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8inch SiC Production grade wafer 4H-N SiC substrate

8inch SiC Production grade wafer 4H-N SiC substrate Chithunzi Chowonetsedwa
  • 8inch SiC Production grade wafer 4H-N SiC substrate
  • 8inch SiC Production grade wafer 4H-N SiC substrate
  • 8inch SiC Production grade wafer 4H-N SiC substrate

Kufotokozera Kwachidule:

Ma substrates a SiC a mainchesi 8 amagwiritsidwa ntchito mu zipangizo zamagetsi zamphamvu kwambiri, monga ma MOSFET amphamvu (Metal Oxide Semiconductor Field Effect Transistors), ma Schottky diodes ndi zipangizo zina zamagetsi zamagetsi.


Mawonekedwe

Tebulo lotsatirali likuwonetsa kufotokozera kwa ma wafer athu a 8inch SiC:

Ma Specs a SiC DSP a 8inch N
Nambala Chinthu Chigawo Kupanga Kafukufuku Chidole
1: magawo
1.1 mtundu wa polytype -- 4H 4H 4H
1.2 kuyang'ana pamwamba ° <11-20>4±0.5 <11-20>4±0.5 <11-20>4±0.5
2: Chizindikiro chamagetsi
2.1 dopant -- Nayitrogeni wa mtundu wa n Nayitrogeni wa mtundu wa n Nayitrogeni wa mtundu wa n
2.2 kukana ohm ·cm 0.015~0.025 0.01~0.03 NA
3: Chizindikiro cha makina
3.1 m'lifupi mm 200±0.2 200±0.2 200±0.2
3.2 makulidwe μm 500±25 500±25 500±25
3.3 Kuyang'ana kwa notch ° [1- 100]±5 [1- 100]±5 [1- 100]±5
3.4 Kuzama kwa Notch mm 1 ~ 1.5 1 ~ 1.5 1 ~ 1.5
3.5 LTV μm ≤5 (10mm * 10mm) ≤5 (10mm * 10mm) ≤10 (10mm * 10mm)
3.6 TTV μm ≤10 ≤10 ≤15
3.7 Uta μm -25~25 -45~45 -65~65
3.8 Kupindika μm ≤30 ≤50 ≤70
3.9 AFM nm Ra≤0.2 Ra≤0.2 Ra≤0.2
4: Chilengedwe
4.1 kuchulukana kwa mapaipi ang'onoang'ono ea/cm2 ≤2 ≤10 ≤50
4.2 zinthu zachitsulo maatomu/cm2 ≤1E11 ≤1E11 NA
4.3 TSD ea/cm2 ≤500 ≤1000 NA
4.4 BPD ea/cm2 ≤2000 ≤5000 NA
4.5 TED ea/cm2 ≤7000 ≤10000 NA
5. Ubwino wakutsogolo
5.1 kutsogolo -- Si Si Si
5.2 kumaliza pamwamba -- Si-face CMP Si-face CMP Si-face CMP
5.3 tinthu tating'onoting'ono ea/wafer ≤100 (kukula ≥0.3μm) NA NA
5.4 kukanda ea/wafer ≤5, Kutalika konse≤200mm NA NA
5.5 Mphepete
ming'alu/mabala/mabala/kuipitsidwa		 -- Palibe Palibe NA
5.6 Madera a polytype -- Palibe Malo ≤10% Malo ≤30%
5.7 chizindikiro chakutsogolo -- Palibe Palibe Palibe
6: Ubwino wa kumbuyo
6.1 kumaliza kumbuyo -- MP wa nkhope ya C MP wa nkhope ya C MP wa nkhope ya C
6.2 kukanda mm NA NA NA
6.3 Mphepete mwa zolakwika kumbuyo
tchipisi/zopindika		 -- Palibe Palibe NA
6.4 Kusakhazikika kwa msana nm Ra≤5 Ra≤5 Ra≤5
6.5 Kulemba kumbuyo -- Chingwe Chingwe Chingwe
7:m'mphepete
7.1 m'mphepete -- Chamfer Chamfer Chamfer
8: Phukusi
8.1 kulongedza -- Yokonzeka ndi vacuum
kulongedza		 Yokonzeka ndi vacuum
kulongedza		 Yokonzeka ndi vacuum
kulongedza
8.2 kulongedza -- Chophikira chamitundu yambiri
phukusi la makaseti		 Chophikira chamitundu yambiri
phukusi la makaseti		 Chophikira chamitundu yambiri
phukusi la makaseti

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