2 inchi 4 inchi 6 inch Patterned Sapphire Substrate (PSS) pomwe zinthu za GaN zimakulira zitha kugwiritsidwa ntchito pakuwunikira kwa LED

Kufotokozera Kwachidule:

Chitsanzo safiro gawo lapansi (PSS) ndi chigoba chowuma etching pa safiro gawo lapansi, chigoba cholembedwa ndi chitsanzo ndi muyezo lithography ndondomeko, ndiyeno safiro zozikika ndi ICP etching luso, ndi chigoba amachotsedwa, ndipo potsiriza GaN zakuthupi wakula pa izo, kotero kuti longitudinal epitaxy wa zinthu GaN epita kukhala horidi. Izi zimaphatikizapo masitepe angapo monga zokutira za photoresist, kuwonetsa masitepe, kupanga mawonekedwe owonekera, ICP dry etching ndi kuyeretsa.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Mbali zazikulu

1. Makhalidwe:
The PSS pamwamba ali mwadongosolo chulucho kapena triangular conical chitsanzo amene mawonekedwe, kukula ndi kugawa akhoza lizilamuliridwa ndi kusintha etching ndondomeko magawo.
Mawonekedwe azithunziwa amathandizira kusintha njira yofalitsira kuwala ndikuchepetsa kuwunikira kwathunthu, motero kumapangitsa kuti kuwalako kukhale kothandiza kwambiri.

2. Makhalidwe azinthu:
PSS imagwiritsa ntchito safiro wapamwamba kwambiri ngati gawo lapansi, lomwe lili ndi mawonekedwe olimba kwambiri, kukhathamiritsa kwamafuta ambiri, kukhazikika kwamankhwala abwino komanso kuwonekera kwa kuwala.
Makhalidwewa amathandizira PSS kupirira madera ovuta monga kutentha kwambiri ndi kupanikizika kwinaku ikugwira ntchito bwino kwambiri.

3. Kuwoneka bwino:
Posintha kufalikira kangapo pa mawonekedwe pakati pa GaN ndi safiro gawo lapansi, PSS imapangitsa kuti mafotoni omwe akuwonekera kwathunthu mkati mwa GaN wosanjikiza akhale ndi mwayi wothawa ku gawo lapansi la safiro.
Mbaliyi imapangitsa kuti kuwala kwa LED kukhale kothandiza kwambiri komanso kumapangitsanso kuwala kwa LED.

4. Makhalidwe a ndondomeko:
Kupanga kwa PSS kumakhala kovuta, kumaphatikizapo masitepe angapo monga lithography ndi etching, ndipo kumafuna zida zolondola kwambiri komanso kuwongolera njira.
Komabe, ndi kupita patsogolo kosalekeza kwaukadaulo komanso kutsika kwamitengo, njira yopangira PSS imakulitsidwa pang'onopang'ono ndikuwongolera.

Ubwino wapakati

1.Kupititsa patsogolo kuwala kwa kuwala: PSS imapangitsa kuti kuwala kwa kuwala kwa LED kukhale bwino mwa kusintha njira yofalitsa kuwala ndi kuchepetsa kuwonetsetsa kwathunthu.

2.Kutalikitsa moyo wa LED: PSS ikhoza kuchepetsa kusungunuka kwa zinthu za GaN epitaxial, potero kuchepetsa kukonzanso kopanda ma radiation ndi kubwezeretsanso kutayikira panopa m'dera logwira ntchito, kukulitsa moyo wa LED.

3.Kupititsa patsogolo kuwala kwa LED: Chifukwa cha kusintha kwa kuwala kwa kuwala ndi kuwonjezereka kwa moyo wa LED, kuwala kowala kwa LED pa PSS kumawonjezeka kwambiri.

4.Kuchepetsa ndalama zopangira: Ngakhale kuti kupanga PSS kumakhala kovuta, kungathe kusintha kwambiri kuwala kowala komanso moyo wa LED, potero kuchepetsa ndalama zopangira pamlingo wina ndikuwongolera mpikisano wa mankhwala.

Magawo ofunsira kwambiri

1. Kuunikira kwa LED: PSS ngati gawo laling'ono la tchipisi ta LED, imatha kusintha kwambiri kuwala kowala komanso moyo wa LED.
M'munda wa kuyatsa kwa LED, PSS imagwiritsidwa ntchito kwambiri pazinthu zosiyanasiyana zowunikira, monga nyali zam'misewu, nyali zapatebulo, magetsi agalimoto ndi zina zotero.

Zipangizo za 2.Semiconductor: Kuwonjezera pa kuunikira kwa LED, PSS ingagwiritsidwenso ntchito kupanga zipangizo zina za semiconductor, monga zowunikira kuwala, lasers, ndi zina zotero. Zidazi zili ndi ntchito zambiri zogwiritsira ntchito poyankhulana, zamankhwala, zankhondo ndi zina.

Kuphatikizidwa kwa 3.Optoelectronic: Mawonekedwe a kuwala ndi kukhazikika kwa PSS kumapangitsa kuti ikhale imodzi mwazinthu zabwino kwambiri za optoelectronic integration.In optoelectronic integration, PSS ingagwiritsidwe ntchito popanga ma waveguides optical, optical switches ndi zigawo zina kuti azindikire kutumiza ndi kukonza zizindikiro za kuwala.

Zosintha zaukadaulo

Kanthu	Gawo Lapansi la safiro (2~6inch)
Diameter	50.8 ± 0.1 mm	100.0 ± 0.2 mm	150.0 ± 0.3 mm
Makulidwe	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Kuzungulira Pamwamba	C-ndege (0001) kumbali yolowera ku M-axis (10-10) 0.2 ± 0.1°
	C-ndege (0001) kumbali yolowera ku A-axis (11-20) 0 ± 0.1°
Chiyambi cha Flat Orientation	A-Ndege (11-20) ± 1.0 °
Utali Woyambira Wathyathyathya	16.0 ± 1.0 mm	30.0 ± 1.0 mm	47.5 ± 2.0 mm
R-Ndege	9-o'clock
Front Surface Finish	Zopangidwa
Back Surface Finish	SSP: Malo abwino, Ra = 0.8-1.2um; DSP: Epi-opukutidwa, Ra<0.3nm
Laser Mark	Mbali yakumbuyo
TTV	≤8μm	≤10μm	≤20μm
BOW	≤10μm	≤15μm	≤25μm
WARP	≤12μm	≤20μm	≤30μm
Kupatula M'mphepete	≤2 mm
Mafotokozedwe a Chitsanzo	Kapangidwe ka Maonekedwe	Dome, Cone, Piramidi
	Kutalika kwa Chitsanzo	1.6-1.8μm
	Chitsanzo Diameter	2.75 ~ 2.85μm
	Chitsanzo Space	0.1 ~ 0.3μm

XKH imayang'ana kwambiri zachitukuko, kupanga ndi kugulitsa kwapattered safire substrate (PSS), ndipo ikudzipereka kupereka zinthu za PSS zapamwamba, zogwira ntchito kwambiri kwa makasitomala padziko lonse lapansi. XKH ili ndi ukadaulo wotsogola wopanga komanso gulu laukadaulo laukadaulo, lomwe limatha kusintha zinthu za PSS mosiyanasiyana malinga ndi zosowa za makasitomala. Panthawi imodzimodziyo, XKH imayang'anitsitsa khalidwe la malonda ndi khalidwe lautumiki, ndipo ikudzipereka kupereka makasitomala ndi chithandizo chokwanira chaukadaulo ndi mayankho. M'munda wa PSS, XKH yapeza zambiri komanso zabwino zake, ndipo ikuyembekeza kugwira ntchito limodzi ndi mabungwe apadziko lonse lapansi kuti alimbikitse limodzi chitukuko chatsopano cha kuyatsa kwa LED, zida za semiconductor ndi mafakitale ena.