8inch SiC Kupanga kalasi yopyapyala 4H-N SiC gawo lapansi

Kufotokozera Kwachidule:

Magawo a 8-inch SiC amagwiritsidwa ntchito pazida zamagetsi zamphamvu kwambiri, monga ma MOSFET amphamvu (Metal Oxide Semiconductor Field Effect Transistors), Schottky diode ndi zida zina zamagetsi zamagetsi.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Gome lotsatirali likuwonetsa zowotcha zathu za 8inch SiC:

8inch N-mtundu wa SiC DSP Zolemba
Nambala	Kanthu	Chigawo	Kupanga	Kafukufuku	Dummy
1: magawo
1.1	polytype	--	4H	4H	4H
1.2	kuyang'ana pamwamba	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2:Zigawo zamagetsi
2.1	dopant	--	n-mtundu wa Nayitrogeni	n-mtundu wa Nayitrogeni	n-mtundu wa Nayitrogeni
2.2	resistivity	uwu ·cm	0.015 ~ 0.025	0.01~0.03	NA
3:Makina parameter
3.1	awiri	mm	200±0.2	200±0.2	200±0.2
3.2	makulidwe	μm	500 ± 25	500 ± 25	500 ± 25
3.3	Notch orientation	°	[1- 100] ± 5	[1- 100] ± 5	[1- 100] ± 5
3.4	Kuzama kwa Notch	mm	1-1.5	1-1.5	1-1.5
3.5	LTV	μm	≤5(10mm*10mm)	≤5(10mm*10mm)	≤10(10mm*10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	Kugwada	μm	-25-25	-45-45	- 65-65
3.8	Warp	μm	≤30	≤50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4:Chinthu
4.1	kachulukidwe ka micropipe	ndi cm2	≤2	≤10	≤50
4.2	zitsulo	ma atomu/cm2	≤1E11	≤1E11	NA
4.3	TSD	ndi cm2	≤500	≤1000	NA
4.4	BPD	ndi cm2	≤2000	≤5000	NA
4.5	TED	ndi cm2	≤7000	≤10000	NA
5.Front khalidwe
5.1	kutsogolo	--	Si	Si	Si
5.2	kumaliza pamwamba	--	Si-nkhope CMP	Si-nkhope CMP	Si-nkhope CMP
5.3	chidutswa	mkate / mkate	≤100(kukula≥0.3μm)	NA	NA
5.4	zikande	mkate / mkate	≤5, Total Utali≤200mm	NA	NA
5.5	M'mphepete tchipisi/ma indents/ming'alu/madontho/kuipitsidwa	--	Palibe	Palibe	NA
5.6	Magawo a polytype	--	Palibe	Chigawo ≤10%	Chigawo ≤30%
5.7	chizindikiro chakutsogolo	--	Palibe	Palibe	Palibe
6:Ubwino wammbuyo
6.1	mmbuyo kumaliza	--	C-nkhope MP	C-nkhope MP	C-nkhope MP
6.2	zikande	mm	NA	NA	NA
6.3	Kumbuyo zolakwika m'mphepete chips / indents	--	Palibe	Palibe	NA
6.4	Msana roughness	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Kulemba kumbuyo	--	Notch	Notch	Notch
7 :panja
7.1	m'mphepete	--	Chamfer	Chamfer	Chamfer
8: paketi
8.1	kuyika	--	Epi-okonzeka ndi vacuum kuyika	Epi-okonzeka ndi vacuum kuyika	Epi-okonzeka ndi vacuum kuyika
8.2	kuyika	--	Zophika zambiri kupaka makaseti	Zophika zambiri kupaka makaseti	Zophika zambiri kupaka makaseti