3 inch High Purity (Undoped) Silicon Carbide Wafers semi-Insulating Sic Substrates (HPSl)
Katundu
1. Katundu Wakuthupi ndi Kapangidwe
● Mtundu Wazinthu: Purity High (Undoped) Silicon Carbide (SiC)
● Diameter: mainchesi 3 (76.2 mm)
● Makulidwe: 0.33-0.5 mm, makonda malinga ndi zofunikira za ntchito.
● Crystal Structure: 4H-SiC polytype yokhala ndi hexagonal lattice, yomwe imadziwika ndi kuyenda kwa electron komanso kukhazikika kwa kutentha.
●Mayendedwe:
oStandard: [0001] (C-ndege), yoyenera ntchito zosiyanasiyana.
osakonda: Otalikirana (4° kapena 8° kupendekeka) pakukula kwa epitaxial kwa zigawo za chipangizo.
●Kuyanjanitsika: Kusiyana kwa makulidwe onse (TTV) ●Ubwino Wa Pamwamba:
opukutidwa mpaka oLow-defect density (<10/cm² kachulukidwe ka micropipe). 2. Zida Zamagetsi ● Kukaniza: >109^99 Ω·cm, kusungidwa ndi kuchotsedwa kwa ma dopants mwadala.
● Mphamvu ya Dielectric: Kupirira kwapamwamba kwambiri ndi kutaya kochepa kwa dielectric, koyenera kwa ntchito zamphamvu kwambiri.
● Thermal Conductivity: 3.5-4.9 W / cm·K, zomwe zimathandiza kuti kutentha kwabwino kuwonongeke pazida zogwira ntchito kwambiri.
3. Thermal ndi Mechanical Properties
● Wide Bandgap: 3.26 eV, kuthandizira ntchito pansi pa magetsi apamwamba, kutentha kwakukulu, ndi kutentha kwakukulu.
● Kuuma: Mohs sikelo 9, kuonetsetsa kulimba motsutsana ndi kuvala kwa makina panthawi yokonza.
● Kuwonjeza Koyefita: 4.2×10−6/K4.2 \times 10^{-6}/\text{K}4.2×10−6/K, kuonetsetsa kukhazikika kwa dimensional pansi pa kusintha kwa kutentha.
Parameter | Kalasi Yopanga | Gulu la Kafukufuku | Dummy Grade | Chigawo |
Gulu | Kalasi Yopanga | Gulu la Kafukufuku | Dummy Grade | |
Diameter | 76.2 ± 0.5 | 76.2 ± 0.5 | 76.2 ± 0.5 | mm |
Makulidwe | 500 ± 25 | 500 ± 25 | 500 ± 25 | µm |
Wafer Orientation | Pa-axis: <0001> ± 0.5° | Pa-axis: <0001> ± 2.0° | Pa-axis: <0001> ± 2.0° | digiri |
Kuchulukana kwa Micropipe (MPD) | ≤1 | ≤5 | ≤10 | cm−2^-2−2 |
Kukaniza Magetsi | ≥ 1E10 | ≥ 1E5 | ≥ 1E5 | Ω·cm |
Dopant | Zosinthidwa | Zosinthidwa | Zosinthidwa | |
Chiyambi cha Flat Orientation | {1-100} ± 5.0° | {1-100} ± 5.0° | {1-100} ± 5.0° | digiri |
Utali Woyambira Wathyathyathya | 32.5 ± 3.0 | 32.5 ± 3.0 | 32.5 ± 3.0 | mm |
Kutalika kwa Sekondale | 18.0 ± 2.0 | 18.0 ± 2.0 | 18.0 ± 2.0 | mm |
Sekondale Flat Orientation | 90 ° CW kuchokera ku flat flat ± 5.0 ° | 90 ° CW kuchokera ku flat flat ± 5.0 ° | 90 ° CW kuchokera ku flat flat ± 5.0 ° | digiri |
Kupatula M'mphepete | 3 | 3 | 3 | mm |
LTV/TTV/Bow/Warp | 3/10/±30/40 | 3/10/±30/40 | 5/15/40/45 | µm |
Kukalipa Pamwamba | Si-nkhope: CMP, C-nkhope: Yopukutidwa | Si-nkhope: CMP, C-nkhope: Yopukutidwa | Si-nkhope: CMP, C-nkhope: Yopukutidwa | |
Ming'alu (Kuwala Kwambiri) | Palibe | Palibe | Palibe | |
Hex Plates (Kuwala Kwambiri) | Palibe | Palibe | Malo owonjezera 10% | % |
Madera a Polytype (Kuwala Kwambiri) | Malo owonjezera 5% | Malo owonjezera 20% | Malo owonjezera 30% | % |
Zokwapula (Kuwala Kwambiri) | ≤ 5 kukwapula, kutalika kokwanira ≤ 150 | ≤ 10 kukwapula, kutalika kokwanira ≤ 200 | ≤ 10 kukwapula, kutalika kokwanira ≤ 200 | mm |
Edge Chipping | Palibe ≥ 0.5 mm m'lifupi/kuya | 2 amaloledwa ≤ 1 mm m'lifupi/kuya | 5 amaloledwa ≤ 5 mm m'lifupi/kuya | mm |
Kuipitsidwa Pamwamba | Palibe | Palibe | Palibe |
Mapulogalamu
1. Zamagetsi Zamagetsi
The bandgap lalikulu ndi mkulu matenthedwe madutsidwe magawo HPSI SiC amawapanga kukhala abwino kwa zipangizo mphamvu ntchito mu zinthu kwambiri, monga:
●Zipangizo Zapamwamba Zamagetsi: Kuphatikizapo ma MOSFET, IGBTs, ndi Schottky Barrier Diodes (SBDs) pofuna kutembenuza mphamvu moyenera.
● Mphamvu Zowonjezereka Zowonjezereka: Monga ma inverters a dzuwa ndi magetsi oyendetsa mphepo.
● Magalimoto Amagetsi (EVs): Amagwiritsidwa ntchito m'ma inverters, ma charger, ndi makina opangira mphamvu kuti azitha kuyendetsa bwino komanso kuchepetsa kukula kwake.
2. Mapulogalamu a RF ndi Microwave
Kutaya kwamphamvu kwambiri komanso kuchepa kwa dielectric kwa ma HPSI mawafa ndikofunikira pama radio-frequency (RF) ndi makina a microwave, kuphatikiza:
● Zipangizo Zamakono: Malo oyambira a 5G network ndi satellite communications.
● Azamlengalenga ndi Chitetezo: Makina a radar, tinyanga tating'onoting'ono, ndi zida za avionics.
3. Optoelectronics
Kuwonekera komanso kufalikira kwa 4H-SiC kumathandizira kugwiritsa ntchito zida za optoelectronic, monga:
● UV Photodetectors: Kwa kuyang'anira chilengedwe ndi matenda achipatala.
● Ma LED amphamvu kwambiri: Kuthandizira machitidwe owunikira olimba.
● Laser Diodes: Kwa mafakitale ndi ntchito zachipatala.
4. Kafukufuku ndi Chitukuko
Magawo a HPSI SiC amagwiritsidwa ntchito kwambiri m'ma laboratories amaphunziro ndi mafakitale a R&D pofufuza zida zapamwamba komanso kupanga zida, kuphatikiza:
● Kukula kwa Epitaxial Layer: Maphunziro okhudza kuchepetsa zolakwika ndi kukhathamiritsa kosanjikiza.
● Maphunziro a Carrier Mobility: Kufufuza za kayendedwe ka electron ndi dzenje muzinthu zoyera kwambiri.
● Prototyping: Kupanga koyambirira kwa zida zatsopano ndi mabwalo.
Ubwino wake
Ubwino Wapamwamba:
Kuyeretsedwa kwakukulu ndi kuchepa kwapang'onopang'ono kumapereka nsanja yodalirika ya mapulogalamu apamwamba.
Thermal Kukhazikika:
Zinthu zabwino kwambiri zowononga kutentha zimalola kuti zipangizo zizigwira ntchito bwino pansi pa mphamvu zambiri komanso kutentha.
Kugwirizana Kwambiri:
Maonekedwe omwe alipo ndi zosankha za makulidwe a mwambo zimatsimikizira kusinthika pazofunikira zosiyanasiyana za chipangizo.
Kukhalitsa:
Kulimba kwapadera ndi kukhazikika kwapangidwe kumachepetsa kusinthika ndi kusinthika panthawi yokonza ndi kugwira ntchito.
Kusinthasintha:
Zoyenera kumafakitale osiyanasiyana, kuchokera ku mphamvu zongowonjezedwanso mpaka zamlengalenga ndi kulumikizana ndi matelefoni.
Mapeto
Chophika chophika cha 3-inch High Purity Semi-Insulating Silicon Carbide chikuyimira ukadaulo wapamwamba kwambiri wamagetsi amphamvu kwambiri, ma frequency apamwamba, ndi zida za optoelectronic. Kuphatikiza kwake kwamafuta abwino kwambiri, magetsi, ndi makina amakina kumatsimikizira kugwira ntchito modalirika m'malo ovuta. Kuchokera pamagetsi amagetsi ndi makina a RF mpaka ma optoelectronics ndi R&D yapamwamba, magawo a HPSI awa amapereka maziko azinthu zatsopano zamawa.
Kuti mudziwe zambiri kapena kuyitanitsa, chonde titumizireni. Gulu lathu laukadaulo likupezeka kuti likupatseni chitsogozo ndi zosankha zomwe zikugwirizana ndi zosowa zanu.