Silicon Carbide Ceramic Chuck ya SiC safiro Si GAAs Wafer

Kufotokozera Kwachidule:

Silicon Carbide Ceramic Chuck ndi nsanja yogwira ntchito bwino kwambiri yopangidwira kuyang'anira semiconductor, kupanga wafer, ndi kugwiritsa ntchito ma bonding. Yopangidwa ndi zipangizo zapamwamba za ceramic—kuphatikizapo sintered SiC (SSiC), reaction-bonded SiC (RSiC), silicon nitride, ndi aluminium nitride—imapereka kuuma kwakukulu, kutentha kochepa, kukana kutopa kwambiri, komanso moyo wautali wautumiki.

Tumizani imelo kwa ife

Mawonekedwe

Chithunzi Chatsatanetsatane

Chidule cha Silicon Carbide (SiC) Ceramic Chuck

TheSilikoni Carbide Ceramic Chuckndi nsanja yogwira ntchito bwino kwambiri yopangidwira kuyang'anira ma semiconductor, kupanga ma wafer, ndi kugwiritsa ntchito ma bonding. Yopangidwa ndi zipangizo zapamwamba zadothi—kuphatikizapoSiC yosungunuka (SSiC), SiC yolumikizidwa ndi reaction (RSiC), silicon nitridendialuminiyamu nitride—imaperekakuuma kwakukulu, kukulitsa kutentha kochepa, kukana bwino kuvala, komanso moyo wautali wautumiki.

Ndi uinjiniya wolondola komanso kupukuta kwapamwamba kwambiri, chuck imaperekakusalala kwa sub-micron, malo abwino ngati galasi, komanso kukhazikika kwa nthawi yayitali, zomwe zimapangitsa kuti ikhale yankho labwino kwambiri pa ntchito zofunika kwambiri za semiconductor.

Ubwino Waukulu

Kulondola Kwambiri
Kusalala kolamulidwa mkati0.3–0.5 μm, kuonetsetsa kuti wafer ndi yokhazikika komanso yolondola nthawi zonse.
Kupukuta Magalasi
AmakwaniritsaRa 0.02 μmKukhwinyata pamwamba, kuchepetsa kukanda ndi kuipitsidwa kwa wafer—kwabwino kwambiri pa malo oyera kwambiri.
Wopepuka kwambiri
Yolimba koma yopepuka kuposa quartz kapena zitsulo, zomwe zimapangitsa kuti kayendedwe kake kayende bwino, kasamalidwe kake, komanso kuti kakhale kolondola.
Kulimba Kwambiri
Modulus ya Exceptional Young imatsimikizira kukhazikika kwa miyeso pansi pa katundu wolemera komanso ntchito yothamanga kwambiri.
Kuwonjezeka kwa Kutentha Kochepa
CTE imagwirizana kwambiri ndi ma wafer a silicon, kuchepetsa kupsinjika kwa kutentha ndikuwonjezera kudalirika kwa njira.
Kukana Kwambiri Kuvala
Kuuma kwambiri kumasunga kusalala ndi kulondola ngakhale kugwiritsidwa ntchito nthawi yayitali komanso pafupipafupi.

Njira Yopangira

Kukonzekera Zinthu Zopangira
Ufa wa SiC woyera kwambiri wokhala ndi tinthu tating'onoting'ono tomwe timayang'aniridwa komanso zinthu zodetsa zochepa kwambiri.
Kupanga & Kupukuta
Njira mongachotsukira chopanda kupanikizika (SSiC) or Kugwirizana kwa reaction (RSiC)kupanga zinthu zokhuthala komanso zofanana za ceramic.
Kukonza Machining Mwanzeru
Kupera kwa CNC, kudula kwa laser, ndi makina opangidwa mwaluso kwambiri zimakwaniritsa kulolerana kwa ±0.01 mm ndi kufanana kwa ≤3 μm.
Chithandizo cha Pamwamba
Kupera ndi kupukuta kwa magawo ambiri mpaka Ra 0.02 μm; zokutira zina zomwe zingagwiritsidwe ntchito polimbana ndi dzimbiri kapena zinthu zina zomwe zingakhudze kukanda kwapadera.
Kuyang'anira ndi Kuwongolera Ubwino
Ma Interferometer ndi oyesa roughness amatsimikizira kuti akutsatira malangizo a semiconductor-grade.

Mafotokozedwe Aukadaulo

Chizindikiro	Mtengo	Chigawo
Kusalala	≤0.5	μm
Kukula kwa ma wafer	6'', 8'', 12'' (yomwe ikupezeka mwamakonda)	—
Mtundu wa pamwamba	Mtundu wa pini / Mtundu wa mphete	—
Kutalika kwa pini	0.05–0.2	mm
Dayamita ya pini yocheperako	ϕ0.2	mm
Malo ocheperako a pini	3	mm
M'lifupi mwa mphete yosindikizira	0.7	mm
Kukhwima kwa pamwamba	Ra 0.02	μm
Kulekerera makulidwe	± 0.01	mm
Kulekerera kwa m'mimba mwake	± 0.01	mm
Kulekerera kufanana	≤3	μm

Mapulogalamu Aakulu

Zipangizo zowunikira za semiconductor wafer
Kupanga ndi kusamutsa ma wafer
Zida zomangira ndi kulongedza zinthu zophikidwa mu chidebe chokulungira
Kupanga zipangizo zamakono zamakono
Zipangizo zolondola zomwe zimafuna malo osalala kwambiri komanso oyera kwambiri

Mafunso ndi Mayankho - Silicon Carbide Ceramic Chuck

Q1: Kodi ma chuck a SiC ceramic amafanana bwanji ndi ma chuck a quartz kapena achitsulo?
A1: Ma chuck a SiC ndi opepuka, olimba, ndipo ali ndi CTE yofanana ndi ma wafer a silicon, zomwe zimachepetsa kusintha kwa kutentha. Amaperekanso kukana kwabwino kwambiri komanso moyo wautali.

Q2: Kodi ndi kusalala kotani komwe kungapezeke?
A2: Yolamulidwa mkati0.3–0.5 μm, kukwaniritsa zofunikira zolimba za kupanga ma semiconductor.

Q3: Kodi pamwamba pake padzakanda ma wafers?
A3: Ayi—yopukutidwa ndi galasi kutiRa 0.02 μm, kuonetsetsa kuti palibe kukanda komwe kumachitika komanso kuti tinthu tating'onoting'ono timene timatulutsa timachepa.

Q4: Ndi kukula kotani kwa wafer komwe kumathandizidwa?
A4: Kukula kokhazikika kwa6'', 8'', ndi 12'', ndipo pali kusintha komwe kulipo.

Q5: Kodi kukana kutentha kuli bwanji?
A5: Zida za SiC zimapereka magwiridwe antchito abwino kwambiri kutentha kwambiri komanso kusintha kochepa pansi pa kutentha.

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.