SiC Ceramic Tray ya Wafer Carrier yokhala ndi Kukana Kutentha Kwambiri
Silikoni Carbide Ceramic Tray (SiC Tray)
Chida chopangidwa ndi ceramic chogwira ntchito bwino kwambiri chochokera ku zinthu za silicon carbide (SiC), chomwe chapangidwa kuti chigwiritsidwe ntchito m'mafakitale apamwamba monga kupanga ma semiconductor ndi kupanga ma LED. Ntchito zake zazikulu zimaphatikizapo kugwira ntchito ngati chonyamulira cha wafer, nsanja yopangira etching, kapena chithandizo cha kutentha kwambiri, kugwiritsa ntchito kutentha kwapadera, kukana kutentha kwambiri, komanso kukhazikika kwa mankhwala kuti zitsimikizire kuti njirayo ndi yofanana komanso kuti zinthu zikuyenda bwino.
Zinthu Zofunika
1. Magwiridwe antchito a kutentha
- Kutenthetsa Kwambiri: 140–300 W/m·K, kuposa kwambiri graphite yachikhalidwe (85 W/m·K), zomwe zimathandiza kuti kutentha kuchepe mwachangu komanso kuchepetsa kupsinjika kwa kutentha.
- Kuchuluka kwa Kutentha Kochepa: 4.0×10⁻⁶/℃ (25–1000℃), silicon yofanana kwambiri (2.6×10⁻⁶/℃), kuchepetsa zoopsa za kusintha kwa kutentha.
2. Katundu wa Makina
- Mphamvu Yaikulu: Mphamvu yopindika ≥320 MPa (20℃), yolimba kupsinjika ndi kugwedezeka.
- Kulimba Kwambiri: Kulimba kwa Mohs 9.5, kwachiwiri pambuyo pa diamondi, komwe kumapereka kukana kwabwino kwambiri.
3. Kukhazikika kwa Mankhwala
- Kukana Kudzikundikira: Kukana ku asidi amphamvu (monga HF, H₂SO₄), yoyenera kugwiritsidwa ntchito pokonza zinthu.
- Yopanda Magnetic: Kuthekera kwa maginito mkati <1×10⁻⁶ emu/g, kupewa kusokoneza zida zolondola.
4. Kulekerera Kwambiri Zachilengedwe
- Kukhalitsa kwa Kutentha Kwambiri: Kutentha kwa nthawi yayitali mpaka 1600–1900℃; kukana kwakanthawi kochepa mpaka 2200℃ (malo opanda mpweya).
- Kukana Kutentha ndi Kutentha: Imapirira kusintha kwadzidzidzi kwa kutentha (ΔT >1000℃) popanda kusweka.
Mapulogalamu
| Munda Wofunsira | Zochitika Zapadera | Mtengo Waukadaulo |
| Kupanga Semiconductor | Kupukuta kwa Wafer (ICP), kuyika filimu yopyapyala (MOCVD), kupukuta kwa CMP | Kutentha kwambiri kumathandizira kuti kutentha kukhale kofanana; kutentha kochepa kumawonjezera kukana kwa wafer. |
| Kupanga kwa LED | Kukula kwa Epitaxial (monga GaN), kudula kwa wafer, kulongedza | Imaletsa zolakwika zamitundu yambiri, kukulitsa mphamvu ya kuwala kwa LED komanso moyo wake wonse. |
| Makampani a Photovoltaic | Zitsulo zoyeretsera za silicon wafer, zothandizira zida za PECVD | Kukana kutentha kwambiri komanso kutentha kumawonjezera nthawi ya moyo wa zida. |
| Laser ndi Optics | Ma substrates ozizira a laser amphamvu kwambiri, othandizira makina a kuwala | Kutentha kwakukulu kumathandiza kuti kutentha kutayike mofulumira, kukhazikika kwa zinthu zowunikira. |
| Zida Zowunikira | Zogwirizira zitsanzo za TGA/DSC | Kutentha kochepa komanso kutentha mwachangu kumathandizira kuti muyeso ukhale wolondola. |
Ubwino wa Zogulitsa
- Kugwira Ntchito Konse: Kupereka mphamvu, mphamvu, ndi kukana dzimbiri kumaposa alumina ndi silicon nitride ceramics, zomwe zimakwaniritsa zofunikira kwambiri pakugwira ntchito.
- Kapangidwe Kopepuka: Kuchuluka kwa 3.1–3.2 g/cm³ (40% ya chitsulo), kuchepetsa katundu wa inertial ndikuwonjezera kulondola kwa mayendedwe.
- Kutalika ndi Kudalirika: Nthawi yogwira ntchito imaposa zaka 5 pa kutentha kwa 1600℃, kuchepetsa nthawi yogwira ntchito ndikuchepetsa ndalama zogwirira ntchito ndi 30%.
- Kusintha: Imathandizira ma geometries ovuta (monga makapu opopera, ma tray okhala ndi zigawo zambiri) okhala ndi cholakwika cha flatness <15 μm kuti agwiritsidwe ntchito molondola.
Mafotokozedwe Aukadaulo
| Gulu la Ma Parameter | Chizindikiro |
| Katundu Wathupi | |
| Kuchulukana | ≥3.10 g/cm³ |
| Mphamvu Yosinthasintha (20℃) | 320–410 MPa |
| Kutentha kwa Matenthedwe (20℃) | 140–300 W/(m·K) |
| Kuchuluka kwa Kutentha (25–1000℃) | 4.0×10⁻⁶/℃ |
| Katundu wa Chemical | |
| Kukana kwa Asidi (HF/H₂SO₄) | Palibe dzimbiri pambuyo pomizidwa maola 24 |
| Kulondola kwa Machining | |
| Kusalala | ≤15 μm (300×300 mm) |
| Kukhwima kwa Pamwamba (Ra) | ≤0.4 μm |
Ntchito za XKH
XKH imapereka mayankho athunthu a mafakitale omwe amaphatikizapo chitukuko chapadera, makina olondola, komanso kuwongolera bwino khalidwe. Pa chitukuko chapadera, imapereka mayankho azinthu zoyera kwambiri (>99.999%) ndi zotupa (30–50%), zophatikizidwa ndi 3D modeling ndi simulation kuti zikonze bwino ma geometries ovuta kugwiritsa ntchito monga semiconductors ndi aerospace. Machining olondola amatsatira njira yosavuta: kukonza ufa → isostatic/dry pressing → 2200°C sintering → CNC/diamond grinding → kuwunika, kuonetsetsa kuti nanometer-level polishing ndi ±0.01 mm dimensional tolerance. Kuwongolera khalidwe kumaphatikizapo kuyesa kwathunthu (XRD composition, SEM microstructure, 3-point bend) ndi chithandizo chaukadaulo (process optimization, 24/7 7/7, kutumiza zitsanzo maola 48), kupereka zida zodalirika komanso zogwira ntchito bwino pazosowa zamafakitale.
Mafunso Ofunsidwa Kawirikawiri (Mafunso Ofunsidwa Kawirikawiri)
1. Q: Ndi mafakitale ati omwe amagwiritsa ntchito ma tray a ceramic a silicon carbide?
A: Amagwiritsidwa ntchito kwambiri popanga ma semiconductor (kusamalira ma wafer), mphamvu ya dzuwa (njira za PECVD), zida zamankhwala (zigawo za MRI), ndiaerospace(zigawo zotentha kwambiri) chifukwa cha kukana kutentha kwambiri komanso kukhazikika kwa mankhwala.
2. Q: Kodi silicon carbide imagwira ntchito bwanji kuposa ma quartz/magalasi?
A: Kukana kutentha kwambiri (mpaka 1800°C poyerekeza ndi 1100°C ya quartz), kusokoneza maginito kosalekeza, komanso moyo wautali (zaka 5+ poyerekeza ndi miyezi 6-12 ya quartz).
3. Q: Kodi mathireyi a silicon carbide amatha kuthana ndi malo okhala ndi asidi?
A: Inde. Yolimba ku HF, H2SO4, ndi NaOH ndipo imakhala ndi dzimbiri <0.01mm/chaka, zomwe zimapangitsa kuti ikhale yoyenera kutsukidwa ndi mankhwala komanso kutsukidwa ndi wafer.
4. Q: Kodi ma tray a silicon carbide amagwirizana ndi automation?
A: Inde. Yapangidwira kunyamula vacuum ndi robotic, yokhala ndi malo osalala <0.01mm kuti tipewe kuipitsidwa ndi tinthu tating'onoting'ono mu zinthu zodzipangira tokha.
5. Q: Kodi kufananiza mtengo ndi zipangizo zachikhalidwe ndi kotani?
A: Mtengo wokwera kwambiri pasadakhale (3-5x quartz) koma 30-50% yatsika ndi TCO chifukwa cha nthawi yayitali yogwira ntchito, kuchepa kwa nthawi yogwira ntchito, komanso kusunga mphamvu chifukwa cha kutentha kwapamwamba.
