Magalasi a AR a Silicon Carbide Optical-Grade: Kukonzekera kwa Ma Substrate Oteteza Zinthu Mopanda Chinyezi Kwambiri

Poganizira za kusintha kwa AI, magalasi a AR pang'onopang'ono akulowa m'maganizo mwa anthu. Monga njira yolumikizira bwino zinthu zenizeni komanso zenizeni, magalasi a AR amasiyana ndi zida za VR polola ogwiritsa ntchito kuwona zithunzi zomwe zawonetsedwa pa digito komanso kuwala kwachilengedwe nthawi imodzi. Kuti akwaniritse magwiridwe antchito awiriwa—kuwonetsa zithunzi zazing'ono m'maso ndikusunga kuwala kwakunja—magalasi a AR okhala ndi mawonekedwe a silicon carbide (SiC) amagwiritsa ntchito kapangidwe ka waveguide (lightguide). Kapangidwe kameneka kamagwiritsa ntchito kuwala konse kwamkati kuti katumize zithunzi, zofanana ndi kutumiza kwa ulusi wa kuwala, monga momwe zasonyezedwera pachithunzichi.

Kawirikawiri, gawo limodzi lokhala ndi ma inchi 6 high-purity semi-insulating limatha kupanga magalasi awiri, pomwe gawo la mainchesi 8 limatha kupanga magalasi atatu mpaka anayi. Kugwiritsa ntchito zipangizo za SiC kumapereka zabwino zitatu zofunika:

1. Chizindikiro chapadera cha refractive (2.7): Chimathandizira >80° full-color field of view (FOV) ndi lenzi imodzi, kuchotsa zinthu zakale zomwe zimapezeka m'mapangidwe a AR achikhalidwe.
2. Integrated tri-color (RGB) waveguide: Imalowa m'malo mwa multi-layer waveguide stacks, kuchepetsa kukula ndi kulemera kwa chipangizocho.
3. Kuthamanga kwapamwamba kwambiri kwa kutentha (490 W/m·K): Kumachepetsa kuwonongeka kwa kuwala komwe kumabwera chifukwa cha kutentha.

Ubwino uwu wapangitsa kuti pakhale kufunikira kwakukulu kwa magalasi a AR ochokera ku SiC. SiC yogwiritsidwa ntchito nthawi zambiri imakhala ndi makristalo a semi-insulating (HPSI) oyeretsedwa kwambiri, omwe amafunika kukonzekera molimbika kwambiri kuti awononge ndalama zambiri. Chifukwa chake, kupanga ma substrates a HPSI SiC ndikofunikira kwambiri.

1. Kupanga Ufa wa SiC Woteteza Mochepa
Kupanga kwakukulu kwa mafakitale kumagwiritsa ntchito kwambiri kapangidwe kake kodzipangira kutentha kwambiri (SHS), njira yomwe imafuna kuwongolera mosamala:

• Zipangizo zopangira: 99.999% ufa wa kaboni/silicon wokhawokha wokhala ndi tinthu tating'onoting'ono ta 10–100 μm.
• Kuyera kwa Crucible: Zigawo za graphite zimayeretsedwa ndi kutentha kwambiri kuti zichepetse kufalikira kwa zinyalala zachitsulo.
• Kulamulira mlengalenga: 6N-purity argon (yokhala ndi zotsukira mkati) imaletsa kulowetsedwa kwa nayitrogeni; mpweya wochepa wa HCl/H₂ ukhoza kuyambitsidwa kuti uchepetse mphamvu ya boron ndikuchepetsa nayitrogeni, ngakhale kuti kuchuluka kwa H₂ kumafuna kukonzedwa bwino kuti tipewe kuwonongeka kwa graphite.
• Miyezo ya zida: Zofukizira zopangira ziyenera kukhala ndi vacuum yotsika ya <10⁻⁴ Pa, yokhala ndi njira zowunikira kutayikira kwa madzi mwamphamvu.

2. Mavuto Okhudza Kukula kwa Makristalo
Kukula kwa HPSI SiC kumagawana zofunikira zofanana za kuyera:

• Zakudya: Ufa wa 6N+-purity SiC wokhala ndi B/Al/N <10¹⁶ cm⁻³, Fe/Ti/O pansi pa malire oyambira, ndi zitsulo zochepa za alkali (Na/K).
• Machitidwe a mpweya: 6N argon/hydrogen blends imawonjezera mphamvu yotsutsa.
• Zipangizo: Mapampu a molekyulu amaonetsetsa kuti vacuum ili ndi mphamvu zambiri (<10⁻⁶ Pa); mankhwala oyeretsera ndi kutsuka nayitrogeni ndizofunikira kwambiri.

2.1 Zatsopano Zokonza Zinthu Zochepa
Poyerekeza ndi silicon, kukula kwa SiC kwa nthawi yayitali komanso kupsinjika kwachilengedwe (zomwe zimayambitsa ming'alu/kusweka kwa m'mphepete) zimafuna kukonza kwapamwamba:

• Kuduladula pogwiritsa ntchito laser: Kumawonjezera phindu kuchokera pa ma wafer 30 (350 μm, waya wodula) kufika pa ma wafer okwana 50 pa boule ya 20-mm, ndipo nthawi yokonza imachepa kuchoka pa masiku 10-15 (waya wodula) kufika pa mphindi zosakwana 20 pa wafer ya ma crystals a mainchesi 8.

3. Mgwirizano wa Makampani

Gulu la Meta la Orion layambitsa kugwiritsa ntchito njira yowunikira ya SiC waveguide, zomwe zapangitsa kuti ndalama zofufuzira ndi chitukuko ziyambe kugwiritsidwa ntchito. Mgwirizano waukulu ndi monga:

• TankeBlue & MUDI Micro: Kupanga pamodzi magalasi a AR diffractive waveguide.
• Jingsheng Mech, Longqi Tech, XREAL, & Kunyou Optoelectronics: Mgwirizano wanzeru wogwirizanitsa unyolo wopereka zinthu wa AI/AR.

Ziwerengero za msika zikuyerekeza kuti mayunitsi 500,000 a AR okhala ndi SiC pachaka pofika chaka cha 2027, akugwiritsa ntchito ma substrates 250,000 a mainchesi 6 (kapena 125,000 a mainchesi 8). Njira imeneyi ikugogomezera udindo wa SiC wosintha zinthu mu ma AR optics a m'badwo wotsatira.

XKH imadziwika bwino popereka ma substrate apamwamba a 4H-semi-insulating (4H-SEMI) SiC okhala ndi mainchesi osinthika kuyambira mainchesi awiri mpaka mainchesi 8, opangidwa kuti akwaniritse zofunikira zinazake mu RF, zamagetsi zamagetsi, ndi ma optics a AR/VR. Mphamvu zathu zimaphatikizapo kupereka voliyumu yodalirika, kusintha kolondola (kukhuthala, kuyang'ana, kutha kwa pamwamba), ndi kukonza kwathunthu mkati kuyambira kukula kwa kristalo mpaka kupukuta. Kupatula 4H-SEMI, timaperekanso ma substrate a 4H-N, 4H/6H-P, ndi 3C-SiC, kuthandizira zatsopano zosiyanasiyana za semiconductor ndi optoelectronic.