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Mzere Wodzipangira Wopopera Wolumikizidwa ndi Silicon / Silicon Carbide (SiC) Wafer (Mzere Wophatikizana Wopopera Pambuyo pa Kupopera)

Mzere Wodzipangira Wopopera Wolumikizidwa ndi Silicon / Silicon Carbide (SiC) Wafer (Mzere Wophatikizidwa Wopopera Pambuyo pa Kupopera) Chithunzi Chowonetsedwa
  • Mzere Wodzipangira Wopopera Wolumikizidwa ndi Silicon / Silicon Carbide (SiC) Wafer (Mzere Wophatikizana Wopopera Pambuyo pa Kupopera)
  • Mzere Wodzipangira Wopopera Wolumikizidwa ndi Silicon / Silicon Carbide (SiC) Wafer (Mzere Wophatikizana Wopopera Pambuyo pa Kupopera)
  • Mzere Wodzipangira Wopopera Wolumikizidwa ndi Silicon / Silicon Carbide (SiC) Wafer (Mzere Wophatikizana Wopopera Pambuyo pa Kupopera)
  • Mzere Wodzipangira Wopopera Wolumikizidwa ndi Silicon / Silicon Carbide (SiC) Wafer (Mzere Wophatikizana Wopopera Pambuyo pa Kupopera)
  • Mzere Wodzipangira Wopopera Wolumikizidwa ndi Silicon / Silicon Carbide (SiC) Wafer (Mzere Wophatikizana Wopopera Pambuyo pa Kupopera)
  • Mzere Wodzipangira Wopopera Wolumikizidwa ndi Silicon / Silicon Carbide (SiC) Wafer (Mzere Wophatikizana Wopopera Pambuyo pa Kupopera)

Kufotokozera Kwachidule:

Mzere Wodzipangira Wopopera Wolumikizidwa ndi Magawo Anayi uwu ndi njira yolumikizirana, yolumikizidwa bwino yopangidwirakupukuta pambuyo / pambuyo pa CMPntchito zasilikonindisilicon carbide (SiC)ma wafer. Omangidwa mozungulirazonyamulira za ceramic (mbale za ceramic), dongosololi limaphatikiza ntchito zingapo zotsatizana kukhala mzere umodzi wogwirizana—kuthandiza zinthu zofewa kuchepetsa kugwiritsa ntchito pamanja, kukhazikika nthawi yogwira ntchito, komanso kulimbitsa kuwongolera kuipitsidwa.

 


Mawonekedwe

Chithunzi Chatsatanetsatane

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Mzere Wodzipangira Wopukutira Wolumikizidwa ndi Silicon / Silicon Carbide (SiC) Wafer (Mzere Wogwirira Ntchito Wophatikizidwa Pambuyo pa Polish)4

Chidule

Mzere Wodzipangira Wopopera Wolumikizidwa ndi Magawo Anayi uwu ndi njira yolumikizirana, yolumikizidwa bwino yopangidwirakupukuta pambuyo / pambuyo pa CMPntchito zasilikonindisilicon carbide (SiC)ma wafer. Omangidwa mozungulirazonyamulira za ceramic (mbale za ceramic), dongosololi limaphatikiza ntchito zingapo zotsatizana kukhala mzere umodzi wogwirizana—kuthandiza zinthu zofewa kuchepetsa kugwiritsa ntchito pamanja, kukhazikika nthawi yogwira ntchito, komanso kulimbitsa kuwongolera kuipitsidwa.

 

Mu kupanga zinthu za semiconductor,kuyeretsa bwino pambuyo pa CMPimadziwika kwambiri ngati sitepe yofunika kwambiri yochepetsera zolakwika musanayambe njira yotsatira, komanso njira zapamwamba (kuphatikizapokuyeretsa kwakukulu) nthawi zambiri amakambidwa kuti akonze bwino ntchito yochotsa tinthu.

 

Makamaka SiC,kuuma kwakukulu ndi kusakhala ndi mphamvu kwa mankhwalazimapangitsa kupukuta kukhala kovuta (nthawi zambiri kumagwirizanitsidwa ndi kuchepa kwa kuchotsedwa kwa zinthu komanso chiopsezo chachikulu cha kuwonongeka kwa pamwamba/pansi pa nthaka), zomwe zimapangitsa kuti automation yokhazikika pambuyo pa kupukuta komanso kuyeretsa/kugwira ntchito moyenera kukhale kofunika kwambiri.

Ubwino Waukulu

Mzere umodzi wophatikizidwa womwe umathandizira:

  • Kulekanitsa ndi kusonkhanitsa ma buledi(mutatha kupukuta)

  • Kusunga / kusungira zinthu zonyamulira za ceramic

  • Kuyeretsa zonyamulira zadothi

  • Kuyika ma wafer (kumatira) pa zonyamulira zadothi

  • Ntchito yogwirizana, ya mzere umodzi yaMa wafer a mainchesi 6–8

Mafotokozedwe Aukadaulo (Kuchokera ku Datasheet Yoperekedwa)

  • Miyeso ya Zida (L×W×H):13643 × 5030 × 2300 mm

  • Magetsi:AC 380 V, 50 Hz

  • Mphamvu Yonse:119 kW

  • Kuyika Ukhondo:0.5 μm < 50 pa; 5 μm < 1 pa

  • Kukwera kwa Flatness:≤ 2 μm

Chizindikiro Chokhudza Kutuluka (Kuchokera ku Datasheet Yoperekedwa)

  • Miyeso ya Zida (L×W×H):13643 × 5030 × 2300 mm

  • Magetsi:AC 380 V, 50 Hz

  • Mphamvu Yonse:119 kW

  • Kuyika Ukhondo:0.5 μm < 50 pa; 5 μm < 1 pa

  • Kukwera kwa Flatness:≤ 2 μm

Kuyenda Kwamzere Kwachizolowezi

  1. Kudyetsa / mawonekedwe ochokera kudera lopukutira lakumtunda

  2. Kulekanitsa ndi kusonkhanitsa mawaya

  3. Kusunga/kusunga chonyamulira cha ceramic (kudula nthawi yogwira ntchito)

  4. Kuyeretsa zonyamulira zadothi

  5. Kuyika chidebe cha wafer pa zonyamulira (ndi ukhondo ndi kusalala)

  6. Kupititsa patsogolo njira zotsatizana kapena zoyendera

FAQ

Q1: Ndi mavuto ati omwe mzerewu umathetsa makamaka?
Yankho: Imachepetsa ntchito zotsuka pambuyo poyeretsa mwa kuphatikiza kulekanitsa/kusonkhanitsa ma wafer, kusungira ma ceramic carrier buffering, kuyeretsa ma carrier, ndi kuyika ma wafer mu mzere umodzi wogwirizana wa automation—kuchepetsa malo ogwirira ntchito pamanja ndikukhazikitsa kamvekedwe ka kupanga.

 

Q2: Ndi zipangizo ziti za wafer ndi kukula kwake zomwe zimathandizidwa?
A:Silikoni ndi SiC,mainchesi 6–8ma wafer (kutengera zomwe zaperekedwa).

 

Q3: N’chifukwa chiyani kuyeretsa pambuyo pa CMP kumagogomezeredwa kwambiri m’makampani?
A: Mabuku amakampani akuwonetsa kuti kufunikira koyeretsa bwino pambuyo pa CMP kwakula kwambiri kuti kuchepetse kuchulukana kwa zilema kusanachitike gawo lotsatira; njira zozikidwa pa megasonic nthawi zambiri zimaphunziridwa kuti ziwongolere kuchotsa tinthu.

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.

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