2inch SiC ingot Dia50.8mmx10mmt 4H-N monocrystal

Kufotokozera Kwachidule:

Ingot ya SiC (silicon carbide) ya mainchesi awiri imatanthauza kristalo imodzi yozungulira kapena yooneka ngati buloko ya silicon carbide yokhala ndi mainchesi awiri m'mimba mwake kapena m'mphepete mwake. Ingot ya silicon carbide imagwiritsidwa ntchito ngati zinthu zoyambira popanga zipangizo zosiyanasiyana za semiconductor, monga zipangizo zamagetsi zamagetsi ndi zipangizo zamagetsi.

Tumizani imelo kwa ife

Mawonekedwe

Ukadaulo Wokulitsa SiC Crystal

Makhalidwe a SiC amachititsa kuti zikhale zovuta kulima makhiristo amodzi. Izi zimachitika makamaka chifukwa chakuti palibe gawo lamadzimadzi lomwe lili ndi chiŵerengero cha stoichiometric cha Si: C = 1: 1 pa mphamvu ya mumlengalenga, ndipo sizingatheke kulima SiC pogwiritsa ntchito njira zokulirapo, monga njira yojambulira mwachindunji ndi njira yogwera, zomwe ndi zofunika kwambiri pamakampani opanga ma semiconductor. Mwachidziwitso, yankho lokhala ndi chiŵerengero cha stoichiometric cha Si: C = 1: 1 lingapezeke kokha pamene mphamvu ili yaikulu kuposa 10E5atm ndipo kutentha kuli kokwera kuposa 3200℃. Pakadali pano, njira zazikulu zikuphatikizapo njira ya PVT, njira ya liquid-phase, ndi njira yoika mankhwala otentha kwambiri.

Ma wafer ndi ma crystal a SiC omwe timapereka amalimidwa makamaka pogwiritsa ntchito njira yotumizira nthunzi (PVT), ndipo izi ndi njira yofotokozera mwachidule za PVT:

Njira yotumizira nthunzi ya thupi (PVT) inachokera ku njira yogwiritsira ntchito mpweya wochepa yomwe Lely adapanga mu 1955, momwe ufa wa SiC umayikidwa mu chubu cha graphite ndikutenthedwa kutentha kwambiri kuti ufa wa SiC uwole ndi kusungunuka, kenako chubu cha graphite chimazizidwa, ndipo zigawo za mpweya wochepa zomwe zawonongeka za ufa wa SiC zimayikidwa ndikusungunuka ngati makristalo a SiC m'dera lozungulira chubu cha graphite. Ngakhale kuti njira iyi ndi yovuta kupeza makristalo akuluakulu a SiC single ndipo njira yoyika mkati mwa chubu cha graphite ndi yovuta kuyilamulira, imapereka malingaliro kwa ofufuza otsatira.

YM Tairov ndi ena ku Russia adayambitsa lingaliro la kristalo wa mbewu pamaziko awa, zomwe zidathetsa vuto la mawonekedwe osalamulirika a kristalo ndi malo a nucleation a makristalo a SiC. Ofufuza otsatira adapitilizabe kukonza ndipo pamapeto pake adapanga njira yosinthira nthunzi ya thupi (PVT) yomwe imagwiritsidwa ntchito m'mafakitale masiku ano.

Monga njira yoyamba yokulira makristalo a SiC, PVT pakadali pano ndiyo njira yokulira kwambiri ya makristalo a SiC. Poyerekeza ndi njira zina, njira iyi ili ndi zofunikira zochepa pazida zokulira, njira yosavuta yokulira, kulamulira kwamphamvu, chitukuko chokwanira ndi kafukufuku, ndipo yakhala ikugwiritsidwa ntchito kale m'mafakitale.