6inch SiC Epitaxiy wafer N/P mtundu amavomereza makonda

Njira yokonzekera silicon carbide epitaxial wafer ndi njira yogwiritsira ntchito ukadaulo wa Chemical Vapor Deposition (CVD). Izi ndi mfundo zaukadaulo zoyenera komanso njira zokonzekera:

Mfundo yaukadaulo:

Kutulutsa nthunzi ya mankhwala: Pogwiritsa ntchito mpweya wa zinthu zopangira mpweya, pansi pa zochitika zinazake, umawola ndikuyikidwa pa substrate kuti upange filimu yopyapyala yomwe mukufuna.

Kuyankha kwa gawo la mpweya: Kudzera mu pyrolysis kapena cracking reaction, mpweya wosiyanasiyana wa zinthu zopangira mpweya mu gawo la mpweya umasinthidwa ndi mankhwala mu chipinda chochitirapo kanthu.

Njira zokonzekera:

Kukonza gawo lapansi: Gawo lapansi limatsukidwa pamwamba ndi kukonzedwanso kale kuti zitsimikizire kuti wafer ya epitaxial ndi yabwino komanso yofewa.

Kukonza zolakwika pa chipinda chochitira zinthu: sinthani kutentha, kuthamanga ndi kuchuluka kwa kayendedwe ka chipinda chochitira zinthu ndi magawo ena kuti muwonetsetse kuti zinthu zomwe zimachitikazo zikukhazikika komanso kuwongolera.

Kupereka zinthu zopangira: kupereka zinthu zopangira mpweya wofunikira mu chipinda chochitira zinthu, kusakaniza ndikuwongolera kuchuluka kwa madzi ngati pakufunika.

Njira Yochitira Zinthu: Potenthetsa chipinda chochitira zinthu, mpweya woipa umalowa mu chipindacho kuti upange malo omwe ukufuna, mwachitsanzo filimu ya silicon carbide.

Kuziziritsa ndi kutsitsa: Pamapeto pa kuchitapo kanthu, kutentha kumachepetsedwa pang'onopang'ono kuti kuziziritse ndikulimbitsa malo omwe ali mu chipinda chochitapo kanthu.

Kupopera ndi kukonza ma wafer a Epitaxial: ma wafer a epitaxial omwe ali mu wafer amapopera ndi kukonzedwanso kuti akonze mphamvu zake zamagetsi ndi kuwala.

Masitepe ndi mikhalidwe yeniyeni ya njira yokonzekera wafer ya silicon carbide epitaxial ingasiyane kutengera zida ndi zofunikira zake. Zomwe zili pamwambapa ndi njira yokhazikika komanso mfundo, ntchito yeniyeniyo iyenera kusinthidwa ndikukonzedwa bwino malinga ndi momwe zinthu zilili.