Mankhwala	Zabwino kwambiri	Wocheperako	Zabwino kwambiri	Wosauka
Chiyero	Pamwamba kwambiri	Wotsika mpaka wocheperako	Pamwamba	Zochepa
Kukula kwa Kutentha	Zochepa kwambiri	Wocheperako	Zochepa	Pamwamba
Mtengo	Pakati mpaka pamwamba	Zochepa	Pamwamba	Zochepa kwambiri

Mafunso Ofunsidwa Kawirikawiri pa Wafer wa Magalasi a Quartz

Q1: Kodi kusiyana pakati pa fused quartz ndi fused silica ndi kotani?
Ngakhale kuti zonsezi ndi mitundu yopanda mawonekedwe ya SiO₂, quartz yosakanikirana nthawi zambiri imachokera ku magwero achilengedwe a quartz, pomwe silika yosakanikirana imapangidwa ndi kupanga. Pantchito, imapereka magwiridwe antchito ofanana, koma silika yosakanikirana ikhoza kukhala ndi chiyero chapamwamba komanso kufanana.

Q2: Kodi ma wafer a quartz osakanikirana angagwiritsidwe ntchito m'malo okhala ndi vacuum yambiri?
Inde. Chifukwa cha mphamvu zawo zochepa zotulutsa mpweya komanso kukana kutentha kwambiri, ma wafer a quartz osakanikirana ndi abwino kwambiri pamakina opumira mpweya komanso ntchito zamlengalenga.

Q3: Kodi ma wafer awa ndi oyenera kugwiritsa ntchito laser ya UV?
Ndithudi. Quartz yosakanikirana ili ndi mphamvu yotumizira mpaka ~185 nm, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsa ntchito DUV optics, lithography masks, ndi excimer laser systems.

Q4: Kodi mumathandizira kupanga ma wafer opangidwa mwamakonda?
Inde. Timapereka zosintha zonse kuphatikizapo kukula kwake, makulidwe ake, mtundu wa pamwamba pake, mawonekedwe ake osalala/osanjidwa, ndi mapangidwe a laser, kutengera zomwe mukufuna kugwiritsa ntchito.

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.

Chophimba Chopanda Choyera Kwambiri cha Sapphire Chopanda Choyera Chopanda Choyera 5