Chitsulo cha silicon carbide cha mainchesi 12 cha SIC chokhala ndi mainchesi 300mm chachikulu kukula kwake 4H-N Choyenera kutenthetsa kutentha kwa chipangizo champhamvu kwambiri

Chitsulo cha silicon carbide cha mainchesi 12 SIC chopangidwa ndi silicon carbide prime grade diameter 300mm chachikulu kukula 4H-N Choyenera kutenthetsa kutentha kwa chipangizo champhamvu kwambiri Chithunzi Chowonetsedwa

Kufotokozera Kwachidule:

Chotsukira cha silicon carbide cha mainchesi 12 (SiC substrate) ndi chotsukira chachikulu, chogwira ntchito bwino kwambiri chopangidwa kuchokera ku kristalo imodzi ya silicon carbide. Silicon carbide (SiC) ndi chotsukira cha semiconductor chokhala ndi mipata yayikulu yokhala ndi mphamvu zamagetsi, kutentha ndi makina abwino kwambiri, chomwe chimagwiritsidwa ntchito kwambiri popanga zida zamagetsi m'malo amphamvu kwambiri, pafupipafupi kwambiri komanso kutentha kwambiri. Chotsukira cha mainchesi 12 (300mm) ndi njira yamakono yopangira ukadaulo wa silicon carbide, yomwe ingathandize kwambiri kupanga bwino ndikuchepetsa ndalama.

Tumizani imelo kwa ife

Mawonekedwe

Makhalidwe a malonda

1. Kutentha kwambiri: kutentha kwa silicon carbide kumapitirira katatu kuposa silicon, komwe kuli koyenera kutenthetsa kutentha kwa chipangizo champhamvu kwambiri.

2. Mphamvu ya malo owonongeka kwambiri: Mphamvu ya malo owonongeka ndi yowirikiza ka 10 kuposa ya silicon, yoyenera kugwiritsidwa ntchito pa mphamvu yamagetsi.

3. Chigawo chachikulu cha bandgap: Chigawocho ndi 3.26eV (4H-SiC), choyenera kugwiritsidwa ntchito kutentha kwambiri komanso pafupipafupi.

4. Kulimba kwambiri: Kulimba kwa Mohs ndi 9.2, yachiwiri pambuyo pa diamondi, kukana bwino kukalamba komanso mphamvu yamakina.

5. Kukhazikika kwa mankhwala: kukana dzimbiri mwamphamvu, magwiridwe antchito okhazikika kutentha kwambiri komanso malo ovuta.

6. Kukula kwakukulu: gawo lapansi la mainchesi 12 (300mm), kupititsa patsogolo ntchito yopangira, kuchepetsa mtengo wa unit.

7. Kuchuluka kwa chilema chochepa: ukadaulo wapamwamba kwambiri wa kukula kwa kristalo imodzi kuti zitsimikizire kuchuluka kwa chilema chochepa komanso kusasinthasintha kwakukulu.

Malangizo ogwiritsira ntchito chinthu chachikulu

1. Zamagetsi zamagetsi:

Mosfets: Amagwiritsidwa ntchito m'magalimoto amagetsi, ma drive amagetsi amafakitale ndi ma power converters.

Ma diode: monga ma diode a Schottky (SBD), omwe amagwiritsidwa ntchito pokonza bwino ndikusintha magetsi.

2. Zipangizo za Rf:

Mphamvu ya Rf amplifier: imagwiritsidwa ntchito m'malo olumikizirana a 5G ndi ma satellite.

Zipangizo za microwave: Zoyenera kugwiritsa ntchito makina olumikizirana a radar ndi opanda zingwe.

3. Magalimoto atsopano amphamvu:

Makina oyendetsa magetsi: zowongolera magalimoto ndi ma inverter a magalimoto amagetsi.

Mulu wochapira: Gawo lamagetsi la zida zochapira mwachangu.

4. Ntchito zamafakitale:

Inverter yamagetsi amphamvu kwambiri: yowongolera magalimoto a mafakitale ndi kasamalidwe ka mphamvu.

Gridi yanzeru: Ya ma transformer a HVDC ndi magetsi.

5. Ndege:

Zipangizo zamagetsi zotentha kwambiri: zoyenera malo otentha kwambiri a zida zamlengalenga.

6. Gawo lofufuzira:

Kafukufuku wa semiconductor wochuluka: wopangira zipangizo ndi zipangizo zatsopano za semiconductor.

Chitsulo cha silicon carbide cha mainchesi 12 ndi mtundu wa chinthu cha semiconductor chomwe chimagwira ntchito bwino kwambiri chomwe chili ndi zinthu zabwino kwambiri monga kutentha kwambiri, mphamvu yayikulu yowononga malo komanso kusiyana kwakukulu kwa band. Chimagwiritsidwa ntchito kwambiri mu zamagetsi zamagetsi, zida zama wailesi, magalimoto atsopano amphamvu, zowongolera mafakitale ndi ndege, ndipo ndi chinthu chofunikira kwambiri cholimbikitsira chitukuko cha mbadwo wotsatira wa zida zamagetsi zogwira ntchito bwino komanso zamphamvu kwambiri.

Ngakhale kuti ma substrate a silicon carbide pakadali pano alibe ntchito zambiri mwachindunji mu zamagetsi monga magalasi a AR, kuthekera kwawo pakuwongolera bwino mphamvu ndi zamagetsi zazing'ono kungathandize mayankho opepuka komanso ogwira ntchito kwambiri amagetsi pazida zamtsogolo za AR/VR. Pakadali pano, chitukuko chachikulu cha substrate ya silicon carbide chikuyang'ana kwambiri m'magawo amafakitale monga magalimoto atsopano amphamvu, zomangamanga zolumikizirana ndi automation yamafakitale, ndipo chimalimbikitsa makampani opanga ma semiconductor kuti apange njira yothandiza komanso yodalirika.

XKH yadzipereka kupereka ma substrates apamwamba kwambiri a 12" SIC okhala ndi chithandizo chaukadaulo chokwanira komanso ntchito, kuphatikizapo:

1. Kupanga kosinthidwa: Malinga ndi zosowa za makasitomala, amapereka kukana kosiyana, mawonekedwe a kristalo ndi gawo lothandizira pamwamba.

2. Kukonza njira: Kupatsa makasitomala chithandizo chaukadaulo pakukula kwa epitaxial, kupanga zida ndi njira zina kuti akonze magwiridwe antchito azinthu.

3. Kuyesa ndi kupereka satifiketi: Perekani chitsimikizo chokhwima cha zilema ndi satifiketi yaubwino kuti muwonetsetse kuti gawo lapansi likukwaniritsa miyezo yamakampani.

4. Mgwirizano wa R&D: Pamodzi pangani zida zatsopano za silicon carbide ndi makasitomala kuti mulimbikitse luso laukadaulo.

Tchati cha deta

1 2 inchi Silicon Carbide (SiC) Substrate Kufotokozera
Giredi		Kupanga kwa ZeroMPD Giredi (Giredi ya Z)	Kupanga Kokhazikika Giredi (Giredi P)		Giredi Yopanda Chilungamo (Giredi D)
M'mimba mwake		3 0 0 mm~305mm
Kukhuthala	4H-N	750μm±15 μm	750μm±25 μm
	4H-SI	750μm±15 μm	750μm±25 μm
Kuwongolera kwa Wafer		Kutseka kwa mzere: 4.0° kulowera <1120 >±0.5° pa 4H-N, Kutseka kwa mzere: <0001>±0.5° pa 4H-SI
Kuchuluka kwa mapaipi ang'onoang'ono	4H-N	≤0.4cm-2	≤4cm-2		≤25cm-2
	4H-SI	≤5cm-2	≤10cm-2		≤25cm-2
Kusakhazikika	4H-N	0.015~0.024 Ω·cm			0.015~0.028 Ω·cm
	4H-SI	≥1E10 Ω·cm			≥1E5 Ω·cm
Kuyang'ana Kwambiri Pang'onopang'ono		{10-10} ±5.0°
Utali Woyamba Wathyathyathya	4H-N	N / A
	4H-SI	Chingwe
Kupatula Mphepete		3 mm
LTV/TTV/Uta/Warp		≤5μm/≤15μm/≤35 μm/≤55 μm			≤5μm/≤15μm/≤35 □ μm/≤55 □ μm
Kuuma		Chipolishi Ra≤1 nm
		CMP Ra≤0.2 nm			Ra≤0.5 nm
Ming'alu ya Mphepete Yopangidwa ndi Kuwala Kwakukulu Kwambiri Mbale za Hex Ndi Kuwala Kwakukulu Kwambiri Malo Opangidwa ndi Polytype Ndi Kuwala Kwambiri Kuphatikizidwa kwa Kaboni Yowoneka Kukanda kwa Silicon Pamwamba Ndi Kuwala Kwambiri		Palibe Malo osonkhanitsidwa ≤0.05% Palibe Malo osonkhanitsidwa ≤0.05% Palibe			Kutalika kokwanira ≤ 20 mm, kutalika kamodzi ≤2 mm Malo osonkhanitsidwa ≤0.1% Malo osonkhanitsidwa ≤3% Malo osonkhanitsidwa ≤3% Kutalika kokwanira ≤1 × m'mimba mwake wa wafer
Ma Chips a M'mphepete Ndi Kuwala Kwakukulu Kwambiri		Palibe chololedwa m'lifupi ndi kuya kwa ≥0.2mm			7 zololedwa, ≤1 mm iliyonse
(TSD) Kusokonekera kwa screw yolumikiza ulusi		≤500 cm-2		N / A
(BPD) Kusuntha kwa ndege yapansi		≤1000 cm-2		N / A
Kuipitsidwa kwa Silicon pamwamba ndi Kuwala Kwambiri		Palibe
Kulongedza		Kaseti Yokhala ndi Ma Wafer Ambiri Kapena Chidebe Chimodzi Chokhala ndi Ma Wafer
Zolemba:
1 Malire a zolakwika amagwira ntchito pamwamba pa wafer yonse kupatulapo malo ochotsera m'mphepete. 2 Mikwingwirima iyenera kuwonedwa pa nkhope ya Si yokha. 3 Deta ya kusokonekera kwa malo imachokera ku ma wafers odulidwa a KOH okha.

XKH ipitiliza kuyika ndalama mu kafukufuku ndi chitukuko kuti ilimbikitse kupita patsogolo kwa ma substrates a silicon carbide a mainchesi 12 okhala ndi kukula kwakukulu, zolakwika zochepa komanso kusasinthasintha kwakukulu, pomwe XKH ikufufuza momwe imagwiritsidwira ntchito m'malo omwe akutukuka monga zamagetsi zamagetsi (monga ma module amphamvu a zida za AR/VR) ndi quantum computing. Mwa kuchepetsa ndalama ndikuwonjezera mphamvu, XKH idzabweretsa chitukuko kumakampani opanga ma semiconductor.