8inch Silicon wafer P/N-mtundu (100) 1-100Ω dummy reclaim gawo lapansi
Kuyambitsa bokosi la wafer
8-inch silicon wafer ndi chinthu chomwe chimagwiritsidwa ntchito kwambiri pa silicon gawo lapansi ndipo chimagwiritsidwa ntchito kwambiri popanga mabwalo ophatikizika. Zophika za silicon zotere zimagwiritsidwa ntchito popanga mitundu yosiyanasiyana ya mabwalo ophatikizika, kuphatikiza ma microprocessors, ma memory chips, masensa ndi zida zina zamagetsi. 8-inchi zowotcha za silicon zimagwiritsidwa ntchito kwambiri kupanga tchipisi tating'onoting'ono, zokhala ndi zabwino kuphatikiza malo okulirapo komanso kuthekera kopanga tchipisi tambiri pachowotcha chimodzi cha silicon, zomwe zimapangitsa kuti ntchito ichuluke. Chowotcha cha silicon cha 8-inch chilinso ndi makina abwino komanso opangira mankhwala, omwe ndi oyenera kupanga magawo akuluakulu ophatikizika.
Zogulitsa
8" P/N mtundu, wopukutira pakachitsulo kachitsulo (25pcs)
Kutalika: 200
Kukaniza: 0.1 - 40 ohm•cm (Itha kusiyana kuchokera pagulu kupita pagulu)
makulidwe: 725 +/- 20um
Gulu la Prime / Monitor / Test
ZINTHU ZONSE
Parameter | Khalidwe |
Mtundu/Dopant | P, Boron N, Phosphorous N, Antimony N, Arsenic |
Mayendedwe | <100>, <111> chepetsani machitidwe malinga ndi zomwe kasitomala akufuna |
Zinthu za oxygen | 1019ppmA Kulekerera Kwamakonda malinga ndi kasitomala |
Zinthu za Carbon | <0.6 ppmA |
ZINTHU ZAMAKHALIDWE
Parameter | Prime | Monitor/ Mayeso A | Yesani |
Diameter | 200 ± 0.2mm | 200 ± 0.2mm | 200 ± 0.5 mm |
Makulidwe | 725±20µm (muyezo) | 725±25µm(muyezo) 450±25µm 625 ± 25µm 1000±25µm 1300±25µm 1500±25µm | 725±50µm (muyezo) |
TTV | <5µm | <10µm | <15µm |
Kugwada | <30µm | <30µm | <50µm |
Manga | <30µm | <30µm | <50µm |
Kuzungulira M'mphepete | Zotsatira za SEMI-STD | ||
Kuyika chizindikiro | Primary SEMI-Flat yokha, SEMI-STD Flats Jeida Flat, Notch |
Parameter | Prime | Monitor/ Mayeso A | Yesani |
Zofunikira Zapambali | |||
Mkhalidwe wapamtunda | Chemical Mechanical Wopukutidwa | Chemical Mechanical Wopukutidwa | Chemical Mechanical Wopukutidwa |
Kukalipa Pamwamba | <2A° | <2A° | <2A° |
Kuipitsidwa Tinthu@>0.3 µm | = 20 | = 20 | = 30 |
Chifunga, maenje Peel ya Orange | Palibe | Palibe | Palibe |
Wowona, Marks Striations | Palibe | Palibe | Palibe |
Zoyenera Kumbuyo Mbali | |||
Ming'alu, khwangwala, macheka mawanga, madontho | Palibe | Palibe | Palibe |
Mkhalidwe wapamwamba | Caustic yokhazikika |