6 inchi-8 inchi LN-on-Si Composite Substrate Kukhuthala 0.3-50 μm Si/SiC/Sapphire ya Zipangizo

Kufotokozera Kwachidule:

Chopangidwa ndi LN-on-Si chokhala ndi mainchesi 6 mpaka 8 ndi chinthu chopangidwa ndi silicon (Si) chomwe chimagwiritsa ntchito mafilimu opyapyala a single-crystal lithium niobate (LN) ndi ma substrate a silicon (Si), okhala ndi makulidwe kuyambira 0.3 μm mpaka 50 μm. Chapangidwa kuti chigwiritsidwe ntchito popanga zida zapamwamba za semiconductor ndi optoelectronic. Pogwiritsa ntchito njira zapamwamba zolumikizira kapena epitaxial, chopangidwachi chimatsimikizira kuti filimu yopyapyala ya LN ndi yapamwamba kwambiri pomwe chimagwiritsa ntchito kukula kwakukulu kwa wafer (mainchi 6 mpaka 8) kwa chopangidwa ndi silicon kuti chiwonjezere kupanga bwino komanso kugwiritsa ntchito ndalama moyenera.
Poyerekeza ndi zipangizo za LN zolemera zachikhalidwe, gawo lopangidwa ndi LN-on-Si la mainchesi 6 mpaka 8 limapereka kufananiza kwabwino kwa kutentha komanso kukhazikika kwa makina, zomwe zimapangitsa kuti likhale loyenera kukonza zinthu zazikulu za wafer. Kuphatikiza apo, zipangizo zina monga SiC kapena safiro zitha kusankhidwa kuti zikwaniritse zofunikira zinazake zogwiritsidwa ntchito, kuphatikiza zida za RF zama frequency apamwamba, ma photonics ophatikizidwa, ndi masensa a MEMS.

Tumizani imelo kwa ife

Mawonekedwe

Magawo aukadaulo

0.3-50μm LN/LT pa Zotetezera
Gawo lapamwamba
M'mimba mwake	mainchesi 6-8
Kuyang'ana	X, Z, Y-42 ndi zina zotero.
Zipangizo	LT, LN
Kukhuthala	0.3-50μm
Gawo lapansi (Makonda)
Zinthu Zofunika	Si, SiC, Safiro, Spinel, Quartz

Zinthu Zofunika Kwambiri

Chogwirizira cha LN-on-Si cha mainchesi 6 mpaka 8 chimasiyanitsidwa ndi zinthu zake zapadera komanso magawo osinthika, zomwe zimathandiza kuti chigwiritsidwe ntchito kwambiri m'mafakitale a semiconductor ndi optoelectronic:

1. Kugwirizana kwa Wafer Waukulu: Kukula kwa wafer wa mainchesi 6 mpaka 8 kumatsimikizira kuti imagwirizana bwino ndi mizere yopangira ya semiconductor yomwe ilipo (monga njira za CMOS), kuchepetsa ndalama zopangira ndikupangitsa kuti pakhale kupanga kwakukulu.

2. Ubwino Wapamwamba wa Makristalo: Njira zabwino kwambiri za epitaxial kapena zomangira zimatsimikizira kuti filimu yopyapyala ya LN ndi yopyapyala, zomwe zimapangitsa kuti ikhale yoyenera kwambiri kwa ma modulators optical, zosefera za surface acoustic wave (SAW), ndi zida zina zolondola.

3. Kukhuthala Kosinthika (0.3–50 μm): Zigawo za LN zoonda kwambiri (<1 μm) ndizoyenera kugwiritsa ntchito ma photonic chips ophatikizika, pomwe zigawo zokhuthala (10–50 μm) zimathandizira zida za RF zamphamvu kwambiri kapena masensa a piezoelectric.

4. Zosankha Zambiri za Substrate: Kuwonjezera pa Si, SiC (kutentha kwambiri) kapena safiro (kutentha kwambiri) zitha kusankhidwa ngati zinthu zoyambira kuti zikwaniritse zosowa za ntchito zama frequency apamwamba, kutentha kwambiri, kapena mphamvu zambiri.

5. Kukhazikika kwa Kutentha ndi Makina: Chogwirira cha silicon chimapereka chithandizo champhamvu cha makina, kuchepetsa kupindika kapena kusweka panthawi yokonza ndikuwongolera kukolola kwa chipangizocho.

Zinthu zimenezi zimaika chipangizo cha LN-on-Si chokhala ndi mainchesi 6 mpaka 8 ngati chinthu chofunika kwambiri pa ukadaulo wapamwamba monga kulumikizana kwa 5G, LiDAR, ndi quantum optics.

Mapulogalamu Aakulu

Chogwirizira cha LN-on-Si cha mainchesi 6 mpaka 8 chimagwiritsidwa ntchito kwambiri m'mafakitale apamwamba chifukwa cha mphamvu zake zapadera za electro-optic, piezoelectric, ndi acoustic:

1. Kulankhulana kwa Optical ndi Integrated Photonics: Kumathandizira ma modulators a electro-optic othamanga kwambiri, ma waveguides, ndi ma photonic integrated circuits (PICs), kuthana ndi zosowa za bandwidth za malo osungira deta ndi ma network a fiber-optic.

Zipangizo za 2.5G/6G RF: Kuchuluka kwa piezoelectric coefficient ya LN kumapangitsa kuti ikhale yoyenera kwambiri pa ma filter a surface acoustic wave (SAW) ndi bulk acoustic wave (BAW), zomwe zimapangitsa kuti ma signal processing agwiritsidwe ntchito m'malo oyambira a 5G ndi mafoni.

3.MEMS ndi Masensa: Mphamvu ya piezoelectric ya LN-on-Si imathandizira ma accelerometers, ma biosensors, ndi ma ultrasound transducers kuti agwiritsidwe ntchito m'mafakitale ndi m'mafakitale.

4. Ukadaulo wa Quantum: Monga chinthu chopanda kuwala, mafilimu opyapyala a LN amagwiritsidwa ntchito m'magwero a kuwala kwa quantum (monga, ma photon pairs olumikizidwa) ndi ma quantum chips ophatikizidwa.

5. Ma Laser ndi Ma Optic Osakhala Amodzi: Ma layers a LN owonda kwambiri amathandizira zida zogwira ntchito bwino zopangira ma harmonic (SHG) ndi optical parametric oscillation (OPO) kuti zigwiritsidwe ntchito popanga ma laser ndi kusanthula ma spectroscopic.

Chopangidwa ndi LN-on-Si composite cha mainchesi 6 mpaka 8 chimalola zipangizozi kupangidwa m'mafaiba akuluakulu a wafer, zomwe zimachepetsa kwambiri ndalama zopangira.

Kusintha ndi Ntchito

Timapereka chithandizo chaukadaulo chokwanira komanso ntchito zosintha zinthu pa LN-on-Si composite substrate ya mainchesi 6 mpaka 8 kuti ikwaniritse zosowa zosiyanasiyana za kafukufuku ndi chitukuko ndi kupanga:

1. Kupanga Mwamakonda: Kukhuthala kwa filimu ya LN (0.3–50 μm), mawonekedwe a kristalo (X-cut/Y-cut), ndi zinthu za substrate (Si/SiC/safaifi) zitha kupangidwa kuti zithandizire bwino magwiridwe antchito a chipangizocho.

2. Kukonza Moyenera: Kupereka ma wafer ambiri a mainchesi 6 ndi mainchesi 8, kuphatikizapo ntchito zakumbuyo monga kudula, kupukuta, ndi kupaka utoto, kuonetsetsa kuti zinthuzo zili zokonzeka kugwiritsidwa ntchito pa chipangizocho.

3. Kufunsana ndi Kuyesa Kwaukadaulo: Kufotokozera zinthu (monga XRD, AFM), kuyesa magwiridwe antchito a electro-optic, ndi chithandizo choyeserera chipangizo kuti chitsimikizire kapangidwe kake mwachangu.

Cholinga chathu ndikukhazikitsa gawo lopangidwa ndi LN-on-Si la mainchesi 6 mpaka 8 ngati yankho lofunikira pazinthu zamagetsi ndi ma semiconductor, kupereka chithandizo kuyambira kumapeto mpaka kumapeto kuyambira pa kafukufuku ndi chitukuko mpaka kupanga zinthu zambiri.

Mapeto

Chogwirizira cha LN-on-Si chokhala ndi mainchesi 6 mpaka 8, chokhala ndi kukula kwakukulu kwa wafer, khalidwe lapamwamba la zinthu, komanso kusinthasintha kwake, chikuyendetsa patsogolo kulumikizana kwa kuwala, 5G RF, ndi ukadaulo wa quantum. Kaya ndi kupanga zinthu zambiri kapena njira zosinthidwa, timapereka zinthu zodalirika komanso ntchito zowonjezera kuti tilimbikitse luso laukadaulo.