Silicon Wafers vs. Glass Wafers: Kodi Kwenikweni Timayeretsa Chiyani? Kuchokera ku Material Essence kupita ku Mayankho Oyeretsa Motengera Njira

Ngakhale zowonda za silicon ndi magalasi zimagawana cholinga chimodzi chokhala "kutsukidwa," zovuta ndi zovuta zomwe amakumana nazo pakuyeretsa ndizosiyana kwambiri. Kusiyana kumeneku kumachokera kuzinthu zakuthupi ndi zofunikira za silicon ndi galasi, komanso "filosofi" yodziwika bwino yoyeretsa yoyendetsedwa ndi ntchito zawo zomaliza.

Choyamba, tiyeni tifotokoze momveka bwino: Kodi kwenikweni tikuyeretsa chiyani? Ndi zinthu zowononga ziti zomwe zimakhudzidwa?

Zowononga zitha kugawidwa m'magulu anayi:

1. Tinthu Zowononga

   • Fumbi, tinthu tachitsulo, tinthu tating'onoting'ono, tinthu tating'onoting'ono (kuchokera ku njira ya CMP), ndi zina zambiri.

   • Zowonongekazi zimatha kuyambitsa zolakwika zapatani, monga zazifupi kapena mabwalo otseguka.

2. Zowonongeka Zachilengedwe

   • Zimaphatikizapo zotsalira za photoresist, zowonjezera za resin, mafuta a khungu laumunthu, zotsalira za zosungunulira, ndi zina zotero.

   • Zowonongeka za organic zimatha kupanga masks omwe amalepheretsa etching kapena implantation ya ayoni ndikuchepetsa kumamatira kwa mafilimu ena owonda.

3. Zowonongeka za Metal Ion

   • Iron, mkuwa, sodium, potaziyamu, calcium, etc., zomwe zimachokera ku zida, mankhwala, ndi kukhudzana ndi anthu.

   • Mu semiconductors, ma ion zitsulo ndi "zakupha" zonyansa, zomwe zimayambitsa milingo yamphamvu mu gulu loletsedwa, zomwe zimawonjezera kutayikira kwapano, kufupikitsa moyo wonyamulira, ndikuwononga kwambiri magetsi. Mu galasi, zingakhudze khalidwe ndi kumamatira kwa mafilimu woonda wotsatira.

4. Native Oxide Layer

   • Pa zowotcha za silicon: Kachitsulo kakang'ono ka silicon dioxide (Native Oxide) mwachilengedwe kamakhala pamwamba pamlengalenga. Kukula ndi kufanana kwa oxide wosanjikiza uyu ndizovuta kuwongolera, ndipo ziyenera kuchotsedwa kwathunthu pakupangidwa kwazinthu zazikulu monga ma oxides pachipata.

   • Pazitsulo zamagalasi: Galasi palokha ndi mawonekedwe a silika, kotero palibe vuto la "kuchotsa wosanjikiza wa oxide." Komabe, pamwamba pake mwina adasinthidwa chifukwa cha kuipitsidwa, ndipo gawoli liyenera kuchotsedwa.

I. Zolinga Zazikulu: Kusiyana Pakati pa Magwiridwe Amagetsi ndi Kukwanira Kwathupi

• Zojambula za Silicon

  • Cholinga chachikulu cha kuyeretsa ndikuonetsetsa kuti magetsi akugwira ntchito. Zodziwika bwino zimaphatikizapo kuchuluka kwa tinthu ting'onoting'ono ndi kukula kwake (mwachitsanzo, tinthu ≥0.1μm tikuyenera kuchotsedwa bwino), kuchuluka kwa ayoni yachitsulo (mwachitsanzo, Fe, Cu iyenera kuyendetsedwa mpaka ≤10¹⁰ maatomu/cm² kapena kutsika), ndi milingo yotsalira ya organic. Ngakhale kuipitsidwa kwa microscopic kungayambitse zazifupi zozungulira, mafunde otayikira, kapena kulephera kwa umphumphu wa chipata cha oxide.

• Zophika Zagalasi

  • Monga ma substrates, zofunika kwambiri ndi ungwiro wakuthupi komanso kukhazikika kwamankhwala. Zofotokozera zimangoyang'ana mbali zazikuluzikulu monga kusakhalapo kwa zingwe, madontho osachotsedwa, komanso kukonza kuuma koyambirira komanso ma geometry. Cholinga choyeretsa ndicho kuonetsetsa ukhondo wamawonekedwe komanso kumamatira bwino pazotsatira monga zokutira.

II. Chilengedwe: Kusiyana Kofunikira Pakati pa Crystalline ndi Amorphous

• Silikoni

  • Silicon ndi zinthu za crystalline, ndipo pamwamba pake mwachilengedwe zimamera wosanjikiza wa silicon dioxide (SiO₂) wosafanana. Wosanjikiza wa oxide uyu umakhala pachiwopsezo chamagetsi ndipo uyenera kuchotsedwa bwino komanso mofanana.

• Galasi

  • Galasi ndi netiweki ya amorphous silica. Zinthu zake zambiri zimakhala zofanana ndi silicon oxide wosanjikiza wa silicon, zomwe zikutanthauza kuti imatha kukhazikika mwachangu ndi hydrofluoric acid (HF) komanso imatha kukokoloka kwamphamvu ya alkali, zomwe zimapangitsa kuti pakhale kuuma kwapamwamba kapena kupindika. Kusiyana kwakukuluku kumapangitsa kuti kuyeretsa kwa silicon wafer kumatha kulekerera kuwala, kuwongolera kuwongolera kuti kuchotse zoipitsidwa, pomwe kuyeretsa magalasi kumayenera kuchitidwa mosamala kwambiri kupewa kuwononga zinthu zoyambira.

III. Kufananiza Mayankho Oyeretsa

Kutengera zolinga zomwe tatchulazi komanso mawonekedwe azinthu, njira zoyeretsera za silicon ndi magalasi amasiyana:

• Glass Wafer Kuyeretsa Njira

  • Pakadali pano, magalasi ambiri opangira magalasi amagwiritsa ntchito njira zoyeretsera potengera mawonekedwe agalasi, kudalira kwambiri ofooka oyeretsa amchere.

  • Makhalidwe a Wotsuka:Zoyeretsa zapaderazi zimakhala ndi alkaline yofooka, yokhala ndi pH yozungulira 8-9. Nthawi zambiri amakhala ndi surfactants (mwachitsanzo, alkyl polyoxyethylene ether), zitsulo chelating agents (mwachitsanzo, HEDP), ndi organic zoyeretsera, opangidwa kuti emulsify ndi kuwola zoipitsa organic monga mafuta ndi zisindikizo zala, pamene kukhala pang'ono dzimbiri matrix galasi.

  • Njira Yoyenda:Mmene kuyeretsa ndondomeko kumafuna ntchito yeniyeni ndende ya ofooka zamchere kuyeretsa wothandizila pa kutentha kuyambira firiji 60 ° C, pamodzi ndi akupanga kuyeretsa. Akamaliza kuyeretsa, zowombazo zimatsuka masitepe angapo ndi madzi oyera ndi kuyanika mofatsa (mwachitsanzo, kukweza pang'onopang'ono kapena kuyanika kwa mpweya wa IPA). Njirayi imakwaniritsa zofunikira zamagalasi kuti zikhale zaukhondo komanso ukhondo wonse.

• Njira Yoyeretsera Silicon Wafer

  • Pokonza ma semiconductor, ma silicon wafers nthawi zambiri amayeretsedwa mu RCA, yomwe ndi njira yabwino kwambiri yoyeretsera yomwe imatha kuthana ndi mitundu yonse ya zonyansa, kuwonetsetsa kuti zofunikira zamagetsi pazida za semiconductor zikukwaniritsidwa.

IV. Galasi Ikakumana ndi Miyezo Yapamwamba ya "Ukhondo".

Zophika zamagalasi zikagwiritsidwa ntchito pofunikira kuchuluka kwa tinthu tating'ono komanso milingo ya ayoni yachitsulo (mwachitsanzo, ngati magawo a semiconductor kapena poyika filimu yopyapyala kwambiri), njira yoyeretsera mkati mwake singakhalenso yokwanira. Pankhaniyi, mfundo zoyeretsera za semiconductor zitha kugwiritsidwa ntchito, ndikuyambitsa njira yoyeretsera ya RCA.

Pachimake panjira iyi ndikuchepetsa ndi kukhathamiritsa magawo a RCA kuti athe kutengera mawonekedwe agalasi:

• Kuchotsa Zowonongeka Zachilengedwe:Mayankho a SPM kapena madzi ocheperako a ozoni atha kugwiritsidwa ntchito kuwola zowononga zachilengedwe kudzera mu okosijeni wamphamvu.

• Kuchotsa Tinthu:Yankho losungunuka kwambiri la SC1 limagwiritsidwa ntchito potentha kwambiri komanso nthawi yayitali yochizira kuti agwiritse ntchito mphamvu yake ya electrostatic repulsion ndi micro-etching zotsatira kuchotsa tinthu tating'onoting'ono, ndikuchepetsa dzimbiri pagalasi.

• Kuchotsa Metal Ion:Njira yochepetsera ya SC2 kapena njira zosavuta zochepetsera hydrochloric acid/dilute nitric acid zimagwiritsidwa ntchito pochotsa zodetsa zachitsulo kudzera pa chelation.

• Zoletsa Kwambiri:DHF (di-ammonium fluoride) iyenera kupewedwa kotheratu kuti gawo lapansi la galasi lisawonongeke.

Pakusinthidwa konseko, kuphatikiza ukadaulo wa megasonic kumathandizira kwambiri kuchotsedwa kwa tinthu tating'onoting'ono ta nano ndipo kumakhala kofatsa pamwamba.

Mapeto

Njira zoyeretsera za silicon ndi zowotcha magalasi ndizotsatira zosapeŵeka za uinjiniya wosinthira kutengera zomwe amafunikira komaliza, katundu wakuthupi, mawonekedwe akuthupi ndi mankhwala. Kuyeretsa silika kumafuna "ukhondo wa mulingo wa atomiki" pamagetsi, pomwe kuyeretsa magalasi kumayang'ana kwambiri kupeza malo "angwiro, osawonongeka". Pamene zowonda zamagalasi zikugwiritsidwa ntchito mochulukira pakugwiritsa ntchito semiconductor, njira zawo zoyeretsera sizidzasintha kupitilira kuyeretsa kofooka kwa alkaline, kupanga njira zoyeretsera, zosinthidwa makonda monga njira yosinthidwa ya RCA kuti ikwaniritse miyezo yapamwamba yaukhondo.