Mutu: Kodi FOUP mu Chip Manufacturing ndi chiyani?

M'ndandanda wazopezekamo

1. Mwachidule ndi Ntchito Zazikulu za FOUP

2. Mapangidwe ndi Mapangidwe a FOUP

3. Classification and Application Guidelines of FOUP

4.Ntchito ndi Kufunika kwa FOUP mu Semiconductor Manufacturing

5. Zovuta Zaukadaulo ndi Zochitika Zachitukuko Zamtsogolo

6.XKH's Customized Solutions and Service Support

Popanga semiconductor, Front Opening Unified Pod (FOUP) ndi chidebe chofunikira chomwe chimagwiritsidwa ntchito poteteza, kunyamula, ndikusunga zowotcha. Mkati mwake amatha kukhala ndi zidutswa za 25 za 300mm wafers, ndipo zigawo zake zazikulu zimaphatikizapo chidebe chotsegulira kutsogolo ndi chitseko chodzipatulira chotsegulira ndi kutseka. FOUP ndi chonyamulira chachikulu mumayendedwe oyenda okha mkati mwa 12inch wafer nsalu. Nthawi zambiri amanyamulidwa pamalo otsekedwa ndipo amatsegulidwa pokhapokha akakankhidwira ku doko lonyamula zida, zomwe zimalola kuti zopatulira zisamutsidwire padoko lotsitsa / lotsitsa la zida.

Mapangidwe a FOUP amasinthidwa kuti agwirizane ndi zofunikira zachilengedwe. Imakhala ndi mipata kumbuyo kuti muyikemo wafer, ndipo chivindikirocho chidapangidwa kuti chigwirizane ndi chotchingira chotsegulira. Maloboti onyamula wafer amagwira ntchito pamalo abwino a Class 1, kuwonetsetsa kuti zopatulirazo sizikuipitsidwa panthawi yopatsirana. Kuphatikiza apo, FOUP imasunthidwa pakati pa zida zamakina kudzera pa makina opangira zinthu (AMHS). Nsalu zamakono zopyapyala nthawi zambiri zimagwiritsa ntchito masitima apamtunda pamayendedwe, pomwe nsalu zingapo zakale zimatha kugwiritsa ntchito magalimoto otsogola (AGVs).

FOUP sikuti imangothandizira kusamutsa kwawafa okha komanso imagwira ntchito yosungira. Chifukwa cha njira zambiri zopangira, zowotcha zimatha kutenga miyezi kuti amalize kuyenda konse. Kuphatikizidwa ndi ma voliyumu opanga mwezi uliwonse, izi zikutanthauza kuti makumi masauzande a zowotcha mkati mwa nsalu zimakhala zodutsa kapena zosungidwa kwakanthawi nthawi iliyonse. Panthawi yosungira, ma FOUP amatsukidwa ndi nayitrogeni nthawi ndi nthawi kuteteza zowononga kuti zisakhudze zowotcha, kuonetsetsa kuti pakupanga zinthu zoyera komanso zodalirika.

1. Ntchito ndi Kufunika kwa FOUP

Ntchito yayikulu ya FOUP ndikuteteza zowotchera kuti zisagwedezeke ndi kuipitsidwa, makamaka kupewa kuwononga zokolola zikamasamutsa. Imateteza bwino chinyezi kudzera m'njira monga kuyeretsa gasi ndi Local Atmosphere Control (LAC), kuwonetsetsa kuti zowotcha zimakhalabe pamalo otetezeka podikirira gawo lotsatira lopanga. Dongosolo lake losindikizidwa ndi lolamulidwa limalola kuti zinthu zofunikira zokhazokha ndi zinthu zilowemo, kuchepetsa kwambiri zotsatira zoipa za VOCs, mpweya, ndi chinyezi pazitsulo.

Popeza FOUP yodzaza ndi ma wafer 25 imatha kulemera mpaka ma kilogalamu 9, mayendedwe ake ayenera kudalira Automated Material Handling System (AMHS). Kuti izi zitheke, FOUP idapangidwa ndi mitundu yosiyanasiyana ya mbale zolumikizirana, mapini, ndi mabowo, ndipo ili ndi ma tag apakompyuta a RFID kuti azindikirike komanso kugawa mosavuta. Kugwiritsa ntchito makinawa kumafuna pafupifupi kusagwira ntchito pamanja, kuchepetsa kwambiri mitengo yolakwika ndikuwonjezera chitetezo ndi kulondola kwa njira yopangira.

2. Kapangidwe ndi Gulu la FOUP

Miyeso yodziwika bwino ya FOUP ndi pafupifupi 420 mm m'lifupi, 335 mm kuya kwake, ndi 335 mm kutalika. Zigawo zake zazikuluzikulu zikuphatikizapo: pamwamba OHT (mutu wa bowa) woyendetsa pamwamba; Khomo lakutsogolo la zida zowotcha; Mbali Zogwirizira, nthawi zambiri zokhala ndi colorcode kuti zisiyanitse madera omwe ali ndi magawo osiyanasiyana oipitsidwa; Malo a Khadi oyikamo makadi a mauthenga; ndi tag ya pansi ya RFID yomwe imagwira ntchito ngati chizindikiritso chapadera cha FOUP, chololeza zida ndi zokweza pamwamba kuti zizindikire. Pansi pake palinso mabowo anayi ozindikiritsa ndikuyikapo kuti mufanane ndi zida komanso madera osiyanitsa.

Kutengera kagwiritsidwe ntchito, ma FOUP amagawidwa m'mitundu itatu: PRD (yopanga), ENG (ya ma wafer opangira uinjiniya), ndi MON (ya zowotcha zowunikira). Ma PRD FOUP atha kugwiritsidwa ntchito popanga zinthu, mitundu ya ENG ndi yoyenera pa R&D kapena zoyeserera, ndipo mitundu ya MON idaperekedwa kuti iwunikire masitepe ngati CMP ndi DIFF. Ndikofunika kuzindikira kuti PRD FOUPs ikhoza kugwiritsidwa ntchito pazolinga zonse za ENG ndi MON, ndipo mitundu ya ENG ingagwiritsidwe ntchito pa MON, koma ntchito yobwereranso imakhala ndi zoopsa zabwino.

Odziwika ndi mulingo wa kuipitsidwa, ma FOUP atha kugawidwa kukhala FE FOUP (ndondomeko yakutsogolo, yopanda zitsulo), BE FOUP (ndondomeko yakumbuyo, ili ndi chitsulo), ndi omwe ali okhazikika pazitsulo zinazake monga NI FOUP, CU FOUP, ndi CO FOUP. Ma FOUP amachitidwe osiyanasiyana amasiyanitsidwa ndi mtundu wa zogwirira zam'mbali kapena mapanelo a zitseko. FOUPs kuchokera ku njira zakutsogolo zitha kugwiritsidwa ntchito pobwerera kumbuyo, koma ma FOUP akumbuyo sayenera kugwiritsidwa ntchito kutsogolo, chifukwa izi zitha kubweretsa ngozi.

Monga chonyamulira chachikulu pakupanga ma semiconductor, FOUP, kudzera pamakina apamwamba kwambiri komanso kuwongolera kuipitsidwa kosamalitsa, imawonetsetsa chitetezo ndi ukhondo wa zowotchera panthawi yopanga, ndikupangitsa kuti ikhale maziko ofunikira muzovala zamakono.

Mapeto

XKH yadzipereka kupatsa makasitomala mayankho okhazikika a Front-Opening Unified Pod (FOUP), kutsatira mosamalitsa zomwe mukufuna komanso mawonekedwe a zida. Pogwiritsa ntchito ukadaulo wapamwamba kwambiri komanso njira zopangira zolondola, timawonetsetsa kuti chilichonse cha FOUP chimapereka mpweya wabwino, ukhondo, komanso kukhazikika kwamakina. Gulu lathu laukadaulo lili ndi ukadaulo waukadaulo, womwe umapereka chithandizo chokwanira cha moyo wonse - kuyambira pakukambirana zosankhidwa ndi kukonza bwino kamangidwe mpaka kuyeretsa ndi kukonza - kuonetsetsa kuti pali kuphatikizana kopanda malire komanso mgwirizano wabwino pakati pa FOUP ndi Automated Material Handling System (AMHS) komanso zida zosinthira. Nthawi zonse timayika patsogolo chitetezo cha mawafa komanso kukulitsa zokolola monga zolinga zathu zazikulu. Kupyolera muzinthu zamakono ndi ntchito zonse zaukadaulo, timakupatsirani chitsimikiziro cholimba cha njira zanu zopangira ma semiconductor, ndikumakulitsa luso la kupanga komanso zokolola.