4inch SiC Epi chowotcha cha MOS kapena SBD

4inch SiC Epi wafer ya MOS kapena SBD Featured Image

Kufotokozera Kwachidule:

SiCC ili ndi mzere wathunthu wa SiC (Silicon Carbide) wopangira gawo lapansi, kuphatikiza kukula kwa kristalo, kukonza zophatikizika, kupanga wafer, kupukuta, kuyeretsa ndi kuyesa. Pakali pano, titha kupereka axial kapena off-olamulira theka-kuteteza ndi theka-conductive 4H ndi 6H SiC zopyapyala ndi makulidwe a 5x5mm2, 10x10mm2, 2″, 3″, 4″ ndi 6″, kuthyola chilema kuponderezedwa, kristalo processing. ndi kukula mofulumira ndi zina Iwo wathyola mu matekinoloje kiyi monga kupondereza chilema, kukonza mbewu za kristalo ndi kukula mwachangu, ndikulimbikitsa kafukufuku woyambira ndi chitukuko cha silicon carbide epitaxy, zida ndi kafukufuku wina wokhudzana ndi izi.

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Zogulitsa Tags

Epitaxy imatanthawuza kukula kwa zinthu zosanjikiza zapamwamba zamtundu umodzi wa kristalo pamwamba pa gawo lapansi la silicon carbide. Pakati pawo, kukula kwa gallium nitride epitaxial wosanjikiza pa semi-insulating silicon carbide gawo lapansi amatchedwa heterogeneous epitaxy; Kukula kwa silicon carbide epitaxial layer pamwamba pa conductive silicon carbide gawo lapansi kumatchedwa homogeneous epitaxy.

Epitaxial imagwirizana ndi zofunikira za kapangidwe ka chipangizo cha kukula kwa gawo lalikulu la ntchito, makamaka limatsimikizira magwiridwe antchito a chip ndi chipangizocho, mtengo wa 23%. Njira zazikulu za SiC woonda filimu epitaxy pa siteji iyi ndi monga: chemical vapor deposition (CVD), molecular beam epitaxy (MBE), liquid phase epitaxy (LPE), ndi pulsed laser deposition and sublimation (PLD).

Epitaxy ndi ulalo wofunikira kwambiri pamakampani onse. Mwa kukulitsa zigawo za GaN epitaxial pazigawo za semi-insulating silicon carbide, zowotcha za GaN epitaxial zochokera ku silicon carbide zimapangidwa, zomwe zimatha kupangidwanso kukhala zida za GaN RF monga ma electron mobility transistors (HEMTs);

Ndi kukula pakachitsulo carbide epitaxial wosanjikiza pa conductive gawo lapansi kupeza pakachitsulo carbide epitaxial mtanda, ndi mu epitaxial wosanjikiza pa kupanga Schottky diodes, golide-oksijeni theka munda zotsatira transistors, insulated chipata bipolar transistors ndi zipangizo zina mphamvu, kotero khalidwe la The epitaxial pa ntchito ya chipangizo ndi yaikulu kwambiri pa chitukuko cha makampani akugwiranso ntchito yofunika kwambiri.