2inch SiC ingot Dia50.8mmx10mmt 4H-N monocrystal

Kufotokozera Kwachidule:

Ingot ya 2-inch SiC (silicon carbide) imatanthawuza kristalo wa cylindrical kapena woboola pakati wa silicon carbide wokhala ndi mainchesi awiri kapena m'mphepete mwake mainchesi awiri. Silicon carbide ingots imagwiritsidwa ntchito ngati poyambira kupanga zida zosiyanasiyana za semiconductor, monga zida zamagetsi zamagetsi ndi zida za optoelectronic.

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SiC Crystal Kukula Technology

Makhalidwe a SiC amachititsa kuti zikhale zovuta kukula makhiristo amodzi. Izi makamaka chifukwa chakuti palibe gawo lamadzimadzi lokhala ndi chiŵerengero cha stoichiometric cha Si : C = 1: 1 pa kuthamanga kwa mlengalenga, ndipo sizingatheke kukula SiC ndi njira zokulirapo zokulirapo, monga njira yojambula yolunjika ndi kugwa kwa crucible, zomwe ndizo zikuluzikulu za makampani a semiconductor. Theoretically, yankho ndi stoichiometric chiŵerengero cha Si : C = 1: 1 angapezeke kokha pamene kuthamanga ndi wamkulu kuposa 10E5atm ndi kutentha ndi apamwamba kuposa 3200 ℃. Pakalipano, njira zodziwika bwino zimaphatikizapo njira ya PVT, njira yamadzimadzi, ndi njira yotsika kwambiri ya vapor-phase chemical deposition.

Zowotcha za SiC ndi makhiristo omwe timapereka amakula makamaka ndi kayendedwe ka nthunzi (PVT), ndipo zotsatirazi ndizofotokozera mwachidule za PVT:

Thupi nthunzi zoyendera (PVT) njira anachokera ku mpweya gawo sublimation njira anatulukira Lely mu 1955, imene SiC ufa anayikidwa mu chubu graphite ndi kutenthedwa ndi kutentha kwambiri kuti SiC ufa kuwola ndi sublimate, ndiyeno graphite chubu utakhazikika pansi, ndi kuvunda wa gawo la kristalo ndi gawo la kristalo magawo a gasi ndi gawo la kristalo. m'madera ozungulira chubu la graphite. Ngakhale njira iyi ndi yovuta kupeza makhiristo akuluakulu a SiC amodzi komanso njira yoyika mkati mwa chubu ya graphite ndizovuta kuwongolera, imapereka malingaliro kwa ofufuza otsatira.

YM Tairov et al. ku Russia adayambitsa lingaliro la kristalo wa mbewu pamaziko awa, omwe adathetsa vuto la mawonekedwe osasinthika a kristalo ndi malo a nucleation a makristasi a SiC. Ofufuza omwe adatsatira adapitilizabe kuchita bwino ndipo pamapeto pake adapanga njira yosinthira mpweya (PVT) yomwe imagwiritsidwa ntchito masiku ano.

Monga njira yoyambilira yakukula kwa makristalo a SiC, PVT pakadali pano ndiyo njira yokulirapo ya makristalo a SiC. Poyerekeza ndi njira zina, njirayi ili ndi zofunikira zochepa pazida zokulirapo, njira yosavuta yakukula, kuwongolera mwamphamvu, chitukuko chambiri ndi kafukufuku, ndipo yapangidwa kale mafakitale.