6inchi GaN-On-Sapphire
150mm 6inch GaN pa Silicon/Sapphire/SiC Epi-layer wafer Gallium nitride epitaxial wafer
Wafer wa sapphire wa mainchesi 6 ndi chinthu chapamwamba kwambiri cha semiconductor chomwe chili ndi zigawo za gallium nitride (GaN) zomwe zimamera pa sapphire substrate. Chidachi chili ndi mphamvu zabwino kwambiri zoyendera zamagetsi ndipo ndi chabwino kwambiri popanga zida za semiconductor zamphamvu kwambiri komanso zamafupipafupi.
Njira Yopangira: Njira yopangira imaphatikizapo kukulitsa zigawo za GaN pa substrate ya safiro pogwiritsa ntchito njira zamakono monga metal-organic chemical vapor deposition (MOCVD) kapena molecular beam epitaxy (MBE). Njira yopangira imachitika pansi pa mikhalidwe yolamulidwa kuti zitsimikizire kuti kristalo ndi filimu yofanana.
Kugwiritsa ntchito ma GaN-On-Sapphire a mainchesi 6: Ma chips a safiro a mainchesi 6 amagwiritsidwa ntchito kwambiri pa kulumikizana kwa ma microwave, machitidwe a radar, ukadaulo wopanda zingwe ndi ma optoelectronics.
Ntchito zina zodziwika bwino zimaphatikizapo
1. Chokulitsa mphamvu cha Rf
2. Makampani owunikira a LED
3. Zipangizo zolumikizirana ndi netiweki yopanda zingwe
4. Zipangizo zamagetsi pamalo otentha kwambiri
5. Zipangizo zamagetsi
Zofotokozera za malonda
- Kukula: M'mimba mwake wa substrate ndi mainchesi 6 (pafupifupi 150 mm).
- Ubwino wa pamwamba: Pamwamba pake papukutidwa bwino kuti pakhale galasi labwino kwambiri.
- Kukhuthala: Kukhuthala kwa gawo la GaN kungasinthidwe malinga ndi zofunikira zinazake.
- Kupaka: Pansi pake pamakhala zinthu zotsutsana ndi malo ozungulira kuti zisawonongeke panthawi yonyamula.
- Malo oikira m'mphepete: Pansi pake pali malo oikira omwe amathandiza kuti chipangizocho chizigwira ntchito bwino komanso moyenera panthawi yokonzekera.
- Magawo ena: Magawo ena monga kuonda, kukana kugwiritsa ntchito mankhwala osokoneza bongo komanso kuchuluka kwa mankhwala osokoneza bongo amatha kusinthidwa malinga ndi zosowa za makasitomala.
Ndi mphamvu zawo zapamwamba komanso ntchito zosiyanasiyana, ma wafer a safiro a mainchesi 6 ndi chisankho chodalirika pakupanga zida zapamwamba za semiconductor m'mafakitale osiyanasiyana.
| Pansi pa nthaka | 6” 1mm <111> p-type Si | 6” 1mm <111> p-type Si |
| Epi ThickAvg | ~5um | ~7um |
| Epi ThickUnif | <2% | <2% |
| Uta | +/-45um | +/-45um |
| Kusweka | <5mm | <5mm |
| BV yoyimirira | >1000V | >1400V |
| HEMT Al% | 25-35% | 25-35% |
| HEMT ThickAvg | 20-30nm | 20-30nm |
| Insitu SiN Cap | 5-60nm | 5-60nm |
| 2DEG conc. | ~1013cm-2 | ~1013cm-2 |
| Kuyenda | ~2000cm2/Vs (<2%) | ~2000cm2/Vs (<2%) |
| Rsh | <330ohm/sikweya (<2%) | <330ohm/sikweya (<2%) |
Chithunzi Chatsatanetsatane
