4 inch SiC Wafers 6H Semi-Insulating SiC Substrates prime, research, and dummy grade

Kufotokozera Kwachidule:

Semi-insulated silicon carbide gawo lapansi limapangidwa ndi kudula, kugaya, kupukuta, kuyeretsa ndi ukadaulo wina wokonza pambuyo pakukula kwa semi-insulated silicon carbide crystal. Wosanjikiza kapena multilayer crystal wosanjikiza amakula pa gawo lapansi lomwe limakwaniritsa zofunikira zamtundu wa epitaxy, ndiyeno chipangizo cha microwave RF chimapangidwa pophatikiza kapangidwe ka dera ndi kuyika. Likupezeka ngati 2inch 3inch 4incgh 6inch 8 inchi mafakitale, kafukufuku ndi mayeso kalasi theka-insulated pakachitsulo carbide gawo limodzi galasi.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Mafotokozedwe a Zamalonda

Gulu			Zero MPD Kalasi Yopanga (Z Giredi)			Magiredi Okhazikika Opanga (P Giredi)		Dummy Grade (D Grade)
Diameter			99.5 mm ~ 100.0 mm
	4H-SI		500 μm ± 20 μm			500 μm ± 25 μm
Wafer Orientation			Otalikirana: 4.0 ° kulowera <1120 > ± 0.5 ° kwa 4H-N, Pa axis: <0001>±0.5° kwa 4H-SI
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Chiyambi cha Flat Orientation		{10-10} ±5.0°
Utali Woyambira Wathyathyathya		32.5 mm± 2.0 mm
Kutalika kwa Sekondale		18.0 mm± 2.0 mm
Sekondale Flat Orientation		Silicon nkhope m'mwamba: 90 ° CW. kuchokera ku Prime flat ± 5.0 °
Kupatula M'mphepete		3 mm
LTV/TTV/Bow/Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Ukali			C nkhope				Chipolishi		Ra≤1 nm
			Ndi face	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Mphepete Mng'alu Mwa Kuwala Kwakukulu Kwambiri		Palibe						Kutalika kochulukira ≤ 10 mm, limodzi kutalika ≤2 mm
Hex Plates Mwa Kuwala Kwakukulu Kwambiri		Malo owonjezera ≤0.05%						Malo owonjezera ≤0.1%
Madera a Polytype Mwa Kuwala Kwakukulu Kwambiri		Palibe						Malo owonjezera≤3%
Mawonekedwe a Carbon Inclusions		Malo owonjezera ≤0.05%						Malo owonjezera ≤3%
Silicon Surface Scratches Ndi Kuwala Kwakukulu Kwambiri		Palibe						Utali wochuluka≤1＊wafer awiri
Mphepete Chips Mmwamba Mwamphamvu Kuwala		Palibe chololedwa ≥0.2 mm m'lifupi ndi kuya						5 zololedwa, ≤1 mm iliyonse
Silicon Surface Kuipitsidwa Ndi High Intensity		Palibe
Kupaka		Makaseti amitundu yopyapyala Kapena Chidebe Chowotcha Chimodzi