AlN-on-NPSS Wafer: Chophimba cha Aluminium Nitride Chogwira Ntchito Kwambiri pa Substrate Yopanda Kupukutidwa ya Sapphire Yogwiritsidwa Ntchito Pakutentha Kwambiri, Mphamvu Yaikulu, ndi RF
Mawonekedwe
Gawo la AlN Logwira Ntchito KwambiriAluminium Nitride (AlN) imadziwika chifukwa chakutentha kwakukulu(~200 W/m·K),mpata waukulundimagetsi owonongeka kwambiri, zomwe zimapangitsa kuti ikhale chinthu choyenera kwambiriamphamvu kwambiri, pafupipafupi kwambirindikutentha kwambirimapulogalamu.
Chosapukutidwa cha Sapphire Substrate (NPSS): Safire yosapukutidwa imaperekayotsika mtengo, yolimba kwambiri pamakinamaziko, kuonetsetsa kuti maziko ake ndi olimba kuti epitaxial ikule popanda kupukuta pamwamba. Kapangidwe kabwino ka makina a NPSS kamathandiza kuti ikhale yolimba m'malo ovuta.
Kukhazikika Kwambiri kwa Kutentha: Wafer ya AlN-on-NPSS imatha kupirira kusinthasintha kwakukulu kwa kutentha, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito muzamagetsi zamagetsi, makina a magalimoto, Ma LEDndintchito zowunikirazomwe zimafuna kuti ntchito ikhale yokhazikika pa kutentha kwambiri.
Kuteteza Magetsi: AlN ili ndi mphamvu zabwino kwambiri zotetezera magetsi, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito pamenekudzipatula kwa magetsindikofunikira kwambiri, kuphatikizapoZipangizo za RFndizamagetsi a microwave.
Kutaya Kutentha Kwambiri: Ndi kutentha kwambiri, AlN layer imatsimikizira kuti kutentha kumataya bwino, zomwe ndizofunikira kuti zipangizo zigwire ntchito bwino komanso zizikhala nthawi yayitali.
Magawo aukadaulo
| Chizindikiro | Kufotokozera |
| M'mimba mwake wa chofufumitsa | Mainchesi awiri, mainchesi anayi (kukula kovomerezeka kulipo) |
| Mtundu wa Pansi | Chosapukutidwa cha Sapphire Substrate (NPSS) |
| Kukhuthala kwa AlN Layer | 2µm mpaka 10µm (yosinthika) |
| Kukhuthala kwa gawo lapansi | 430µm ± 25µm (ya mainchesi awiri), 500µm ± 25µm (ya mainchesi 4) |
| Kutentha kwa Matenthedwe | 200 W/m·K |
| Kukana kwa Magetsi | Kuteteza kutentha kwambiri, koyenera kugwiritsa ntchito RF |
| Kuuma kwa pamwamba | Ra ≤ 0.5µm (ya AlN layer) |
| Kuyera kwa Zinthu Zakuthupi | AlN yoyera kwambiri (99.9%) |
| Mtundu | Choyera/Chosayera (AlN wosanjikiza ndi gawo la NPSS lowala) |
| Wafer Warp | < 30µm (wamba) |
| Mtundu wa Doping | Wosagwiritsidwa ntchito (akhoza kusinthidwa) |
Mapulogalamu
TheWafa wa AlN-on-NPSSYapangidwira ntchito zosiyanasiyana zapamwamba m'mafakitale angapo:
Zamagetsi Zamphamvu Kwambiri: Chifukwa cha kutentha kwambiri komanso mphamvu zotetezera kutentha za AlN layer, chimapangitsa kuti chikhale chinthu chabwino kwambiri pa ntchito zake.ma transistors amphamvu, zokonzansondima IC amphamvuamagwiritsidwa ntchito mumagalimoto, mafakitalendimphamvu zongowonjezwdwansomachitidwe.
Zigawo za Radio-Frequency (RF): Kapangidwe kabwino kwambiri ka AlN koteteza magetsi, pamodzi ndi kutayika kwake kochepa, kumathandiza kupangaMa transistors a RF, Ma HEMT (Ma transistors Oyenda ndi Ma Electron Ambiri), ndi zinazigawo za microwavezomwe zimagwira ntchito bwino pama frequency apamwamba komanso pamlingo wamagetsi.
Zipangizo ZowalaMa wafer a AlN-on-NPSS amagwiritsidwa ntchito muma diode a laser, Ma LEDndima photodetectors, komwekutentha kwakukulundikulimba kwa makinandizofunikira kwambiri kuti zigwire ntchito bwino kwa nthawi yayitali.
Masensa Otentha Kwambiri: Kuthekera kwa wafer kupirira kutentha kwambiri kumapangitsa kuti ikhale yoyenera kugwiritsidwa ntchitomasensa a kutenthandikuyang'anira zachilengedwem'mafakitale ngatindege, magalimotondimafuta ndi gasi.
Kupaka Semiconductor: Yogwiritsidwa ntchito mu zofalitsira kutenthandimagawo oyang'anira kutenthamu machitidwe opakira, kuonetsetsa kudalirika ndi kugwira ntchito bwino kwa ma semiconductors.
Mafunso ndi Mayankho
Q: Kodi ubwino waukulu wa ma wafer a AlN-on-NPSS ndi wotani poyerekeza ndi zipangizo zachikhalidwe monga silicon?
A: Ubwino waukulu ndi wa AlNkutentha kwakukulu, zomwe zimathandiza kuti ichotse kutentha bwino, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsidwa ntchitoamphamvu kwambirindintchito zomwe zimachitika pafupipafupikomwe kusamalira kutentha n'kofunika kwambiri. Kuphatikiza apo, AlN ili ndimpata waukulundipo ndi yabwino kwambirikutchinjiriza magetsi, zomwe zimapangitsa kuti ikhale yabwino kwambiri kugwiritsidwa ntchito muRFndizipangizo za microwavepoyerekeza ndi silikoni yachikhalidwe.
Q: Kodi gawo la AlN pa ma wafer a NPSS likhoza kusinthidwa kukhala lofanana ndi la ena?
A: Inde, gawo la AlN likhoza kusinthidwa malinga ndi makulidwe (kuyambira 2µm mpaka 10µm kapena kuposerapo) kuti likwaniritse zosowa za pulogalamu yanu. Timaperekanso kusintha malinga ndi mtundu wa doping (mtundu wa N kapena mtundu wa P) ndi zigawo zina za ntchito zapadera.
Q: Kodi kugwiritsa ntchito kwa wafer iyi m'makampani opanga magalimoto ndi kotani?
A: Mu makampani opanga magalimoto, ma wafer a AlN-on-NPSS amagwiritsidwa ntchito kwambirizamagetsi zamagetsi, Makina owunikira a LEDndimasensa a kutenthaAmapereka chithandizo chabwino kwambiri cha kutentha komanso kuteteza magetsi, zomwe ndizofunikira kwambiri pamakina ogwira ntchito bwino omwe amagwira ntchito pansi pa kutentha kosiyanasiyana.
Chithunzi Chatsatanetsatane



