6 Inchi Conductive SiC Composite Substrate 4H Diameter 150mm Ra≤0.2nm Warp≤35μm

Kufotokozera Kwachidule:

Chifukwa cha kufunafuna kwa makampani opanga ma semiconductor mphamvu yokwera komanso mtengo wotsika, gawo la SiC composite lokhala ndi mainchesi 6 latuluka. Kudzera muukadaulo watsopano wazinthu zophatikizika, wafer iyi ya mainchesi 6 imakwaniritsa 85% ya magwiridwe antchito a ma wafer achikhalidwe a mainchesi 8 pomwe imawononga 60% yokha. Zipangizo zamagetsi zomwe zimagwiritsidwa ntchito tsiku ndi tsiku monga malo atsopano ochapira magalimoto, ma module amagetsi a 5G base station, komanso ma drive osinthasintha m'zida zapamwamba zapakhomo zitha kukhala zikugwiritsa ntchito kale ma substrates amtunduwu. Ukadaulo wathu wopangidwa ndi patent multi-layer epitaxial growth umalola ma interfaces a flat composite pa ma base a SiC, okhala ndi mawonekedwe apansi pa 1×10¹¹/cm²·eV - mawonekedwe omwe afika pamlingo wapamwamba padziko lonse lapansi.

Tumizani imelo kwa ife

Mawonekedwe

Magawo aukadaulo

Zinthu	Kupangagiredi	Chitsirugiredi
M'mimba mwake	mainchesi 6-8	mainchesi 6-8
Kukhuthala	350/500±25.0 μm	350/500±25.0 μm
Mtundu wa Polytype	4H	4H
Kusakhazikika	0.015-0.025 ohm·cm	0.015-0.025 ohm·cm
TTV	≤5 μm	≤20 μm
Kupindika	≤35 μm	≤55 μm
Kukhwima kwa nkhope (kutsogolo)	Ra≤0.2 nm (5μm×5μm)	Ra≤0.2 nm (5μm×5μm)

Zinthu Zofunika Kwambiri

1. Ubwino wa Mtengo: Chida chathu cholumikizira cha SiC cha mainchesi 6 chimagwiritsa ntchito ukadaulo wa "graded buffer layer" womwe umakonza kapangidwe ka zinthu kuti achepetse mtengo wa zinthu zopangira ndi 38% pomwe chikugwira ntchito bwino kwambiri pamagetsi. Miyeso yeniyeni ikuwonetsa kuti zida za 650V MOSFET zomwe zimagwiritsa ntchito chida ichi zimapeza kuchepetsedwa kwa mtengo ndi 42% pagawo lililonse poyerekeza ndi njira zachikhalidwe, zomwe ndizofunikira kwambiri pakulimbikitsa kugwiritsa ntchito zida za SiC mu zamagetsi.
2. Kapangidwe Kabwino Kwambiri Koyendetsera Zinthu: Kudzera mu njira zowongolera bwino za nayitrogeni, gawo lathu la SiC lopangira zinthu la mainchesi 6 limapeza mphamvu yotsika kwambiri ya 0.012-0.022Ω·cm, ndi kusintha komwe kumayendetsedwa mkati mwa ± 5%. Chodziwika bwino ndichakuti, timasunga mphamvu yoyendetsera zinthu ngakhale m'dera la 5mm m'mphepete mwa wafer, kuthetsa vuto la zotsatira za m'mphepete lomwe lakhalapo kwa nthawi yayitali mumakampani.
3. Kugwira Ntchito kwa Kutentha: Gawo la 1200V/50A lomwe lapangidwa pogwiritsa ntchito gawo lathu likuwonetsa kukwera kwa kutentha kwa 45℃ kokha pamwamba pa malo ozungulira pakagwira ntchito yonse - 65℃ yotsika kuposa zida zofanana ndi silicon. Izi zimathandizidwa ndi kapangidwe kathu ka "3D thermal channel" komwe kumathandizira kuyendetsa bwino kutentha kwa mbali ya 380W/m·K ndi kuyendetsa bwino kutentha kwa vertical kufika pa 290W/m·K.
4. Kugwirizana kwa Njira: Kuti tipeze kapangidwe kapadera ka ma substrate a SiC opangidwa ndi mainchesi 6, tapanga njira yofananira yodulira laser yobisika yomwe imafikira liwiro lodulira la 200mm/s pomwe tikulamulira kudulidwa kwa m'mphepete pansi pa 0.3μm. Kuphatikiza apo, timapereka njira zodulira zomwe zimayikidwa kale ndi nickel zomwe zimathandiza kuti ma diamondi azitha kulumikizidwa mwachindunji, zomwe zimapulumutsa makasitomala njira ziwiri zodulira.

Mapulogalamu Aakulu

Zipangizo Zofunika Kwambiri za Gridi Yanzeru:

Mu makina otumizira magetsi amphamvu kwambiri (UHVDC) omwe amagwira ntchito pa ±800kV, zipangizo za IGCT zomwe zimagwiritsa ntchito ma substrate athu a SiC opangidwa ndi ma conductive a mainchesi 6 zikuwonetsa kukweza kwakukulu kwa magwiridwe antchito. Zipangizozi zimapeza kuchepa kwa 55% pakutayika kwa kusinthana panthawi yosintha, pomwe zimawonjezera magwiridwe antchito a dongosolo lonse mpaka kupitirira 99.2%. Mphamvu yapamwamba kwambiri ya ma substrate (380W/m·K) imalola mapangidwe a converter ang'onoang'ono omwe amachepetsa kutsika kwa malo osinthira magetsi ndi 25% poyerekeza ndi njira zachikhalidwe zochokera ku silicon.

Magalimoto Atsopano Ogwiritsa Ntchito Mphamvu:

Dongosolo loyendetsa lomwe lili ndi ma substrate athu a SiC opangidwa ndi mainchesi 6 limakwaniritsa mphamvu ya inverter ya 45kW/L - kusintha kwa 60% poyerekeza ndi kapangidwe kake kakale ka 400V kopangidwa ndi silicon. Chodabwitsa kwambiri, dongosololi limasunga magwiridwe antchito a 98% pa kutentha konse kuyambira -40℃ mpaka +175℃, kuthetsa mavuto a nyengo yozizira omwe akhudza kugwiritsa ntchito ma EV m'malo akumpoto. Kuyesa kwa zenizeni kukuwonetsa kuwonjezeka kwa 7.5% m'nyengo yozizira kwa magalimoto okhala ndi ukadaulo uwu.

Ma Drive Osinthasintha a Mafakitale:

Kugwiritsa ntchito ma substrates athu mu ma intelligent power modules (IPMs) a mafakitale a servo systems kukusintha ma manufacturing automation. Mu malo opangira ma CNC machining, ma module awa amapereka yankho la mota mwachangu ndi 40% (kuchepetsa nthawi yofulumira kuchokera pa 50ms mpaka 30ms) pomwe akuchepetsa phokoso lamagetsi ndi 15dB kufika pa 65dB(A).

Zipangizo Zamagetsi Zogwiritsa Ntchito:

Kusintha kwa zamagetsi kwa ogula kukupitilira ndi ma substrates athu omwe amalola ma charger a 65W GaN a m'badwo wotsatira. Ma adapter amagetsi ang'onoang'ono awa amachepetsa voliyumu ndi 30% (mpaka 45cm³) pomwe amasunga mphamvu zonse, chifukwa cha mawonekedwe apamwamba a SiC-based switching. Kujambula kwa kutentha kumawonetsa kutentha kwakukulu kwa 68°C panthawi yogwira ntchito mosalekeza - 22°C yozizira kuposa mapangidwe achizolowezi - zomwe zimapangitsa kuti moyo wa chinthucho ukhale wotetezeka komanso wokhalitsa.

Ntchito Zosinthira Makonda a XKH

XKH imapereka chithandizo chokwanira cha kusintha kwa zinthu za SiC composite za mainchesi 6:

Kusintha kwa makulidwe: Zosankha kuphatikiza 200μm, 300μm, ndi 350μm
2. Kuwongolera Kukana: Kuchuluka kwa doping komwe kungasinthidwe kwa mtundu wa n kuyambira 1 × 10¹⁸ mpaka 5 × 10¹⁸ cm⁻³

3. Kuyang'ana kwa Makristalo: Kuthandizira njira zosiyanasiyana kuphatikizapo (0001) off-axis 4° kapena 8°

4. Ntchito Zoyesera: Malipoti onse oyesera magawo a wafer

Nthawi yathu yoyambira kuyambira kupanga zinthu mpaka kupanga zinthu zambiri ikhoza kukhala yochepa ngati milungu 8. Kwa makasitomala anzeru, timapereka ntchito zodzipereka zopanga njira kuti tiwonetsetse kuti zikugwirizana bwino ndi zofunikira pa chipangizocho.