Ma Wafers a SiC a mainchesi 4 6H Semi-Insulating SiC Substrates ndi abwino kwambiri, ofufuza, komanso odabwitsa.

Ma Wafers a SiC a mainchesi 4 6H Semi-Insulating SiC Substrates abwino, ofufuza, komanso odziwika bwino Chithunzi Chowonetsedwa

Kufotokozera Kwachidule:

Gawo la silicon carbide lokhala ndi insulation yochepa limapangidwa mwa kudula, kupukuta, kupukuta, kuyeretsa ndi ukadaulo wina wokonza pambuyo pa kukula kwa silicon carbide crystal yokhala ndi insulation yochepa. Gawo la kristalo lokhala ndi layer kapena multilayer limakulitsidwa pa gawo lomwe limakwaniritsa zofunikira zamtundu monga epitaxy, kenako chipangizo cha microwave RF chimapangidwa pophatikiza kapangidwe ka dera ndi ma phukusi. Likupezeka ngati 2inch 3inch 4incgh 6inch 8inch mafakitale, kafukufuku ndi mayeso a silicon carbide single crystal substrates.

Tumizani imelo kwa ife

Mawonekedwe

Mafotokozedwe a Zamalonda

Giredi			Giredi Yopanga ya Zero MPD (Giredi Z)			Giredi Yopanga Yokhazikika (Giredi ya P)		Giredi Yosamveka (Giredi D)
M'mimba mwake			99.5 mm ~ 100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Kuwongolera kwa Wafer			Kutseka kwa mzere: 4.0° kulowera ku < 1120 > ± 0.5° pa 4H-N, Kutseka kwa mzere: <0001>± 0.5° pa 4H-SI
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Kuyang'ana Kwambiri Pang'onopang'ono		{10-10} ±5.0°
Utali Woyamba Wathyathyathya		32.5 mm±2.0 mm
Utali Wachiwiri Wathyathyathya		18.0 mm±2.0 mm
Kuyang'ana Kwachiwiri Kwapafupi		Silikoni yoyang'ana mmwamba: 90° CW. kuchokera ku Prime flat ±5.0°
Kupatula Mphepete		3 mm
LTV/TTV/Uta/Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Kuuma			Nkhope ya C				Chipolishi		Ra≤1 nm
			Nkhope ya Si	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Ming'alu ya Mphepete Yopangidwa ndi Kuwala Kwakukulu Kwambiri		Palibe						Kutalika kokwanira ≤ 10 mm, kamodzi kutalika ≤2 mm
Mbale za Hex Ndi Kuwala Kwakukulu Kwambiri		Malo osonkhanitsidwa ≤0.05%						Malo osonkhanitsidwa ≤0.1%
Malo Opangidwa ndi Polytype Ndi Kuwala Kwambiri		Palibe						Malo osonkhanitsidwa ≤3%
Kuphatikizidwa kwa Kaboni Yowoneka		Malo osonkhanitsidwa ≤0.05%						Malo osonkhanitsidwa ≤3%
Kukanda kwa Silicon Pamwamba Ndi Kuwala Kwambiri		Palibe						Kutalika kokwanira ≤1 * m'mimba mwake wa wafer
Ma Chips a M'mphepete Okhala ndi Mphamvu Yaikulu		Palibe chololedwa m'lifupi ndi kuya kwa ≥0.2 mm						5 zololedwa, ≤1 mm iliyonse
Kuipitsidwa kwa Silicon pamwamba ndi Mphamvu Yaikulu		Palibe
Kulongedza		Kaseti Yokhala ndi Ma Wafer Ambiri Kapena Chidebe Chimodzi Chokhala ndi Ma Wafer