8inch SiC Kupanga kalasi yopyapyala 4H-N SiC gawo lapansi
Gome lotsatirali likuwonetsa zowotcha zathu za 8inch SiC:
| 8inch N-mtundu wa SiC DSP Zolemba | |||||
| Nambala | Kanthu | Chigawo | Kupanga | Kafukufuku | Dummy |
| 1: magawo | |||||
| 1.1 | polytype | -- | 4H | 4H | 4H |
| 1.2 | kuyang'ana pamwamba | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2:Zigawo zamagetsi | |||||
| 2.1 | dopant | -- | n-mtundu wa Nayitrogeni | n-mtundu wa Nayitrogeni | n-mtundu wa Nayitrogeni |
| 2.2 | resistivity | uwu ·cm | 0.015 ~ 0.025 | 0.01~0.03 | NA |
| 3:Makina parameter | |||||
| 3.1 | awiri | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | makulidwe | μm | 500 ± 25 | 500 ± 25 | 500 ± 25 |
| 3.3 | Notch orientation | ° | [1- 100] ± 5 | [1- 100] ± 5 | [1- 100] ± 5 |
| 3.4 | Kuzama kwa Notch | mm | 1-1.5 | 1-1.5 | 1-1.5 |
| 3.5 | LTV | μm | ≤5(10mm*10mm) | ≤5(10mm*10mm) | ≤10(10mm*10mm) |
| 3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Kugwada | μm | -25-25 | -45-45 | - 65-65 |
| 3.8 | Warp | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4:Chinthu | |||||
| 4.1 | kachulukidwe ka micropipe | ndi cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | zitsulo | ma atomu/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ndi cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | ndi cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | ndi cm2 | ≤7000 | ≤10000 | NA |
| 5.Front khalidwe | |||||
| 5.1 | kutsogolo | -- | Si | Si | Si |
| 5.2 | kumaliza pamwamba | -- | Si-nkhope CMP | Si-nkhope CMP | Si-nkhope CMP |
| 5.3 | chidutswa | mkate / mkate | ≤100(kukula≥0.3μm) | NA | NA |
| 5.4 | zikande | mkate / mkate | ≤5, Total Utali≤200mm | NA | NA |
| 5.5 | M'mphepete tchipisi/ma indents/ming'alu/madontho/kuipitsidwa | -- | Palibe | Palibe | NA |
| 5.6 | Magawo a polytype | -- | Palibe | Chigawo ≤10% | Chigawo ≤30% |
| 5.7 | chizindikiro chakutsogolo | -- | Palibe | Palibe | Palibe |
| 6:Ubwino wammbuyo | |||||
| 6.1 | kumaliza kumbuyo | -- | C-nkhope MP | C-nkhope MP | C-nkhope MP |
| 6.2 | zikande | mm | NA | NA | NA |
| 6.3 | Kumbuyo zolakwika m'mphepete chips / indents | -- | Palibe | Palibe | NA |
| 6.4 | Msana roughness | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Kulemba kumbuyo | -- | Notch | Notch | Notch |
| 7 :panja | |||||
| 7.1 | m'mphepete | -- | Chamfer | Chamfer | Chamfer |
| 8: paketi | |||||
| 8.1 | kuyika | -- | Epi-okonzeka ndi vacuum kuyika | Epi-okonzeka ndi vacuum kuyika | Epi-okonzeka ndi vacuum kuyika |
| 8.2 | kuyika | -- | Zophika zambiri kupaka makaseti | Zophika zambiri kupaka makaseti | Zophika zambiri kupaka makaseti |
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