Gallium Nitride pa Silicon wafer 4inch 6inch Yopangidwa ndi Si Substrate, Resistivity, ndi N-type/P-type Options
Mawonekedwe
●Chingwe Chokulirapo:GaN (3.4 eV) imapereka kusintha kwakukulu pakugwira ntchito kwa ma frequency apamwamba, mphamvu zapamwamba, komanso kutentha kwambiri poyerekeza ndi silicon yachikhalidwe, zomwe zimapangitsa kuti ikhale yoyenera kugwiritsa ntchito zida zamagetsi ndi ma amplifier a RF.
●Kusintha Koyenera kwa Si Substrate:Sankhani kuchokera ku njira zosiyanasiyana za Si monga <111>, <100>, ndi zina kuti zigwirizane ndi zofunikira pa chipangizocho.
● Kusasinthika Kwapadera:Sankhani pakati pa njira zosiyanasiyana zotetezera mphamvu ya Si, kuyambira pa kutetezera mphamvu pang'ono mpaka kukana mphamvu kwambiri komanso kukana mphamvu pang'ono kuti muwongolere magwiridwe antchito a chipangizocho.
● Mtundu wa mankhwala osokoneza bongo:Imapezeka mu mtundu wa N kapena P-type doping kuti igwirizane ndi zofunikira za zida zamagetsi, ma RF transistors, kapena ma LED.
●Kuwonongeka Kwambiri kwa Mphamvu yamagetsi:Ma wafer a GaN-on-Si ali ndi mphamvu yamagetsi yotsika kwambiri (mpaka 1200V), zomwe zimawalola kuti agwire ntchito pogwiritsa ntchito mphamvu yamagetsi yokwera kwambiri.
●Kuthamanga Kofulumira Kwambiri:GaN ili ndi kuyenda kwa ma elekitironi ambiri komanso kutayika kochepa kwa kusinthana kuposa silicon, zomwe zimapangitsa kuti ma wafer a GaN-on-Si akhale abwino kwambiri pama circuits othamanga kwambiri.
●Kugwira Ntchito Kwambiri kwa Kutentha:Ngakhale kuti silikoni ndi yopanda kutentha, GaN-on-Si imaperekabe kukhazikika kwa kutentha kwabwino, komanso kutentha kwake kumachepa bwino kuposa zida zachikhalidwe za silikoni.
Mafotokozedwe Aukadaulo
| Chizindikiro | Mtengo |
| Kukula kwa Wafer | Mainchesi 4, mainchesi 6 |
| Kuwongolera kwa Substrate | <111>, <100>, mwamakonda |
| Si Resistivity | Kulimba kwambiri, Kuteteza pang'ono, Kulimba pang'ono |
| Mtundu wa Doping | Mtundu wa N, Mtundu wa P |
| Kukhuthala kwa GaN Layer | 100 nm – 5000 nm (yosinthika) |
| AlGaN Chotchinga Gawo | 24% – 28% Al (nthawi zambiri 10-20 nm) |
| Kugawanika kwa Volti | 600V – 1200V |
| Kuyenda kwa Electron | 2000 cm²/V·s |
| Kusintha pafupipafupi | Mpaka 18 GHz |
| Kuuma kwa pamwamba pa Wafer | RMS ~0.25 nm (AFM) |
| Kukana kwa GaN Sheet | 437.9 Ω·cm² |
| Chikhomo Chonse cha Wafer | < 25 µm (pamwamba) |
| Kutentha kwa Matenthedwe | 1.3 – 2.1 W/cm·K |
Mapulogalamu
Zamagetsi ZamagetsiGaN-on-Si ndi yabwino kwambiri pa zamagetsi zamagetsi monga ma amplifiers amphamvu, ma converter, ndi ma inverter omwe amagwiritsidwa ntchito mumakina amagetsi obwezerezedwanso, magalimoto amagetsi (ma EV), ndi zida zamafakitale. Mphamvu yake yotsika kwambiri komanso kukana kochepa kumatsimikizira kusintha kwa mphamvu moyenera, ngakhale pakugwiritsa ntchito mphamvu zambiri.
Kulankhulana kwa RF ndi MicrowaveMa wafer a GaN-on-Si amapereka mphamvu zama frequency apamwamba, zomwe zimapangitsa kuti akhale abwino kwambiri pa ma amplifiers amphamvu a RF, kulumikizana ndi satellite, machitidwe a radar, ndi ukadaulo wa 5G. Ali ndi liwiro lalikulu losinthira komanso kuthekera kogwira ntchito pama frequency apamwamba (mpaka18 GHz), Zipangizo za GaN zimapereka magwiridwe antchito abwino kwambiri mu mapulogalamu awa.
Zamagetsi ZamagalimotoGaN-on-Si imagwiritsidwa ntchito mumakina amphamvu zamagalimoto, kuphatikizapozochapira zomwe zili m'bwato (OBCs)ndiZosinthira za DC-DCKutha kwake kugwira ntchito kutentha kwambiri komanso kupirira mphamvu zamagetsi zambiri kumapangitsa kuti ikhale yoyenera magalimoto amagetsi omwe amafuna mphamvu zambiri.
LED ndi OptoelectronicsGaN ndi chinthu chomwe chimasankhidwa kwambiri ma LED abuluu ndi oyeraMa wafer a GaN-on-Si amagwiritsidwa ntchito popanga makina owunikira a LED ogwira ntchito bwino kwambiri, omwe amapereka magwiridwe antchito abwino kwambiri pakuwunikira, ukadaulo wowonetsera, komanso kulumikizana kwa kuwala.
Mafunso ndi Mayankho
Q1: Kodi ubwino wa GaN kuposa silicon mu zipangizo zamagetsi ndi wotani?
A1:GaN ili ndibandgap yokulirapo (3.4 eV)kuposa silicon (1.1 eV), yomwe imalola kuti ipirire ma voltage ndi kutentha kwakukulu. Kapangidwe kameneka kamathandiza GaN kuthana ndi magwiritsidwe ntchito amphamvu kwambiri bwino, kuchepetsa kutaya mphamvu ndikuwonjezera magwiridwe antchito a makina. GaN imaperekanso liwiro losinthira mwachangu, lomwe ndi lofunikira kwambiri pazida zama frequency apamwamba monga ma RF amplifiers ndi ma power converters.
Q2: Kodi ndingathe kusintha mawonekedwe a Si substrate kuti ndigwiritse ntchito?
A2:Inde, timaperekanjira zosinthira za Si substratemonga<111>, <100>, ndi njira zina zoyendetsera chipangizo chanu kutengera zomwe mukufuna. Njira yoyendetsera chipangizo cha Si imagwira ntchito yofunika kwambiri pakugwira ntchito kwa chipangizocho, kuphatikizapo makhalidwe amagetsi, momwe kutentha kumayendera, komanso kukhazikika kwa makina.
Q3: Kodi ubwino wogwiritsa ntchito ma wafer a GaN-on-Si ndi wotani pakugwiritsa ntchito pafupipafupi?
A3:Ma wafer a GaN-on-Si amapereka zabwino kwambiriliwiro losinthira, zomwe zimathandiza kuti ntchito iziyenda mofulumira kwambiri poyerekeza ndi silicon. Izi zimapangitsa kuti zikhale zabwino kwambiriRFndimaikulowevuntchito, komanso ma frequency apamwambazipangizo zamagetsimongaHEMTs(Ma transistors Oyenda Moyenda Kwambiri a Electron) ndiMa amplifiers a RFKuyenda kwa ma elekitironi ambiri a GaN kumabweretsanso kuchepa kwa kutayika kwa ma switching ndikuwongolera magwiridwe antchito.
Q4: Ndi njira ziti zogwiritsira ntchito mankhwala osokoneza bongo zomwe zilipo pa ma wafer a GaN-on-Si?
A4:Timapereka zonse ziwiriMtundu wa NndiMtundu wa Pnjira zogwiritsira ntchito mankhwala osokoneza bongo, zomwe zimagwiritsidwa ntchito kwambiri pa mitundu yosiyanasiyana ya zida za semiconductor.Kugwiritsa ntchito mankhwala osokoneza bongo amtundu wa Nndi yabwino kwambirima transistors amphamvundiMa amplifiers a RF, pameneKupopera mankhwala a mtundu wa Pnthawi zambiri amagwiritsidwa ntchito pa zipangizo zamagetsi monga ma LED.
Mapeto
Ma Wafer athu a Gallium Nitride pa Silicon (GaN-on-Si) Opangidwa Mwamakonda amapereka njira yabwino kwambiri yogwiritsira ntchito pafupipafupi, mphamvu zambiri, komanso kutentha kwambiri. Ndi njira zosinthira za Si substrate, resistivity, ndi N-type/P-type doping, ma wafer awa amapangidwa kuti akwaniritse zosowa zamakampani kuyambira zamagetsi zamagetsi ndi magalimoto mpaka kulumikizana kwa RF ndi ukadaulo wa LED. Pogwiritsa ntchito mphamvu zapamwamba za GaN komanso kukula kwa silicon, ma wafer awa amapereka magwiridwe antchito abwino, magwiridwe antchito, komanso chitetezo chamtsogolo cha zida zam'badwo wotsatira.
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