6inch SiC Epitaxiy wafer N/P mtundu amavomereza makonda

6inch SiC Epitaxiy wafer N/P mtundu amavomereza Chithunzi Chosinthidwa makonda

Kufotokozera Kwachidule:

ndi kupereka 4, 6, 8 inchi pakachitsulo carbide epitaxial buledi ndi epitaxial foundry ntchito, kupanga (600V ~ 3300V) zipangizo mphamvu kuphatikizapo SBD, JBS, PiN, MOSFET, JFET, BJT, GTO, IGBT ndi zina zotero.

Titha Kupereka zowotcha za 4-inch ndi 6-inch SiC epitaxial zopangira zida zamagetsi kuphatikiza SBD JBS PiN MOSFET JFET BJT GTO & IGBT kuyambira 600V mpaka 3300V

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Kukonzekera kwa silicon carbide epitaxial wafer ndi njira yogwiritsira ntchito ukadaulo wa Chemical Vapor Deposition (CVD).Zotsatirazi ndi zofunikira zaukadaulo ndi njira zokonzekera:

mfundo zaukadaulo:

Chemical Vapor Deposition: Pogwiritsa ntchito mpweya wamafuta mu gawo la gasi, pansi pamikhalidwe yodziwika bwino, imawola ndikuyikidwa pagawo lapansi kuti ipange filimu yopyapyala yomwe mukufuna.

Gasi-gawo reaction: Kupyolera mu pyrolysis kapena akulimbana anachita, zosiyanasiyana zopangira mpweya mu gawo mpweya amasinthidwa mankhwala mu chipinda anachita.

Njira zokonzekera:

Kuchiza kwa gawo lapansi: Gawoli limayikidwa kuyeretsedwa pamwamba ndi kukonzedweratu kuti zitsimikizire ubwino ndi crystallinity wa epitaxial wafer.

Rection chamber debugging: sinthani kutentha, kuthamanga ndi kuthamanga kwa chipinda chochitiramo ndi magawo ena kuti mutsimikizire kukhazikika ndi kuwongolera zomwe zikuchitika.

Kupereka kwazinthu zopangira: perekani zopangira zopangira gasi muchipinda chochitiramo, kusakaniza ndikuwongolera kuchuluka kwamayendedwe ngati pakufunika.

Njira yochitirapo kanthu: Powotcha chipinda chochitirapo kanthu, chakudya cha gaseous chimalowa m'chipindamo kuti chipange gawo lomwe mukufuna, mwachitsanzo, filimu ya silicon carbide.

Kuziziritsa ndi kutsitsa: Kumapeto kwa zomwe zimachitika, kutentha kumatsitsidwa pang'onopang'ono kuti kuziziritsa ndi kulimbitsa madipoziti mu chipinda chochitiramo.

Epitaxial wafer annealing and post-processing: chowotcha cha epitaxial choyikidwa chimasungidwa ndikusinthidwa pambuyo pake kuti chiwongolere mphamvu zake zamagetsi ndi kuwala.

Masitepe enieni ndi mikhalidwe ya silicon carbide epitaxial wafer yokonzekera ndondomeko imatha kusiyana kutengera zida ndi zofunikira.Zomwe zili pamwambazi ndizomwe zimayendera komanso ndondomeko, ntchito yeniyeniyo iyenera kusinthidwa ndikukonzedwa molingana ndi momwe zilili.